CN1329759C - Method for imploementing optical waveguide device coupled packaging - Google Patents
Method for imploementing optical waveguide device coupled packaging Download PDFInfo
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- CN1329759C CN1329759C CNB2004100623352A CN200410062335A CN1329759C CN 1329759 C CN1329759 C CN 1329759C CN B2004100623352 A CNB2004100623352 A CN B2004100623352A CN 200410062335 A CN200410062335 A CN 200410062335A CN 1329759 C CN1329759 C CN 1329759C
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- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000004806 packaging method and process Methods 0.000 title abstract description 6
- 230000003287 optical effect Effects 0.000 title abstract description 5
- 230000008878 coupling Effects 0.000 claims abstract description 30
- 238000010168 coupling process Methods 0.000 claims abstract description 30
- 238000005859 coupling reaction Methods 0.000 claims abstract description 30
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000013307 optical fiber Substances 0.000 claims abstract description 12
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 9
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 238000005530 etching Methods 0.000 claims abstract description 7
- 238000003384 imaging method Methods 0.000 claims abstract description 4
- 239000000835 fiber Substances 0.000 claims description 52
- 238000005538 encapsulation Methods 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000002840 optical waveguide grating Methods 0.000 abstract 7
- 238000005516 engineering process Methods 0.000 description 4
- 238000012536 packaging technology Methods 0.000 description 4
- 238000003491 array Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000001808 coupling effect Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- Optical Couplings Of Light Guides (AREA)
Abstract
一种用于实现光波导器件耦合封装的方法，包括如下步骤：在二氧化硅衬底上刻蚀一光波导光栅，光波导光栅的输入与输出在同一端，使光波导光栅的输入端与输出端等间距均匀排列；在二氧化硅衬底上光波导光栅的外围刻蚀一分支波导，分支波导的两输出端口与光波导光栅的输入输出在同一端，分支波导的输入端在该输出的另一端，分支波导的两个输出端与光波导光栅的输入、输出波导等间距均匀排列；在分支波导的输入端处放置一光纤，在光波导光栅的输入与输出端置放一透镜，在透镜成像处放置一CCD红外摄像机，以准直光纤与分支波导输入端的耦合；用一光纤阵列代替透镜及CCD红外摄像机耦合至光波导光栅的输入与输出端，而完成光波导器件与光纤阵列的耦合。
A method for realizing coupling and packaging of optical waveguide devices, comprising the following steps: etching an optical waveguide grating on a silicon dioxide substrate, the input and output of the optical waveguide grating are at the same end, so that the input end of the optical waveguide grating is connected to the The output ends are evenly spaced; a branch waveguide is etched on the periphery of the optical waveguide grating on the silicon dioxide substrate. At the other end of the branch waveguide, the two output ends of the branch waveguide and the input and output waveguides of the optical waveguide grating are arranged at equal intervals; an optical fiber is placed at the input end of the branch waveguide, and a lens is placed at the input and output ends of the optical waveguide grating, Place a CCD infrared camera at the lens imaging place to collimate the coupling between the optical fiber and the input end of the branch waveguide; replace the lens and the CCD infrared camera with an optical fiber array to couple to the input and output ends of the optical waveguide grating to complete the optical waveguide device and optical fiber array coupling.
Description
Technical field
The present invention relates to the method for fiber waveguide device coupling encapsulation, and it is applied in the coupling packaging technology of silicon based silicon dioxide array waveguide grating fiber waveguide devices such as (AWG).
Background technology
The coupling encapsulating structure of fiber waveguide device is made up of three parts usually at present: importation, fiber waveguide device and output.Wherein input can be a simple optical fiber with output, also can be fiber array, or other active, passive devices.
For the fiber waveguide device of multi-channel structure, main packaged type is the array mode of " fiber array+fiber waveguide device+fiber array ".This packaged type has some weak point:
(1) device size is bigger: owing to adopt the conventional package method, for the ease of packaging technology, designed device input end and output terminal are on two end faces of device, and this has limited the possibility of further minimizing size of devices design undoubtedly.
(2) having relatively high expectations to the coupling sealed in unit:,, require input end and output terminal all to adopt 6 micropositioning stages, and require equipment to have long stability characteristic (quality) in order to realize optimum coupling for the conventional package method.
(3) device polishing difficulty increases: for the conventional package method, the input of device and output terminal all will carry out glossing, and polishing angle and quality are difficult to reach consistent.
(4) increase packaging cost: for the conventional package method, especially for N * N type fiber waveguide device, need two or more fiber arrays, this has strengthened encapsulation difficulty undoubtedly, has increased packaging cost simultaneously.
The new method of the fiber waveguide device coupling encapsulation that the present invention relates to is at these problems in traditional fiber waveguide device coupling encapsulation, monolateral coupling encapsulation has been proposed, thereby effectively avoided the generation of the problems referred to above, reduced technology difficulty, reduced the coupling packaging cost.
Summary of the invention
The purpose of this invention is to provide a kind of method that is used to realize fiber waveguide device coupling encapsulation, its key is the input of waveguide optical grating and output terminal equidistantly are evenly arranged in one side of device, and an additional branch-waveguide is so that being coupled and aligned of device.
The present invention realizes by the following method:
A kind of method that is used to realize fiber waveguide device coupling encapsulation of the present invention is characterized in that: comprise the steps:
Step 1: etching one light waveguide raster on silicon dioxide substrates, the input of light waveguide raster and output be at same end, and make the input end of light waveguide raster and output terminal equidistantly evenly distributed;
Step 2: peripheral etching one branch-waveguide of light waveguide raster on silicon dioxide substrates, two output ports of this branch-waveguide and the input and output of light waveguide raster are at same end, the input end of this branch-waveguide is at the other end of this output, and input, the output waveguide of two output terminals of branch-waveguide and light waveguide raster are equidistantly evenly distributed;
Step 3: place an optical fiber at the input end of branch-waveguide, put lens, place a CCD thermal camera at the lens imaging place, with the coupling of collimating optical fibre and branch-waveguide input end at the input and the output terminal of light waveguide raster;
Step 4: replace lens and CCD thermal camera to be coupled to the input and the output terminal of light waveguide raster with a fiber array, and finish the coupling of fiber waveguide device and fiber array.
Wherein the input end of the said light waveguide raster of step 1 and output terminal are equidistantly evenly distributed, and its spacing is 127 microns or 250 microns.
The said branch-waveguide of step 2 wherein adopts the Y branched structure or adopts the structure of multimode interference, and the splitting ratio of this branch-waveguide structure is 50: 50.
Wherein input, the output terminal of two of the said branch-waveguide of step 2 output terminals and light waveguide raster are equidistantly evenly distributed, and its spacing is 127 microns or 250 microns.
Wherein said light waveguide raster is an array waveguide grating.
Description of drawings
For further specifying technology contents of the present invention, below in conjunction with embodiment and accompanying drawing describes in detail as after, wherein:
Fig. 1 is to be the domain of the complete fiber waveguide device of example making with arrayed waveguide grating type fiber waveguide device (AWG).
Fig. 2 is to be the packaging technology block diagram of the complete fiber waveguide device of example with arrayed waveguide grating type fiber waveguide device (AWG).
Embodiment
See also Fig. 1 and Fig. 2, a kind of method that is used to realize fiber waveguide device coupling encapsulation of the present invention comprises the steps:
Step 1: etching one light waveguide raster 15 on silicon dioxide substrates 10, the input of light waveguide raster 15 and output be at same end, and make the input end of light waveguide raster 15 and output terminal equidistantly evenly distributed, and its spacing is 127 microns or 250 microns;
Step 2: peripheral etching one branch-waveguide 16 of light waveguide raster 15 on silicon dioxide substrates 10, two output ports of this branch-waveguide 16 and the input and output of light waveguide raster 15 are at same end, the input end of this branch-waveguide 16 is at the other end of this output, and two output terminals of branch-waveguide 16 and input, the output waveguide of light waveguide raster 15 are equidistantly evenly distributed, said branch-waveguide 16, adopt the structure of Y branched structure or employing multimode interference, the splitting ratio of this branch-waveguide 16 is 50: 50; Two output terminals of said branch-waveguide 16 and input, the output terminal of light waveguide raster 15 are equidistantly evenly distributed, and its spacing is 127 microns or 250 microns;
Step 3: place an optical fiber 21 at the input end of branch-waveguide 12, put lens 22, place a CCD thermal camera 23, with the coupling of collimating optical fibre 21 with branch-waveguide 16 input ends in lens 22 imagings place at the input and the output terminal of light waveguide raster 15;
Step 4: replace lens 22 and CCD thermal camera 23 to be coupled to the input and the output terminal of light waveguide raster 15 with a fiber array 24, and finish the coupling of fiber waveguide device and fiber array.
Wherein said light waveguide raster 15 is an array waveguide grating.
Please consulting Fig. 1 again, is to be the domain of the complete fiber waveguide device of example making with the arrayed waveguide grating type fiber waveguide device.This fiber waveguide device also can be star coupler, optical comb dress wave filter or other fiber waveguide devices.The principal feature of its method for designing is:
(1) input end 13 of light waveguide raster 15 and output terminal 12 the same side at device.
(2) input end 13 each input end spacing of light waveguide raster 15, output terminal 12 each output terminal spacing and input end and output terminal next-door neighbour's waveguide spacing specifications design all active according to the fiber array that will encapsulate or other, passive device is a certain value.
(3) at the additional branch-waveguide 16 in figure outside, this branch-waveguide 16 can be the Y branched structure, also can adopt multiple-mode interfence or other waveguiding structures.The splitting ratio suggestion of branch-waveguide is 50: 50, also can adopt the splitting ratio of other numerical value.Two output terminals 11,14 of branch-waveguide structure respectively with the distal-most end of device input waveguide 13 and output waveguide 12 next-door neighbour, and its spacing is identical with other waveguide spacings.
Fig. 2 is to be the packaging technology block diagram of the complete fiber waveguide device of example with the arrayed waveguide grating type fiber waveguide device.Wherein:
Fig. 2-the 1st, with the input end of single-mode fiber 21 or other optical fiber align branch-waveguide structures, penetrating mirror 22 and infrared CCD video camera 23 observe two luminous points at a distance of certain distance, illustrate that input end aims at.
Fig. 2-the 2nd is coupled and aligned to output terminal with fiber array.When adjusting to two ports of fiber array 24 outermost end waveguide-coupled output power corresponding with the branch-waveguide output terminal when maximum, being coupled and aligned of fiber array and fiber waveguide device finished.The device that is connected with fiber waveguide device also can be photodetector array or other active, passive device arrays.If the splitting ratio of branch-waveguide structure is 50: 50, then should make the output power after fiber array and branch-waveguide output terminal are coupled reach 50: 50 as far as possible, could guarantee the coupling effect that reaches best like this.Remove single-mode fiber 21 after coupling finishes, fiber array 24 usefulness ultra-violet curing glue are fixed on the fiber waveguide device, the coupling curing process finishes.
The present invention has effectively avoided the prior art shortcoming, has reduced technology difficulty, has reduced the coupling packaging cost.
Claims (5)
1, a kind of method that is used to realize fiber waveguide device coupling encapsulation is characterized in that: comprise the steps:
Step 1: etching one light waveguide raster on silicon dioxide substrates, the input of light waveguide raster and output be at same end, and make the input end of light waveguide raster and output terminal equidistantly evenly distributed;
Step 2: peripheral etching one branch-waveguide of light waveguide raster on silicon dioxide substrates, two output ports of this branch-waveguide and the input and output of light waveguide raster are at same end, the input end of this branch-waveguide is at the other end of this output, and input, the output waveguide of two output terminals of branch-waveguide and light waveguide raster are equidistantly evenly distributed;
Step 3: place an optical fiber at the input end of branch-waveguide, put lens, place a CCD thermal camera at the lens imaging place, with the coupling of collimating optical fibre and branch-waveguide input end at the input and the output terminal of light waveguide raster;
Step 4: replace lens and CCD thermal camera to be coupled to the input and the output terminal of light waveguide raster with a fiber array, and finish the coupling of fiber waveguide device and fiber array.
2, a kind of method that is used to realize fiber waveguide device coupling encapsulation according to claim 1, wherein the input end of the said light waveguide raster of step 1 and output terminal are equidistantly evenly distributed, and its spacing is 127 microns or 250 microns.
3, a kind of method that is used to realize fiber waveguide device coupling encapsulation according to claim 1, the said branch-waveguide of step 2 wherein adopts the Y branched structure or adopts the structure of multimode interference, and the splitting ratio of this branch-waveguide structure is 50: 50.
4, a kind of method that is used to realize fiber waveguide device coupling encapsulation according to claim 1, wherein input, the output terminal of two of the said branch-waveguide of step 2 output terminals and light waveguide raster are equidistantly evenly distributed, and its spacing is 127 microns or 250 microns.
5, a kind of method that is used to realize fiber waveguide device coupling encapsulation according to claim 1, wherein said light waveguide raster is an array waveguide grating.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2004100623352A CN1329759C (en) | 2004-07-06 | 2004-07-06 | Method for imploementing optical waveguide device coupled packaging |
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| CNB2004100623352A CN1329759C (en) | 2004-07-06 | 2004-07-06 | Method for imploementing optical waveguide device coupled packaging |
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| CN1329759C true CN1329759C (en) | 2007-08-01 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5982960A (en) * | 1997-01-22 | 1999-11-09 | Hitachi Cable, Ltd. | Optical wavelength multiplexer/demultiplexer |
| CN1262448A (en) * | 1999-02-01 | 2000-08-09 | 三星电子株式会社 | Optical wavethength multiplexer/multi-deplexer with uniform loss |
| US20020131705A1 (en) * | 2001-03-16 | 2002-09-19 | Whiteaway James E. | Arrayed waveguide grating |
| CN1449148A (en) * | 2002-03-30 | 2003-10-15 | 三星电子株式会社 | Dual wavelength-division multiplex / disintegrating apparatus using one plane light-conductive circuit |
-
2004
- 2004-07-06 CN CNB2004100623352A patent/CN1329759C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5982960A (en) * | 1997-01-22 | 1999-11-09 | Hitachi Cable, Ltd. | Optical wavelength multiplexer/demultiplexer |
| CN1262448A (en) * | 1999-02-01 | 2000-08-09 | 三星电子株式会社 | Optical wavethength multiplexer/multi-deplexer with uniform loss |
| US20020131705A1 (en) * | 2001-03-16 | 2002-09-19 | Whiteaway James E. | Arrayed waveguide grating |
| CN1449148A (en) * | 2002-03-30 | 2003-10-15 | 三星电子株式会社 | Dual wavelength-division multiplex / disintegrating apparatus using one plane light-conductive circuit |
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| CN1719296A (en) | 2006-01-11 |
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