CN1327091A - Cathode micro arc electrodepositing method for preparing oxide ceramic coating - Google Patents

Cathode micro arc electrodepositing method for preparing oxide ceramic coating Download PDF

Info

Publication number
CN1327091A
CN1327091A CN 01118541 CN01118541A CN1327091A CN 1327091 A CN1327091 A CN 1327091A CN 01118541 CN01118541 CN 01118541 CN 01118541 A CN01118541 A CN 01118541A CN 1327091 A CN1327091 A CN 1327091A
Authority
CN
China
Prior art keywords
metal
sample
oxide ceramic
ceramic coating
salt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN 01118541
Other languages
Chinese (zh)
Other versions
CN1138023C (en
Inventor
何业东
杨晓战
王德仁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Science and Technology Beijing USTB
Original Assignee
University of Science and Technology Beijing USTB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Science and Technology Beijing USTB filed Critical University of Science and Technology Beijing USTB
Priority to CNB011185414A priority Critical patent/CN1138023C/en
Publication of CN1327091A publication Critical patent/CN1327091A/en
Application granted granted Critical
Publication of CN1138023C publication Critical patent/CN1138023C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

During the preparation of oxide ceramic coating, one layer of insulating film is formed in advance on the surface of the sample before electrodeposition of the sample as cathode absolute alcohol water or aqueous alcohol solution of metal salt with the pulse voltage and duration being computer controlled continuously. The process of the present invention can be used to obtain metal oxide ceramic coating with single metal or composite metal as well as metal oxide ceramic coatings with different components or graidient component.

