CN1362748A - Piezoelectric element polarization method - Google Patents

Piezoelectric element polarization method Download PDF

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Publication number
CN1362748A
CN1362748A CN01145213A CN01145213A CN1362748A CN 1362748 A CN1362748 A CN 1362748A CN 01145213 A CN01145213 A CN 01145213A CN 01145213 A CN01145213 A CN 01145213A CN 1362748 A CN1362748 A CN 1362748A
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polarity
piezoelectric element
polarization
rem
setting level
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CN1173422C (en
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友廣宏
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising

Abstract

Polarization is performed by applying a DC voltage to a piezoelectric and the polarization &Delta fmid is measured in the process. The current to the piezoelectric when the measured polarization &Delta fmid in the polarization reaches a set level and a kickback polarization is found from the measured current value to predict the remaining polarization &Delta frem. If the predicted remaining polarization &Delta frem is larger than a target value, the application of the DC voltage is stopped when the polarization &Delta fmid in the polarization reaches the set level and if the predicted remaining polarization &Delta frem is less than the target value, the set level of the polarization &Delta fmid in the polarization is updated. When the polarization &Delta fmid in the polarization reaches the updated set level, the application of the DC voltage is stopped.

Description

The polarization method of piezoelectric element
Invention field
The present invention relates to the method that a kind of polarization is used for the piezoelectric element of ceramic filter or ceramic resonator.
Background technology
In known technology, the polarization of the piezoelectric ceramic of the piezoelectric ceramic substrate made from lead zirconate titanate (PZT) or platinum (PT) is finished in the following method.Behind roasting piezoelectric ceramic substrate, loaded onto the electrode that for example is made from silver on two opposites of substrate.Many piezoelectric ceramic substrates are immersed in the insulating solution that temperature is 60～100C simultaneously, after this, on many piezoelectric ceramic substrates, add 2 to the electric field of 8kv/mm 10 to 30 minutes, thereby finished polarization.
When in liquid, finishing polarization as mentioned above, because piezoelectric element is placed in the liquid, so during polarization process, can not measure the polarization of piezoelectric element, because liquid causes the oscillation damping that is produced by piezoelectric element, so the characteristic of piezoelectric element has hindered measurement.Therefore, when in liquid, finishing polarization, only finish within the predetermined time owing to polarize, so can not accurately control polarization.
Thereby, in order to obtain to have the piezoelectric element of homogeneous quality, and on piezoelectric constant, keep little and stable variation again, little by little use a kind of in air the method for control polarity.(No. 2656041 Japan Patent)
In the method that is used for controlling polarity, the piezoelectric constant of piezoelectric ceramic (for example, electromechanical coefficient or polarity) is tested when applying direct voltage polarized piezoelectric pottery, and just removes this voltage that is added on the piezoelectric ceramic when measured value reaches a setting level.This setting level be by the piezoelectric constant after just having removed the direct voltage that is added on the piezoelectricity (pottery) and after adequate time the correlation between the stable piezoelectric constant obtain.
But, when using a kind of existing method of control polarity, though during polarizing, to be set to the setting level to this polarity, as shown in Figure 1 and since batch with criticize between component and the difference of the mode of roasting, so remain polarity Δ f RemChange hardly.Here, residue polarity Δ f RemRefer to after polarized, aging and be cooled to normal temperature after stable polarity.Because residue polarity Δ f RemVariation, will to finish the test that prior polarization regulates be necessary so pull in each that made, also have since batch with batch between change in polarity, need in step subsequently, finish the frequency adjustment of trouble, thereby reduce productivity ratio and output.
After having considered above-mentioned description, the present inventor think batch with criticize between residual polarization Δ f RemVariation be that difference owing to many amounts of returning of these batches causes, although during polarizing, always control polarization equally, but these differences since batch with criticize between different these facts of component with the roasting mode cause, here, the meaning of the polarity amount of returning is the polarity before just removing the voltage that is added on the piezoelectric element and is removing poor between the polarity that experience is aging after the voltage that is added on the piezoelectric element.In addition, various experiments make the inventor draw following result of study.Here it is, and the current value by piezoelectric element during the difference of the polarity amount of returning between criticizing and criticizing is polarizing has a correlation.
The invention summary
According to above-described result of study, thus purpose of the present invention provide a kind of reduction occur in batch with criticize between change in polarity obtain the method for the polarized piezoelectric element of target polarity exactly.
For this reason,, provide a kind of method of polarized piezoelectric element, comprise the steps: to finish the polarization of piezoelectric element by applying direct voltage to piezoelectric element according to one aspect of the present invention; When the polarized piezoelectric element, measure polarity Δ f MidWhen polarization, work as the polarity Δ f that measures MidWhen reaching the setting level, measure electric current by piezoelectric element; Estimate residue polarity Δ f from the electric current that has measured RemWork as polarity Δ f during the polarization MidWhen reaching the setting level of having upgraded, remove the direct voltage that is added on the piezoelectric element.
Preferably, the method for polarized piezoelectric element also comprises the steps:
When polarization, work as the residual polarization Δ f that estimates RemDuring less than desired value, upgrade polarity Δ f MidThe setting level;
When polarization, as polarization Δ f MidWhen reaching the setting level, remove the voltage that is added on the piezoelectric element, when polarization, work as and estimate residual polarization Δ f RemDuring more than or equal to desired value, do not upgrade polarity Δ f MidThe setting level.
Utilize and just to remove the polarity before the direct voltage that is added on the piezoelectric element and removing the direct voltage that is added on the piezoelectric element after, wear out and be cooled to correlation between the residue polarity of normal temperature subsequently to obtain the setting level be preferable.
More particularly, by seeking before just removing the direct voltage that is added on the piezoelectric element and residue polarity Δ f RemBetween the best fit data straight line of correlation to obtain the setting level be preferable, wherein data obtain by many batches of experiments.Best-fitting straight line obtains with known method, such as least squares method.
In addition, reasonable is to estimate residue polarity Δ f from the electric current that has measured RemStep also comprise the steps:
Obtain the polarity amount of returning from the electric current that has measured; And
Obtain to remain polarity Δ f from the difference between setting level and the polarity amount of returning Rem
By the initial setting level with at residue polarity Δ f RemDesired value and residue polarity Δ f RemExpectation between the poor sum updating value that obtains the setting level also be preferable.
It is evident that, the present invention can make by in the component or batch with batch between the electric current of the change in polarity that causes of roasting mode difference can be from polarization the time estimate, and can make change in polarity when polarizing, feed back to target polarity.So, change in polarity between criticizing and criticizing is become minimum, become possibility thereby make accurately control residue polarity reach target polarity.
Also have, the present invention has eliminated to making the polarization that will finish in batch and has regulated or measure in advance and test, thereby has increased efficient and the output of adjusting at the subsequent process medium frequency.
The accompanying drawing summary
The comparison of residue polarity and the polarity amount of returning between Fig. 1 shows and criticizes and criticize.
The variation of piezoelectric element polarity when Fig. 2 shows polarization;
Fig. 3 shows the example that is used to finish the Polarity Control system of polarization according to of the present invention;
Correlation when Fig. 4 shows polarization between the polarity of polarity after being cooled to normal temperature;
Relation when Fig. 5 shows polarization between electric current and the polarity amount of returning;
The characteristic of polarity when Fig. 6 shows polarization;
Fig. 7 illustrates the flow chart of control polarity method example, and
The polarity that is subjected to the polarity adjusting between Fig. 8 shows and criticizes and criticize compares.
The description of preferred embodiment
In the present invention, the polarity frequency characteristic of measuring it when piezoelectric element is subjected to polarizing obtains.Obtain polarity by the difference on the frequency Δ f that seeks between resonance frequency fr and the antiresonant frequency fa, or opposite, by seeking a piezoelectric parameter, obtain such as electromechanical coefficient k or centre frequency.When measuring, the polarity Δ f when determining polarization MidWhether reached the setting level.
When polarization, polarity Δ f MidBe controlled to and rise to a predetermined initial setting level, as polarity Δ f MidProbe current when reaching the initial setting level, and can estimate to remain polarity Δ f from this electric current that has detected RemAt electric current and residual polarization Δ f RemBetween correlation be that many batches of experiments obtain.
In addition, the polarity Δ f when polarization MidThe setting level be according to expectation residual polarization Δ f RemUpgrade residual polarization Δ f on the estimation RemBe to have determined whether to upgrade this setting level more than or equal to predetermined target value.When polarization, as polarity Δ f MidWhen reaching the level of having upgraded, just remove the direct voltage that is added on the piezoelectric element.
Fig. 2 show piezoelectric element polarized, aging and its change in polarity when being cooled to normal temperature.
As shown in Figure 2, when the maximum point of polarity, use Δ f at it Max 'Represent the polarity Δ f after wearing out AgeRepresent that the polarity after being cooled to normal temperature is then used Δ f RemRepresent that the polarity during polarization rises to maximum point Δ f Max 'And because the aging Δ f that drops to Age, still, the polarity of landing partly is resumed owing to be cooled to normal temperature, and at Δ f RemThe place is steady, and the meaning that remains polarity in a word is the polarity Δ f when being cooled to normal temperature MidYet in the present invention, the meaning of residue polarity may be the polarity Δ f of aging back (before being cooled to normal temperature) AgeOr the polarity Δ f after being cooled to normal temperature Rem
In other words, the polarity Δ f after aging AgeWith the polarity Δ f that is cooled to behind the normal temperature RemBetween correlation be according to the unique decision of temperature characterisitic of piezoelectric element material.In other words, the polarity Δ f after being cooled to normal temperature (for example 26 ℃) RemBy decision material, aging temperature and aging after polarity Δ f AgeUnique decision.
Also have, Fig. 2 shows the polarity amount of returning Q Df, it is by the polarity Δ f before removing the voltage that is added on the piezoelectric element just MaxThe polarity Δ f after aging after removing the voltage that is added on the piezoelectric element just AgeDifference defined.Be exactly:
Q df＝Δf max-Δf age
When polarization, polarity backspace amount Q DfRelevant with the electric current by piezoelectric element, electric current is bigger, and polarity is returned quantitative change and must be healed greatly, therefore, and residue polarity Δ f RemCan be from setting level and the polarity amount of returning Q DfBetween difference accurately expected.
When in exploitation during material, can test in batch obtain polarization during polarity return Q DfCorrelation with the electric current that passes through piezoelectric element.This correlation can be represented or stores as a table with a formula.So, the polarity amount of returning Q DfCan complicated data processing obtain at short notice.
As mentioned above, the polarity Δ f after aging AgeWith the polarity Δ f that is cooled to normal temperature RemBetween relation by the unique decision of the temperature characterisitic of material.So, the polarity amount of returning Q DfCan be by defining to formula down:
Q df＝Δf max-Δf rem
Fig. 3 shows the example that is used to finish the Polarity Control system of piezoelectric element polarization according to of the present invention, and label W is the piezoelectric element of being made by piezoelectric ceramic that is polarized.Label 1 is a thermostat that is used to regulate piezoelectric element W and atmosphere is fixed on a predetermined temperature.Label 2 is the high-voltage DC power supplies that are used to polarize.Label 3 is that voltage is risen to the high voltage switch circuit that piezoelectric element W gets on.The 4th, the time be used to block the ac/dc split circuit of high direct voltage in polarization.Label 5 is the measurement mechanisms that are used for measuring the polarity f of piezoelectric element W when polarization.Label 6 is to be used to measure the current detection circuit that passes through the current value of piezoelectric element W when polarizing.Label 7 is the control device such as computer.
Piezoelectric element W is that a thickness is 5 to 10mm lead zirconate titanate (PZT).On two of piezoelectric element W relative faces each has been done two electrodes, and interelectrode electric field is fixed on 1.1kv/mm.
Thermostat 1 is used for finishing piezoelectric element W such as the step that polarizes, wears out and get back to normal temperature.Control device 7 remains on a suitable temperature to the atmosphere (air) in the thermostat 1 to each process.The polarization temperature is remained on aging temperature or more higher, that is, under the situation of in liquid, finishing polarization, obtain the temperature of identical polar.The polarization temperature is remained on 200C.And aging temperature is at 200C.Ageing time was set in 300 seconds.According to Fig. 3, thermostat 1 is only regulated a piezoelectric element W, yet thermostat 1 can hold a plurality of piezoelectric element W simultaneously and control polarity.
Measurement mechanism 5 is a network analyser for example, and the AC signal that it will be included in the AC power in the measurement mechanism 5 is added on the piezoelectric element W, and utilizes the impedance operator of piezoelectric element W, surveys the poor of resonance frequency fa.The difference of resonance frequency fr and antiresonant frequency fa is referred to as difference on the frequency Δ f and is used to measure polarity.Except Δ f, the electromechanical coefficient k may be used to measure polarity.
Current detection circuit 6 comprises the potential difference that is used for detecting between resistance and this resistance two ends so that measure the amplifier such as operational amplifier (OP) by the electric current of piezoelectric element W from this potential difference, changing signal into and be input to control device 7 by measurement mechanism 5 detected polarity f with by current detection circuit 6 detected electrorheologicals.This input signal is used to control added voltage and polarity.More precisely, control device 7 has been controlled thermostat 1, high-voltage DC power supply 2 and high voltage switch circuit 3.When regulating many piezoelectric element W in thermostat 1, control device may comprise multichannel switching system so that sequentially to each control polarity of these piezoelectric elements W.
Control device 7 comprises various data, such as in the polarity setting level in when polarization, the data of correlation and the data of electric current and the polarity amount of returning correlation when polarizing and between the polarity when being cooled to normal temperature.Control device 7 is also regulated a program that is used for control polarity under predetermined way.
Below explain the operation of control device 7.When development piezoelectric element W material, must finish the adjusting that is used for to two batches control polarity, be described below:
1, as shown in Figure 4, when polarization, found polarity Δ f MidWith residue polarity Δ f RemBetween correlation, in when polarization, polarity Δ f MidCan remain polarity Δ f from target RemCalculate conversely with correlation.When polarization reaches polarity Δ f MidThe time, remove the direct voltage that is added on the piezoelectric element.Therefore, polarity is accurately controlled and rises to target polarity Δ f RemThereby reduced the variation on the polarity.
More particularly, though piezoelectric element is made by same material,, found the polarity Δ f when polarization for the component piezoelectric element different with the roasting mode Mid(at 6.5KHz, 6.55KHz, and 6.65KHz) and residue polarity Δ f RemBetween correlation.Three best-fitting straight line AVE and AVE ± 3 σ have been found by least squares method.
2, then, when polarization, the initial setting level set is arrived desired polarity.When target residue polarity was 5KHz, the initial setting level became Δ f=6.4KHz, so the residue polarity of straight line AVE ± 3 σ and Δ f=5KHz intersects.
Here, though straight line AVE ± 3 σ are used to obtain the initial setting level, also available straight line AVE.In this case, the horizontal Δ f of initial setting is 6.5kHz.
3, reach the initial setting level when polarity, in other words, for example, during 6.4kHz, just found the correlation (see figure 5) between each batch current value and the polarity amount of returning.
In Fig. 5, the electric current of horizontal axis representative each batch when polarity reaches the initial setting level, vertical axis is represented the polarity amount of returning.The polarity amount of returning is defined as follows:
The polarity amount of returning=(initial setting level)-(residue polarity Δ f Rem)
In formula, residue polarity Δ f RemAvailable aging back polarity Δ f AgeReplace.
In Fig. 5, the electric current during polarization is represented by x, and the polarity amount of returning is when being represented by y, and of being provided by following formula is approximate:
y＝0.5048x+1.4256
The method of control polarity is explained as follows:
How polarity changed in time when Fig. 6 showed polarization, and Fig. 7 then shows the flow chart of control polarity.
(1) direct voltage is added on the piezoelectric element W that is polarized, (step S1) is when polarization, up to polarity Δ f MidReach the initial setting level, then piezoelectric element W is polarized.(step S2) measures electric current and in high voltage switch circuit 3 when piezoelectric element W is polarized, fall so that the voltage that has calculated presented at protective resistance place calculating voltage and get back on the added voltage.In other words, can control two interelectrode voltages of piezoelectric element W constant all the time by the voltage drop of having calculated being added on the initial institute making alive.
(2) when polarization, when polarity reaches the initial setting level, measure electric current.(step S3) obtains the polarity amount of returning, as shown in Figure 5.(step S4) so described by following formula, expectation remains polarity f Rem(step 5).
Estimate residue polarity Δ f Rem=initial setting level-polarity amount of returning
For example, when the electric current that has measured is 0.3mA, the polarity amount of returning is 1.58kHz, if the initial setting level is 6.4kHz, the residue polarity of expectation will be.
Estimate residue polarity Δ f Rem=6.4-1.58=4.82kHz.
(3) then this is estimated residue polarity Δ f RemWith desired value, 5kHz make comparisons (step S6) for example.When estimating residue polarity Δ f RemReach or when the desired value, then the setting level is remained on the initial setting level, and when polarization, as polarity Δ f MidWhen reaching the initial setting level, remove the direct voltage (step S7) that is added on the piezoelectric element.In addition, remove be added to the voltage of pressing on the element after, according to the bias of desired value, the process that can add is such as contrapolarization or other process roughly the same.
(4) on the other hand, when estimating residue polarity Δ f RemLess than target polarity, the setting level will be upgraded (step S8) by being shown in following formula.The setting level may be updated highly as predetermined value.But if the setting level is updated to the level that is higher than necessity, it may cause reversed polarity Δ f RemDesired value and surplus face polarity Δ f RemPredicted value between poor sum, the process that then setting level is available single is upgraded suitably.
Setting level=initial setting level of having upgraded+(target polarity-expectation residue polarity)
When estimating residue polarity Δ f RemDuring less than predetermined target value, should remove the direct voltage that is added on the piezoelectric element, otherwise residue polarity Δ f RemReach desired value never, therefore, as pre-residue polarity Δ f RemWhen not reaching desired value, just need be when polarization, as polarity Δ f MidWhen reaching the setting level of renewal, new settings level more, and remove the direct voltage that is added on the piezoelectric element.
For example, when initial setting level is 6.4kHz, desired value is 5kHz, and estimates that residue polarity is 4.82kHz, then the setting level is updated to 6.58kHz.
Therefore, residue polarity Δ f RemBe accurately controlled so that reach desired value, here, residue polarity Δ f RemThe meaning be aging and be cooled to normal temperature after a stationary value of polarity after removing the direct voltage that is added on the piezoelectric element.
For the value of the renewal of seeking the setting level is to be not limited in the above-described example, on the other hand also by shown in the following formula.
Desired value+polarity amount of returning of the updating value=polarity of setting level
Therefore, the setting level is updated to greater than the initial setting level according to the increase of the polarity amount of returning, and this increase is caused by change in polarity between criticizing and criticizing.In polarization, polarity Δ f MidThe setting level not necessarily need to upgrade.The needs that upgrade are to estimate residue polarity Δ f by judging RemWhether make less than desired value.Therefore, eliminate unnecessary renewal, made polarization to finish as early as possible.In polarization, as polarity Δ f MidWhen reaching the setting level of having upgraded (step S9), just remove the direct voltage (step S7) that is added on the piezoelectric element.
Fig. 8 A and 8B show that the present invention and prior art make comparisons batch with criticize between change in polarity.In the present invention, owing to the polarity amount of returning inequality that the difference on component between criticizing and criticizing or the roasting mode causes is got back to desired polarity by feedback, and in existing technology, do not provide feedback.
In addition, average (AVE) result relatively of polarity between Fig. 8 A shows and criticizes and criticize, Fig. 8 B then shows in a collection of Semi-polarity (3) result relatively, and in both cases, the initial setting level is all Δ f=6.4kHz.
By Fig. 8 A as seen, between the target polarity chron is got back in the feedback of the polarity amount of returning, criticizing and criticize, remaining polarity Δ f RemMean change not present the variation of getting back to the polarity of wanting than the polarity amount of returning little.In this case, mean change concentrates on the desired value of 5kHz.
By Fig. 8 B as seen, when feedback is provided, every crowd residue polarity Δ f Rem(3 σ) variation is less than the variation that the polarity amount of returning is not presented the situation of getting back to target polarity.
As described above, owing to batch with batch between the difference of material or roasting mode cause the polarity amount of returning inequality to obtain with the measurement electric current when the polarization.Therefore, estimate the residue polarity that when polarization, can not be estimated by polarity and by the feedback of the polarity amount of returning is got back to the polarity of wanting reduce batch and criticize between change in polarity become possibility.
In addition, according to the present invention, when developing the material of piezoelectric element W, be necessary only to two batches of adjustings of finishing control polarity.So, no longer need every batch of having made is done prior test, and it needs, and therefore, is linked to be continuous polarization process as a whole in existing technology.
In the above embodiments, the polarity amount of returning is to obtain with seeking the electric current that has measured, and residue polarity Δ f RemEstimate from the polarity amount of returning.Yet residual polarization is directly estimated from electric current most probably.In this case, the correlation between electric current and residue polarity must be with experiment in prior acquisition.

Claims (6)

1. the method for a polarized piezoelectric element is characterized in that comprising the steps:
Finish the polarization of piezoelectric element by applying direct voltage to piezoelectric element;
When the polarized piezoelectric element, measure polarity Δ f Mid
When polarization, work as the polarity Δ f that measures MidWhen reaching the setting level, measure electric current by piezoelectric element;
Estimate residue polarity Δ f from the electric current that has measured RemWork as polarity Δ f during the polarization MidWhen reaching the setting level of having upgraded, remove the direct voltage that is added on the piezoelectric element.
2. the method for polarized piezoelectric element as claimed in claim 1 is characterized in that also comprising the steps:
When polarization, work as the residual polarization Δ f that estimates RemDuring less than desired value, upgrade polarity Δ f MidThe setting level;
When polarization, as polarization Δ f MidWhen reaching the setting level, remove the voltage that is added on the piezoelectric element, when polarization, work as and estimate residual polarization Δ f RemDuring more than or equal to desired value, do not upgrade polarity Δ f MidThe setting level.
3. the method for polarized piezoelectric element as claimed in claim 1 or 2 is characterized in that utilizing and just removes the polarity before the direct voltage that is added on the piezoelectric element and wear out removing the direct voltage that is added on the piezoelectric element after and the correlation that is cooled to subsequently between the residue polarity of normal temperature obtains the setting level.
4. the method for polarized piezoelectric element as claimed in claim 3 is characterized in that:
By seeking before just removing the direct voltage that is added on the piezoelectric element and residue polarity Δ f RemBetween the best fit data straight line of correlation obtain the setting level, wherein data obtain by many batches of experiments.Best-fitting straight line obtains with known method.
5. as the method for any described polarized piezoelectric element among the claim 1-4, it is characterized in that estimating residue polarity Δ f from the electric current that has measured RemStep also comprise the steps:
Obtain the polarity amount of returning from the electric current that has measured; And
Obtain to remain polarity Δ f from the difference between setting level and the polarity amount of returning Rem
6. as the method for any described polarized piezoelectric element among the claim 1-5, it is characterized in that by the initial setting level with at residue polarity Δ f RemDesired value and residue polarity Δ f RemExpectation between the poor sum updating value that obtains the setting level also be preferable.
CNB011452137A 2000-12-26 2001-12-26 Piezoelectric element polarization method Expired - Lifetime CN1173422C (en)

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CN115508658A (en) * 2022-11-21 2022-12-23 南京霆升医疗科技有限公司 Method and device for automatic polarization analysis of piezoelectric ceramics

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KR20090005631A (en) * 2007-07-09 2009-01-14 삼성전자주식회사 Method of poling piezoelectric actuator
KR101153632B1 (en) * 2010-01-07 2012-07-03 삼성전기주식회사 Poling device of piezoelectric element and poling method using the same

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JP3075033B2 (en) * 1993-09-01 2000-08-07 トヨタ自動車株式会社 Polarization method for piezoelectric ceramics
JP3395679B2 (en) * 1998-12-16 2003-04-14 株式会社村田製作所 Polarization treatment method for piezoelectric body

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115508658A (en) * 2022-11-21 2022-12-23 南京霆升医疗科技有限公司 Method and device for automatic polarization analysis of piezoelectric ceramics
CN115508658B (en) * 2022-11-21 2023-03-14 南京霆升医疗科技有限公司 Method and device for automatic polarization analysis of piezoelectric ceramics

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Granted publication date: 20041027