CN1359733A - Piezoelectrically driven microspray method and apparatus for atomizing administration - Google Patents
Piezoelectrically driven microspray method and apparatus for atomizing administration Download PDFInfo
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- CN1359733A CN1359733A CN 02103609 CN02103609A CN1359733A CN 1359733 A CN1359733 A CN 1359733A CN 02103609 CN02103609 CN 02103609 CN 02103609 A CN02103609 A CN 02103609A CN 1359733 A CN1359733 A CN 1359733A
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- elastic cavity
- cavity mould
- micro
- piezoelectric
- spray
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- 238000000034 method Methods 0.000 title claims abstract description 15
- 239000003814 drug Substances 0.000 claims abstract description 33
- 239000007921 spray Substances 0.000 claims abstract description 29
- 239000007788 liquid Substances 0.000 claims abstract description 14
- 239000000919 ceramic Substances 0.000 claims abstract description 6
- 238000005507 spraying Methods 0.000 claims description 16
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 239000002245 particle Substances 0.000 abstract description 16
- 239000003380 propellant Substances 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 230000002685 pulmonary effect Effects 0.000 description 10
- 238000000889 atomisation Methods 0.000 description 9
- 229940079593 drug Drugs 0.000 description 9
- 229940071648 metered dose inhaler Drugs 0.000 description 7
- 238000010521 absorption reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 210000000214 mouth Anatomy 0.000 description 4
- 210000003800 pharynx Anatomy 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 210000003928 nasal cavity Anatomy 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000443 aerosol Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000013536 elastomeric material Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- LVGUZGTVOIAKKC-UHFFFAOYSA-N 1,1,1,2-tetrafluoroethane Chemical compound FCC(F)(F)F LVGUZGTVOIAKKC-UHFFFAOYSA-N 0.000 description 1
- 208000006545 Chronic Obstructive Pulmonary Disease Diseases 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 208000006673 asthma Diseases 0.000 description 1
- NBMKJKDGKREAPL-DVTGEIKXSA-N beclomethasone Chemical compound C1CC2=CC(=O)C=C[C@]2(C)[C@]2(Cl)[C@@H]1[C@@H]1C[C@H](C)[C@@](C(=O)CO)(O)[C@@]1(C)C[C@@H]2O NBMKJKDGKREAPL-DVTGEIKXSA-N 0.000 description 1
- 229940092705 beclomethasone Drugs 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000012742 biochemical analysis Methods 0.000 description 1
- 210000000621 bronchi Anatomy 0.000 description 1
- 210000003123 bronchiole Anatomy 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000003246 corticosteroid Substances 0.000 description 1
- 229960001334 corticosteroids Drugs 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 208000030603 inherited susceptibility to asthma Diseases 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 210000000867 larynx Anatomy 0.000 description 1
- 210000001331 nose Anatomy 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 208000023504 respiratory system disease Diseases 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 210000003437 trachea Anatomy 0.000 description 1
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Abstract
A method and apparatus for atomizing medicine before it is applied to human body is disclosed. Said apparatus is composed of elastic cavity with micro spray holes, piezoelectric ceramic and liquid feeding tube. Under the action of electric signals, the vibration of said elastic cavity is generated to generate pressure waves, which can extrude liquid medicine out from said spray holes, so atomizing it. Its advantages are no destroy to environment, high size uniform of atomized particles, and high utilization rate of medicine.
Description
Technical field
The invention belongs to medicinal atomized back input intravital method of people and device, little spray method of the Piezoelectric Driving that particularly a kind of atomized medicine introducing is used and device thereof.
Background technology
Fig. 1 is existing medical metered-dose inhaler (Genova; Perry A.Metered dose inhaler agitator.United States Patent, 6116234,2000-09-12), comprise pressure vessel 1, content 2, sleeve 3, quantity control valve 4, spray lance 5, atomizer 6, elastomeric material 7.Be full of content 2 in the pressure vessel 1 in advance, content 2 comprises liquid drug, additives and the liquid propellant that has added high pressure (being higher than atmospheric pressure).Pressure vessel 1 can move up and down in sleeve 3.During dispenser, push pressure vessel 1 with hands downward (shown in arrow among Fig. 1), spray lance 5 can not move relative to sleeve 3 with atomizer 6, pressure vessel 1 moves down in sleeve 3, spray lance 5 is opened quantity control valve 4, under high pressure liquid propellant sprays from atomizer, and gasification rapidly, liquid drug sprays rapidly from atomizer under the effect of pressure and propellant, atomizing forms small vaporific drop, and atomization particle arrives at certain site of action through telescopic guide effect and realizes that medicine is applied to when patient breathes synchronously.When hands was not pressed pressure vessel downwards, the elastic-restoring force of elastomeric material 7 moved up pressure vessel 1, closes quantity control valve 4 simultaneously, finished primary atomization spray medicine.
Studies show that the above droplet of diameter 100 μ m is stranded in nose, the above droplet of diameter 60 μ m deposits at pharynx, larynx and trachea, and the droplet of diameter 20~60 μ m deposits in bronchus, and the droplet of diameter 3~20 μ m deposits at bronchioles.In general, the droplet of 1~12 μ m pulmonary that relatively is suitable for atomizing sucks treatment, and especially the droplet of 1~5 μ m is suitable for pulmonary most and sucks treatment.For the aerosolizer of existing quantitative constant-pressure type, because the influence of factors such as ambient temperature and propellant concentration, propellant can not be gasified fully, and the atomizing of medicinal liquid is also incomplete; The adiabatic expansion of propellant can be cooled off atomization particle and make droplet condense into big droplet in addition, therefore the atomization particle diameter of metered-dose inhaler is bigger at present, be generally 20~50 μ m, big like this droplet is difficult to arrive pulmonary, is unfavorable for the inhalation (Sperry of pulmonary; Charles R.Inhalation device.UnitedStates Patent, 4852561,1989-08-01).The droplet speed of metered-dose inhaler is general bigger, and the droplet ratio that speed is big is easier to strike the oral cavity, is difficult to arrive pulmonary, also is unfavorable for pulmonary's inhalation.In addition, metered-dose inhaler atomization particle diameter Distribution is concentrated inadequately at present, make that the drug dose utilization rate of atomized medicine introducing is low, this not only causes a large amount of wastes of medicine, and owing to particle size distribution is relatively disperseed, make drug particle can not arrive at correct drug absorption position, also can bring some side effect.
Propellant in the early stage metered-dose inhaler is a freon, and freon has good physicochemical property, use as ideal propellant, but freon is to cause the ruined main cause of atmospheric ozone layer always.In order to eliminate the harm because of using freon to bring for the mankind and ecological environment thereof, 1987,27 states signed treaty in Montreal and require forbidding freon comprehensively in 2003.So pharmacy worker begins to seek new approaches and methods.Its main path has: the one, seek the freon succedaneum as new propellant, as what be used for the treatment of bronchial asthma and chronic obstructive pulmonary disease is the corticosteroids metered dose inhalation aerosol of representative with Beclomethasone, just use HFC-134a short chain alkanes replacement fluorine Lyons as propellant (the Zhang Jun longevity, fourth is upright, You Yizhong, the non-freon medicinal aerosol of treatment respiratory system disease, Chinese patent application publication number, CN 1296814 A); Another solution route is to seek new atomized medicine introducing device, does not use propellant in use.
Summary of the invention
For solving the problem that existing medical atomized medicine introducing device exists, except considering that doser should be lightly reliable, simple to operation, atomization particle diameter and initial velocity size to fit, distribute that to concentrate and need not to use propellant also be crucial.For this reason, the present invention will be based on MEMS (micromachine electronic system) technology, comprehensive current single hole and the miniature spray present Research of little array porous and be applied to the successful experience of numerous areas such as biochemical analysis, inkjet printing, little propelling, development can be widely used in oral cavity, nasal cavity, throat and pulmonary, and to suck atomized medicine introducing be target and array micro spray and the system thereof that need not to use propellant.
The present invention relates to the little spray method of Piezoelectric Driving that a kind of atomized medicine introducing is used, it is characterized in that: this method utilizes Piezoelectric Driving to have the elastic cavity mould atomized medicine introducing of micro-spraying hole.The Piezoelectric Driving micro-spray device that uses a kind of atomized medicine introducing of said method to use is characterized in that: this device comprises two piezoelectric signal inputs that one side has the elastic cavity mould of micro-spraying hole, is installed in the piezoelectric ceramic piece of elastic cavity mould another side, links to each other with the elastic cavity mould and the feed pipe of liquid is provided, is connected with the elastic cavity mould with piezoelectric ceramic piece for the elasticity die cavity.In said apparatus, described elastic cavity mould can be processed into by monocrystalline silicon piece, and the elastic cavity mould also can be made up of left and right two monocrystalline silicon pieces processing.
Driving type piezoelectric actuator array micro spray device of the present invention is a kind of novel atomized medicine introducing device, and this device does not contain propellant such as freon, brings harm can not for the mankind and ecological environment; Do not need pressure vessel; Do not need to add high pressure to liquid medicine yet.
The present invention can adopt the micro-spraying hole of different-diameter size to make array micro spray produce different big or small atomized particles, so that atomized particles helps the absorption of patient's different parts.The atomization particle diameter Distribution is more concentrated, and drug particle can arrive at correct drug absorption position to greatest extent, can improve the utilization rate of the drug dose of atomized medicine introducing, and this is quite important for some costly medicine, and can reduce some side effect.In addition can be by changing the initial velocity that driving voltage change the atomized particles that array micro spray produces, make the droplet of its generation be suitable for the absorption at various positions.This invention has solved problems such as the bigger than normal and dispersion that distributes of existing medical atomized medicine introducing device atomization particle diameter substantially, can reach clinical practice.
Description of drawings
Fig. 1: be existing medical metered-dose inhaler.
Fig. 2: the front view that is array micro spray apparatus of the present invention.
Fig. 3: the right view that is array micro spray apparatus of the present invention.
Fig. 4: the A-A cutaway view that is Fig. 2.
Fig. 5: the processing process figure that is micro-spraying hole array of the present invention.
The specific embodiment
The present invention is according to application requirements and correlational study achievement, based on Piezoelectric Driving ink-jet printer its working principles, utilize MEMS (micromachine electronic system) technology, developed the driving type piezoelectric actuator atomized medicine introducing array micro spray apparatus shown in Fig. 2,3,4.In the device shown in Figure 2, the elastic cavity mould is made up of left and right two elastic cavity moulds, wherein 8 represent left elastic cavity mould silicon chip, 9 represent the circular piezoelectric potsherd, the right elastic cavity mould silicon chip of 10 representatives, the round micro-spraying hole that 11 representatives process at right elastic cavity mould silicon chip 10,12 is the elasticity die cavity that left elastic cavity mould silicon chip 8 and right elastic cavity mould silicon chip 10 form, 13 is feed pipe, and 14 is contact conductor.According to the mini spray medicine-feeding part is the difference of oral cavity, nasal cavity, throat or pulmonary, and the diameter of micro-spraying hole is controlled at the different intervals between 3~30 μ m, and more than 600 micro-spraying hole distributing on the spray orifice face of right elastic cavity mould.Simultaneously, form piezoelectric transducer by left elastic cavity mould silicon chip 8 with piezoelectric ceramic piece 9.Drug solution imports elasticity die cavity 12 through feed liquid pipeline 13, realizes that the medicinal liquid of miniature spray is supplied with.
During dispenser, the contact conductor 14 of piezoelectric transducer connects the ultrasonic emitting machine, under the signal of telecommunication drives, piezoelectric transducer produces bending vibration and converts electric energy to mechanical energy on its resonance point, the pressure wave that left side elastic cavity mould silicon chip 8 surface vibrations form is extruded the formation atomized drop with the liquid in the elasticity die cavity 12 from micro-spraying hole 11, thereby reaches the purpose of atomized medicine introducing.
