CN1332075A - 利用多频率的辐射固化密封层 - Google Patents
利用多频率的辐射固化密封层 Download PDFInfo
- Publication number
- CN1332075A CN1332075A CN01122822A CN01122822A CN1332075A CN 1332075 A CN1332075 A CN 1332075A CN 01122822 A CN01122822 A CN 01122822A CN 01122822 A CN01122822 A CN 01122822A CN 1332075 A CN1332075 A CN 1332075A
- Authority
- CN
- China
- Prior art keywords
- radiation
- frequency
- fundamental
- fundamental frequency
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0673—Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
- B23K26/206—Laser sealing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0838—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using laser
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
- B29K2105/0079—Liquid crystals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
- B29K2105/0097—Glues or adhesives, e.g. hot melts or thermofusible adhesives
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Nonlinear Science (AREA)
- Health & Medical Sciences (AREA)
- Oral & Maxillofacial Surgery (AREA)
- Toxicology (AREA)
- Thermal Sciences (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Liquid Crystal (AREA)
Abstract
Description
Claims (15)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/614,056 US6485599B1 (en) | 2000-07-11 | 2000-07-11 | Curing of sealants using multiple frequencies of radiation |
US09/614,056 | 2000-07-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1332075A true CN1332075A (zh) | 2002-01-23 |
CN1139469C CN1139469C (zh) | 2004-02-25 |
Family
ID=24459692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB011228229A Expired - Lifetime CN1139469C (zh) | 2000-07-11 | 2001-07-10 | 利用多频率的辐射固化密封层 |
Country Status (3)
Country | Link |
---|---|
US (1) | US6485599B1 (zh) |
CN (1) | CN1139469C (zh) |
TW (1) | TWI298039B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100361011C (zh) * | 2003-04-07 | 2008-01-09 | 友达光电股份有限公司 | 固化框胶的方法及运用此种方法制造液晶面板的方法 |
WO2014187003A1 (zh) * | 2013-05-23 | 2014-11-27 | 深圳市华星光电技术有限公司 | 液晶显示设备的制作方法 |
CN107350640A (zh) * | 2017-08-15 | 2017-11-17 | 成都新柯力化工科技有限公司 | 一种高效率多波长激光打孔方法 |
CN107717215A (zh) * | 2017-11-28 | 2018-02-23 | 温州大学 | 多功能超快激光微细加工系统及其方法 |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7006193B2 (en) * | 1999-05-10 | 2006-02-28 | Au Optronics Corporation | Method of sealing two substrates with a non-epoxy or epoxy-acrylate sealant using laser radiation |
JP2001326290A (ja) * | 2000-03-10 | 2001-11-22 | Seiko Epson Corp | パッケージの封止方法、電子素子モジュールの製造方法、封止装置並びにパッケージ品 |
EP1176389A1 (de) * | 2000-07-24 | 2002-01-30 | Leica Geosystems AG | Verfahren und Vorrichtung zur optischen Distanz- oder Geschwindigkeitsmessung |
US6858104B2 (en) * | 2002-01-28 | 2005-02-22 | Scimed Life Systems, Inc. | Apparatus and method for closed-loop control of laser welder for welding polymeric catheter components |
US20050190337A1 (en) * | 2002-01-29 | 2005-09-01 | Park Tae K. | Liquid crystal display device and method for manufacturing the same |
US20040239867A1 (en) * | 2003-05-29 | 2004-12-02 | Chi Mei Optoelectronics Corp. | Method for manufacturing liquid crystal display |
US20060144522A1 (en) * | 2004-03-17 | 2006-07-06 | Vladislav Sklyarevich | Apparatus for laminating glass sheets using short wave radiation |
US7253125B1 (en) | 2004-04-16 | 2007-08-07 | Novellus Systems, Inc. | Method to improve mechanical strength of low-k dielectric film using modulated UV exposure |
PL1763699T3 (pl) * | 2004-07-02 | 2012-04-30 | Essilor Int | Sposób wytwarzania przezroczystego elementu optycznego, składnik optyczny biorący udział w tym sposobie oraz tak wytworzony element optyczny |
FR2872590B1 (fr) * | 2004-07-02 | 2006-10-27 | Essilor Int | Procede de realisation d'un verre ophtalmique et composant optique adapte pour la mise en oeuvre de ce procede |
US9659769B1 (en) | 2004-10-22 | 2017-05-23 | Novellus Systems, Inc. | Tensile dielectric films using UV curing |
US7790633B1 (en) | 2004-10-26 | 2010-09-07 | Novellus Systems, Inc. | Sequential deposition/anneal film densification method |
FR2879757B1 (fr) * | 2004-12-17 | 2007-07-13 | Essilor Int | Procede de realisation d'un element optique transparent, composant optique intervenant dans ce procede et element optique ainsi obtenu |
US7510982B1 (en) | 2005-01-31 | 2009-03-31 | Novellus Systems, Inc. | Creation of porosity in low-k films by photo-disassociation of imbedded nanoparticles |
US7300891B2 (en) * | 2005-03-29 | 2007-11-27 | Tokyo Electron, Ltd. | Method and system for increasing tensile stress in a thin film using multi-frequency electromagnetic radiation |
US8980769B1 (en) | 2005-04-26 | 2015-03-17 | Novellus Systems, Inc. | Multi-station sequential curing of dielectric films |
US8282768B1 (en) | 2005-04-26 | 2012-10-09 | Novellus Systems, Inc. | Purging of porogen from UV cure chamber |
US8137465B1 (en) | 2005-04-26 | 2012-03-20 | Novellus Systems, Inc. | Single-chamber sequential curing of semiconductor wafers |
US8889233B1 (en) | 2005-04-26 | 2014-11-18 | Novellus Systems, Inc. | Method for reducing stress in porous dielectric films |
US8454750B1 (en) | 2005-04-26 | 2013-06-04 | Novellus Systems, Inc. | Multi-station sequential curing of dielectric films |
FR2888951B1 (fr) * | 2005-07-20 | 2008-02-08 | Essilor Int | Composant optique pixellise aleatoirement, son procede de fabrication, et son utilisation dans la fabrication d'un element optique transparent |
FR2888950B1 (fr) * | 2005-07-20 | 2007-10-12 | Essilor Int | Composant optique transparent pixellise a parois absordantes son procede de fabrication et son utilisation dans la farication d'un element optique transparent |
FR2888948B1 (fr) | 2005-07-20 | 2007-10-12 | Essilor Int | Composant optique transparent pixellise comprenant un revetement absorbant, son procede de realisation et son utilisation dans un element optique |
FR2888947B1 (fr) * | 2005-07-20 | 2007-10-12 | Essilor Int | Composant optique a cellules |
US7781697B2 (en) * | 2006-04-10 | 2010-08-24 | Hewlett-Packard Development Company, L.P. | Micro-display and methods |
FR2907559B1 (fr) * | 2006-10-19 | 2009-02-13 | Essilor Int | Composant optique elecro-commandable comprenant un ensemble de cellules |
US10037905B2 (en) | 2009-11-12 | 2018-07-31 | Novellus Systems, Inc. | UV and reducing treatment for K recovery and surface clean in semiconductor processing |
US8465991B2 (en) | 2006-10-30 | 2013-06-18 | Novellus Systems, Inc. | Carbon containing low-k dielectric constant recovery using UV treatment |
US7851232B2 (en) | 2006-10-30 | 2010-12-14 | Novellus Systems, Inc. | UV treatment for carbon-containing low-k dielectric repair in semiconductor processing |
US7906174B1 (en) | 2006-12-07 | 2011-03-15 | Novellus Systems, Inc. | PECVD methods for producing ultra low-k dielectric films using UV treatment |
FR2910642B1 (fr) * | 2006-12-26 | 2009-03-06 | Essilor Int | Composant optique transparent a deux ensembles de cellules |
DE102007035715A1 (de) * | 2006-12-27 | 2008-07-03 | Robert Bosch Gmbh | Laserstrahlbearbeitungsvorrichtung sowie Verfahren zum Justieren der Fokuslage |
FR2911404B1 (fr) * | 2007-01-17 | 2009-04-10 | Essilor Int | Composant optique transparent a cellules remplies de materiau optique |
US8242028B1 (en) | 2007-04-03 | 2012-08-14 | Novellus Systems, Inc. | UV treatment of etch stop and hard mask films for selectivity and hermeticity enhancement |
US7622162B1 (en) * | 2007-06-07 | 2009-11-24 | Novellus Systems, Inc. | UV treatment of STI films for increasing tensile stress |
US8211510B1 (en) | 2007-08-31 | 2012-07-03 | Novellus Systems, Inc. | Cascaded cure approach to fabricate highly tensile silicon nitride films |
JP5383342B2 (ja) * | 2008-08-01 | 2014-01-08 | キヤノン株式会社 | 加工方法 |
US9050623B1 (en) | 2008-09-12 | 2015-06-09 | Novellus Systems, Inc. | Progressive UV cure |
US9847221B1 (en) | 2016-09-29 | 2017-12-19 | Lam Research Corporation | Low temperature formation of high quality silicon oxide films in semiconductor device manufacturing |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3159504B2 (ja) | 1992-02-20 | 2001-04-23 | 松下電器産業株式会社 | 液晶パネルの製造方法 |
US5325381A (en) * | 1992-12-22 | 1994-06-28 | Xerox Corporation | Multiple beam diode laser output scanning system |
JP3977529B2 (ja) * | 1998-11-18 | 2007-09-19 | 三菱電機株式会社 | 波長変換レーザ装置およびレーザ加工装置 |
US6179679B1 (en) | 1999-10-22 | 2001-01-30 | International Business Machines Corporation | Method and system for curing ultra violet curable sealant that is shadowed by metallization |
-
2000
- 2000-07-11 US US09/614,056 patent/US6485599B1/en not_active Expired - Lifetime
-
2001
- 2001-07-02 TW TW090116181A patent/TWI298039B/zh not_active IP Right Cessation
- 2001-07-10 CN CNB011228229A patent/CN1139469C/zh not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100361011C (zh) * | 2003-04-07 | 2008-01-09 | 友达光电股份有限公司 | 固化框胶的方法及运用此种方法制造液晶面板的方法 |
WO2014187003A1 (zh) * | 2013-05-23 | 2014-11-27 | 深圳市华星光电技术有限公司 | 液晶显示设备的制作方法 |
CN107350640A (zh) * | 2017-08-15 | 2017-11-17 | 成都新柯力化工科技有限公司 | 一种高效率多波长激光打孔方法 |
CN107717215A (zh) * | 2017-11-28 | 2018-02-23 | 温州大学 | 多功能超快激光微细加工系统及其方法 |
Also Published As
Publication number | Publication date |
---|---|
US6485599B1 (en) | 2002-11-26 |
TWI298039B (en) | 2008-06-21 |
CN1139469C (zh) | 2004-02-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C06 | Publication | ||
PB01 | Publication | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: YOUDA PHOTOELECTRIC CO., LTD. Free format text: FORMER OWNER: INTERNATIONAL BUSINESS MACHINE CORP. Effective date: 20060707 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20060707 Address after: Taiwan, China Hsinchu science and Technology Park, Hsinchu City Road, No. two Patentee after: AU Optronics Corporation Address before: American New York Patentee before: International Business Machines Corp. |
|
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20040225 |