CN115593835A - Substrate conveying system - Google Patents

Abstract

The invention relates to the technical field of transportation systems, in particular to a substrate conveying system which comprises a first space and a second space, wherein the first space and the second space are arranged up and down; the invention can use each mode and cassette mode to transfer the base plate, and uses each mode and cassette mode to feed the base plate, so as to reduce the waiting time of the process equipment, and further improve the production efficiency.

Description

Substrate conveying system

Technical Field

The invention relates to the technical field of transportation systems, in particular to a substrate conveying system.

Background

With the recent development of various portable electronic devices such as mobile phones (mobilephones), PDAs, and notebook computers, there has been an increasing demand for a flat panel display device (fltpanel display device) suitable for the mobile phones, PDAs, and notebook computers. These flat panel displays, including LCD (liquid crystal display), plasma Display Panel (PDP), OLED, and the like, are actively studied, but liquid crystal display elements (LCD) are currently favored due to mass production techniques, ease of use of driving means, realization of high image quality, and the like.

As shown in fig. 1, the liquid crystal display element (1 ') is composed of a lower substrate (5') and an upper substrate (3 ') and a liquid crystal layer (7') formed between the lower substrate (5 ') and the upper substrate (3'). The lower substrate (5 ') is a driving element array substrate, and although not shown in detail in the schematic view, a plurality of pixels are formed on the lower substrate (5'), and one driving element, for example, a Thin Film Transistor (Thin Film Transistor) is formed on each pixel. The upper substrate (3') is a Color Filter (Color Filter) substrate, forming a Color Filter layer for realizing actual colors. Further, a pixel electrode and a common electrode are formed on the lower substrate (5 ') and the upper substrate (3 '), respectively, and a back film for back-facing liquid crystal molecules on the liquid crystal layer (7 ') is applied. The lower substrate (5 ') and the upper substrate (3 ') are folded by a Sealing Material (9 '); a liquid crystal layer (7 ') is formed therebetween, and liquid crystal molecules are driven by a driving element formed on the lower substrate (5'), thereby displaying information by controlling the amount of light transmitted through the liquid crystal layer.

The manufacturing process of the liquid crystal display element can be roughly divided into a driving element array substrate process of forming driving elements on a lower substrate (5 '), a color filter substrate process of forming color filters on an upper substrate (3'), and a Cell forming (Cell) process, and the processes of these liquid crystal display elements are described below with reference to fig. 2:

first, a plurality of Gate lines (Gate lines) defining pixel regions and Data lines (Data lines) are arranged on a lower substrate (5') by a driving element array process, and a driving element, a thin film transistor, connected to the Data lines with the Gate lines is formed on each of the pixel regions (S101). In addition, the thin film transistor is connected through the driving element array process, and a pixel electrode for driving the liquid crystal layer is formed as a signal is approved through the thin film transistor. Further, on the upper substrate (3'), a common electrode is formed with color filter layers of R, G, B realizing colors by a color filter process (S104).

Then, a back control force or a surface fixing force (i.e., rubbing, which is a film for providing a Pre-Tilt angle (Pre-Tilt angle) and a back direction) is applied to liquid crystal molecules of the liquid crystal layer formed between the upper substrate (3 ') and the lower substrate (5') after coating a back film on the upper substrate (3 ') and the lower substrate (5'), respectively) (S102, S105). Thereafter, spacers (spacers) for maintaining the liquid crystal gap (CellGap) are scattered on the lower substrate (5 '), and a sealing material is applied to the periphery of the upper substrate (3'), and then pressure is applied to the lower substrate (5 ') and the upper substrate (3') to achieve folding (S103, S106, S107). On the other hand, the lower substrate (5 ') and the upper substrate (3') are made of glass substrates having a large area. In other words, since a plurality of Panel (Panel) regions are formed on a large-area glass substrate and the driving device TFT and the color filter layer are formed in each of the Panel regions, the glass substrate must be cut and processed to produce a single liquid crystal Panel (S108). Thereafter, liquid crystal is injected through the liquid crystal column inlet on the single liquid crystal panel processed as described above, and the liquid crystal layer is formed by sealing the liquid crystal column inlet, and then a liquid crystal display element is manufactured by inspecting each liquid crystal panel (S109, S110). Since the liquid crystal display element manufactured by the above-described process is likely to be defective due to contaminants such as dust, a manufacturing space of the liquid crystal display element is performed in a Clean Room (Clean Room).

As shown in FIG. 3, the inside of the clean room (10) is divided into regions according to process characteristics, and a plurality of regions (regions; 5) having a predetermined width are formed in each region for performing the process. Various devices (1) for performing a process are provided around the area (5), and a robot and an Automatic Guided Vehicle (AGV) having a predetermined moving function are provided in the area (5), and the robot and AGV travel inside the area (5) to transfer the processed substrate to an appropriate device (1).

And, for each of the above-mentioned areas (5), a three-dimensional stocker (3) is provided in the area (5) for temporarily storing the substrate subjected to the completed process or the cassette on which the substrate is loaded for the next process. The movement of the substrates between the three-dimensional stockers (3) and the three-dimensional stockers (3) is performed by an automatic transfer device (not shown) along a transport line (7). Fig. 4 is an oblique view of a clean room including an engineering production line, schematically showing three-dimensional warehouses (3 a to 3 f) and spaces (5 a to 5 g) between the three-dimensional warehouses (3 a to 3 f) for convenience of explanation.

As illustrated, the clean room (10) is substantially divided into an upper space (10 a) for performing substrate processing and a lower space (10 b) for discharging the gas flow in the upper space (10 a) to the outside.

First to sixth three-dimensional stockers (3 a to 3 f) provided in the upper space (10 a) are connected to each other by first to seventh areas (5 a to 5 f), and the cassettes are transferred through the areas (5 a to 5 f). That is, the cassette transfer between the first three-dimensional stocker (3 a) and the second three-dimensional stocker (3 b) is performed through the first area (5 a), and the second three-dimensional stocker (3 b) and the third three-dimensional stocker (3 c) are performed through the second area (5 b). Then, the cassette transfer between the third three-dimensional stocker (3 c) and the fourth three-dimensional stocker (3 d) is performed through the third area (5 c), and the third area (3 c) and the fifth three-dimensional stocker (3 e) are performed through the fifth area (5 e). In addition, the cassette transfer between the fourth three-dimensional warehouse (3 d) and the sixth three-dimensional warehouse (3 f) is performed through the fourth area (5 d), and the fifth three-dimensional warehouse (3 e) and the sixth three-dimensional warehouse (6 f) are performed through the fifth area (5 f).

For example, if the cassette is transferred from the first stereoscopic warehouse (3 a) to a third stereoscopic warehouse (3 c); the automatic transfer device will take the cassette out of the first three-dimensional warehouse (3 a) and move the first area (5 a), and then place the cassette on the port of the second three-dimensional warehouse (3 b). Next, the cassette entering the port of the second stocker (3 b) is carried by another automatic transfer device operating between the second and third stockers (3 b, 3 c), the second area (5 b) is moved, the cassette is blown into the third stocker (5 c), and the cassette is transferred from the first stocker (3 a,3 c) to the third stocker (3 c).

However, the above transfer method has a problem in that the number of unmanned transfer devices is difficult to be mounted to a certain number or more because the space of an automatic transfer device (AGV) running line is limited although the transfer amount of the cassette and the substrate increases due to an increase in yield. Therefore, there is a problem that the transfer cannot be completed within a predetermined time, and the waiting time for delaying entry into the construction equipment increases, thereby lowering the work efficiency.

Further, the conventional transfer method has a problem that only one of the transfer method for each substrate or the cassette transfer method for transferring a cassette containing a plurality of substrates can be selected. That is, if the sheet-by-sheet method is adopted, the automatic transfer device is not required, and since the running lines are all arranged in a built-in type, the substrates placed thereon are transferred one by one along with the movement of the running lines. On the other hand, the cassette transfer method is to load a plurality of substrates into a cassette and then load the substrates into a moving line of an automatic transfer device, thereby transferring the substrates. Thus, only one way in the cassette can be selected for each piece.

Disclosure of Invention

The present invention is directed to provide a substrate transfer system that can be directly put into process equipment without waiting time of cassettes or substrates with an increase in throughput, thereby increasing production efficiency.

In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a base plate system of sending, includes first space and second space, first space and second space are arranged from top to bottom, the inside in first space is provided with first three-dimensional storage, the second space is provided with the card casket, the perpendicular position that corresponds of first three-dimensional storage is provided with the three-dimensional storage of second group, first three-dimensional storage of group and the perpendicular feeding device that is connected with of the three-dimensional storage of second group, first three-dimensional storage of group is connected and is provided with first set of region, the three-dimensional storage of second group is connected and is provided with the second and organizes the region, the periphery in first set of region and second group region all is provided with the process equipment, first set of region comprises conveying system.

Preferably, the first group of three-dimensional warehouses comprises a first three-dimensional warehouse, a second three-dimensional warehouse, a third three-dimensional warehouse, a fourth three-dimensional warehouse, a fifth three-dimensional warehouse and a sixth three-dimensional warehouse, and the first group of areas comprises a first area, a second area, a third area, a fourth area, a fifth area, a sixth area and a seventh area.

Preferably, the first area and the seventh area are respectively connected with a second three-dimensional warehouse and a fourth three-dimensional warehouse, the third three-dimensional warehouse is respectively connected with the second area and the third area, the second area is fixedly connected with the second three-dimensional warehouse, the third area is connected with the fourth three-dimensional warehouse, the fifth three-dimensional warehouse is respectively fixedly connected with a fifth area and a sixth area, the fifth area is fixedly connected with the third three-dimensional warehouse, the sixth area is fixedly connected with the sixth three-dimensional warehouse, and the fourth area is respectively fixedly connected with the sixth three-dimensional warehouse and the fourth three-dimensional warehouse.

Preferably, the second group of three-dimensional warehouses comprises a first three-dimensional warehouse, a second three-dimensional warehouse, a third three-dimensional warehouse, a fourth three-dimensional warehouse, a fifth three-dimensional warehouse and a sixth three-dimensional warehouse, and the second group of areas comprises a first area, a second area, a third area, a fourth area, a fifth area, a sixth area, a seventh area and an eighth area.

Preferably, the first three-dimensional warehouse is fixedly connected with a first area and a fifth area respectively, the first area and the fifth area are fixedly connected with a second three-dimensional warehouse and a fourth three-dimensional warehouse respectively, the second area and the sixth area are fixedly connected with the second three-dimensional warehouse, the other ends of the second area and the sixth area are connected to a third three-dimensional warehouse and a fourth three-dimensional warehouse respectively, the third three-dimensional warehouse and the third area are fixedly connected with the fifth three-dimensional warehouse, the sixth three-dimensional warehouse is fixedly connected with the fourth area and the eighth area respectively, and the fourth area and the eighth area are connected with the fourth three-dimensional warehouse and the fifth three-dimensional warehouse respectively.

Preferably, engineering equipment is installed around the first group of areas, and the engineering equipment comprises evaporation equipment, etching equipment, exposure equipment, heat treatment equipment and cleaning equipment.

Preferably, the first group of areas is a conveying device characterized by a conveying system, and the feeding device comprises a moving pipe vertically connecting the first group of three-dimensional warehouses and the second group of three-dimensional warehouses.

Preferably, an inclined top capable of moving up and down is arranged above the feeding device.

Compared with the prior art, the invention has the following beneficial effects:

the invention can use each mode and cassette mode to transfer the base plate, and uses each mode and cassette mode to feed the base plate, so as to reduce the waiting time of the process equipment, and further improve the production efficiency.

Drawings

FIG. 1 is a cross-sectional view of a typical liquid crystal display device.

FIG. 2 is a drawing of a process flow chart of a typical LCD device.

Fig. 3 is a drawing summarizing the interior of a clean room.

Fig. 4 is a perspective view schematically illustrating a substrate transfer apparatus in a conventional clean room.

Fig. 5 is a perspective view of the substrate feeding apparatus of the present invention.

Fig. 6 is a diagram showing an automatic moving apparatus.

In the figure, 13a to 13f, a first group of stereoscopic warehouses; 23a to 23f, a second group of three-dimensional warehouses; 15a to 15g, a first set of regions; 25a to 25h, a second set of regions; 31a to 31f, a feed tube; 30. an automatic feed system; 33. a linear motor; 35. and (4) a cassette.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.

Referring to fig. 1 to 6, a substrate carrying system, a first and a second space disposed up and down, a first set of three-dimensional stockers for temporarily storing substrates in the first space; a second group of three-dimensional warehouses which are used for temporarily storing the cassettes and are arranged at the positions vertically corresponding to the first group of three-dimensional warehouses are arranged in the second space; and providing a feeding device consisting of feeding pipes which vertically connect the first group of three-dimensional warehouses with the second group of three-dimensional warehouses.

Further comprising a first group of zones connected between the first set of stockers and a second group of zones connected between the second set of stockers, process equipment being disposed around either the first group of zones or the second group of zones. The process equipment comprises evaporation equipment, etching equipment, exposure equipment, heat treatment equipment, cleaning equipment and the like.

Then, the first group of zones is composed of a transport system, and the substrates are transported one by the movement of the first group of zones.

In addition, the substrates are moved between the first group of three-dimensional warehouses and the second group of three-dimensional warehouses through the feeding pipe, and the feeding pipe is provided with a lifter for moving the substrates in the vertical direction.

And an automatic transfer device which runs between the second group of three-dimensional warehouses and transfers the cassettes to the destination. Further, the present invention includes first and second spaces arranged up and down; a first group of three-dimensional warehouses which are arranged in the first space and used for temporarily storing the cassettes; a second set of three-dimensional warehouses configured to temporarily store substrates in the second space and arranged at positions vertically corresponding to the first set of three-dimensional warehouses; and providing a feeding device consisting of a feeding pipe which vertically connects the first group of three-dimensional warehouses with the second group of three-dimensional warehouses.

Further comprising a first group of zones connected between the first set of stockers and a second group of zones connected between the second set of stockers, process equipment being disposed around either the first group of zones or the second group of zones. The process equipment comprises evaporation equipment, etching equipment, exposure equipment, heat treatment equipment, cleaning equipment and the like.

Then, the second group of zones is composed of a transport system, and the substrates are transported one by the movement of the second group of zones.

In addition, the substrates are moved between the first group of three-dimensional warehouses and the second group of three-dimensional warehouses through the feeding pipe, and the feeding pipe is provided with a lifter for moving the substrates in the vertical direction.

And an automatic transfer device which runs between the first group of three-dimensional warehouses and transfers the cassettes to the destination.

The feeder of the present invention configured as described above will be described in detail with reference to the drawings, and fig. 5 is a schematic oblique view of the feeder of the present invention, and simply shows an arbitrary area and a three-dimensional warehouse for convenience of description.

As shown in the drawing, the transfer device of the invention is respectively arranged in a clean room (20) divided into a first space (20 a) and a second space (20 b).

In the first space (20 a), regions are divided according to process characteristics, and regions (15 a-15 g) of a first group for performing a process are formed in each process region with a predetermined width. Then, around each of the areas (15 a to 15 g), there are engineering equipments (not shown) (e.g., a deposition equipment, an etching equipment, an exposure equipment, a heat treatment equipment, and a cleaning equipment), and the substrate from the above-mentioned process equipments is transferred to other process equipments through the first set of areas (15 a to 15 g).

In addition, a first set of stockers (13 a-13 e) is provided between the areas (15 a-15 g), and substrates passing through a specific process specific area through any area can be temporarily stored before entering other process areas.

That is, the first stereoscopic warehouse (13 a) in the first group is connected to the second and fourth stereoscopic warehouses (13b, 13d) by the first and seventh areas (15a, 15g) in the first group, respectively; the third three-dimensional warehouse (13 c) is connected with the second and fourth three-dimensional warehouses (13 b,13 d) through the second and third areas (15 b, 15 c), respectively. Then, the above-mentioned fifth stereoscopic warehouse (13 e) is connected to the third and sixth stereoscopic warehouses (13 c, 13 f) through the fifth and sixth areas (15 e, 15 f); the sixth three-dimensional warehouse (13 f) is connected to the fourth three-dimensional warehouse (13 d) through a fourth area (15 d).

The first group of zones (15 a-15 g) is composed of a conveying system, and the substrate placed on the zones is automatically conveyed by the movement of the zones. Then, the substrate on which the process of the specific area is completed is stored in the three-dimensional stocker by the robot, and the substrate stored in the three-dimensional stocker is transferred to the Ta area by the robot to be blown into another process area.

In addition, a second group of three-dimensional warehouses (23 a to 23 f) arranged at the positions corresponding to the first group of three-dimensional warehouses (13 a to 13 f) vertically are arranged in the second space (20 b); the second group of three-dimensional warehouses (23 a-23 f) is communicated with the first group of three-dimensional warehouses (13 a-13 f) through first feeding pipes (31 a-31 f) and sixth feeding pipes (31 a-31 f). The feeding pipes (31 a to 31 f) are provided with adapter devices (Lifter systems) capable of moving the substrates stored in the first set of three-dimensional warehouses (13 a to 13 f) in the vertical direction. Further, areas (25 a to 25 h) connecting the respective three-dimensional warehouses are provided between the second group of three-dimensional warehouses (23 a to 23 f), and cassette transfer between the second group of three-dimensional warehouses (23 a to 23 f) is performed by an unmanned carrier device (not shown) moving within the areas.

That is, the first stereoscopic warehouse (23 a) of the second group is connected to the second and fourth stereoscopic warehouses (23 b, 23 d) by the first and fifth areas (25 a, 25 e) of the second group; the second stereoscopic warehouse (23 b) is connected to the third and fourth stereoscopic warehouses (23 c, 23 d) by second and sixth areas (25 b, 25 f). Then, the third stereoscopic warehouse (23 c) is connected to a fifth stereoscopic warehouse (23 e) by a third zone (25 c); the sixth three-dimensional warehouse (23 f) is connected to the fourth and fifth three-dimensional warehouses (23 d, 23 e) by fourth and eighth areas (25 d, 25 h).

Therefore, the cassette transfer is realized by the second group of areas (25 a-25 h) which are connected among the second group of three-dimensional warehouses (23 a-23 f).

The method of transferring the substrate stored in the first stocker (13 a) of the first group to the third stocker (13 c) by the above-configured feeding device includes, for example, a first transfer method performed only in the first space (20 a) and a second transfer method performed through the first and second spaces (20 a, 20 b). First, the first transfer method includes that the substrate stored in the first three-dimensional stocker (13 a) is taken out by a robot and uploaded to the first area (15 a) of the first group; the first area (15 a) is moved to the vicinity of the second three-dimensional warehouse (13 b). Then, the robot moves the second area (15 b) of the first group through the second three-dimensional warehouse (13 b) on the substrate which reaches the vicinity of the second three-dimensional warehouse (13 b). When the substrate reaches the vicinity of the third three-dimensional warehouse (13 c) by the movement of the second area (15 b), the third three-dimensional warehouse (13 c) is blown by the robot. At this time, the substrate is finished by the robot through the second three-dimensional stocker (13 b). Namely, the substrate which reaches the vicinity of the second three-dimensional warehouse (13 b) is uploaded to the second three-dimensional warehouse (13 b) by the robot, and the substrate uploaded to the second three-dimensional warehouse (13 b) is uploaded to the second area (15 b) by the robot.

Then, the second transfer method is that the substrate stored in the first three-dimensional stocker (13 a) is taken out by the robot and placed in the first area (15 a) of the first group, and then transferred to the vicinity of the second three-dimensional stocker (13 b) by the movement of the first area (15 a). The base plate transferred to the second three-dimensional warehouse (13 b) is stored in the second three-dimensional warehouse (13 b) by a robot, and then; and is moved to the second stereoscopic warehouse (23 b) through a second feeding pipe (31 b) connecting the second stereoscopic warehouse (13 b) of the first group and the second stereoscopic warehouse (23 b) of the second group. At this time, the second feeding pipe (31 b) is provided with a lifter (micro guide) vertically movable between the first and second sets of the second three-dimensional stockers (13 b, 23 b), and the substrate is transferred to the second set of the second three-dimensional stockers (23 b) by the lifter. As described above, the substrates arriving at the second stocker (23 b) of the second group are loaded onto the cassettes by the robot, and the cassettes are blown into the third stocker (23 c) by the automatic feeding device moving between the second stocker (23 b) of the second group and the third stocker (23 c).

At this time, the automatic feeding device is driven by a magnetic levitation system, and a linear motor (linear motor) completes a traveling motion.

Fig. 6 is a drawing showing the automatic transfer device (30) carrying the cassette (35). As illustrated in the drawing, the automatic transfer device (30) operates along a linear motor (33) disposed axially inward to transfer the cassette (35). At this time, a plurality of substrates are loaded in the cassette (35).

As described above, the substrate or cassette feeding according to the present invention is performed in a sheet-by-sheet manner or a cassette manner. That is, each way of transferring the substrates one by one is performed in the first space by constituting the above-mentioned areas as one transport system. Then, a cassette system for loading and transferring a plurality of substrates into a cassette is performed in the second space by moving an automatic transfer device in the rack.

Alternatively, the first space may be used in a cassette manner, and the second space may be used in a sheet-by-sheet manner, or both the first and second spaces may be used in a cassette or in a sheet-by-sheet manner.

However, in the first space where the substrate processing is actually performed, when the cassette type of the auto-feeder is used, since the cassette movement between the process equipments is performed by the auto-transporter operating in the area, the feeding time of the substrate is increased, thereby increasing the substrate feeding time compared to the sheet type. Therefore, in the first space where the actual substrate processing is performed, it is more advantageous in terms of process time to adopt the per-wafer method.

Furthermore, the process equipment may also be installed in a second group of areas of the second space.

In addition, the present invention can also realize the substrate transfer of the first space (20 a) and the second space (20 b) at the same time. That is, if the substrate cannot be transferred within a predetermined time period only by the transfer means of the first space (20 a) due to an increase in the throughput, the transfer of the substrate can be made smooth by using the transfer means of the second space (20 b) together.

Although not described in detail in the drawings, a fan filter unit is provided in the ceiling of the first space (20 a), and the fan filter unit filters outside air sucked therein and discharges the sucked air to the second space (20 b). Then, the air discharged to the second space (20 b) is discharged outward again or circulated again through the first space (20 a). Accordingly, at the interface of the first space (20 a) and the second space (20 b), a plurality of through holes as air flow passages are formed at a uniform density.

As described above, the present invention provides a substrate or cassette feeding device, and more particularly, a feeding device for increasing process efficiency with an increase in throughput. In the conventional feeding device using a cassette, since the space of an automatic feeding device (AGV) operation line is limited, and the number of unmanned feeding devices is difficult to be mounted to a certain number, the transportation and delay can not be completed within a predetermined time, and the waiting time for entering process equipment is increased, thereby reducing the working efficiency. On the other hand, the present invention can increase the process efficiency by configuring the transfer device such that the substrate or the cassette is simultaneously transferred in the first and second spaces separated vertically, so that the transfer of the substrate can be performed at will for a predetermined time. That is, in the first space, each sheet system is applied by constituting each area as a transport system, and in the second space, the waiting time of the substrate can be shortened by applying the cassette system using the auto-feeder.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrases "comprising a," "8230," "8230," or "comprising" does not exclude the presence of additional like elements in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (8)

1. A substrate transfer system comprising a first space (20 a) and a second space (20 b), characterized in that: the first space (20 a) and the second space (20 b) are arranged up and down, a first group of three-dimensional warehouses (13 a-13 f) are arranged in the first space (20 a), cassettes (35) are arranged in the second space (20 b), a second group of three-dimensional warehouses (23 a-23 f) are arranged at positions corresponding to the first group of three-dimensional warehouses (13 a-13 f) vertically, the first group of three-dimensional warehouses (13 a-13 f) and the second group of three-dimensional warehouses (23 a-23 f) are connected with a feeding device vertically, a first group of areas (15 a-15 g) are connected with the first group of three-dimensional warehouses (13 a-13 f), a second group of areas (25 a-25 h) are connected with the second group of three-dimensional warehouses (23 a-23 f), process equipment is arranged on the peripheries of the first group of areas (15 a-15 g) and the second group of areas (25 a-25 h), and the first group of areas (15 a-15 g) are composed of conveying systems.

2. The substrate carrier system according to claim 1, wherein: the first group of three-dimensional warehouses (13 a-13 f) comprises a first three-dimensional warehouse (13 a), a second three-dimensional warehouse (13 b), a third three-dimensional warehouse (13 c), a fourth three-dimensional warehouse (13 d), a fifth three-dimensional warehouse (13 e) and a sixth three-dimensional warehouse (13 f), and the first group of areas (15 a-15 g) comprises a first area (15 a), a second area (15 b), a third area (15 c), a fourth area (15 d), a fifth area (15 e), a sixth area (15 f) and a seventh area (15 g).

3. A substrate handling system according to claim 2, wherein: the first area (15 a) and the seventh area (15 g) are respectively connected with a second three-dimensional warehouse (13 b) and a fourth three-dimensional warehouse (13 d), the third three-dimensional warehouse (13 c) is respectively connected with the second area (15 b) and the third area (15 c), the second area (15 b) is fixedly connected with the second three-dimensional warehouse (13 b), the third area (15 c) is connected with the fourth three-dimensional warehouse (13 d), the fifth three-dimensional warehouse (13 e) is respectively fixedly connected with a fifth area (15 e) and a sixth area (15 f), the fifth area (15 e) is fixedly connected with the third three-dimensional warehouse (13 c), the sixth area (15 f) is fixedly connected with the sixth three-dimensional warehouse (13 f), and the fourth area (15 d) is respectively fixedly connected with the sixth three-dimensional warehouse (13 f) and the fourth three-dimensional warehouse (13 d).

4. The substrate carrier system according to claim 1, wherein: the second group of three-dimensional warehouses (23 a-23 f) comprises a first three-dimensional warehouse (23 a), a second three-dimensional warehouse (23 b), a third three-dimensional warehouse (23 c), a fourth three-dimensional warehouse (23 d), a fifth three-dimensional warehouse (23 e) and a sixth three-dimensional warehouse (23 f), and the second group of areas (25 a-25 h) comprises a first area (25 a), a second area (25 b), a third area (25 c), a fourth area (25 d), a fifth area (25 e), a sixth area (25 f), a seventh area (25 g) and an eighth area (25 h).

5. The substrate carrier system according to claim 4, wherein: the first three-dimensional warehouse (23 a) is fixedly connected with a first area (25 a) and a fifth area (25 e) respectively, the first area (25 a) and the fifth area (25 e) are fixedly connected with a second three-dimensional warehouse (23 b) and a fourth three-dimensional warehouse (23 d) respectively, the second area (25 b) and a sixth area (25 f) are fixedly connected with the second three-dimensional warehouse (23 b), the other ends of the second area (25 b) and the sixth area (25 f) are connected to a third three-dimensional warehouse (23 c) and a fourth three-dimensional warehouse (23 d) respectively, the third three-dimensional warehouse (23 c) and the third area (25 c) are fixedly connected with the fifth three-dimensional warehouse (23 e), the sixth three-dimensional warehouse (23 f) is fixedly connected with a fourth area (25 d) and an eighth area (25 h) respectively, and the fourth area (25 d) and the eighth area (25 h) are fixedly connected with the fourth three-dimensional warehouse (23 d) and the fifth three-dimensional warehouse (23 e) respectively.

6. The substrate carrier system according to claim 1, wherein: engineering equipment is arranged around the first group of areas (15 a-15 g), and the engineering equipment comprises evaporation equipment, etching equipment, exposure equipment, heat treatment equipment and cleaning equipment.

7. A substrate handling system according to claim 1, wherein: the first group of areas (15 a-15 g) is a conveying device characterized by a conveying system, and the feeding device comprises a first group of three-dimensional warehouses (13 a-13 f) and a second group of three-dimensional warehouses (23 a-23 f) which are vertically connected with a moving pipe.

8. The substrate carrier system according to claim 1, wherein: an inclined top capable of moving up and down is arranged above the feeding device.

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