CN1368474A - Delivery system for stored materials - Google Patents
Delivery system for stored materials Download PDFInfo
- Publication number
- CN1368474A CN1368474A CN 01103669 CN01103669A CN1368474A CN 1368474 A CN1368474 A CN 1368474A CN 01103669 CN01103669 CN 01103669 CN 01103669 A CN01103669 A CN 01103669A CN 1368474 A CN1368474 A CN 1368474A
- Authority
- CN
- China
- Prior art keywords
- crystal
- boat box
- stock station
- stock
- delivery system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A conveying system for the materials stored in repository is disclosed, and it is used for production line and composed of at least one treating station, trays for holding the materials to be conveyed, a storage station, a robot between the treating station and storage station, and an over-head conveying system.
Description
The present invention relates to a kind of inventory system, relate in particular to a kind of semiconductor device or electrooptical device, for example employed a kind of delivery system for stored materials in the manufacturing line of Liquid Crystal Display (LCD).
Semiconductor wafer (hereinafter to be referred as " wafer ") is respectively the woof of producing VLSI chip and LCD device with LCD flat panel glass (hereinafter referred to as " plate glass ").These materials are stored in carrier or the crystal-boat box usually, and only can handle in utmost point clean environment and transmission, even because grit slightly can make it further process.Therefore, if will produce VLSI chip and LCD device, then must control grit and pollute in profit mode low-cost, high yield.The main source that grit pollutes is personnel, instrument, equipment (comprising dust free room), reaches chemical.Grit that personnel and dust free room equipment are produced is real to be topmost source of pollution, because of being easy to ionization, and is easy to cause defective at wafer or surface of plate glass.Always constant trend is more accurate for setting up, and has the dust free room of high efficiency grit air (HEPA) fil, with air recycle system, with the pollution of thorough control grit.Acceptable cleanliness level in the dust free room is that requirement fil efficient is up to 99.99999% at present.In fact,, comprise fil, fan etc.,,, cost will be improved as the environment of class1 so make dust free room keep desirable dustfree environment owing to different personnel, material being arranged in the dust free room, reaching equipment.
For in actv. cost control mode, reduce the suffered grit of wafer and pollute and raising production yield, existing few techniques is used for the storage sites (stock station) of design improved, in conjunction with the notion of dust free room, with storage and transferring wafer and plate glass.
One known operational mode of this notion is to use a transmission system at a manufacturing line, and this system comprises four main portions basically.
The first, at least one treating stations is used to make element.The exemplary process station is for sheltering alignment machine, photoresist remover, evaporator, reaching etching machine etc.The clean passage for the treatment of stations uncommon cleanliness level (for example class 1 cleanliness level) towards having.On the other hand, the treating stations internal environment needs to safeguard in addition and cleaning, so treating stations is installed in the battery limits than low cleaning degree (for example class 1000) usually.
The second, the carrier (crystal-boat box) of putting wafer (or plate glass) is in order to bearing wafer (or plate glass) turnover one treating stations, reaches bearing wafer (or plate glass) between each different treating stations.
The 3rd, between the lay-up period of handling wafer, be to be arranged in the said equipment district in order to the known storage sites (stock station) that holds aforementioned carrier (crystal-boat box), and input/output end port is fully in clean channel range.In inside, stock station, utilize hoisting crane usually, with the carrier (crystal-boat box) of mobile storage in the stock station.
The 4th, between treating stations and the stock station transmission system is arranged, in order to mobile carrier (crystal-boat box).This transmission system should also comprise one to be transmitted and disposal system automatically, is a mechanical car on the typical case, is commonly referred to automatic guided vehicle (AGV), and it is controlled via a wireless ground control system (FCS).
Yet, use the stock station to combine the dust free room notion with automatic guided vehicle, it is not most economical effective and efficient manner, because of it uses the automatic guided vehicle transmission, the cleaning ambient that still need have proper area, it must have and is equivalent to class 1 or better cleanliness level, and the transmission time of automatic guided vehicle also may seriously increase manufacturing cycle time.
Thereby a purpose of the present invention is to provide a delivery system for stored materials, the manufacturing line that is used for quartz conductor or LCD device, remove automatic guided vehicle by economizing,, thereby reduce production costs and manufacturing cycle time with the scope of minimizing class 1 cleaning ambient and the transmission time of automatic guided vehicle.
The present invention mainly comprises five main portions.
The first, at least one treating stations is used to make element.The exemplary process station is for sheltering alignment machine, photoresist remover, evaporator, reaching etching machine etc.The clean passage for the treatment of stations uncommon cleanliness level (for example class 1 cleanliness level) towards having.On the other hand, the treating stations internal environment is to keep clean in addition, so treating stations is installed in the battery limits than low cleaning degree (for example class 1000) usually.
The second, the carrier (crystal-boat box) that comprises wafer (or plate glass) is in order to bearing wafer (or plate glass) turnover one treating stations, reaches bearing wafer (or plate glass) between each different treating stations.
The 3rd, handling between the lay-up period of wafer, in order to the storage sites (stock station) that holds aforementioned carrier (crystal-boat box) for cleaning passage around.Hoisting crane and rack are arranged at inside, stock station, respectively in order to move and storage carrier (crystal-boat box).
The four, one robot is arranged between treating stations and the stock station, and fully in clean channel range, in order to input and output port via crystal-boat box, between stock station and treating stations, sending and receiving wafer (or plate glass).
The 5th, an overhead transmission system is set, in order to manage between district and each stock station mobile carrier (crystal-boat box) throughout.This overhead transmission system frame and is arranged in the space of above-mentioned robot top aloft.
Owing to need not to use automatic guided vehicles ystem, and only need class 1 environment of small size, so can avoid in quartz conductor or the LCD manufacturing line shortcoming of using known stock station system to be caused, thereby obviously can reduce production costs and reduce manufacturing cycle time according to the present invention.
For realizing described purpose, the invention provides a kind of delivery system for stored materials, comprise at least one treatment region for being used in, and this treatment region comprises in the manufacturing line of at least one treating stations, this delivery system for stored materials comprises: a crystal-boat box, and it holds at least one article waiting for transmission; One stock station comprises: be arranged at a plurality of hoisting cranes in this stock station, in order to move this crystal-boat box in this stock station; At least one crystal-boat box load/unloader port, this crystal-boat box is through load thus/this stock station of unloader port transmission turnover; These at least one article in a plurality of input/output end ports, this crystal-boat box are via this this stock station of a plurality of input/output end port transmission turnover; And be arranged at a plurality of racks in this stock station, in order to hold this crystal-boat box; And a robot, be arranged between this at least one treating stations and this stock station, in order to this stock station certainly these at least one article in this crystal-boat box are imported into and spread out of to this at least one treating stations.
By the detailed description and the accompanying drawing of following preferred embodiment, should be able to fully understand above-mentioned and other purpose of the present invention, characteristics, reach effect.
Fig. 1 shows and to utilize public stock station and automatic guided vehicle, and in conjunction with a public production-line arrangement of dust free room notion.
Fig. 2 A shows the lateral plan at a public stock station.
Fig. 2 B shows the top view of a public stock station together with automatic guided vehicle.
Fig. 3 is a scheme drawing, shows the part specialized equipment that utilizes according to a small-sized manufacturing line of stock of the present invention station system.
Fig. 4 shows two small-sized manufacturing lines, and wherein each manufacturing line all uses according to delivery system for stored materials of the present invention.
Fig. 5 shows the relative position of complying with a stock station of the present invention, an overhead transmission system, a robot, reaching a treating stations.
Fig. 3 shows the part specialized equipment of a predetermined small-sized manufacturing line 10, wherein comprises three kinds of primary elements of inventory system: stock station, robot, and overhead transmission system.Show a stock station 100, five robots, an and overhead transmission system 300 among Fig. 3.One carrier (for example crystal-boat box) 800 is in small-sized manufacturing line 10, back and forth between each treating stations.Four kinds of main composition parts are arranged in the stock station 100, comprising: three hoisting cranes 400, connect five input/output end ports of each robot 200, in order to a crystal-boat box load/unloader port 600 and a plurality of racks in other parts of stock station owner body at transmission crystal-boat box between stock station and overhead transmission system.
As shown in Figure 3, in a preferred embodiment of delivery system for stored materials, article containers such as wafer or plate glass are in stock station 100 in Ci the crystal-boat box 800 on Ri rack 700.When Ci crystal-boat box 800 is about to be subjected to the processing at a particular procedure station 901 (for example film vapor deposition machine), utilize near Nj responsible hoisting crane 400 Ci the crystal-boat box 800, from Ri rack 700, Ci crystal-boat box 800 is carried into P901 input/output end port 500, and the article in Ci crystal-boat box 800 takes out it, and transfer to treating stations 901 by T901 robot 200.
After in film vapor deposition machine 901, finishing processing, article are sent in Ci the crystal-boat box 800 in P901 the input/output end port 500.Then, by Nj the hoisting crane of being responsible for 400 Ci crystal-boat box 800 is carried in Qj/j+1 the zone, this zone is the lap of the mobile route of Nj hoisting crane 400 and Nj+1 hoisting crane 400.Then, Nj+1 hoisting crane 400 is carried into Ci crystal-boat box 800 in Ri+m the rack 700.When Ci crystal-boat box 800 will be delivered to a time treating stations (a for example photoetch machine 902), with painting photoresist with aim at when sheltering, Nj+1 hoisting crane 400 takes out Ci crystal-boat box 800 from Ri+m rack 700, and deliver to P902 input/output end port 500, and take out article from Ci crystal-boat box 800, transfer to treating stations 902 by T902 robot 200.
Show an overhead transmission system among Fig. 4, in order to transmit crystal-boat box between and each small-sized manufacturing line inner at a small-sized manufacturing line.Transmitting crystal-boat box by overhead transmission system in a small-sized manufacturing line, is in order to transmit crystal-boat box between discontinuous two treatment regions.Yet, between each small-sized manufacturing line, transmit crystal-boat box by overhead transmission system, be that crystal-boat box is passed to another small-sized manufacturing line, with the balance production capacity, or be applied to the situation that shut down at an important process station.
Overhead transmission system is to be suspended in the air, and its mobile route or extends the side at each stock station at least around each stock station, and above each robot between stock station and the treating stations, as shown in Figure 5.The mobile route of overhead transmission system is basically around each stock station and connecting bridge, as shown in Figure 4.
Comprehensively above-mentioned, have following advantage according to inventory system manufacturing line of the present invention:
1. owing to need not the transmission range of automatic guided vehicle, so can reduce making space in a large number.
2. owing to need not to use automatic guided vehicle, so can reduce the scope of class 1 environment, and then can reduce the productive costs of clean passage, and because of need not any ground control system (FCS), so also can reduce the laid down cost of dust free room with class 1 or better cleanliness level.
3. remove the step that automatic guided vehicle is handled wafer (or plate glass) owing to economizing, and the transmission time of saving automatic guided vehicle, so can reduce the processing cost of handling wafer (or plate glass) in a large number.
Only in order to technology contents of the present invention to be described, spirit of the present invention and scope are not limited in the detailed description of above preferred embodiment.All according to any change that the present invention did, all belong to the spirit and the scope of claim of the present invention.
Claims (11)
1. delivery system for stored materials comprises at least one treatment region for being used in, and this treatment region comprises in the manufacturing line of at least one treating stations, and this delivery system for stored materials comprises:
One crystal-boat box, it holds at least one article waiting for transmission;
One stock station comprises:
Be arranged at a plurality of hoisting cranes in this stock station, in order to move this crystal-boat box in this stock station;
At least one crystal-boat box load/unloader port, this crystal-boat box is through load thus/this stock station of unloader port transmission turnover;
These at least one article in a plurality of input/output end ports, this crystal-boat box are via this this stock station of a plurality of input/output end port transmission turnover; And
Be arranged at a plurality of racks in this stock station, in order to hold this crystal-boat box; And
One robot is arranged between this at least one treating stations and this stock station, in order to this stock station certainly these at least one article in this crystal-boat box are imported into and spread out of to this at least one treating stations.
2. according to a delivery system for stored materials of claim 1, also comprise an overhead transmission system, be to hang in the air, its mobile route is arranged in the superjacent air space of described robot, and along moving at least on one side of this stock station, via this at least one crystal-boat box load/unloader port, pass in and out this stock station in order to transmit this crystal-boat box.
3. according to a delivery system for stored materials of claim 1, wherein the mobile route of these a plurality of hoisting cranes is to be positioned within this at least one treatment region; Wantonly two hoisting cranes in these a plurality of hoisting cranes are adjacent, and its mobile route can overlap a zone that determines in advance, adjoins between the hoisting crane this crystal-boat box is transmitted in these two.
4. according to a delivery system for stored materials of claim 1, also comprise at least one forwarder in this stock station; Wherein the mobile route of these a plurality of hoisting cranes is to be positioned within this at least one treatment region, and this at least one forwarder is carried into one with the hoisting crane of this crystal-boat box in these hoisting cranes and adjoins in the hoisting crane.
5. according to a delivery system for stored materials of claim 1, it comprises at least two treating stations, and wherein these treating stations are lined up two parallel row, and each these treating stations links via this robot and this stock station.
6. according to a delivery system for stored materials of claim 2, also comprise at least two these stock stations, wherein this overhead transmission system is in order to via this at least one crystal-boat box load/unloader port within this stock station, transmits this crystal-boat box and debouches between these at least two these stock stations.
7. a delivery system for stored materials comprises at least one treatment region for being used in, and this treatment region comprises in the manufacturing line of at least one treating stations, and this delivery system for stored materials comprises:
One crystal-boat box, it holds at least one article waiting for transmission;
One stock station comprises:
Be arranged at a plurality of hoisting cranes in this stock station, in order to move this crystal-boat box in this stock station;
At least one crystal-boat box load/unloader port, this crystal-boat box is through load thus/this stock station of unloader port transmission turnover;
These at least one article in a plurality of input/output end ports, this crystal-boat box are via this stock station of described a plurality of input/output end port transmission turnover; And
Be arranged at a plurality of racks in this stock station, in order to hold this crystal-boat box;
One robot is arranged between this at least one treating stations and this stock station, in order to this stock station certainly these at least one article in this crystal-boat box are imported into and spread out of to this at least one treating stations; And
One overhead transmission system is to hang in the air, and its mobile route is arranged in the superjacent air space of described robot, and moves along the one side at least at this stock station, via this at least one crystal-boat box load/unloader port, passes in and out this stock station in order to transmit this crystal-boat box.
8. according to a delivery system for stored materials of claim 7, wherein the mobile route of these a plurality of hoisting cranes is to be positioned within this at least one treatment region; Wantonly two hoisting cranes in these a plurality of hoisting cranes are adjacent, and its mobile route can overlap a zone that determines in advance, adjoins between the hoisting crane this crystal-boat box is transmitted in these two.
9. according to a delivery system for stored materials of claim 7, also comprise at least one forwarder in this stock station; Wherein the mobile route of these a plurality of hoisting cranes is to be positioned within this at least one treatment region, and this at least one forwarder is carried into one with the hoisting crane of this crystal-boat box in these hoisting cranes and adjoins in the hoisting crane.
10. according to a delivery system for stored materials of claim 7, it comprises at least two treating stations, and wherein these treating stations are lined up two parallel row, and each these treating stations links via this robot and this stock station.
11. a delivery system for stored materials according to claim 7, also comprise at least two these stock stations, wherein this overhead transmission system is in order to via this at least one crystal-boat box load/unloader port within this stock station, transmits this crystal-boat box and debouches between these at least two these stock stations.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011036699A CN1170747C (en) | 2001-02-08 | 2001-02-08 | Delivery system for stored materials |
| CNB2004100641401A CN100349787C (en) | 2001-02-08 | 2001-02-08 | Stock transmitting systems |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011036699A CN1170747C (en) | 2001-02-08 | 2001-02-08 | Delivery system for stored materials |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100641401A Division CN100349787C (en) | 2001-02-08 | 2001-02-08 | Stock transmitting systems |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1368474A true CN1368474A (en) | 2002-09-11 |
| CN1170747C CN1170747C (en) | 2004-10-13 |
Family
ID=4653407
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB011036699A Expired - Fee Related CN1170747C (en) | 2001-02-08 | 2001-02-08 | Delivery system for stored materials |
| CNB2004100641401A Expired - Fee Related CN100349787C (en) | 2001-02-08 | 2001-02-08 | Stock transmitting systems |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100641401A Expired - Fee Related CN100349787C (en) | 2001-02-08 | 2001-02-08 | Stock transmitting systems |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN1170747C (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1306580C (en) * | 2003-08-20 | 2007-03-21 | 旺宏电子股份有限公司 | Mechanism and method for inspecting batch nos. and etched nos. on wafers in casing |
| CN100392841C (en) * | 2004-08-12 | 2008-06-04 | 友达光电股份有限公司 | Automatic material transport system |
| CN1950275B (en) * | 2004-04-30 | 2010-10-06 | 株式会社汤山制作所 | Medicine supply system |
| CN102054725A (en) * | 2009-10-29 | 2011-05-11 | 台湾积体电路制造股份有限公司 | System and method for overhead cross-system transportation |
| CN110491814A (en) * | 2019-08-06 | 2019-11-22 | 华侨大学 | A kind of automatic conveying device for workpieces and its automatic transmission method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5527390A (en) * | 1993-03-19 | 1996-06-18 | Tokyo Electron Kabushiki | Treatment system including a plurality of treatment apparatus |
| JP3185595B2 (en) * | 1995-04-03 | 2001-07-11 | 株式会社ダイフク | Load storage equipment with board sorting equipment |
| KR19990035554A (en) * | 1997-10-31 | 1999-05-15 | 윤종용 | Stalker equipment structure |
| JP3267266B2 (en) * | 1999-04-05 | 2002-03-18 | セイコーエプソン株式会社 | Cassette stocker and method of manufacturing semiconductor device |
-
2001
- 2001-02-08 CN CNB011036699A patent/CN1170747C/en not_active Expired - Fee Related
- 2001-02-08 CN CNB2004100641401A patent/CN100349787C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1306580C (en) * | 2003-08-20 | 2007-03-21 | 旺宏电子股份有限公司 | Mechanism and method for inspecting batch nos. and etched nos. on wafers in casing |
| CN1950275B (en) * | 2004-04-30 | 2010-10-06 | 株式会社汤山制作所 | Medicine supply system |
| CN100392841C (en) * | 2004-08-12 | 2008-06-04 | 友达光电股份有限公司 | Automatic material transport system |
| CN102054725A (en) * | 2009-10-29 | 2011-05-11 | 台湾积体电路制造股份有限公司 | System and method for overhead cross-system transportation |
| CN102054725B (en) * | 2009-10-29 | 2012-07-04 | 台湾积体电路制造股份有限公司 | System and method for overhead cross-system transportation |
| CN110491814A (en) * | 2019-08-06 | 2019-11-22 | 华侨大学 | A kind of automatic conveying device for workpieces and its automatic transmission method |
| CN110491814B (en) * | 2019-08-06 | 2024-02-27 | 华侨大学 | Automatic workpiece conveying device and automatic workpiece conveying method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1583528A (en) | 2005-02-23 |
| CN100349787C (en) | 2007-11-21 |
| CN1170747C (en) | 2004-10-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11978652B2 (en) | Automatic handling buffer for bare stocker | |
| US20060051192A1 (en) | Carrying system | |
| KR20060015660A (en) | Transfer system for glass substrate | |
| US20050063791A1 (en) | Inline transfer system and method | |
| KR20080012116A (en) | Clean stocker and keeping method of article | |
| US9670002B2 (en) | Conveyor device | |
| CN1170747C (en) | Delivery system for stored materials | |
| KR20200039229A (en) | Overhead hoist transport | |
| KR20050040008A (en) | Glass substrate lifter and glass substrate lifting system | |
| GB2318686A (en) | A semiconductor device manufacturing line | |
| WO2020042306A1 (en) | System and method for handling display panel | |
| KR101340786B1 (en) | Delivering equipment using over head shuttle | |
| KR20050038134A (en) | Glass substrate stocking system | |
| JPH06206149A (en) | Production line | |
| KR20150073338A (en) | System for transferring glass | |
| KR100966434B1 (en) | Apparatus for stacking cassette | |
| CN1493511A (en) | Automatic material transfer system and method | |
| KR20080048364A (en) | Inter stk conveyor for inter bay system using thereof | |
| JPH11199007A (en) | Cassette conveying method and handling equipment | |
| KR20070110576A (en) | Automatic guided vehicle and control method thereof | |
| KR100317000B1 (en) | Stocker-Based Transfer System | |
| JP5157787B2 (en) | Transport system | |
| JP4154269B2 (en) | Manufacturing equipment transfer system | |
| KR100505183B1 (en) | System for transporting glass | |
| CN115593835A (en) | Substrate conveying system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20041013 Termination date: 20160208 |