Description

A kind of cathode micro arc electrodepositing method for preparing oxide ceramic coating
The present invention relates to the top coat paint-on technique, particularly a kind of cathode technique method for preparing multiple oxide ceramic coating belongs to International Classification of Patents C25D9/08.
The method that is used at present preparing oxide ceramic coating both at home and abroad mainly contains physical vapor deposition (PVD), chemical vapor deposition (CVD) and plasma spraying method etc.Utilize PVD, CVD technology can obtain various oxide ceramic coatings, and coating quality height, but because it is a kind of gas-phase reaction deposition technique, therefore often need the air pressure control of higher temperature, strictness etc. in the deposition process, its preparation technology will be subjected to the influence of the geometrical dimension and the shape of reaction chamber, and the apparatus expensive that this technology adopts, the use cost height.These shortcomings have all limited this The Application of Technology.As long as plasma spraying method has that technological process is stable, easy handling, spray efficiency advantages of higher, and strict red-tape operati parameter, just can obtain the coating of favorable reproducibility, and method is economical and practical.But because the related parameter of technological process is many, so the difficult control of the quality of gained coating, and the performance of the coating that is obtained is not high.The common drawback of these methods is to be difficult for obtaining on complex-shaped workpiece the uniform coating of thickness.
Utilized electrochemical deposition technique to prepare the oxide ceramic coating technology in the last few years and receive people's concern day by day, it has following advantage:
1. the composition of coating, thickness and structure can be controlled by regulating electrochemical parameter easily;
2. be good conductor owing to electrode, and settling is very high oxide compound of resistance value or oxyhydroxide, sedimentary position
Because of resistance value is high further deposition is suppressed, deposition forwards to and is not deposited or position that settled layer is thin is advanced
OK, this feasible deposition is not subjected to the restriction of workpiece shape, can obtain even, complete on the workpiece of complicated shape
Coating;
3. can deposit method economy, easy at a lower temperature.
For this reason, people's research and utilization differential arc oxidization technique obtains oxide ceramic coating, has proposed plasma as Chinese patent 95114880 and has strengthened electrochemical surface potteryization method and product.Differential arc oxidation (MAO) is to grow up on the basis of anodizing technology, can on metallic matrix, obtain the fine and close oxide compound of one deck by anodic oxidation, this layer oxide compound is a layer insulating in electric field, when this insulation layer has certain thickness, apply suitable voltage the breakdown phenomenon of insulation layer can take place, occurred putting the arc phenomenon when puncturing, utilized and put the energy that arc produces and on matrix, to obtain the high-quality oxide coating of one deck.But this technology only is applicable to the valve metal (as Al, Mg) and the alloy thereof that can produce the anodic oxidation phenomenon, and can only obtain the corresponding oxide ceramic coating of this metal, therefore makes this The Application of Technology be restricted.
A kind of deposition-thermal decomposition sintering oxide film method that proposes in the Chinese patent 93100181, although can utilize the cathodic electrochemical deposition method to obtain various sulls, and matrix is unrestricted.But owing to what obtain in the deposition process is oxyhydroxide or other compound, need after deposition, make it change oxide compound into by sintering, and in the sintering process because the sedimental contraction that the volatilization of some material causes easily causes the cracking of produced film, therefore can only be used to obtain film.And the hardness of the film that obtains, density are not fine.
The objective of the invention is to advantage in conjunction with differential arc oxidization technique and cathodic electrochemical deposition technology, a kind of technology of cathode micro arc electrodepositing oxide ceramic coating is proposed, not only can obtain single metal oxide ceramic coating in various metallic surfaces, and can obtain the multilevel oxide of complex metal oxides, heterogeneity and the ceramic coating of component gradient, and the operating procedure of this technology is simple, is easy to automatization.
The present invention at first adopts solution dipping method, sample is heated to 400-1000 ℃, taking out the back immerses in the 0.05-0.3M aqueous metal salt rapidly, treat to take out and dry up after the sample cooling, cyclical operation 10-30 time, at the prefabricated one deck insulation oxide of specimen surface ceramic membrane, again metal-salt is dissolved in dehydrated alcohol or water or the aqueous ethanolic soln, the solution that is mixed with concentration and is 0.01-0.2M is as electrolytic solution, with the sample of prefabricated film as negative electrode, sample is applied pulsed voltage, the parameter area of pulsed voltage is that base value voltage is between the 0-100 volt, crest voltage is between the 100-1000 volt, and frequency is between 50-1000Hz, and dutycycle is between 10%-50%, deposit and after 1-12 hour sample is taken out, heated 30-120 minute down in 500-1000 ℃ in inert atmosphere dry back, to remove the trace carbon of surface deposition, can obtain oxide ceramic coating.
Metal-salt among the present invention can be nitrate or carbonate or muriate, and electrolytic solution can be used the metal-salt preparation of Zr, Al, Ce, Y, Ta, Ti, Ca, Mg, Fe, Zn, Pb, Ni, Hf, La, Pd, Co, Cr, Sn element.Electrolytic solution can also can be regulated by the metal-salt preparation of two or more element and the ratio of various metal-salts by a kind of metal-salt preparation of element.Sample can be in different electrolytic solution cyclic deposition.In deposition process, can continuously change the ratio of various metal-salts in the electrolytic solution.
The present invention has the following advantages:
1. the micro-arc discharge phenomenon owing at the prefabricated one deck insulation film of sample surfaces, when the sample in the electrolytic solution is applied certain voltage, can take place in the present invention like this on film.With this sample is negative electrode, is electrolytic solution with the dehydrated alcohol of metal-salt or water or aqueous ethanolic soln, the energy that in negative electrode generation galvanic deposit, utilizes microplasma with sample on sedimentary metallic compound be converted into the oxide ceramic layer of superior performance.Because micro-arc discharge preferentially takes place in the thin spot of film, and preferentially forms oxide ceramics at this place, this place's resistance is increased, micro-arc discharge is transferred to other thin spot then.Consequently micro-arc discharge shifts automatically at sample surfaces, causes the oxide ceramic layer homogenizing and constantly thickens.
2. the present invention can obtain various oxide ceramic coatings.When having only a kind of metal-salt of element in the electrolytic solution, can obtain single metal oxide ceramic coating; When containing two or more metal element salt in the electrolytic solution, can obtain the complex metal oxides ceramic coating, and the ratio of regulating various metal-salts in the electrolytic solution can obtain the complex metal oxides ceramic coating of heterogeneity; When cyclic deposition in different electrolytic solution, can obtain the multiple layer metal oxide ceramic coating of heterogeneity; When changing the ratio of each metal-salt in the electrolytic solution continuously, can obtain the complex metal oxides ceramic coating of component gradient.
3. the present invention can control the thickness and the structure of deposited coatings effectively by the parameter and the depositing time of stepless control pulsed voltage, and processing unit is simple, is easy to automatization
Describe the present invention in detail below in conjunction with embodiment:
1. dispose the Zr (NO of 0.1M 3) 46H 2O+7.8wt%Y (NO 3) 35H 2The aqueous solution of O with the mechanical polishing of Fe25Cr5Al alloy sample, is heated to 1000 ℃ with sample, takes out the Zr (NO that the back is immersed 0.1M rapidly 3) 46H 2O+7.8wt%Y (NO 3) 35H 2In the aqueous solution of O, treat to take out and dry up, cyclical operation 20 times after the sample cooling.With the sample after handling is negative electrode, and platinum electrode is an anode, with the Zr (NO of 0.1M 3) 46H 2O+7.8wt%Y (NO 3) 35H 2The aqueous solution of O is electrolytic solution, applies pulsed voltage (base value voltage is 0v, and crest voltage is 100v, and frequency is 100Hz, and dutycycle is 20%), deposits 12 hours, and sample takes out and heated 2 hours in argon gas under 1000 ℃ dry back, promptly obtains ZrO after the cooling 2-15wt%Y 2O 3Composite ceramic coat.
2. dispose the Al (NO of 0.2M 3) 39H 2Zr (the NO of the ethanol solution of O and the aqueous solution and 0.1M 3) 46H 2The ethanol solution of O with the mechanical polishing of Fe25Cr5Al alloy sample, is heated to 800 ℃ with sample, takes out the Al (NO that the back is immersed 0.2M rapidly 3) 36H 2In the aqueous solution of O, treat to take out and dry up, cyclical operation 10 times after the sample cooling.With the sample after handling is negative electrode, and platinum electrode is an anode, with the Al (NO of 0.2M 3) 36H 2The ethanol solution of O is an electrolytic solution, applies pulsed voltage (base value voltage is 20V, and crest voltage is 100V, and frequency is 100Hz, and dutycycle is 30%), deposits 10 hours, puts into the Zr (NO of 0.1M after sample taking-up and the drying again 3) 46H 2In the ethanol solution of O, (base value voltage is 0v, and crest voltage is 200v to apply pulsed voltage, frequency is 100Hz, and dutycycle is 20%), deposit 12 hours, sample takes out and heated 2 hours in argon gas under 1000 ℃ dry back, and promptly obtaining internal layer after the cooling is Al 2O 3Skin is ZrO 2The double-layer ceramic coating.
3. dispose the Ce (NO of 0.05M 3) 36H 2The ethanolic soln that contains 20% water and the aqueous solution of O with the mechanical polishing of Fe25Cr5Al alloy sample, are heated to 600 ℃ with sample, take out the Ce (NO that the back is immersed 0.05M rapidly 3) 36H 2In the aqueous solution of O, treat to take out and dry up, cyclical operation 20 times after the sample cooling.With the sample after handling is negative electrode, and platinum electrode is an anode, with the Ce (NO of 0.05M 3) 36H 2The ethanolic soln that contains 20% water of O is an electrolytic solution, and (base value voltage is 10V, and crest voltage is 300V to apply pulsed voltage, frequency is 200Hz, and dutycycle is 40%), deposit 2 hours, sample takes out and heated 1 hour in argon gas under 800 ℃ dry back, promptly obtains CeO after the cooling 2Ceramic coating.
4. dispose the Zr (NO of 0.1M 3) 46H 2O+7.8wt%Y (NO 3) 35H 2Zr (the NO of the ethanol solution of O and the aqueous solution and 0.1M 3) 46H 2The ethanol solution of O is heated to 1000 ℃ with sample, takes out the Zr (NO that the back is immersed 0.1M rapidly 3) 46H 2O+7.8wt%Y (NO 3) 35H 2In the O aqueous solution, treat to take out and dry up, cyclical operation 20 times after the sample cooling.With the sample after handling is negative electrode, and platinum electrode is an anode, with the Zr (NO of 0.1M 3) 46H 2O+7.8wt%Y (NO 3) 35H 2The O ethanol solution is an electrolytic solution, applies pulsed voltage (base value voltage is 0v, and crest voltage is 100v, and frequency is 100Hz, and dutycycle is 20%), and the sedimentary while splashes into the Zr (NO of 0.1M in electrolytic solution 3) 46H 2The ethanol solution of O deposits 12 hours, and sample takes out and heated 2 hours in argon gas under 1000 ℃ dry back, promptly obtains ZrO after the cooling 2The ZrO that increases gradually from inside to outside of content 2-Y 2O 3The component gradient ceramic coating.

Claims (4)

1, a kind of cathode micro arc electrodepositing method for preparing oxide ceramic coating, it is characterized in that, sample is heated to 400-1000 ℃, taking out the back immerses in the 0.05-0.3M aqueous metal salt rapidly, treat to take out and dry up after the sample cooling, cyclical operation 10-30 time, again metal-salt is dissolved in dehydrated alcohol or water or the aqueous ethanolic soln, the solution that is mixed with concentration and is 0.01-0.2M is as electrolytic solution, with the sample of prefabricated film as negative electrode, sample is applied pulsed voltage, deposit after 1-12 hour sample is taken out, heated 30-120 minute down in 500-1000 ℃ in inert atmosphere dry back.
2, the cathode micro arc electrodepositing method of preparation oxide ceramic coating as claimed in claim 1, it is characterized in that, the parameter area of pulsed voltage is that base value voltage is between the 0-100 volt, crest voltage is between the 100-1000 volt, frequency is between 50-1000Hz, and dutycycle is between 10%-50%.
3, the cathode micro arc electrodepositing method of preparation oxide ceramic coating as claimed in claim 1 is characterized in that, metal-salt can be nitrate or carbonate or muriate.
4, as the cathode micro arc electrodepositing method of claim 1,3 described preparation oxide ceramic coatings, it is characterized in that electrolytic solution can use the metal-salt preparation of Zr, Al, Ce, Y, Ra, Ti, Ca, Mg, Fe, Zn, Pb, Ni, Hf, La, Pd, Co, Cr, Sn element, electrolytic solution can be by a kind of metal-salt preparation of element, also can regulate by the ratio of preparation of the metal-salt of two or more element and various metal-salts, sample can be in different electrolytic solution cyclic deposition.In deposition process, can continuously change the ratio of various metal-salts in the electrolytic solution.
CNB011185414A 2001-05-31 2001-05-31 Cathode micro arc electrodepositing method for preparing oxide ceramic coating Expired - Fee Related CN1138023C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNB011185414A CN1138023C (en) 2001-05-31 2001-05-31 Cathode micro arc electrodepositing method for preparing oxide ceramic coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB011185414A CN1138023C (en) 2001-05-31 2001-05-31 Cathode micro arc electrodepositing method for preparing oxide ceramic coating

Publications (2)

Publication Number Publication Date
CN1327091A true CN1327091A (en) 2001-12-19
CN1138023C CN1138023C (en) 2004-02-11

Family

ID=4663261

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB011185414A Expired - Fee Related CN1138023C (en) 2001-05-31 2001-05-31 Cathode micro arc electrodepositing method for preparing oxide ceramic coating

Country Status (1)

Country Link
CN (1) CN1138023C (en)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1299135C (en) * 2002-06-20 2007-02-07 富士施乐株式会社 Process for preparation of optical element, electrolytic solution used for the same and apparatus for preparation of optical element
CN102634832A (en) * 2012-05-10 2012-08-15 中国兵器工业第五九研究所 Method for preparing aluminum alloy element surface coating and system thereof
CN104372394A (en) * 2014-07-03 2015-02-25 西安工业大学 Preparation method for oxide ceramic layer
CN104562128A (en) * 2015-01-09 2015-04-29 西安工业大学 Method for preparing thermal protection ceramic layer on surface of metal or metal composite material
CN104746120A (en) * 2015-03-06 2015-07-01 深圳大学 Carbon/carbon composite material containing bioactive calcium phosphate coating on surface and preparation method for carbon/carbon composite material
CN105132982A (en) * 2015-09-24 2015-12-09 中国工程物理研究院材料研究所 Method for preparing uranium and its alloy surface ceramic coating layers
CN105420774A (en) * 2015-11-03 2016-03-23 中国第一汽车股份有限公司 Method for preparing nano cerium oxide coating on metal carrier
CN105441999A (en) * 2015-11-03 2016-03-30 中国第一汽车股份有限公司 Method for preparing nanometer lanthanum oxide coating on metal carrier
CN106480482A (en) * 2016-12-15 2017-03-08 河海大学常州校区 A kind of cathode surface nanosecond pulse plasma prepares solution and the preparation method of catalytic nanometer perforated membrane
CN106801241A (en) * 2017-02-13 2017-06-06 广东飞翔达科技有限公司 The device and method of a kind of ceramic protective coating of generation on metal parts
CN107557836A (en) * 2017-09-07 2018-01-09 西北工业大学 TiAl alloy surface cathode micro arc plasma body electrolytic deposition prepares CeO2‑Al2O3The method of composite ceramic layer
CN108147831A (en) * 2016-12-06 2018-06-12 航天特种材料及工艺技术研究所 A kind of preparation method of C/C composite materials high-temperature oxidation resistant coating
CN111378970A (en) * 2020-04-26 2020-07-07 西安交通大学 Method for preparing high-frequency electric knife insulating coating based on micro-arc oxidation method
CN111676499A (en) * 2020-07-30 2020-09-18 华南理工大学 Hydrogen-resistant coating based on cathode plasma electrolytic deposition and preparation method thereof
CN112647106A (en) * 2020-10-29 2021-04-13 西安交通大学 Method for preparing zirconia-based ceramic coating by electrolyzing stainless steel surface catholyte phase plasma
CN113430613A (en) * 2021-06-17 2021-09-24 西安交通大学 Method for preparing ceramic coating on inner surface and outer surface of complex special-shaped component
CN115745644A (en) * 2022-11-14 2023-03-07 航天特种材料及工艺技术研究所 Carbon fiber toughened ceramic matrix composite and preparation method thereof

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1299135C (en) * 2002-06-20 2007-02-07 富士施乐株式会社 Process for preparation of optical element, electrolytic solution used for the same and apparatus for preparation of optical element
CN102634832A (en) * 2012-05-10 2012-08-15 中国兵器工业第五九研究所 Method for preparing aluminum alloy element surface coating and system thereof
CN102634832B (en) * 2012-05-10 2015-04-22 中国兵器工业第五九研究所 Method for preparing aluminum alloy element surface coating and system thereof
CN104372394A (en) * 2014-07-03 2015-02-25 西安工业大学 Preparation method for oxide ceramic layer
CN104562128A (en) * 2015-01-09 2015-04-29 西安工业大学 Method for preparing thermal protection ceramic layer on surface of metal or metal composite material
CN104746120A (en) * 2015-03-06 2015-07-01 深圳大学 Carbon/carbon composite material containing bioactive calcium phosphate coating on surface and preparation method for carbon/carbon composite material
CN105132982A (en) * 2015-09-24 2015-12-09 中国工程物理研究院材料研究所 Method for preparing uranium and its alloy surface ceramic coating layers
CN105420774A (en) * 2015-11-03 2016-03-23 中国第一汽车股份有限公司 Method for preparing nano cerium oxide coating on metal carrier
CN105441999A (en) * 2015-11-03 2016-03-30 中国第一汽车股份有限公司 Method for preparing nanometer lanthanum oxide coating on metal carrier
CN108147831A (en) * 2016-12-06 2018-06-12 航天特种材料及工艺技术研究所 A kind of preparation method of C/C composite materials high-temperature oxidation resistant coating
CN108147831B (en) * 2016-12-06 2020-06-12 航天特种材料及工艺技术研究所 Preparation method of C/C composite material high-temperature oxidation-resistant coating
CN106480482A (en) * 2016-12-15 2017-03-08 河海大学常州校区 A kind of cathode surface nanosecond pulse plasma prepares solution and the preparation method of catalytic nanometer perforated membrane
CN106801241A (en) * 2017-02-13 2017-06-06 广东飞翔达科技有限公司 The device and method of a kind of ceramic protective coating of generation on metal parts
CN107557836B (en) * 2017-09-07 2019-11-05 西北工业大学 TiAl alloy surface cathode micro arc plasma body electrolytic deposition prepares CeO2-Al2O3The method of composite ceramic layer
CN107557836A (en) * 2017-09-07 2018-01-09 西北工业大学 TiAl alloy surface cathode micro arc plasma body electrolytic deposition prepares CeO2‑Al2O3The method of composite ceramic layer
CN111378970A (en) * 2020-04-26 2020-07-07 西安交通大学 Method for preparing high-frequency electric knife insulating coating based on micro-arc oxidation method
CN111378970B (en) * 2020-04-26 2021-07-13 西安交通大学 Method for preparing high-frequency electric knife insulating coating based on micro-arc oxidation method
CN111676499A (en) * 2020-07-30 2020-09-18 华南理工大学 Hydrogen-resistant coating based on cathode plasma electrolytic deposition and preparation method thereof
CN112647106A (en) * 2020-10-29 2021-04-13 西安交通大学 Method for preparing zirconia-based ceramic coating by electrolyzing stainless steel surface catholyte phase plasma
CN113430613A (en) * 2021-06-17 2021-09-24 西安交通大学 Method for preparing ceramic coating on inner surface and outer surface of complex special-shaped component
CN115745644A (en) * 2022-11-14 2023-03-07 航天特种材料及工艺技术研究所 Carbon fiber toughened ceramic matrix composite and preparation method thereof
CN115745644B (en) * 2022-11-14 2023-08-22 航天特种材料及工艺技术研究所 Carbon fiber toughened ceramic matrix composite material and preparation method thereof

Also Published As

Publication number Publication date
CN1138023C (en) 2004-02-11

Similar Documents

Publication Publication Date Title
CN1138023C (en) Cathode micro arc electrodepositing method for preparing oxide ceramic coating
TWI564437B (en) Non-metallic coating and method of its production
Gal‐Or et al. Electrolytic ZrO2 coatings: I. Electrochemical aspects
KR100868547B1 (en) Electrolytic process for plasma microarc oxidation and electronic generator of the current source type for implementing the process
CN102677127B (en) Magnesium alloy microarc oxidation-electrophoresis composite coating and preparation method thereof
US6071570A (en) Electrodes of improved service life
CN106757260B (en) A kind of its application of the composite Nano electrolyte being used to prepare micro-arc oxidation of aluminum alloy surface film
CN110819965A (en) Energy-saving preparation method of anode aluminum foil for aluminum electrolytic capacitor
JPH02247393A (en) Electrolytic electrode with durability and its production
Bu et al. Al 2 O 3-TiO 2 composite oxide films on etched aluminum foil fabricated by electrodeposition and anodization
CN1014726B (en) Treating method for electrolytic etching of metal
CN112663105A (en) Method for preparing oxide ceramic coating by catholyte plasma electrolysis
WO2011036225A1 (en) Electrode for electrolytic processes with controlled crystalline structure
JPH08199384A (en) Electrolyzing electrode and its production
JPH07229000A (en) Oxygen generating anode
JP3621148B2 (en) Electrode for electrolysis and method for producing the same
CN101451263B (en) Method for electrophoretic deposition of rare-earth lanthanum oxide film on aluminium alloy surface
JP3832645B2 (en) Electrode for electrolysis and method for producing the same
Bespalova et al. The Formation of Vanadium-Containing Coatings in a Stagewise Microarc Oxidation Process
US10030300B2 (en) Substrate coating on one or more sides
CN1040345C (en) Electro-chemical deposition-thermal decomposition method for sintering oxide film
CN100467676C (en) Method for plasma electrolytic oxidation preparation of ceramic oxide film and its products
KR20110011001A (en) Insoluble anode and method of preparing insoluble anode
Wang et al. Mechanism of Cathodic Plasma Electrolytic Deposition on Ti6Al4V Alloy in Al (NO3) 3 Ethanol-Aqueous Solution
CN1268417C (en) Metallic compound film material and its preparation method

Legal Events

Date Code Title Description
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C06 Publication
PB01 Publication
C14 Grant of patent or utility model
GR01 Patent grant
C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee