CN1349109A - Three axial magnetic sensor, all direction magnetic sensor, and direction testing method therewith - Google Patents

Three axial magnetic sensor, all direction magnetic sensor, and direction testing method therewith Download PDF

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CN1349109A
CN1349109A CN01102972A CN01102972A CN1349109A CN 1349109 A CN1349109 A CN 1349109A CN 01102972 A CN01102972 A CN 01102972A CN 01102972 A CN01102972 A CN 01102972A CN 1349109 A CN1349109 A CN 1349109A
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magnetic
substrate
sensor
axial
magnetic sensor
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CN1249453C (en
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田村泰弘
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C&N K. K.
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AF FIRST SYSTEM Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C17/00Compasses; Devices for ascertaining true or magnetic north for navigation or surveying purposes
    • G01C17/02Magnetic compasses
    • G01C17/28Electromagnetic compasses
    • G01C17/32Electron compasses
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C17/00Compasses; Devices for ascertaining true or magnetic north for navigation or surveying purposes
    • G01C17/02Magnetic compasses
    • G01C17/28Electromagnetic compasses
    • G01C17/30Earth-inductor compasses
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/04Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S19/00Satellite radio beacon positioning systems; Determining position, velocity or attitude using signals transmitted by such systems
    • G01S19/01Satellite radio beacon positioning systems transmitting time-stamped messages, e.g. GPS [Global Positioning System], GLONASS [Global Orbiting Navigation Satellite System] or GALILEO
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04MTELEPHONIC COMMUNICATION
    • H04M2250/00Details of telephonic subscriber devices
    • H04M2250/12Details of telephonic subscriber devices including a sensor for measuring a physical value, e.g. temperature or motion

Abstract

This hybrid magnetic sensor 200 constituted integrally as a hybrid IC includes a flux gate type magnetic sensor 100 formed using a substrate as a main body, and for detecting two axial components of a magnetic vector defined by a plane parallel to the substrate, a Hall element 24 for detecting a component of the magnetic vector perpendicular to the substrate, an inclined sensor 22 for detecting an inclination angle of the substrate, and a CPU 20. The azimuth of the earth magnetism is accurately calculated, since the detected three-dimensional magnetic vector is corrected taking the inclination of the substrate into account. The azimuth of the earth magnetism is accurately calculated even thought a magnetic sensor for earth magnetism is inclined by an attitude of a user and a holding manner by the user, when the magnetic sensor is assembled in a cellular phone.

Description

3 axial magnetic sensors, comprehensive Magnetic Sensor and use their direction-finding method
The present invention relates to the earth magnetism determination techniques.Especially, the present invention relates to revise the geomagnetic sensor and the direction-finding method of the orientation error of calculation.
Geomagnetic sensor is used to measure the orientation of observation place.Geomagnetic sensor is arranged on the surface level in the observation place, 2 components of the geomagnetic fieldvector on the detection level face.2 components that the base area Magnetic Sensor is measured calculate the orientation, magnetic field.Geomagnetic sensor also can be used for the navigational system of automobile, for revising the influence that magnetization brings, dispatches from the factory after calibrating in advance.
On the other hand, increasing mobile phone and portable terminal are used for displayed map information.In view of this situation, the applicant at first imagines and geomagnetic sensor is assembled into portable sets such as mobile phone and portable terminal, recognizes following problem finally in the stage of inquiring into its realization.That is and since the holder when carrying portable set posture and carry the difference of mode, portable set can be towards all directions, perhaps the direction of portable set be indefinite, constantly change.Therefore, the relative horizontal level of geomagnetic sensor that is contained in the portable set tilts with various pitch angle, and this pitch angle is constantly change.Therefore, under such environment for use, must get rid of the influence that magnetization influence, posture and the mode of carrying brought change in real time, revise the detection signal of geomagnetic fieldvector automatically.
The applicant has finished the present invention based on above understanding.Its purpose is, provides a kind of small-sized and to magnetization and geomagnetic sensor that tilts can revise automatically and the direction-finding method of using this geomagnetic sensor.
The applicant is in 2000 No. 104689 application of Japanese patent of invention, a kind of mobile terminal device that 2 axial magnetic sensors are housed has been proposed, and proposed a kind of can be to processing, make the position information display system in the shown map alignment of orientation mobile terminal device orientation of mobile terminal device on the map.Also have, the applicant is in order to improve the convenience of system, the comprehensive Magnetic Sensor that also proposed a kind of inclination sensor of packing in Magnetic Sensor, can revise automatically to inclination.
A kind of form of the present invention relates to 3 axial magnetic sensors.3 axial magnetic sensors are the mixed type IC devices with 2 axial magnetic sensors and magnetic detecting element formation one.2 axial magnetic sensors form body with substrate, detect 2 components of the magnetic vector of the plane defined parallel with described substrate.Magnetic detecting element detects described magnetic vector and component described plane vertical direction.Thus, 3 axial magnetic sensors can be measured 3 components to the magnetic vector of earth magnetism.As magnetic detecting element, can use the magnetic induction parts such as Hall element of measuring magnetic field according to Hall effect, perhaps utilize its resistance of magnetization along with the ferromagnetism body this phenomenon that changes to detect the magnetoresistance elements such as MR element of magnetic.
The coil pattern that 2 axial magnetic sensors also can be used 2 components that detect magnetic vector forms at whole stacked substrate.2 axial magnetic sensors also can be the fluxgate type Magnetic Sensors, this fluxgate type Magnetic Sensor is a core with the amorphous state annulus, excitation with the coil substrate of the X-direction magnetic-field component on stacked detection in the outside of coil substrate and described substrate parallel plane and detect described plane the Y direction magnetic-field component the coil substrate and constitute.
2 axial magnetic sensors and magnetic detecting element are installed the all-in-one-piece mode, can adopt following method, the substrate that promptly forms 2 axial magnetic sensors has the figure that transmission is used from the detection signal of magnetic detecting element output, when magnetic detecting element was installed on the substrate, described detection signal was introduced directly on the substrate by described figure.
The signal processing that also can also contain the output signal of handling described 2 axial magnetic sensors and described magnetic detecting element, described signal processing is calculated the magnetic intensity of measuring, and 2 components of the magnetic vector that described 2 axial magnetic sensors are measured are revised.This signal processing can form one with this 3 axial magnetic sensor on substrate, also can be positioned at outside this 3 axial magnetic sensor, receives the output signal fixed signal Processing of professional etiquette of going forward side by side.
Another form of the present invention relates to comprehensive Magnetic Sensor.Comprehensive Magnetic Sensor is with the mixed type IC device that is formed on the substrate, 3 axial magnetic sensors that magnetic vectors are tieed up in detection 3 and the inclination sensor that detects described substrate pitch angle constitute one.So-called " being formed on the substrate ", comprise several situations, a kind of situation is that at least a portion inscape of for example 3 axial magnetic sensors is that body forms with the substrate, and other inscape of 3 axial magnetic sensors is installed in the substrate outside, and another kind of situation is that whole formations of 3 axial magnetic sensors are body formation etc. with the substrate.As an example also can be like this, detection is that body forms with the substrate with 2 axial magnetic sensors of 2 components of magnetic vector of substrate parallel plane defined, and detect described magnetic vector and magnetic detecting element described plane vertical direction component and be formed on on-chip figure and be connected, install by this way.
Inclination sensor also can detect x direction of principal axis pitch angle and the y direction of principal axis pitch angle with described substrate parallel plane defined.Inclination sensor also can detect the displacement that causes because of 3 axial inclinations.Such inclination sensor also can be acceleration transducer or the angular-rate sensor that detects 2 direction of principal axis or 3 direction of principal axis displacements.
Described substrate also can have the figure that transmission is used from the detection signal of described inclination sensor output, and when described inclination sensor had been installed on the described substrate, described detection signal was directly introduced described substrate by described figure.
Also can form like this, it also comprises to be contained in this on-chip film substrate from the outward extending form of described substrate, described inclination sensor is installed on the described film substrate, described film substrate is bent to described substrate side, and integral adhesive is fixed.
It is 2 axial magnetic sensors of 2 components of magnetic vector of that body forms, detection and described substrate parallel plane defined that described 3 axial magnetic sensors also can contain with described substrate, and detects magnetic detecting element described magnetic vector and vertical direction component described plane.Described magnetic detecting element also can be installed on the described film substrate.The mode that element is installed on the described film substrate also can be the flip-chip mode.
The tilt angle calculation horizontal component ofmagnetic field that 3 dimension magnetic vectors that the signal processing that also contains the output signal of handling described 3 axial magnetic sensors and described inclination sensor, described signal processing also can be measured according to described 3 axial magnetic sensors and described inclination sensor are measured.The displacement that described signal processing also can cause according to the 3 axial inclinations that described inclination sensor is measured, revise described pitch angle, and 3 dimension magnetic vector and the revised described pitch angle of measuring according to described 3 axial magnetic sensors, the calculated level magnetic-field component.Described signal processing also can be revised described horizontal component ofmagnetic field according to the magnetic intensity of being calculated by described 3 dimension magnetic vectors.
Another form of the present invention relates to the direction-finding method.The direction-finding method comprises: the process that receives the detection signal of 3 dimension magnetic vectors; The process of 3 dimension coordinates of the described magnetic vector of reception regulation and the detection signal at the folded pitch angle of ground level; The magnetic field intensity that use is calculated according to described 3 dimension magnetic vectors is revised the process of the detection signal of 3 dimension magnetic vectors; Revised described 3 dimension magnetic vectors are carried out the process of coordinate transform and calculated level magnetic-field component according to described pitch angle.In the process that receives described pitch angle detection signal, 3 components that also can detect gravity are revised the detection signal at described pitch angle.The process that also can also contain with good grounds described horizontal component ofmagnetic field computer azimuth angle.
In addition, the combination in any of above inscape and with the present invention with multi-form performances such as method, sensor, systems, these all are effective as form of the present invention.
Brief description.
Figure 1 shows that the decomposition key diagram of the employed fluxgate type sensor of comprehensive Magnetic Sensor of the 1st example.
Figure 2 shows that the principle key diagram of the inclination sensor that comprehensive Magnetic Sensor uses.
Figure 3 shows that the pie graph of the hybrid magnetic sensor of one of comprehensive Magnetic Sensor example.
Figure 4 shows that the synoptic diagram of the hybrid magnetic sensor of realizing by another manufacturing process.
Figure 5 shows that the function constitution map of hybrid magnetic sensor.
Figure 6 shows that the corrected Calculation process flow diagram that the CPU of hybrid magnetic sensor carries out.
Figure 7 shows that the vertical view of the hybrid magnetic sensor of the 3rd example.
Figure 8 shows that the azimuth orientation system key diagram of the hybrid magnetic sensor that uses the 4th example.
The cell-phone function pie graph of dress hybrid magnetic sensor in Figure 9 shows that.
Figure 10 shows that the process flow diagram of direction-finding method.
The following describes the 1st example of the present invention.Use Fig. 1 to Fig. 3, the formation of the comprehensive Magnetic Sensor of the 1st example is described.In Fig. 1, the formation of employed 2 axial magnetic sensors of comprehensive Magnetic Sensor is described, in Fig. 2, the formation of the employed inclination sensor of comprehensive Magnetic Sensor is described, comprehensive Magnetic Sensor shown in Figure 3 is whole to be constituted.
Fig. 1 is that one of 2 geomagnetic sensors example is the decomposition key diagram of fluxgate type sensor 100.Fluxgate type sensor 100 is that Japanese patent of invention discloses 1997 No. 43322 communique and Japanese patent of invention discloses the disclosed fluxgate type sensor of communique 1999 No. 118892, the ring-shaped core 9 that forms with ring-type amorphous state magnetic core is a core, on thereon, by order shown in this figure, the stacked field coil that is etched with field coil figure 12 with substrate 8, be etched with Y coil pattern 11 Y direction magnetic field detection coil substrate 7, be etched with the X-direction magnetic field detection coil substrate 6 of X coil pattern 10 and constitute.
Fig. 2 is the principle key diagram of inclination sensor 22.Be weight body 34 to be bearing in structure on the basket 30,, can measure inclination by the displacement that piezolectric crystal unit 32A-D detects weight body 34 by the piezolectric crystal unit 32A-D of one of piezoelectric element example.
Fig. 3 (A), (B) are the pie graph of hybrid magnetic sensor 200 for one of comprehensive Magnetic Sensor example.At Fig. 3 (A) vertical view of hybrid magnetic sensor 200 is shown, Fig. 3 (B) illustrates the cut-open view of hybrid magnetic sensor 200.Hybrid magnetic sensor 200 with fluxgate type sensor 100 as substrate, on the formed figure of this substrate, load onto CPU20 as arithmetic processing section, inclination sensor 22 and as the Hall element 24 of one of magnetic detecting element example by welding 28, with silicones 26 with overall fixed, form one, constitute the hybrid magnetic sensor.The hybrid magnetic sensor 200 that constitutes can directly be introduced substrate through figure with the detection signal of inclination sensor 22 and Hall element 24 outputs, CPU20 is in the detection signal that receives 100 outputs of fluxgate type sensor, receive the detection signal of inclination sensor 22 and Hall element 24, carry out the corrected Calculation of back, and export revised signal narration.Hall element 24 detects the magnetic-field component with the substrate vertical direction.By fluxgate type sensor 100 and Hall element 24 combinations, can carry out 3 axial magnetic sensors that 3 dimension magnetic vectors detect with regard to constituting.As magnetic detecting element, can use the magnetic induction part of Hall element 24 grades, also can use the magneto-resistance effect element of MR element etc.
Fig. 4 is the synoptic diagram of the hybrid magnetic sensor 200 of another manufacturing process's realization.In the end of fluxgate type sensor 100 film substrate 40A-C is housed, on the figure that film substrate 40A-C forms, CPU20, inclination sensor 22 and Hall element 24 is installed.Film substrate 40A-C is folding to fluxgate type sensor 100 sides, and integral adhesive is fixed.Element is very free in design to the configuration of film substrate 40A-C, the element that comprises CPU20, inclination sensor 22 and Hall element 24 can be installed on any film substrate 40A-C, also can use all film substrate 40A-C, on a film substrate, these elements are installed just at least.When using film substrate to form hybrid magnetic sensor 200 like this, there is not welding portion, just can corresponding reduction thickness.
Adopt any formation among Fig. 3, Fig. 4, hybrid magnetic sensor 200 is that a kind of IC mixed type constitutes, it is on the substrate that detects 2 axial magnetic sensors of 2 magnetic-field components in 2 dimensional planes is installed, the inclination sensor that the magnetic detecting element of the magnetic-field component of installation and measuring and substrate vertical direction and detection substrate tilt, constitute one, utilize the fusion of a plurality of sensors to realize miniaturization.
Fig. 5 is the function constitution map of hybrid magnetic sensor 200.Export the X-axis the 2 dimension coordinate axles of stipulating by the plane of substrate, magnetic-field component x, the y of Y direction from fluxgate type sensor 100.From the magnetic-field component z of Hall element 24 outputs with the Z-direction of substrate plane vertical direction.From the angle of inclination beta of inclined angle alpha of inclination sensor 22 output X-directions (below be also referred to as " pitch angle ") and Y direction (below be also referred to as " roll angle ").
Hybrid magnetic sensor 200 is packed in the mobile phone, and the user is with angle handheld mobile phone arbitrarily during use.Under such situation, the angle that horizontal magnetic field incides fluxgate type sensor 100 is that the difference at the elevation angle, terrestrial magnetic field has appreciable impact to detection sensitivity.Therefore, the substrate of obtaining hybrid magnetic sensor 200 tilts, and carries out coordinate transform and becomes surface level, the magnetic vector when obtaining level.
CPU20 has coordinate transform part 202 and part 204 is calculated at the position angle.Coordinate transform part 202 is according to magnetic vector (x, y, z) and pitch angle α, roll angle β, carry out the influence that corrected Calculation causes get rid of, the magnetic vector (xh, yh, zh) when calculating the level that the substrate of hybrid magnetic sensor 200 measures when relatively planar horizontal is placed.Magnetic vector (xh, yh, zh) when part 204 input levels are calculated at the position angle is calculated the terrestrial magnetic field azimuth angle theta.Part 204 is calculated at the position angle also can calculate the elevation angle, terrestrial magnetic field φ again.
Figure 6 shows that the CPU20 of hybrid magnetic sensor 200 carries out the process flow diagram of corrected Calculation.Coordinate transform part 202 obtains pitch angle α and roll angle β (S10) from inclination sensor 22, obtain the X-direction of magnetic vector, component x, the y of Y direction from fluxgate type sensor 100, and obtain the Z-direction component z (S12) of magnetic vector from Hall element 24.Magnetic vector (xh, yh, zh) during the level of the substrate that coordinate transform part 202 is obtained hybrid magnetic sensor 200 when relatively planar horizontal is placed (S14).Concrete corrected Calculation is following carries out.
Because the X-axis tilt alpha of the space coordinates of the substrate of hybrid magnetic sensor 200 when level and the magnetic vector when Y-axis inclination β are (x, y, z), therefore, the magnetic vector (xh, yh, zh) during level by as shown in the formula make like that magnetic vector (x, y, z) around Y-axis rotate-β and around X-axis rotate-α just can obtain.
[mathematical expression 1] [ xyz ] cos β 0 sin β 0 1 0 - sin β 0 cos α 1 0 0 0 cos α sin α 0 - sin α cos α = [ xyz ] cos β - sin β sin α sin β cos α 0 cos α sin α - sin β - cos β sin α cos β cos α - - - - ( 1 )
Thus, the magnetic vector (xh, yh, zh) during level can followingly be obtained.
[mathematical expression 2]
xh=xcosβ-zsinβ
yh=-xsinβsinα+ycosα-zcosβsinα (2)
zh=xsinβcosα+ysinα+zcosβcosα
X-axis component xh and the Y-axis component yh of part 204 according to the magnetic vector after the coordinate transform calculated at the position angle, obtains terrestrial magnetic field azimuth angle theta (S16) with following formula.
θ=arctan(yh/xh) (3)
Part 204 is calculated at the position angle also can obtain the elevation angle, terrestrial magnetic field with following formula again, i.e. the folded angle φ of geomagnetic fieldvector and horizontal magnetic field vector (xh, yh).
φ=arccos(H/r) (4)
Wherein, H is the size of horizontal magnetic field vector (xh, yh), and r is the size of magnetic vector (xh, yh, zh), i.e. magnetic field intensity.
Magnetic field intensity r is used for waiting the earth magnetism that causes to detect error to magnetization and revises.Generally speaking, because Magnetic Sensor be subjected to device that influence that Magnetic Sensor itself magnetization brings and Magnetic Sensor install with the influence in magnetic field, so must revise to output valve.Especially, because hybrid magnetic sensor 200 is contained in mobile phone and the portable terminal, the user is carrying and is walking, therefore usually in the city and the places such as area of network of communication lines prosperity, device can have magnetic field, or near the bar construction thing, can detect the other side's object with magnetic, can sneak into the dynamic magnetic field that nature can not produce.High-intensity magnetic field outside such nature magnetic field incides Magnetic Sensor and makes it be state of saturation, can not carry out the situation that earth magnetism detects with regard to taking place.
In order to remove the influence that Magnetic Sensor is magnetized etc., generally be to calibrate in the field of employment.Carrying out Calibration Method is, under horizontally disposed state with Magnetic Sensor, make Magnetic Sensor vertically promptly revolve three-sixth turn, obtain the central point of the circle that the output valve of the output valve of X-direction and Y direction constitutes around the Z axle, and with the coordinate figure of this central point as the compensation rate of revising.But because hybrid magnetic sensor 200 is to be contained in mobile phone or the portable terminal etc., the user is carrying in arbitrary site and is using, so it is inappropriate wanting the each use of user all to calibrate.
Therefore, utilize the magnetic field intensity r that is measured, find that magnetization waits the influence of high-intensity magnetic field,, eliminate the influence of high-intensity magnetic field the X-axis component of high-intensity magnetic field, the compensation rate that the Y-axis component is used as the output valve of hybrid magnetic sensor 200.In order from the magnetic field intensity of measuring, to get rid of high-intensity magnetic field, in advance with form with the range storage of initial magnetic field intensity and the magnetic field intensity that might measure in storer.The magnetic field intensity of practical measurement contrasts mutually with the data that are stored in the table, eliminates the influence of the magnetic-field component outside the nature magnetic field, carries out the correcting process of detected value.In addition, when measuring the high-intensity magnetic field that surpasses the magnetic field intensity scope of setting, also can abandon detected value, make mensuration invalid.
In general, if do not calibrate when using Magnetic Sensor at every turn, just can not correctly obtain geomagnetic field intensity and orientation, but because the hybrid magnetic sensor 200 of this example has the Hall element 24 that can detect the Z-direction magnetic-field component, so can detect high-intensity magnetic field, can correctly calculate nature magnetic field with CPU by correcting process.Therefore, hybrid magnetic sensor 200 has the effect of calibrating automatically when being equivalent to use.This is very favorable to hybrid magnetic sensor 200 is installed in the portable set.
The following describes the 2nd example of the present invention.In the 1st example,, used and detected around X-axis, around 2 inclination sensors 22 at the pitch angle of Y-axis in order to detect the inclination of hybrid magnetic sensor 200.In the 2nd example, be that with the 1st example difference be provided with 3 inclination sensors that can also detect around the pitch angle of Z axle, other formation is identical with the 1st example.
In the 1st example, measure because of magnetization waits the high-intensity magnetic field that causes by using 3 Magnetic Sensor, just can calibrate automatically.In the 2nd example, also can calibrate automatically in order to make inclination sensor, used 3 inclination sensor.
3 inclination sensors that use at the 2nd example are identical with inclination sensor 22 formations of the Fig. 2 that illustrated at the 1st example, detect 3 components of weight body 34 displacements that cause because of gravity.Thus, obtain gravitational vector (gx, gy, gz) in the moving coordinate system that can move at substrate with hybrid magnetic sensor 200.Therefore can know the inclination of the substrate of hybrid magnetic sensor 200, i.e. the folded angle ψ of the normal direction of substrate and vertical direction.Use this information, the X-axis of inclination sensor, the output signal of Y-axis are revised.If the gravitational vector that obtains is (O, O, g), the output signal of Z axle is zero, and then substrate is a level, need not revise.
Generally speaking,,, also inclination sensor must calibrated under the horizontally disposed state, carried out the correction of output valve in order to obtain the right value at pitch angle for inclination sensor.Use 2 inclination sensors, because can only obtain the output valve of X-axis and Y-axis, so whether inclination sensor self tilts is ignorant, so must under horizontality, calibrate.By using 3 inclination sensors, can obtain the output signal of Z axle, as benchmark, just the pitch angle of energy opposing connection X-axis and Y-axis is revised with the output signal of Z axle.Therefore, needn't under horizontally disposed state, calibrate before use, have the effect of calibrating automatically when being equivalent to use.
The present invention's the 3rd example below is described.Fig. 7 is the vertical view of the hybrid magnetic sensor 200 of the 3rd example.With fluxgate type sensor 100 is substrate, and CPU20, inclination sensor 23 and Hall element 24 are installed on top.The inclination sensor 23 of this example is identical with inclination sensor 22 formations of Fig. 2 that the 1st example illustrated, but difference is that silica gel 50 coverings with flexibility utilize the poor of the interior interior pressure of outer air pressure and sensor, can also measure outer air pressure.Other formation of hybrid magnetic sensor 200 is identical with the Fig. 3 that illustrated at the 1st example, and except inclination sensor 22, integral body is fixed with silicones 26.The hybrid magnetic sensor 200 of An Zhuaning can be measured the orientation of observation place like this, simultaneously according to outer barometric surveying height.
Below the azimuth orientation system of the hybrid magnetic sensor 200 of one of the 1st to the 3rd example is used in explanation, as the present invention's the 4th example.Fig. 8 is the key diagram of the azimuth orientation system of the 4th example.Hybrid magnetic sensor 200 and GPS receiving unit 102 are housed in the mobile phone 110.Mobile phone 110 is from a plurality of gps satellite 114 receiving position informations.Positional information comprises the latitude and the longitude of observation place.Mobile phone 110 sends to earth station 112 with the positional information that receives.Earth station 112 has server 116, map datum 118 and gps antenna 120.Correctly know the latitude and the longitude of earth station 112, server 116 is used as comparable data with the known warp and the latitude of earth station 112, the positional information of using gps antenna 120 to receive from a plurality of gps satellites 114, revise the positional information that mobile phone 110 sends, correct positional information is sent to mobile phone 110.In addition, server 116 extracts the full magnetic force data of the current position of mobile phone 110 requirements from map datum 118, and sends it to mobile phone 110.In addition, server 116 extracts cartographic information from map datum 118 and sends to mobile phone 110 according to the current position of mobile phone 110.Mobile phone 110 is processed cartographic information according to the orientation of being measured by hybrid magnetic sensor 200, terrestrial magnetic field and is shown.
Fig. 9 is the function constitution map of mobile phone 110.Omitted the functions such as conversation of mobile phone 110, illustrated and direction-finding technology function associated of the present invention.Mobile phone 110 have from gps satellite 114 receive the GPS receiving unit 102 of gps signals, the full magnetic force of obtaining full magnetic force data from earth station 112 obtains part 104, hybrid magnetic sensor 200, map information handling part 206 and display part 208.Hybrid magnetic sensor 200 has fluxgate type sensor 100, inclination sensor 22, coordinate transform part 202 and position angle and calculates part 204.
GPS receiving unit 102 is from the positional information of gps satellite 114 reception observation places, and full magnetic force is obtained part 104 positional information that GPS receiving unit 102 receives is sent to earth station 112, receives the full magnetic force r of observation places from earth station 112.Full magnetic force is obtained part 104 full magnetic force r is input to coordinate transform part 202.The pitch angle α and the roll angle β input coordinate conversion fraction 202 of the X-axis of the magnetic vector that fluxgate type sensor 100 is measured and exported, Y-axis component x, y and inclination sensor 22 outputs.Coordinate transform part 202 is obtained the Z axle component z of magnetic vector according to X-axis component x and the Y-axis component y and the full magnetic force r of magnetic vector, and uses pitch angle α and roll angle β, by coordinate transform, and the magnetic vector when obtaining level (xh, yh, zh).Magnetic vector when part 204 is calculated at the position angle according to level is calculated the terrestrial magnetic field azimuth angle theta, and outputs to map information handling part 206.
Map information handling part 206 is processed the map datum that receives from earth station 112 according to azimuth angle theta, and the map datum after display part 208 will process is presented on the screen.For example, map information handling part 206 makes the map rotation so that the terrestrial magnetic field azimuth angle theta that the alignment of orientation of map is measured.Show on the picture of mobile phone 110 with mobile phone 110 carrier towards the consistent map in orientation.
Figure 10 is the process flow diagram of the direction-finding method of this example.Coordinate transform part 202 obtains pitch angle α and roll angle β (S20) from inclination sensor 22, obtains X-axis component x, the Y-axis component y (S22) of magnetic vector from fluxgate type sensor 100.GPS acceptance division 102 is obtained current position information (S24), and full magnetic force is obtained part 104 current position information is sent to the server 116 of earth station 112, and receives the full magnetic force r (S26) of current position from server 116.Coordinate transform part 202 is calculated Z axle component z (S28) according to X-axis component x, the Y-axis component y of full magnetic force r and magnetic vector with following formula.
[mathematical expression 3] Z = r 2 - x 2 - y 2 - - - - - ( 5 )
Coordinate transform part 202 is used pitch angle α and roll angle β, and by the coordinate transform of above-mentioned formula (2), the magnetic vector when asking level (xh, yh, zh) (S30).X-axis component xh and the Y-axis component yh of part 204 according to the magnetic vector after the coordinate transform calculated at the position angle, calculates azimuth angle theta (S32) by above-mentioned formula (3).
Also can use hybrid magnetic sensor 200 as hybrid magnetic sensor 200, with the height of observation place and the warp of observation place, the server 116 that latitude sends to earth station 112 in the lump at the 3rd example detected height that illustrated, Fig. 7.In addition, also can maintain the current barometric information in each area by server 116, provide barometric information to mobile phone 110, and the height detection value of using barometric information that hybrid magnetic sensor 200 is measured be revised.
In addition, in the above description, hybrid magnetic sensor 200 does not detect the magnetic-field component of Z-direction, but also can use Hall element 24 to detect the magnetic-field component of Z-direction, ask magnetic field intensity, compare with the full magnetic force r that obtains from server 116, thereby wait the high-intensity magnetic field influence that causes to revise magnetization.
As mentioned above, the hybrid magnetic sensor of above-mentioned example 200 is because fluxgate type sensor 100 is that body forms with the substrate, and on substrate Hall element 24 is installed and inclination sensor 22 becomes one, so can realize miniaturization.
In addition, hybrid magnetic sensor 200 is owing to revise automatically inclination, so even hybrid magnetic sensor 200 tilts to any direction, perhaps roll angle is not to be changeless, also can revise the influence of tilting to bring automatically to get rid of, just very convenient when portable sets such as formation mobile phone and portable terminal.Compare when utilizing mechanicalness level such as oscillator to keep function to calibrate with traditional magnetic azimuth sensor, the hybrid magnetic sensor 200 that forms like this is because be pure electronic type, so response is soon, and no mechanicalness contact, but semipermanent is used, and its structure can adapt to all postures.
Abovely the present invention has been described according to example.Industry personnel should be understood that shown in the example to be example, and the combination of each inscape and each handling procedure can have various distortion examples, and these distortion examples are also within the scope of the invention in addition.
The following describes such distortion example.In the above description, be provided with CPU20 at hybrid magnetic sensor 200, but also storer can be set again, the form of usefulness is revised in storage.In addition, also CPU20 and storer can be installed in the hybrid magnetic sensor 200, but the signal that hybrid magnetic sensor 200 is measured is fetched into the outside computing of revising etc. by the microcomputer of outer setting.In addition, in the above description, Magnetic Sensor and inclination sensor are formed as one, but also Magnetic Sensor and inclination sensor can be made of one and be arranged on the other substrate, handle both output signals with a CPU20 with same substrate.
According to the present invention, revise the influence of tilting to bring to get rid of, can correctly measure the orientation, terrestrial magnetic field.

Claims (16)

1. an axial magnetic sensor is characterized in that,
2 axial magnetic sensors and magnetic detecting element are constituted integrally formed mixed type IC,
Described 2 axial magnetic sensors are that body forms with the substrate, detect 2 components of the magnetic vector of the plane defined parallel with described substrate,
Described magnetic detecting element detects described magnetic vector and component described plane vertical direction.
2. 3 axial magnetic sensors according to claim 1 is characterized in that, described 2 axial magnetic sensors are that the coil pattern that 2 components that detect magnetic vector are used is formed at whole stacked substrate.
3. 3 axial magnetic sensors according to claim 1 and 2, it is characterized in that, described substrate has the figure that transmission is used from the detection signal of described magnetic detecting element output, when described magnetic detecting element was installed on the described substrate, described detection signal was introduced directly on the described substrate by described figure.
4. 3 axial magnetic sensors according to claim 3, it is characterized in that, the signal processing that also contains the output signal of handling described 2 axial magnetic sensors and described magnetic detecting element, described signal processing is calculated the magnetic intensity of measuring, and 2 components of the magnetic vector that described 2 axial magnetic sensors are measured are revised.
5. a comprehensive Magnetic Sensor is characterized in that, 3 axial magnetic sensors that are formed on on-chip detection 3 dimension magnetic vectors are constituted integrally formed mixed type IC with the inclination sensor that detects described substrate pitch angle.
6. comprehensive Magnetic Sensor according to claim 5, it is characterized in that, described substrate has the figure that transmission is used from the detection signal of described inclination sensor output, when described inclination sensor had been installed on the described substrate, described detection signal was directly introduced described substrate by described figure.
7. comprehensive Magnetic Sensor according to claim 5, it is characterized in that, it also comprises to be contained in this on-chip film substrate from the outward extending form of described substrate, described inclination sensor is installed on the described film substrate, described film substrate bends to described substrate side, and integral body is adhesively fixed and forms.
8. according to each the described comprehensive Magnetic Sensor in the claim 5 to 7, it is characterized in that, described 3 axial magnetic sensors comprise: be 2 axial magnetic sensors of 2 components of magnetic vector of that body forms, detection and described substrate parallel plane defined with described substrate
And detect magnetic detecting element described magnetic vector and vertical direction component described plane.
9. according to each the described comprehensive Magnetic Sensor in the claim 5 to 8, it is characterized in that described inclination sensor detects X-direction roll angle and the Y direction roll angle with described substrate parallel plane defined.
10. according to each the described comprehensive Magnetic Sensor in the claim 5 to 8, it is characterized in that described inclination sensor detects the displacement that 3 axial inclinations cause.
11. according to each the described comprehensive Magnetic Sensor in the claim 5 to 9, it is characterized in that, horizontal component ofmagnetic field is calculated at the pitch angle that 3 dimension magnetic vectors that the signal processing that also contains the output signal of handling described 3 axial magnetic sensors and described inclination sensor, described signal processing are measured according to described 3 axial magnetic sensors and described inclination sensor are measured.
12. comprehensive Magnetic Sensor according to claim 10, it is characterized in that, the signal processing that also contains the output signal of handling described 3 axial magnetic sensors and described inclination sensor, the described roll angle of displacement correction that 3 direction of principal axis that described signal processing is measured according to described inclination sensor tilt to cause, and calculate horizontal component ofmagnetic field according to 3 dimension magnetic vectors and revised described pitch angle that described 3 axial magnetic sensors are measured.
13., it is characterized in that described signal processing is revised described horizontal component ofmagnetic field according to the magnetic intensity of calculating from described 3 dimension magnetic vectors according to claim 11 or 12 described comprehensive Magnetic Sensors.
14. a direction-finding method is characterized in that, comprising:
Receive the process of the detection signal of 3 dimension magnetic vectors;
The process of 3 dimension coordinates of the described magnetic vector of reception regulation and the detection signal at the folded pitch angle of ground level;
The magnetic field intensity that use is calculated according to described 3 dimension magnetic vectors is revised the process of the detection signal of 3 dimension magnetic vectors;
Revised described 3 dimension magnetic vectors are carried out the process of coordinate transform and calculated level magnetic-field component according to described pitch angle.
15. direction-finding method according to claim 14 is characterized in that, in the process of the detection signal that receives described pitch angle, 3 components that detect gravity are revised the detection signal at described pitch angle.
16. according to claim 14 or 15 described direction-finding methods, it is characterized in that, also comprise process according to described horizontal component ofmagnetic field computer azimuth angle.
CNB011029722A 2000-10-16 2001-02-07 Three axial magnetic sensor, all direction magnetic sensor, and direction testing method therewith Expired - Lifetime CN1249453C (en)

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