CN1403841A - Small mechanical variable laser strength attenuator - Google Patents
Small mechanical variable laser strength attenuator Download PDFInfo
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- CN1403841A CN1403841A CN 02136830 CN02136830A CN1403841A CN 1403841 A CN1403841 A CN 1403841A CN 02136830 CN02136830 CN 02136830 CN 02136830 A CN02136830 A CN 02136830A CN 1403841 A CN1403841 A CN 1403841A
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Abstract
The present invention is one kind of laser device. The small mechanical variable laser strength attenuator includes laser input unit; laser strength attenuating unit, laser output unit and control unit connected via optical path. Laser beam is projected via the laser input unit to the laser strength attenuating unit on the angle turning part of the control unit, its incident angle is regulated by the control unit, and the laser beam after being attenuated in the laser strength attenuating unit is output via the laser output unit. The present invention is used in optical communication, optical information processing and other fields needing laser strength attenuation as well as precise ranging, holographic information processing, etc.
Description
Technical field
What the present invention relates to is a kind of attenuater of laser intensity, and particularly a kind of small mechanical variable laser strength attenuator belongs to laser device field.
Background technology
Because the intensity and the power of laser itself are higher, usually can surpass the ability to bear of follow-up device in some application scenarios, so, certainly will cause damage to follow-up device if light intensity is not carried out suitable decay to light intensity.Variable optical attenuator is exactly a kind of device that is inserted in the optical circuit, its objective is light intensity is carried out artificial controlled decay, makes output light satisfy request for utilization on intensity or power.Find by literature search, Application No. is: 6130984, and the date of application is: 2000.10.10, denomination of invention is: small-sized adjustable variable optical attenuator, this patent introduction be a kind of mechanical tuning formula variable optical attenuator, but adopt the method for mechanical tuning that light intensity is carried out controlling attenuation.Mechanical tuning formula laser intensity attenuator generally has strong, the easy advantage of decay in various degree that realizes light intensity of adjustability, the optical principle of its realization has nothing in common with each other, more common, as U.S. Patent number be: 6130984, at first make a decay film, its attenuation coefficient is difference and continually varying at diverse location, utilizes CD-ROM drive motor or manual adjustment to change the displacement of decay film, make the diverse location of light beam, thereby obtain decay in various degree light intensity by film.The core component of this mechanical tuning formula variable optical attenuator is the decay film, and its requirement is the film thickness continuous gradation, generally also needs to plate antireflective film for the loss that reduces light intensity on substrate.There is following deficiency in the method that realizes the laser intensity decay by the position of regulating the decay film: 1. film producing process complexity, in order to realize that light intensity attenuation is difference and continually varying at diverse location, film thickness also should be a continually varying, this is difficult to control in manufacturing process, be difficult for accomplishing producing in enormous quantities, correspondingly cause cost higher; 2. the light intensity attenuation adjustable extent is not very big; 3. under the same duty (it is identical that light beam passes the position of film), the optical attenuation of different wave length differs bigger, when the demonstration that realizes the size that decays, is difficult for accomplishing to unitize like this.
Summary of the invention
The present invention is directed to the deficiencies in the prior art and defective, a kind of small mechanical variable laser strength attenuator is provided, make that it has low insertion loss, polarization characteristic is good, manufacture craft is simple, cheap, the contour technical feature of miniaturization.Technical scheme of the present invention is to realize like this, the present invention mainly comprises: light input part, strength attenuator, light output part, control part, its connecting mode connects by light path, the light input part is positioned at whole attenuating device foremost, light incides on the strength attenuator behind the light input part earlier, strength attenuator is arranged on the angle rotary part of control part, control part is regulated the incident angle of light on strength attenuator, light on the strength attenuator through the decay after, export by light output part.
The light input part is made of parallel component and deviation parts, light to be decayed improves the depth of parallelism through parallel component earlier, then through inciding on the strength attenuator at a certain angle behind the deviation parts deviation, light through after the reflection repeatedly, enters into light output part at the prismatic film interface of strength attenuator.
Strength attenuator is a prism that the cross section is an isosceles trapezoid, bottom surface scribbles dielectric film respectively on it, under the certain situation of the refractive index of upper and lower surface dielectric film, and the thickness of strict control film, under the situation of same refractive index, its suitable thickness has a plurality of.
Light output part is made of deviation parts and parallel component, and elder generation is adjusted to the direction of emergent ray by the deviation parts consistent with incident ray direction on the light input part, is processed into directional light output by parallel component at last.
Control part is made of angle revolving part and angular adjustment part, the angular adjustment parts can be regulated the operating angle of angle rotary part and strength attenuator by driving member, and, reach the purpose of control light intensity attenuation by regulating the incident angle of light on strength attenuator.
Static in order to remain in the strength attenuator rotary course optical prism side outgoing luminous point, the turning axle position of angle revolving part should be determined as follows: at first, light is entered prism by prism side normal incidence, in prism through a series of reflections, through path l
p, by another arm outgoing of isosceles prism, near the outgoing luminous point, be a radius r=l at last
p/ n
pCircle (n
pBe the prismatic refraction rate) simultaneously tangent with prism incident arm and incident ray, get final product as turning axle with the center of circle.
Select suitable prism base angle, its working point can reduce the light intensity that incident beam loses owing to reflection in prism side so roughly on the summit of reflectance curve rising edge (total reflection decays to 0dB) when making the vertical prism side incident of light beam; Select the height and the length of suitable prism, can make light beam increase (such as five times, seven inferior) at the order of reflection of the upper and lower bottom surface of prism.
During whole device work, incident light improves the depth of parallelism through parallel component earlier, by being input to strength attenuator behind the deviation parts deviation, incide on the bottom surface of its optical prism, at this moment then with an angle θ, repeatedly reflection takes place in prism-film interface in light, by the incident angle θ decision of the light of control part control, along with the rotation of angle revolving part, incident angle θ changes reflection efficiency fully, the reflection efficiency of prism-film interface changes, and corresponding damping capacity also changes.Like this, the outgoing light intensity just can be regulated by the size of control incident angle fully, realizes needed attenuating.Last emergent ray becomes and the light of incident light on same direction the treated again directional light that becomes through the deviation of light output part.
The present invention has substantive distinguishing features and marked improvement, and the present invention can be used for the occasion that optical communication and optical information processing etc. need light intensity attenuation, also can be used for the situation that precise distance measurement, holographic information processing etc. need be carried out strict control to light beam parameters.Compared with prior art, adopt SOL-GEL method (sol-gel process) to make SiO
2Film is as the attenuator operation material, and outstanding advantage is that material configuration is simple, cost is very low.Because the colloidal sol of SOL-GEL method preparation is filmed by czochralski method, its thickness and refractive index and homogeneity thereof can be controlled more easily; Because what adopt is the reflection-type attenuating structure, so device does not have loss, the insertion loss is also lower; The extinction ratio of strength attenuator is decided by the minimum value of the reflectivity that changes with angle fully, thickness and refractive index by accurate selection, control film, adopt triple reflection, can make reflected light, and the angular range of regulating is also little near complete extinction.So the extinction ratio of this strength attenuator can very high (surpassing 50dB), can keep PDL (Polarization Dependent Loss) (less than 0.5dB) preferably simultaneously.Under the situation of basic structure that does not change attenuating device and parameter, can obtain light intensity attenuation greatly and littler polarization correlated by increasing the order of reflection of light beam in the prism bottom surface, have following advantage so the present invention compares with the existing conventional technology: (1), technology are simple, cheap; (2), extinction ratio is big; (3), operating wavelength range is big; (4), polarization sensitivity is little; (5), the insertion loss is little; (6), no loss.
Description of drawings
Fig. 1 general structure synoptic diagram of the present invention
Each ingredient structural representation of Fig. 2 the present invention
The variable optical attenuator fundamental diagram of Fig. 3 band fibre-optical splice of the present invention
Fig. 4 large aperture of the present invention laser intensity attenuator fundamental diagram
Embodiment
As Fig. 1, Fig. 2, Fig. 3, shown in Figure 4, the present invention mainly comprises: light input part 1, strength attenuator 2, light output part 3, control part 4, its connecting mode connects by light path, light input part 1 is positioned at whole attenuating device foremost, light is earlier through inciding behind the light input part on the strength attenuator 2, strength attenuator 2 is arranged on the angle rotary part 13 of control part 4, control part 4 is regulated the incident angle of light on strength attenuator 2, light on the strength attenuator 2 after decay, by light output part 3 output.
Light input part 1 is made of parallel component 5 and deviation parts 6, and light to be decayed improves the depth of parallelism through parallel component 5 earlier, then through inciding at a certain angle on the strength attenuator 2 behind deviation parts 6 deviations.
Strength attenuator 2 is prisms 8 that a cross section is an isosceles trapezoid, and bottom surface scribbles upper surface dielectric film 7 and lower surface dielectric film 9 respectively on it, and the thickness of upper and lower surface dielectric film 7,9 has a plurality of.
Light output part 3 is made of deviation parts 10 and parallel component 11, and elder generation is adjusted to the direction of emergent ray by deviation parts 10 consistent with incident ray direction on the light input part 1, is processed into directional light output by parallel component 11 then.
Control part 4 is made of angle revolving part 13 and angular adjustment part 12, and angular adjustment parts 12 are regulated the operating angle of angle rotary part 13 and strength attenuator 2 by driving member.
The turning axle position of angle revolving part 13 is determined as follows: at first, light is entered prism by prism 8 side normal incidences, a series of reflections of process in prism 8 are through path l
p, by 8 another arm outgoing of isosceles prism, near the outgoing luminous point, be a radius r=l at last
p/ n
pCircle and prism 8 incident arms and incident ray simultaneously tangent, get final product as turning axle with the center of circle.
Below in conjunction with particular content of the present invention, provide two embodiment:
Embodiment one: the variable optical attenuator with the band fibre-optical splice is an example, the light input part is by fibre-optical splice 14, optical fiber 15 and optical fiber GRIN Lens 16 are formed, standard fiber joint 14 can be easily and input light, laser instrument as the fine output of magnetic tape trailer, with the butt joint of optical fiber form, GRIN Lens 16 makes the light keeping parallelism, and light incides on the strength attenuator 2 with fixed-direction from light input part 1.
Strength attenuator 2 by isosceles trapezoid prism 8, go up dielectric film 7, dielectric film 9 is formed down, the parameter designing of strength attenuator 2 is a centre wavelength with 1.3 μ m, if select other wavelength as operation wavelength, parameter designing needs optimization again.In the strength attenuator 2, prism 8 is selected high index of refraction isosceles trapezoid prism (ZF7, n=1.750,38.45 ° at base angle) for use, and last bottom surface dielectric film 7 adopts identical SiO with 9
2Film, its refractive index n=1.32, thickness d=0.340 μ m can be got behind the colloidal sol by the czochralski method preparation by sol-gel Sol-Gel legal system, and the angular adjustment parts can drive spiral fine setting instrument 21 by manual or step motor and realize.The angle rotary part is realized by precision corner instrument 20.
Light output part is by optical fiber GRIN Lens 17, optical fiber 18 and fibre-optical splice 19 are formed, wherein GRIN Lens 17 is improved the depth of parallelism of output light, fibre-optical splice 19 in order to the butt joint of external fiber device, GRIN Lens 17 is close on the light beam eye point of optical prism 8 of strength attenuator 2.
For the attenuator that works in different operation wavelengths, mainly be that the parameter by each rete of changing optical attenuation portion realizes.
Embodiment two: with large aperture laser intensity attenuator is example, and light input part 2 is by incidence window 23, and light collecting lens 24 and level crossing 25 are formed.Light collecting lens 24 makes the light keeping parallelism.Level crossing 25 changes optical propagation direction, and after reflection output light and input light are kept point-blank.
Strength attenuator 2 is by isosceles trapezoid prism 8, last dielectric film 7, and following dielectric film 9 is formed, and the parameter designing of strength attenuator 2 is a centre wavelength with 1.3 μ m, if select other wavelength as operation wavelength, parameter designing needs to optimize again.In the strength attenuator 2, prism 8 is selected high index of refraction isosceles trapezoid prism (ZF7, n=1.750,38.45 ° at base angle) for use, and last bottom surface dielectric film 7 adopts identical SiO with 9
2Film, its refractive index n=1.32, thickness d=0.340 μ m can be made by the SOL-GEL method.The angular adjustment parts can drive spiral fine setting instrument 21 by manual or step motor and realize.
The angle rotary part is realized by precision corner instrument 20, light output part is by level crossing 26, and light collecting lens 27 and outgoing window 28 are formed, and wherein light collecting lens 27 improves the depth of parallelism of output light, level crossing 26 changes optical propagation direction, and after reflection output light and input light are kept point-blank.
Claims (6)
1, a kind of small mechanical variable laser strength attenuator, mainly comprise: light input part (1), strength attenuator (2), light output part (3), control part (4), it is characterized in that its connecting mode connects by light path, light input part (1) is positioned at whole attenuating device foremost, light is earlier through inciding behind the light input part (1) on the strength attenuator (2), strength attenuator (2) is arranged on the angle rotary part (13) of control part (4), control part (4) is regulated the incident angle of light on strength attenuator (2), light is gone up after decay at strength attenuator (2), exports by light output part (3).
2, this small mechanical variable laser strength attenuator according to claim 1, it is characterized in that light input part (1) is made of parallel component (5) and deviation parts (6), light to be decayed is earlier through parallel component (5), incides at a certain angle on the strength attenuator (2) after passing through deviation parts (6) deviation then.
3, this small mechanical variable laser strength attenuator according to claim 1, it is characterized in that strength attenuator (2) is the prism (8) that a cross section is an isosceles trapezoid, bottom surface scribbles upper surface dielectric film (7) and lower surface dielectric film (9) respectively on it, and the thickness of upper and lower surface dielectric film (7), (9) has a plurality of.
4, this small mechanical variable laser strength attenuator according to claim 1, it is characterized in that light output part (3) is made of deviation parts (10) and parallel component (11), elder generation is adjusted to the direction of emergent ray by deviation parts (10) consistent with the last incident ray direction of light input part (1), is processed into directional light output by parallel component (11) then.
5, this small mechanical variable laser strength attenuator according to claim 1, it is characterized in that control part (4) is made of angle revolving part (13) and angular adjustment part (12), angular adjustment parts (12) are regulated the operating angle of angle rotary part (13) and strength attenuator (2) by driving member.
6, this small mechanical variable laser strength attenuator according to claim 5, the turning axle position that it is characterized in that angle revolving part (13) is determined as follows: at first, light is entered prism by prism (8) side normal incidence, and a series of reflections of process in prism (8) are through path l
p, by another arm outgoing of isosceles prism (8), near the outgoing luminous point, be a radius r=l at last
p/ n
pCircle and prism (8) incident arm and incident ray simultaneously tangent, with the center of circle as turning axle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02136830 CN1403841A (en) | 2002-09-05 | 2002-09-05 | Small mechanical variable laser strength attenuator |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02136830 CN1403841A (en) | 2002-09-05 | 2002-09-05 | Small mechanical variable laser strength attenuator |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102096186A (en) * | 2010-12-20 | 2011-06-15 | 无锡荣兴科技有限公司 | Continuous and adjustable type optical attenuator |
| CN102636875A (en) * | 2012-04-28 | 2012-08-15 | 中国科学院西安光学精密机械研究所 | High-power laser cut-off device |
| CN104238107A (en) * | 2014-07-07 | 2014-12-24 | 中国科学院上海光学精密机械研究所 | Digitalized variable optical attenuator |
| CN107430193A (en) * | 2014-12-22 | 2017-12-01 | 特林布尔有限公司 | Distance measuring instrument |
| CN108513220A (en) * | 2016-04-07 | 2018-09-07 | 李永宏 | A kind of scaling method towards between the master controller and shaft of exempting to draw wheat microphone |
-
2002
- 2002-09-05 CN CN 02136830 patent/CN1403841A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102096186A (en) * | 2010-12-20 | 2011-06-15 | 无锡荣兴科技有限公司 | Continuous and adjustable type optical attenuator |
| CN102636875A (en) * | 2012-04-28 | 2012-08-15 | 中国科学院西安光学精密机械研究所 | High-power laser cut-off device |
| CN104238107A (en) * | 2014-07-07 | 2014-12-24 | 中国科学院上海光学精密机械研究所 | Digitalized variable optical attenuator |
| CN107430193A (en) * | 2014-12-22 | 2017-12-01 | 特林布尔有限公司 | Distance measuring instrument |
| CN107430193B (en) * | 2014-12-22 | 2020-08-07 | 特林布尔有限公司 | Distance measuring instrument |
| US10816646B2 (en) | 2014-12-22 | 2020-10-27 | Trimble Ab | Distance measurement instrument |
| CN108513220A (en) * | 2016-04-07 | 2018-09-07 | 李永宏 | A kind of scaling method towards between the master controller and shaft of exempting to draw wheat microphone |
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