CN1358987A - Single scaling second-order monoemitting autocorrelation measurer - Google Patents
Single scaling second-order monoemitting autocorrelation measurer Download PDFInfo
- Publication number
- CN1358987A CN1358987A CN 01132361 CN01132361A CN1358987A CN 1358987 A CN1358987 A CN 1358987A CN 01132361 CN01132361 CN 01132361 CN 01132361 A CN01132361 A CN 01132361A CN 1358987 A CN1358987 A CN 1358987A
- Authority
- CN
- China
- Prior art keywords
- pulse
- frequency
- order
- beam splitter
- reflecting surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The laser pulse to be tested is passed through beam splitter and separated into two beams, one beam is passed through first total reflector and second total reflector, and fed into double frequency crystal, another beam is passed through an echelon reflection face angle reflector and third total reflector and fed into double frequency crystal. The laser pulse outputted on the detection element connected with computer. Said invention can implement one-dimensional space resolved simple second-order related measurement, and utilize one pulse signal and one measurement to can simultaneously scale and collest dwo-D plane information.
Description
Technical field:
The invention relates to a kind of can single the second order single-shot autocorrelation measurer of calibration, (one dimension is a pulse autocorrelation function time width can to measure two-dimensional signal simultaneously, one dimension is the distribution spatially of this width), and utilize this characteristic to realize single calibration, be used for before the single measurement of ultra-short pulse laser of femtosecond～psec and this laser wave pulse width information of diverse location and measure.
Background technology:
Along with the development of ultra-short pulse laser, the measurement of ultrashort laser pulse becomes a kind of measurement measure of frequent use.When wherein the pulse after amplifying being measured, owing to amplify pulsion phase for the oscillator stage pulse, pulse strength and pulsewidth fluctuation are bigger, so use second order single-shot autocorrelation measurer usually.Formerly the structure of second order single-shot autocorrelation measurer is as shown in Figure 1 in the technology:
It mainly comprises: LASER Light Source emitted laser Shu Shouxian is used to intercept a part of wavefront by aperture 1; Be divided into two-beam through beam splitter 2 again, a branch of process is fixed on the corner cube mirror 5 on thousand fens translation stages of one dimension, pass through completely reflecting mirror 4 again to frequency-doubling crystal 6, another Shu Guang through two completely reflecting mirrors 10,3 to frequency-doubling crystal 6, laser beam by frequency-doubling crystal 6 outputs is passed through post lens 7 again, and linear array charge-coupled device (CCD) 9 enters oscillograph 10 and shows.Divide two-way (10 → 3 → 6 after 2 beam splitting of light process beam splitter, 5 → 4 → 6) enter frequency-doubling crystal 6, if two-way equivalent optical path and hot spot overlap on frequency-doubling crystal 6 surfaces, then can in frequency-doubling crystal 6, form relevant frequency-doubled signal, flashlight is propagated along the angular bisector of two incident lights.If the wavefront intensity distributions of incident light is even, then the distribution of second order related function is represented in the distribution of signal x direction in Fig. 1, gathers and be input to oscillograph 8 by linear array charge-coupled device (CCD) 9 after 7 imagings of post lens.Record this deration of signal and calibrate by oscillograph 8, get final product the width of second order related function, can instead push away thus laser pulse width information (referring to technology [1] F.Salin formerly, P.Georges, G.Roger, and A.Brun, " Single-shot measurement of a 52-fs pulse ", Applied Optics Vol, 26, No.21,4528～4531 (1987)).
In order to show on the oscillograph 8 that pulse width is for conversion into the time width of second order autocorrelation function, must calibrate.The method of calibration is to move forward and backward corner reflector 5, and then the position of flashlight can change, and is reflected on the oscillograph, and the maximal value that is exactly waveform is moved.If the waveform width is τ on the oscillograph, corner reflector 5 displacements are Δ x, signal maximum has moved Δ t on oscillograph 8, then the width of this second order autocorrelation function is T=2 (Δ x/c) τ/Δ t, (c is the light velocity) pulse width is T/ α, α is called form factor, needs hypothesis pulse shape to calculate the α factor then.(seeing also formerly technology [2] Wang Yi people Lee about calibration, the computing formula derivation detailed process of second order single-shot autocorrelation measurer passes eastern Han Shen and gives birth to " single measurement of femtosecond amplifying laser pulse " that Zhang Zhengquan Xu provides to inventors such as exhibitions, " Chinese laser ", Vo.25, No.2,132～134 (1998)).
Ultrashort pulse generally has the frequency band of super wide spectrum.Such pulse is when spatial transmission, because the wavelength of free space diffraction relies on, the pattern scale effect (frequency-dependent mode size) that the meeting frequency of occurrences relies on, this effect will cause that parameters such as laser corrugated polishing wax, position phase and burst length shape are in horizontal distribution.Through the ultrashort pulse of broadening, multistage amplification and compression, the parameters on its corrugated distributes then more complicated.Measure and analyze this effect and will help that quantitative test is ultrashort, the various physical phenomenons when the super broad pulse of frequency band is propagated in space and medium, have very important significance.This measurement pulse characteristic just needs the measuring system of spatial discrimination in space distribution.The someone utilizes more complicated instrument (SPIDER) this to be done measurement and (sees technology [3] L.Gallmann formerly for details, G.Steinmeyer, D.H.Sutter, and T.Rupp, " Spatially resolved amplitudeand phase characterization of femtosecond optical pulses ", Optics Letters, Vol.26, No.2,96～98 (2001)).In fact, the frequency-doubled signal that the frequency-doubling crystal of second order single-shot autocorrelation measurer provides is the length and width both direction, what provide at Width (x direction) is the intensity distributions of the second order related function of this point, has provided the intensity distributions of the related function of difference simultaneously in the direction of the vertical x of frequency-doubled signal.When adopting traditional usefulness linear array charge-coupled device (CCD) detection and showing with oscillograph, one-shot measurement can only be measured the width of coherent signal on one point, can't accomplish spatial discrimination, like this, represented the pulsewidth on whole corrugated with the pulsewidth of a bit, obviously be irrational, this be formerly technology with the significant deficiency of traditional second order single autocorrelation measurement.
In addition, formerly the second order single-shot is autocorrelative in the technology, measuring instrument generally adopts the linear array charge-coupled device (CCD) as detecting element, the electric signal that frequency-doubled signal is converted into the output of linear array charge-coupled device (CCD) in the intensity distributions of x direction in time distribution and show by oscillograph.Like this, flashlight converts pulse waveform in the electric signal to relative to the moving of the synchronizing signal of linear array charge-coupled device (CCD) x direction mobile, so require during calibration the linear array charge-coupled device (CCD) that the triggering oscillograph that synchronizing signal can be correct is arranged.In practical operation, often have can not synchronous triggering or trigger after the problem that can not lock.Simultaneously, the each measurement must be calibrated in advance, just need take multiple measurements calibration.The path difference of two-beam is read by the microspindle scale that promotion corner reflector 5 moves forward and backward during calibration, general minimum scale only can reach 10 μ m, and reading error is 5 μ m, and measures for femtosecond pulse, microspindle moves forward and backward displacement only can be at tens of microns (μ m), and relative error is very big.Though be averaged the calibration data and can reduce reading error to a certain extent by repeatedly measuring, but repeatedly measurement can face the reciprocal error of microspindle, simultaneously, for chirped pulse amplification system, the energy, pulsewidth, the waveform that amplify pulse all can have fluctuation (general repeatability index is 5%), bring more error will certainly for repeatedly calibration.
Secondly,, must adopt advanced digital oscilloscope for accurate survey measurements, even and also can only obtain the shape, width etc. of pulse like this, and can not obtain more specific numerical information, can't carry out match accurately and analysis to correlation curve.
Summary of the invention:
The invention provides a kind of second order single-shot autocorrelation measurer of have living space resolution and the calibration of energy single, can in single measurement, calibrate voluntarily, and can carry out the single pulse width measure that the one-dimensional space is differentiated.
Single scaling second-order monoemitting autocorrelation measurer of the present invention comprises measured laser pulse G
0At first incide on the beam splitter 2 through aperture 1.Through beam splitter 2 the measured laser pulse is divided into two bundle G
f, G
t, wherein a branch of is by beam splitter 2 beam reflected G
fBe mapped on the frequency-doubling crystal 6 through first completely reflecting mirror 10 and second completely reflecting mirror 3; Another bundle is the light beam G by beam splitter 2 transmissions
tBe mapped on the frequency-doubling crystal 6 through ladder reflection face angle catoptron 11 and the 3rd completely reflecting mirror 4.Laser beam by frequency-doubling crystal 6 outputs is injected on the detecting element 13 of two dimension after leaning on lens 7, and the output of detecting element 13 is connected on the computing machine 12.As shown in Figure 2.
An interior angle reflecting surface of said ladder reflection face angle catoptron 11 is constituted by high reflecting surface 1103 that a step is arranged and low reflecting surface 1101, and another side interior angle reflecting surface is a plane reflection face 1102.As shown in Figure 3.
Said detecting element 13 is two-dimensional video charge-coupled device (CCD)s.
As above-mentioned structure, after the measured laser pulse is through aperture 1 limit bundle, be divided into two bundles through beam splitter 2 again, behind first, second completely reflecting mirror 10,3 of a branch of process, be mapped on the frequency-doubling crystal 6; Behind another bundle process ladder reflection face angle catoptron 11 and the 3rd completely reflecting mirror 4, also be mapped on the frequency-doubling crystal 6.Two beam splitting measured laser pulses reach on the frequency-doubling crystal 6 when equivalent optical path simultaneously, and two beam splitting laser pulses produce coherent signal on frequency-doubling crystal 6.Because the two beam splitting laser pulses that produce interference are all by the beam splitting of measured laser pulse own, so be called from relevant.The coherent signal that produces on frequency-doubling crystal 6 is passed through frequency-doubling crystal 6 frequencys multiplication again, and the relevant frequency-doubled signal of output is input to through two-dimentional detecting element 13 and carries out data processing in the computing machine 12.
An above-mentioned beam splitting measured laser pulse through ladder reflection face angle catoptron 11, because an interior angle reflecting surface of ladder reflection face angle catoptron 11 is ladder reflectings surface that a step is arranged, this just makes this beam splitting measured laser pulse be divided into the two measured laser pulses of restrainting on the priority arrival frequency-doubling crystal 6 that optical path difference Δ L ≠ 0 is arranged again, the a branch of interference signal that arrives earlier for measuring, a branch of interference signal that the back arrives for calibration.As long as just can measure simultaneously and calibrate so measuring instrument of the present invention is got a measured laser pulse.
Aforesaid the present invention is in order to be implemented in single calibration in the measurement, and corner reflector of the present invention is the ladder reflection face angle catoptron 11 that an interior angle reflecting surface is the ladder reflecting surface.As shown in Figure 3, ladder reflection face angle catoptron 11 1 interior angle reflectings surface become to the reflecting surface of a ladder is arranged, and the height of ladder is δ l (when pulse width was tens of femtosecond magnitude, this ladder height can be peeked ten～100 microns).Light beam has a ladder when this ladder reflection face angle catoptron 11 between high reflecting surface 1103 and the low reflecting surface 1101, introduce an optical path difference between these two parts, the displacement of will staggering of this two parts second order auto-correlation strength signal.This displacement is determined by the path difference between two parts.
The incident angle that light beam is injected ladder reflection face angle catoptron 11 is generally 45 degree, as shown in Figure 4.So, the path difference between two parts light is:
If the displacement of staggering in the image that two parts second order auto-correlation strength signal shows on computing machine 12 is a N screen point up and down, and the autocorrelation function width that shows on the computing machine is n point (these two number averages can be read on computers), and then the time width of Dui Ying second order autocorrelation function is
T＝n/N·ΔL/c
So, the shape that the present invention has realized brand-new two dimensional image and two dimensional image mutually, realized the single second order measurement of correlation that the one-dimensional space is differentiated, and make full use of this spatial resolving power, only need single measurement, time width information, this width that just can realize obtaining simultaneously to calibrate parameter, second order related function are the one-dimensional space distributed intelligence in vertical x direction.
The present invention compares with technology formerly, and the present invention has realized:
1. the present invention's information that just can calibrate and gather bidimensional simultaneously by the single measurement of a pulse has realized the single pulse width measure that the one-dimensional space is differentiated.Compare with technology formerly, the present invention just can gather two-dimensional plane information simultaneously to the one-shot measurement of a pulse, promptly x direction one dimension being analyzed is exactly traditional resulting related function intensity curve of second order single-shot autocorrelation measurer in the technology formerly, can obtain the related function intensity curve of diverse location simultaneously in vertical x direction, obtain the one-dimensional space and differentiate information, the propagation of analyzing pulse characteristic, understanding ultrashort pulse is had important Practical significance.
2. based on one-dimensional space resolution characteristic of the present invention,, introduce fixing optical path difference, be implemented in and finish calibration and pulse width measure in the single operation simultaneously by ladder reflection face angle catoptron 11 of the present invention.Because this optical path difference is by the machining decision of fixing ladder reflecting surface 1101 and 1103, can accurately control to 1 μ m, avoided moving back and forth in the technology formerly the sum of errors reading error of thousand fens bars, the influence of pulse ripple has also been eliminated in the operation of single pulse, feasible calibration is more simple easily, and it is more accurate to measure.A pulse signal records needed information data accurately simultaneously, and this is the marked improvement that the present invention had that formerly can't compare in the technology.
3. the distributed intelligence that records by measuring instrument of the present invention is the strength values information of pointwise, more complete sum is accurate than the shape information that shows on the oscillograph in the technology formerly, curve that like this can pair correlation function carries out accurate match and analysis, thereby obtain related function information more accurately, so can obtain the information of more accurate pulse shape and width.All information all show by two-dimensional image and are analyzed by computing machine, realize storing, exporting, print accurate data.
4. two-dimentional ordinary video CCD of the present invention, capture card, computing machine all are the commodity of more commonization, and the linear array charge-coupled device (CCD) that cost and ease for use are lower than in the technology formerly adds digital oscillograph.
In a word, the present invention realized can spatial discrimination the single ultrashort pulse measure, can finish accurate calibration and pulsewidth parameter measurement simultaneously, obtain femtosecond pulse width this important information of distribution and become possibility a pulse signal, realize measurement more simple, the parameter of single ultrashort pulse more accurately simultaneously on the laser corrugated.
Description of drawings:
Fig. 1 is the structural representation of technology second order single-shot autocorrelation measurer formerly
Fig. 2 is the structural representation of measuring instrument of the present invention
Fig. 3 is the structural representation of ladder reflection face angle catoptron 11 used in the measuring instrument of the present invention, Fig. 3-the 1st wherein, the interior angle front elevational schematic of ladder reflection face angle catoptron 11, Fig. 3-the 2nd, the synoptic diagram of the ladder reflecting surface of ladder reflection face angle catoptron 11.
Fig. 4 is the optical path difference synoptic diagram that ladder reflection face angle catoptron 11 is introduced
Embodiment:
According to the above, to arrange according to light path and the optical element of Fig. 2, the interior angle of ladder reflection face angle catoptron 11 is 90 °, the ladder height δ l=0.1mm between high reflecting surface 1103 of ladder reflecting surface and the low reflecting surface 1101, aperture 1 is of a size of 5mm.
With the pulsewidth after measuring instrument measurement high light optical laboratory's 5 terawatt (TW) femtosecond laser devices upgrading of the present invention, measured laser pulse gross energy is 10mJ, it is that 5mm measures that aperture 1 has been chosen the spot center diameter, obtain minimum second order related function halfwidth T=54.3fs, for the gaussian shape pulse, being equivalent to the pulse halfwidth is 37.7fs, and for a square hyperbolic secant shape pulse, being equivalent to the pulse halfwidth is 35fs.
At the xsect of the hot spot of measured laser pulse, the distribution of measurement result, the numerical value of T is between 54.3～60.
What frequency-doubling crystal 6 adopted is barium metaborate (BBO) crystal.
Claims (2)
1. a single scaling second-order monoemitting autocorrelation measurer comprises measured laser pulse (G
0) at first pass through aperture (1) and be mapped on the beam splitter (2), through beam splitter (2) the measured laser pulse is divided into two bundle (G
f, G
t), a branch of is by beam splitter (2) beam reflected (G
f) be mapped on the frequency-doubling crystal (6) through first completely reflecting mirror (10) and second completely reflecting mirror (3), another bundle is the light beam (G by beam splitter (2) transmission
t) be mapped on the frequency-doubling crystal (6) through the 3rd completely reflecting mirror (4), inject on the detecting element (13) behind the laser beam process post lens (7) by frequency-doubling crystal (6) output, it is characterized in that the folded light beam (G between beam splitter (2) and the 3rd completely reflecting mirror (4)
t) light path on be equipped with ladder reflection face angle catoptron (11), the output of two-dimensional detection element (13) is connected on the computing machine (12).
2. single scaling second-order monoemitting autocorrelation measurer according to claim 1, an interior angle reflecting surface that it is characterized in that said ladder reflection face angle catoptron (11) is constituted by high reflecting surface (1103) that a step is arranged and low reflecting surface (1101), and another side interior angle reflecting surface is plane reflection face (1102).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011323612A CN1162689C (en) | 2001-11-30 | 2001-11-30 | Single scaling second-order monoemitting autocorrelation measurer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011323612A CN1162689C (en) | 2001-11-30 | 2001-11-30 | Single scaling second-order monoemitting autocorrelation measurer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1358987A true CN1358987A (en) | 2002-07-17 |
| CN1162689C CN1162689C (en) | 2004-08-18 |
Family
ID=4671389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB011323612A Expired - Fee Related CN1162689C (en) | 2001-11-30 | 2001-11-30 | Single scaling second-order monoemitting autocorrelation measurer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1162689C (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103278249A (en) * | 2013-05-15 | 2013-09-04 | 中国科学院上海光学精密机械研究所 | Quasi-near field picosecond pulse width diagnosis instrument |
| CN103900724A (en) * | 2014-03-27 | 2014-07-02 | 中国科学院上海光学精密机械研究所 | Precise calibrating method used for time resolution of single correlation measuring instrument |
| CN104596652A (en) * | 2015-01-04 | 2015-05-06 | 中国科学院上海光学精密机械研究所 | Time-resolution-adjustable ultra-short pulse pulse-width measurer |
| CN104880258A (en) * | 2015-06-04 | 2015-09-02 | 中国科学院上海光学精密机械研究所 | Device and method for measuring near-field correlation pulse width of ultrashort optical pulses |
| CN107436197A (en) * | 2017-06-17 | 2017-12-05 | 河南省启封新源光电科技有限公司 | Big bandwidth, the autocorrelation function analyzer of microminiature single-shot automatic measurement femtosecond laser pulsewidth |
| CN107727249A (en) * | 2017-09-04 | 2018-02-23 | 中国科学院上海光学精密机械研究所 | The single-shot measurement apparatus and measuring method of ultra-intense ultra-short laser pulse far field pulsewidth |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101699233B (en) * | 2009-09-08 | 2011-01-26 | 中国科学院上海光学精密机械研究所 | Device for measuring width of single picosecond laser pulse |
-
2001
- 2001-11-30 CN CNB011323612A patent/CN1162689C/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103278249A (en) * | 2013-05-15 | 2013-09-04 | 中国科学院上海光学精密机械研究所 | Quasi-near field picosecond pulse width diagnosis instrument |
| CN103900724A (en) * | 2014-03-27 | 2014-07-02 | 中国科学院上海光学精密机械研究所 | Precise calibrating method used for time resolution of single correlation measuring instrument |
| CN103900724B (en) * | 2014-03-27 | 2017-02-01 | 中国科学院上海光学精密机械研究所 | Precise calibrating method used for time resolution of single correlation measuring instrument |
| CN104596652A (en) * | 2015-01-04 | 2015-05-06 | 中国科学院上海光学精密机械研究所 | Time-resolution-adjustable ultra-short pulse pulse-width measurer |
| CN104596652B (en) * | 2015-01-04 | 2017-11-10 | 中国科学院上海光学精密机械研究所 | A kind of adjustable ultrashort pulse instrument for measuring the optical pulse of temporal resolution |
| CN104880258A (en) * | 2015-06-04 | 2015-09-02 | 中国科学院上海光学精密机械研究所 | Device and method for measuring near-field correlation pulse width of ultrashort optical pulses |
| CN104880258B (en) * | 2015-06-04 | 2018-01-12 | 中国科学院上海光学精密机械研究所 | Ultrashort light pulse near field associates pulse width measure device and measuring method |
| CN107436197A (en) * | 2017-06-17 | 2017-12-05 | 河南省启封新源光电科技有限公司 | Big bandwidth, the autocorrelation function analyzer of microminiature single-shot automatic measurement femtosecond laser pulsewidth |
| CN107727249A (en) * | 2017-09-04 | 2018-02-23 | 中国科学院上海光学精密机械研究所 | The single-shot measurement apparatus and measuring method of ultra-intense ultra-short laser pulse far field pulsewidth |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1162689C (en) | 2004-08-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102169050B (en) | Method for comprehensively measuring reflectivity | |
| US6940600B1 (en) | Apparatus and method for measuring decay in intensity of electromagnetic radiation in multipass spectrometry | |
| CN110057543B (en) | Wave surface measuring device based on coaxial interference | |
| CN108827471B (en) | Diffraction element, high-resolution spectrometer and spectrum detection method | |
| CN111522018B (en) | Double-femtosecond laser frequency comb distance measuring device and method | |
| CN101750154B (en) | Detecting device for laser noise-signal ratio | |
| CN2515663Y (en) | Optical pulse information measurer capable of measuring and calibrating at same time | |
| CN1162689C (en) | Single scaling second-order monoemitting autocorrelation measurer | |
| CN108254088A (en) | A wide range of Ps Laser Pulse width of measuring device | |
| CN105333815A (en) | Super lateral resolution surface three-dimensional online interference measuring system based on spectral dispersion line scanning | |
| CN104880258B (en) | Ultrashort light pulse near field associates pulse width measure device and measuring method | |
| CN103644859A (en) | Device and method used for measuring deformation of diamond anvil under high temperature high pressure condition | |
| US5375011A (en) | Non-linear, real-time, micrometer resolution optical time domain reflectometers for optoelectronic circuits diagnostic and sensing applications | |
| CN203848938U (en) | Vacuum ultraviolet laser line width measuring device | |
| WO2021143580A1 (en) | Measuring instrument and method for ultrashort pulse laser | |
| CN109884657A (en) | A kind of high speed high throughput particle velocity-measuring system stretched based on optical event | |
| CN105203223A (en) | Device for measuring temperature of flame through one-dimensional scanning on basis of CARS | |
| CN109900359B (en) | High dynamic range signal-to-noise ratio measuring device of ultrashort pulse | |
| CN110319941A (en) | Using devitrified glass as the ultrashort pulse detector based on lateral frequency multiplication of frequency multiplication medium | |
| CN108931298B (en) | Compact high-flux high-stability interference imaging spectrometer | |
| JPS63193003A (en) | Apparatus for measuring depth of recessed part and thickness of film | |
| Rhodes et al. | Accuracy and precision in broadband laser ranging | |
| CN106654839A (en) | Displacement self-sensing helium-neon laser system | |
| CN101561317B (en) | System for measuring the influence of object to polarization state of transmitted beams with high precision and automation | |
| CN105136329A (en) | CARS (Coherent Anti-stokes Raman Spectroscopy) spectrum temperature measurement experimental device based on bifocal lens |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |