CN1318136A - 流体静压支承装置 - Google Patents

流体静压支承装置 Download PDF

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Publication number
CN1318136A
CN1318136A CN00801423A CN00801423A CN1318136A CN 1318136 A CN1318136 A CN 1318136A CN 00801423 A CN00801423 A CN 00801423A CN 00801423 A CN00801423 A CN 00801423A CN 1318136 A CN1318136 A CN 1318136A
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bearing device
hydrostatic bearing
sealing
fluid chamber
described hydrostatic
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CN00801423A
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CN1099532C (zh
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索尔斯腾·拉什
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Deckel Maho Seebach GmbH
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Deckel Maho Seebach GmbH
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
    • F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
    • F16C32/0644—Details of devices to control the supply of liquids to the bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
    • F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
    • F16C32/0651—Details of the bearing area per se
    • F16C32/0659—Details of the bearing area per se of pockets or grooves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/0666—Details of hydrostatic bearings independent of fluid supply or direction of load of bearing pads
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/72—Sealings
    • F16C33/74—Sealings of sliding-contact bearings

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

关于流体静压支承装置，其用于两个具有相互平行设置的平面(1a,1a′；2a,2a′)的、可相互相对运动的机械部分(1,1′；2)并且具有流体室(3)，流体室(3)由两不同的机械部分(1,1′；2)的部分限定，这些部分形成间隙(3a)。流体室(3)中的流体处于压力作用下。两不同机械部分(1,1′；2)之间的间隙(3a)借助于密封件(4)封闭并且由蓄压器(5)保持流体室(3)中的压力。

Description

流体静压支承装置
本发明涉及按照权利要求1的前序部分的流体静压支承装置。
通常已知的流体静压支承装置具有总是与一压力源相连通的流体室，压力源在流体室中产生压力并且不断地补偿经由支承间隙流出的流体量。流出的支承流体在支承的外部加以回收并可以重新输给压力源。
流体静压支承装置与其他支承型式相比具有众多的优点，但是与其他的支承装置相比，例如与由球元件或滚子元件构成的支承相比，它不仅在制造方面而且在运行方面的费用较高。其中的原因在于，已知的流体静压支承装置总是必须由通常为高压泵方式的压力源供给以压力流体。在这种情况下由在必要时存在的多个压力室中的每个压力流体室都必须通过一个在流体上分开的管道来供给流体。此外，流出的支承流体的回收费用是很大的。
从上述现有技术出发，本发明的目的在于，提供一种构造简单的、可节省成本制造的并且可以很少的运行费用运行的流体静压支承装置，其没有上述的已知的流体静压支承装置的缺点。
该目的通过权利要求1所述的特征来达到。
密封件的设置使其在不同的可相互相对运动的机械部分的相互平行设置的平面之间的泄漏量可以保持到很小，以致实际上可以忽略流出的流体量。密封件的设计使其可以体现出，蓄压器的补充充满的时间间距很长，以致补充充满过程对支承装置的使用能力没有影响。支承装置可以紧凑地设计并且不占用外部的尺寸，从而它在狭窄的空间情况下也可以安装。
本发明的优选的发展由从属权利要求给出。
以下将借助于附图详细地描述本发明的优选实施形式。其中
图1通过两相互面向对准的流体静压支承装置截取的横剖面；
图2通过按照图1支承装置中剖线Ⅱ-Ⅱ截取的剖面。
图1中，两个以其相互面向对准的作用的支承装置设置在两第一机械部分1和1′上，它们借助于螺钉1b结合成一个导向座。导向座嵌接一作为导向板构成的第二机械部分2。导向板可以固定在机架上，而导向座可以沿垂直于图面方向在导向板上移动。
在机械部分1和1′与机械部分2之间始终存在间隙3a、间隙3a由平面1a和2a以及由平面2a′和1a′限定。
间隙3a避免机械部分1和1′与机械部分2的接触。在机械部分1和1′中都设有蓄压器5，其保持流体室3中的流体处于压力作用下。流体室3由一圆环形密封件4限定。
蓄压器5具有活塞5b，其可在缸室5a内移动并且用活塞环5d相对于缸壁密封。活塞5b在一侧受一压缩弹簧5c作用，该弹簧产生流体压力。通过蓄压器5保持流体室3中的流体压力，即使经过足够长的时间间隔出现微小流体损失时也是如此。流体室3与一流体供给管5e相连通而可关闭，借助该流体供给管可以补偿因泄漏损失的流体。
环形密封件4安装在机械部分1和1′的环形槽中并且支撑在槽底部处的弹性元件4b上。密封件4在向着机械部分2的一边设计成刀刃形状。它与第二机械部分2的平面2a和2a′一起形成接触部分4a。由于接触部分4a的刀刃形状，微小的接触压力对间隙3a的密封来说是足够的。支承的流体静压作用不会因小的接触面积和小的接触压力而受到不利的影响。
在纵向导轨中沿进给方向接连地设置多个支承装置，如图2中所示。全部的、由密封件4限定的、在平面1a与2a以及平面1a′与2a′之间的流体室3由一共同的附加的密封件6包围，密封件6可以避免污物侵入间隙3a和损坏接触部分4a。

Claims (8)

1．流体静压支承装置，用于两个具有相互平行设置的平面(1a,1a′；2a,2a′)的、可相互相对运动的机械部分(1,1′；2)，该支承装置具有流体室(3)，其由两不同的机械部分(1,1′；2)的部分限定，这些部分形成间隙(3a)，其中流体室(3)中的流体处于压力作用下，其特征在于，两机械部分(1,1′；2)之间的间隙(3a)借助于密封件(4)封闭并且由蓄压器(5)保持流体室(3)中的压力。
2．按照权利要求1所述的流体静压支承装置，其特征在于，与机械部分(1,1′)相连接的密封件(4)以其刀刃形的接触部分(4a)贴靠在另一机械部分(2)的相对平面(2a,2a′)上。
3．按照权利要求1或2所述的流体静压支承装置，其特征在于，密封件(4)在沿刀刃形接触部分(4a)的方向是预紧的。
4．按照权利要求1至3的一项或多项所述的流体静压支承装置，其特征在于，流体室(3)设计成圆形的并且密封件(4)设计成圆环形的。
5．按照权利要求1至4的一项或多项所述的流体静压支承装置，其特征在于，在由密封件(4)封闭的区域外部设置一附加的密封件(6)。
6．按照权利要求1至5的一项或多项所述的流体静压支承装置，其特征在于，蓄压器(5)具有受预紧的、可在缸室(5a)中移动的活塞(5b)。
7．按照权利要求6所述的流体静压支承装置，其特征在于，活塞(5b)借助于压缩弹簧预紧。
8．按照权利要求1至7的一项或多项所述的流体静压支承装置，其特征在于，设置一可关闭的通向流体室(3)的流体供给管(5e)。
CN00801423A 1999-04-17 2000-02-29 流体静压支承装置 Expired - Fee Related CN1099532C (zh)

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DE19917516.0 1999-04-17
DE19917516A DE19917516A1 (de) 1999-04-17 1999-04-17 Hydrostatische Lagervorrichtung

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EP (1) EP1171719B1 (zh)
JP (1) JP3639852B2 (zh)
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CZ (1) CZ294211B6 (zh)
DE (2) DE19917516A1 (zh)
ES (1) ES2190954T3 (zh)
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Cited By (6)

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CN103394983A (zh) * 2013-08-06 2013-11-20 中国科学院长春光学精密机械与物理研究所 用于超大口径光学加工的静压支撑装置
CN104024668A (zh) * 2012-01-10 2014-09-03 奥依列斯工业株式会社 静压气体轴承装置
CN104100636A (zh) * 2013-04-01 2014-10-15 上海意丰机电科技开发有限公司 带保压环的滑动轴承
CN105626691A (zh) * 2016-03-09 2016-06-01 仁兴机械（佛山）有限公司 活塞式液体平面静压油垫及设有该油垫的压铸机
CN107309669A (zh) * 2016-04-26 2017-11-03 有限会社新研究所 重物支承装置
US10077806B2 (en) 2015-07-15 2018-09-18 National Tsing Hua University Compact bearing system and machine stage system equipping the same

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DE102007030883A1 (de) 2007-07-03 2009-01-08 Schaeffler Kg Dichtung für eine hydrostatische Linearführung
CN102777496B (zh) * 2012-08-09 2017-10-10 华锐风电科技(集团)股份有限公司 多油腔静压油膜厚度自动补偿装置及系统
JP6559937B2 (ja) * 2014-10-28 2019-08-14 東芝機械株式会社 油静圧案内機構および工作機械
DE102017005663A1 (de) * 2017-06-14 2018-12-20 Hochschule Niederrhein Hydrostatische Gleitlageranordnung
CN114992242B (zh) * 2022-06-16 2023-06-20 中国工程物理研究院机械制造工艺研究所 一种抗扰动气浮轴承

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CN104024668A (zh) * 2012-01-10 2014-09-03 奥依列斯工业株式会社 静压气体轴承装置
CN104024668B (zh) * 2012-01-10 2017-02-22 奥依列斯工业株式会社 静压气体轴承装置
CN104100636A (zh) * 2013-04-01 2014-10-15 上海意丰机电科技开发有限公司 带保压环的滑动轴承
CN103394983A (zh) * 2013-08-06 2013-11-20 中国科学院长春光学精密机械与物理研究所 用于超大口径光学加工的静压支撑装置
CN103394983B (zh) * 2013-08-06 2015-06-10 中国科学院长春光学精密机械与物理研究所 用于超大口径光学加工的静压支撑装置
US10077806B2 (en) 2015-07-15 2018-09-18 National Tsing Hua University Compact bearing system and machine stage system equipping the same
TWI662203B (zh) * 2015-07-15 2019-06-11 國立清華大學 液壓軸承系統及裝配有液壓軸承系統之移動平台系統
CN105626691A (zh) * 2016-03-09 2016-06-01 仁兴机械（佛山）有限公司 活塞式液体平面静压油垫及设有该油垫的压铸机
CN105626691B (zh) * 2016-03-09 2018-05-01 仁兴机械（佛山）有限公司 一种具有活塞式液体平面静压油垫的压铸机
CN107309669A (zh) * 2016-04-26 2017-11-03 有限会社新研究所 重物支承装置
CN107309669B (zh) * 2016-04-26 2019-05-28 有限会社新研究所 重物支承装置
US10632580B2 (en) 2016-04-26 2020-04-28 Yugen Kaisha Newly Laboratory Heavy object supporting device

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EP1171719B1 (de) 2003-04-02
CN1099532C (zh) 2003-01-22
ES2190954T3 (es) 2003-09-01
EP1171719A1 (de) 2002-01-16
CZ294211B6 (cs) 2004-10-13
US6644856B2 (en) 2003-11-11
JP3639852B2 (ja) 2005-04-20
DE19917516A1 (de) 2000-11-16
JP2002542437A (ja) 2002-12-10
DE50001618D1 (de) 2003-05-08
CZ200157A3 (cs) 2001-08-15
WO2000063571A1 (de) 2000-10-26
US20010021284A1 (en) 2001-09-13

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