The processing of right elastic cavity mould silicon chip micro-spraying hole array is adopted the silicon fine process based on the MEMS technology, and Fig. 5 is the work flow sketch of micro-spraying hole array.14 is monocrystal silicon among the figure, and 15 is silicon dioxide, and 16 is silicon nitride.Technological process is: (1) two-sided growth SiO
2Two-sided deposit Si
3N
4(2) upper surface photoetching, etching Si
3N
4And SiO
2(3) anisotropic etch monocrystal silicon upper surface; (4) lower surface photoetching, etching Si
3N
4And SiO
2(5) ICP etching single crystal silicon forms micro-spraying hole.
Adopt the array micro spray of different micro-spraying hole diameters can produce different big or small atomized particles, the array micro spray is suitable for different parts dispensers such as patient's mouth, nasal cavity, throat or pulmonarys.To the micro-spraying hole diameter is that the array micro spray of 10 μ m is tested, and the diameter that 80% atomization particle is arranged is between 1~12 μ m; Adopting the micro-spraying hole diameter is that 5 μ m array micro sprays also obtain good diameter Distribution, and the droplet of its generation is more suitable for absorbing in pulmonary.
Claims (4)
1, the little spray method of Piezoelectric Driving used of a kind of atomized medicine introducing is characterized in that this method is to drive the vibration of elastic cavity mould by the signal of telecommunication, and the pressure wave of formation is extruded liquid and formed the atomized drop administration from micro-spraying hole.
2, the Piezoelectric Driving micro-spray device used of a kind of atomized medicine introducing is characterized in that: two piezoelectric signal inputs that this device comprises the elastic cavity mould that one side has micro-spraying hole, the piezoelectric ceramic piece that is installed in elastic cavity mould another side, link to each other with the elastic cavity mould and the feed pipe of liquid is provided, is connected with the elastic cavity mould with piezoelectric ceramic piece for the elasticity die cavity.
3, according to the described device of claim 2, it is characterized in that: described elastic cavity mould is processed into by monocrystalline silicon piece.
4, according to claim 2 or 3 described devices, it is characterized in that: described elastic cavity mould is to be processed by left and right two monocrystalline silicon pieces.
Priority Applications (1)
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CN 02103609 CN1359733A (en) | 2002-01-29 | 2002-01-29 | Piezoelectrically driven microspray method and apparatus for atomizing administration |
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CN 02103609 CN1359733A (en) | 2002-01-29 | 2002-01-29 | Piezoelectrically driven microspray method and apparatus for atomizing administration |
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Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006116915A1 (en) * | 2005-05-02 | 2006-11-09 | Hong Kong Piezo Co. Ltd. | Piezoelectric fluid atomizer apparatuses and methods |
CN1317815C (en) * | 2004-03-18 | 2007-05-23 | 清华大学 | Mini piezoelectric drive for MEMS |
CN101008652B (en) * | 2006-12-22 | 2010-05-26 | 北京航空航天大学 | Particle enrichment transmission device |
CN101791602A (en) * | 2010-03-11 | 2010-08-04 | 清华大学 | Instant heat ultrasonic micro-spray device |
CN1896744B (en) * | 2005-07-14 | 2012-06-06 | 中国科学院电子学研究所 | Non-contacting micro-sampling head |
CN105311718A (en) * | 2014-08-01 | 2016-02-10 | 心诚镁行动医电股份有限公司 | Portable ultrasonic atomizer and atomizing structure thereof |
CN105942585A (en) * | 2016-07-19 | 2016-09-21 | 云南中烟工业有限责任公司 | Electronic cigarette based on MEMS atomization chip |
CN105962424A (en) * | 2016-07-19 | 2016-09-28 | 云南中烟工业有限责任公司 | MEMS atomization chip for electronic cigarette |
CN107041985A (en) * | 2017-04-20 | 2017-08-15 | 成都倍瑞科技有限公司 | A kind of hand-held artificial intelligence atomizer |
CN108185526A (en) * | 2018-01-03 | 2018-06-22 | 云南中烟工业有限责任公司 | The MEMS euthermic chips and its manufacturing method of a kind of integrated diode temperature sensor |
CN109674576A (en) * | 2017-10-19 | 2019-04-26 | 深圳市启明医药科技有限公司 | Fluid supply unit and fine liquid drop spray driving device, generating device |
WO2019218312A1 (en) * | 2018-05-17 | 2019-11-21 | Fontem Holdings 1 B.V. | Atomization system for electronic cigarette |
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2002
- 2002-01-29 CN CN 02103609 patent/CN1359733A/en active Pending
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1317815C (en) * | 2004-03-18 | 2007-05-23 | 清华大学 | Mini piezoelectric drive for MEMS |
US7954730B2 (en) | 2005-05-02 | 2011-06-07 | Hong Kong Piezo Co. Ltd. | Piezoelectric fluid atomizer apparatuses and methods |
GB2440891A (en) * | 2005-05-02 | 2008-02-13 | Hong Kong Piezo Co Ltd | Piezoelectric fluid atomizer apparatuses and methods |
GB2440891B (en) * | 2005-05-02 | 2009-11-18 | Hong Kong Piezo Co Ltd | Piezoelectric fluid atomizer apparatuses and methods |
WO2006116915A1 (en) * | 2005-05-02 | 2006-11-09 | Hong Kong Piezo Co. Ltd. | Piezoelectric fluid atomizer apparatuses and methods |
CN101282792B (en) * | 2005-05-02 | 2011-05-18 | 香港功能陶瓷有限公司 | Piezoelectric fluid atomizer apparatuses and methods |
CN1896744B (en) * | 2005-07-14 | 2012-06-06 | 中国科学院电子学研究所 | Non-contacting micro-sampling head |
CN101008652B (en) * | 2006-12-22 | 2010-05-26 | 北京航空航天大学 | Particle enrichment transmission device |
CN101791602A (en) * | 2010-03-11 | 2010-08-04 | 清华大学 | Instant heat ultrasonic micro-spray device |
CN105311718A (en) * | 2014-08-01 | 2016-02-10 | 心诚镁行动医电股份有限公司 | Portable ultrasonic atomizer and atomizing structure thereof |
CN105311718B (en) * | 2014-08-01 | 2019-01-18 | 心诚镁行动医电股份有限公司 | Portable ultrasonic atomizer and its atomization structure |
CN105942585A (en) * | 2016-07-19 | 2016-09-21 | 云南中烟工业有限责任公司 | Electronic cigarette based on MEMS atomization chip |
CN105962424A (en) * | 2016-07-19 | 2016-09-28 | 云南中烟工业有限责任公司 | MEMS atomization chip for electronic cigarette |
CN107041985A (en) * | 2017-04-20 | 2017-08-15 | 成都倍瑞科技有限公司 | A kind of hand-held artificial intelligence atomizer |
CN109674576A (en) * | 2017-10-19 | 2019-04-26 | 深圳市启明医药科技有限公司 | Fluid supply unit and fine liquid drop spray driving device, generating device |
CN109674576B (en) * | 2017-10-19 | 2024-02-27 | 深圳市启明医药科技有限公司 | Fluid supply unit, micro-droplet ejection driving device, and generation device |
CN108185526A (en) * | 2018-01-03 | 2018-06-22 | 云南中烟工业有限责任公司 | The MEMS euthermic chips and its manufacturing method of a kind of integrated diode temperature sensor |
CN108185526B (en) * | 2018-01-03 | 2023-09-01 | 云南中烟工业有限责任公司 | MEMS heating chip integrated with diode temperature sensor and manufacturing method thereof |
WO2019218312A1 (en) * | 2018-05-17 | 2019-11-21 | Fontem Holdings 1 B.V. | Atomization system for electronic cigarette |
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