CN1296609A - Magnetic head having layered structure - Google Patents
Magnetic head having layered structure Download PDFInfo
- Publication number
- CN1296609A CN1296609A CN00800299A CN00800299A CN1296609A CN 1296609 A CN1296609 A CN 1296609A CN 00800299 A CN00800299 A CN 00800299A CN 00800299 A CN00800299 A CN 00800299A CN 1296609 A CN1296609 A CN 1296609A
- Authority
- CN
- China
- Prior art keywords
- magnetosphere
- magnetic head
- magnetic
- insulation course
- cobalt alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3916—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide
- G11B5/3919—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/147—Structure or manufacture of heads, e.g. inductive with cores being composed of metal sheets, i.e. laminated cores with cores composed of isolated magnetic layers, e.g. sheets
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Magnetic head (1) having a head face (3) and a layer structure (7) comprising a first magnetic layer (13a, 13b), a second magnetic layer (17) and a thin insulation layer (19a, 19b) electrically separating these magnetic layers. At least the first layer of these magnetic layers comprises an amorphous cobalt alloy and is an integral part of the first magnetic layer comprising the amorphous cobalt alloy.
Description
The present invention relates to have the magnetic head of magnetic head face and hierarchy, hierarchy comprises first magnetosphere, second magnetosphere and the insulation course that is used for these magnetosphere electricity are separated, and the ground floor at least of described magnetosphere comprises the amorphous cobalt alloy.
Such magnetic head can be known among 284,572 (PHN13.265) from US-A5.The known magnetic head with film-type comprises soft magnetosphere, plays the effect of magnetic flux director element and facing to the reverse magneto-resistive layer of extending of the barrier of magnetic flux director element, plays the effect of inverting element.SiO
2Insulation course, be used for making the mutual electrical isolation of magnetic flux director element and inverting element, it exist in this two-layer between.Have sizable thickness by the insulation course that constitutes of deposition on the magnetic flux director element, 400nm (nanometer) for example is so that reach the insulation of wanting.Exist the shortcoming of so quite thick insulation course to be, at run duration, a part of magnetic information that is provided by the magnetic flux director element does not reach inverting element, but stops that owing to what insulation course caused it crosses the path that does not extend to inverting element.Certainly, this efficient for magnetic head has injurious effects.
An object of the present invention is to make that the insulation course on the magnetic head of describing has thinner structure in starting one section.
In order to reach this purpose, be characterised in that according to magnetic head of the present invention insulation course comprises the cobalt oxide that is formed by the amorphous cobalt alloy.
Found through experiments, such insulation course can have good like this dielectric property and have such homogeneous texture, makes to arrive in the quite little thickness of 100nm (nanometer) 10, and needed resistance is presented between the magnetosphere.In one embodiment, insulation course is an integral part of first magnetosphere.
Embodiment according to magnetic head of the present invention is characterised in that the amorphous cobalt alloy is CoNbZr alloy, Co specifically
88Nb
9Zr
30Have been found that the insulation course of CoNbZrO (it mainly comprises one or more cobalt oxides) can be realized in simple mode during manufacture when using the magnetosphere of CoNbZr alloy.This is described in detail later.
According to being characterized as of the embodiment of magnetic head of the present invention as regulation in the claim 4.In such magnetic head, in fact be implemented as thin-film head, the distance between magnetoresistive element (MR element) and magnetic flux targeting part can be quite little, for example the magnitude of 50nm.Little between MR element and the magnetic flux targeting part,, promptly provide to have the magnetic head of potent rate so that reach another object of the present invention apart from the coupling between Enhanced MR element and the magnetic flux targeting part.Be particularly suitable in register system, being used as reading head according to magnetic head of the present invention.
According to being characterized as of the embodiment of magnetic head of the present invention as regulation in the claim 5.Magnetic head with such structure is commonly called interlayer magnetic head (Standwich head).The interlayer magnetic head can be used in magnetic recording and/or build system again.The magnetosphere of amorphous cobalt alloy has satisfied soft magnetic characteristic, such as, high saturation magnetization, low coercivity, low magnetostriction and high magnetoconductivity.Contain high ohm oxide according to the insulation course that uses in the magnetic head of the present invention, it has quite little thickness, about 100nm magnitude.Therefore, between adjacent magnetosphere, has effective power block layer, so that compression swirl and might pile up magnetosphere compactly effectively.
The present invention also relates to make the method for layer structure (comprising first magnetosphere, the insulation course and second magnetosphere).
Such method can be from US-A5 from magnetic head, knows that it is used for being manufactured on the magnetic head of describing in the opening paragraph in 284,572.In known method, first magnetosphere is that the deposition by NiFe forms, and after this, by the deposition electrically insulating material, specifically is SiO
2, on this magnetosphere, provide insulation course.Subsequently, by on insulation course, depositing, provide magneto-resistive layer by the first magnetosphere support.In known method,, promptly be used to form the deposition step and another deposition step that is used to provide insulation course of magnetosphere so deposition step several but that be different in essence must be arranged.
The objective of the invention is to improve and simplify known method.In order to reach this purpose, be characterised in that according to method of the present invention, first magnetosphere is that the deposition by the amorphous cobalt alloy forms, after this, this layer is exposed in the well-oxygenated environment, be used to form the one deck that comprises cobalt oxide, after this, second magnetosphere is to be formed by deposition magnetic material on the oxide layer that forms.In this method, cobalt oxide obtains the back at magnetosphere and forms simply by it being placed in the well-oxygenated environment.The insulation course of Xing Chenging can think to comprise an integral part of first magnetosphere of amorphous cobalt alloy like this.
Usually preferably form magnetosphere by carry out sputter in sputtering system, if wherein use with same cobalt-base alloy in each magnetosphere, preferably the CoNbZr alloy then can use same target at every turn.The formation of cobalt oxide can be in employed sputtering system by providing oxygen or by using the plasma oxidation effect or as active gases target is carried out active sputter with oxygen, and carry out.Plasma oxidation effect and active sputtering at are technically known.Stipulate in claim 7 according to relevant change example of the present invention.
The present invention also relates to be used for information is written to magnetic recording medium or from the equipment of magnetic recording medium sense information by magnetic head.This equipment can be known type, and recording medium is disk or band shape therein, but has wherein used according to magnetic head of the present invention.In PCT patented claim WO97/24712, describe and shown that known equipment (quote at this, for your guidance) by this patent.
For claim, should be pointed out that the various combinations of the feature of defined in the appended claims are possible.
Set forth these and other aspect of the present invention with reference to embodiment below.
In the accompanying drawings:
Fig. 1 is the sectional view according to the first embodiment of the present invention,
Fig. 2 is the vertical elevational view according to the second embodiment of the present invention, and
Fig. 3 is the vertical elevational view with the part (according to the arrow III) of second embodiment of bigger ratio scale demonstration.
As shown in Figure 1, be implemented as thin-film head according to magnetic head 1 of the present invention, it has magnetic head face 3.Magnetic head 1 comprises substrate 5, is presented on the layer structure 7 on the substrate 5 and is presented on protection piece 9 on layer structure 7.Layer structure 7 has SiO
2Or Al
2O
3 Insulated substrate 11, it is provided on the substrate 5 of permeability magnetic material (for example, NiZn ferrite).Layer structure 7 also has the first magnetosphere 13a, 13b, and its ground floor part 13a and magnetic head face 3 has a common boundary, and it and second layer part 13b are spaced-apart, and slit 15 fillings are with non-magnetic conduction and non-conductive material, as SiO
2, it extends between two layer segment 13a and the 13b.Ground floor part 13a constitutes the first magnetic flux targeting part adjacent with the magnetic head face, and second layer part 13b constitutes the second magnetic flux targeting part.Slit 15 between magnetic flux targeting part 13a and 13b is by magnetoresistive element (MR element) bridge joint, and the MR element is also formed by second magnetosphere 17.The first magnetosphere 13a, the 13b and second magnetosphere 17 are made up of amorphous cobalt alloy (particularly CoNbZr alloy) in the present embodiment.Insulation course 19a, 19b are magnetosphere 13a, and 13b and 17 mutual electricity separate, and it extends in the first magnetosphere 13a, between the 13b and second magnetosphere 17.Insulation course 19a, 19b comprise by the first magnetosphere 13a, the cobalt oxide that the amorphous cobalt alloy of 13b forms.
Magnetic head shown in Figure 1 is by using embodiment according to method of the present invention to make, the first magnetosphere 13a wherein, 13b is formed in the basic unit by means of sputtering sedimentation amorphous cobalt alloy in sputtering system, after this, and this one deck 13a, 13b is exposed in the well-oxygenated environment, be used to form cobalt oxide, cause insulation course 19a, 19b, therefore it is the first magnetosphere 13a, the integral part of 13b.In the present embodiment, insulation course 19a, 19b have the thickness of 50nm.Forming insulation course 19a, after the 19b, slit 15 is filled with non magnetic, non-conducting material, is SiO in the present embodiment
2, after this, second magnetosphere 17 is formed by means of sputtering sedimentation soft magnetic material (in the present embodiment, being the amorphous state cobalt-base alloy).Subsequently, this one deck 17 is configured to insulation material layer 21, is SiO in the present embodiment
2, place protection piece 9 thereon.Subsequently, magnetic head face 3 can be plane or curved surface, is formed by polishing and/or correct grinding.Should be pointed out that and do not show electric input and output conductor on the figure.Should also be noted that magnetic head can be made single channel or multichannel magnetic head.Magnetic head can be made into and banded record or information medium (specifically being tape) coordinated operation, or with disc like recording or information medium (specifically being disk or magnetooptical disc) coordinated operation.
Shown in Fig. 2 and 3, are interlayer magnetic heads according to magnetic head 101 of the present invention.The interlayer magnetic head is used in the system of magnetic writing information and/or sense information, such as the video tape system.Magnetic head 101 has two ceramic substrate 103a, 103b and 105a, 105b, one is placed on substrate 103a, 103b and 105a, the different layers between the 105b pile up 107, and coil 109 that is used as inverting element.In the present embodiment, substrate is by CaTiO
3Make.Piling up 107 is layer structure that the insulation course 107b of magnetosphere 107 that comprises the amorphous cobalt alloy and the cobalt oxide that is formed by the amorphous cobalt alloy replaces.Magnetosphere 107a is responsible for magnetic flux, thus should have satisfied soft magnetic characteristic, such as, high saturation magnetization, low coercivity and low magnetostriction.And magnetoconductivity should be enough high in wide frequency range.Originally just knew that the CoNbZn alloy was the material that is well suited for being used for this purposes.Know also and utilize the rotation magnetoconductivity that so that reach magnetoconductivity high in wide frequency range, in this case, the domination of needed magnetic domain orientation can be by using magnetic field or reaching by the annealing soft magnetic material during sputter in the CoNbZn alloy-layer.The insulation course 107b that exists is used for forbidding eddy current, otherwise eddy current can reduce magnetoconductivity.The insulation course 107b that has been found that cobalt oxide existence, that made by alloy has sufficiently high resistance, allows to form the lamination of insulation, so that forbid eddy current effectively.Magnetic head 101 has magnetic head face 111, also is surface of contact in the present embodiment, is used for and the tape coordinated operation, and the direction that tape is represented along arrow x at run duration moves past magnetic head face 111.
About the manufacturing of magnetic head 101, particularly it pile up 107, can make the following description.The invention provides the possibility that realizes that output increases, if soft magnetosphere 107a and insulation course 107b form by sputter, wherein two sputter procedure are finished in same sputter equipment.In this respect, form the advantageous method of all layer 107a and 107b from same CoNbZr target.In the first step of first method, CoNbZr is deposited by sputter, so that form soft magnetosphere 107a.In second step, use the plasma oxidation effect, mainly form cobalt oxide and CoNbZrO therein, so that constitute the first insulation course 107b.First and second steps repeat needed number of times subsequently, so as the number of the layer 107a and the 107b that obtain wanting pile up 107.The target that is fit to is a kind of Co
88Nb
9Zr
3The target of alloy.The RF power of depressing 100W and 200W at the oxygen of 0.8Pa (handkerchief) that experiment showed, that carries out in the plasma oxidation action method is the insulation course 107b that is suitable for realizing high ohm.Oxidization time is 10 minutes.Find that also in these experiments, the magnetic characteristic of the soft magnetosphere 107a of existence such as coercivity, is not subjected to or is subjected to hardly injurious effects.In the second approach, CoNbZr is deposited by first sputter procedure of using the sputter clock, so that form soft magnetosphere 107a, in second sputter procedure, has the active sputter of oxygen, so that form insulation course 107b.The sputter rate of 10nm/min (nanometer/per minute) is possible under the RF power that experiment showed, at 500W.Experiment is proof also, and the CoNbZrO of formation does not have injurious effects for the magnetic characteristic of already present CoNbZr alloy.In the embodiment of reality, each is 2500nm for the thickness of magnetosphere 107a, and the thickness of insulation course 107b each be 100 to 200nm.In the embodiment of reality, the number altogether of the magnetosphere 107a in piling up normally 10 to 25.
Should be pointed out that the present invention is not limited to shown embodiment.The magnetic head of other type except shown for example, has the magnetic head and the magnetic head that is used as the magnetic head, particularly film-type of sensor of huge magnetoresistive element, all belongs to scope of the present invention.
Claims (8)
1. the magnetic head that has magnetic head face and hierarchy, hierarchy comprises first magnetosphere, second magnetosphere and be used for making the insulation course that described magnetosphere electricity separates, and the ground floor of described at least magnetosphere comprises the amorphous cobalt alloy, it is characterized in that insulation course comprises the cobalt oxide of making from the amorphous cobalt alloy.
2. the magnetic head as requiring in the claim 1 is characterized in that insulation course is an integral part of first magnetosphere.
3. the magnetic head as requiring in the claim 1 is characterized in that the amorphous cobalt alloy is the CoNbZr alloy.
4. the magnetic head as requiring in the claim 1, it is characterized in that, first magnetosphere that comprises the amorphous cobalt alloy is the magnetic flux targeting part adjacent with the magnetic head face, and second magnetosphere be the magnetoresistive inverting element, and comprise that the insulation course of cobalt oxide extends between the magnetic flux targeting part and magnetoresistive inverting element that comprises the amorphous cobalt alloy.
5. the magnetic head as requiring in the claim 1, it is characterized in that, layer structure is included in by the magnetosphere of interlayer between two substrates piles up, two layers in succession constitute by first magnetosphere that comprises the amorphous cobalt alloy at every turn, comprise the insulation course of cobalt oxide and the subassembly of second magnetosphere therein, described magnetic head is equipped with the inductive inverting element, surrounds a part and the described part of piling up of substrate at least.
6. make the method for layer structure, wherein first magnetosphere is that deposition by the amorphous cobalt alloy forms, after this, this layer is exposed in the well-oxygenated environment, be used to form the one deck that comprises cobalt oxide, after this, second magnetosphere is to be formed by deposition magnetic material on the oxide layer that forms.
7. make the method for layer structure, wherein first magnetosphere is to form by the sputtering sedimentation from the target of amorphous cobalt alloy, after this, is used to form the oxygen of insulation course, is deposited over described this one deck by active sputter from same target.
8. be used for writing information to magnetic recording media and/or from the equipment of magnetic recording media sense information, this equipment configuration is just like the magnetic head that requires in each of claim 1 to 5.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP99200694 | 1999-03-09 | ||
| EP99200694.0 | 1999-03-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1296609A true CN1296609A (en) | 2001-05-23 |
Family
ID=8239962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN00800299A Pending CN1296609A (en) | 1999-03-09 | 2000-02-14 | Magnetic head having layered structure |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP1076897A1 (en) |
| JP (1) | JP2002539570A (en) |
| KR (1) | KR20010043386A (en) |
| CN (1) | CN1296609A (en) |
| WO (1) | WO2000054260A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3836294B2 (en) | 2000-03-27 | 2006-10-25 | 株式会社日立グローバルストレージテクノロジーズ | Magnetic head and magnetic recording / reproducing apparatus using the same |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54116663A (en) * | 1978-03-03 | 1979-09-11 | Matsushita Electric Ind Co Ltd | Magnetic device |
| FR2473209A1 (en) * | 1980-01-08 | 1981-07-10 | Sagem | Forming protective oxide layer - on the surface of magnetic memory by coating with metal and oxidising |
| JPS59146426A (en) * | 1983-02-10 | 1984-08-22 | Matsushita Electric Ind Co Ltd | Magnetic head |
| WO1997028528A1 (en) * | 1996-01-31 | 1997-08-07 | Philips Electronics N.V. | Magnetic head with magnetoresistive sensor, and scanning device provided with the magnetic head |
-
2000
- 2000-02-14 CN CN00800299A patent/CN1296609A/en active Pending
- 2000-02-14 EP EP00907561A patent/EP1076897A1/en not_active Withdrawn
- 2000-02-14 JP JP2000604407A patent/JP2002539570A/en active Pending
- 2000-02-14 KR KR1020007012407A patent/KR20010043386A/en not_active Application Discontinuation
- 2000-02-14 WO PCT/EP2000/001172 patent/WO2000054260A1/en not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| WO2000054260A1 (en) | 2000-09-14 |
| EP1076897A1 (en) | 2001-02-21 |
| KR20010043386A (en) | 2001-05-25 |
| JP2002539570A (en) | 2002-11-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |