JP3222081B2 - Magnetic recording / reproducing head and method of manufacturing the same - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording / reproducing head used for a magnetic disk drive and the like and a method of manufacturing the same.

[0002]

2. Description of the Related Art In recent years, the density of magnetic recording has been increased, and VT
High density recording system that 500 Mb / inch ^2, the HDD 200 Mb / inch ² in R have been put into practical use, mainly inductive type magnetic head has been used in these systems. However, there is a growing demand for higher information processing and higher speed, and it is desired that magnetic recording systems achieve higher recording densities.

On the other hand, there is known a reproducing head utilizing the magnetoresistance effect, in which the electric resistance of a certain kind of magnetic thin film or magnetic multilayer thin film is changed by an external magnetic field. A magnetic head utilizing the magnetoresistive effect (hereinafter referred to as an MR head) has attracted attention as a reproducing head in a high recording density system since a high output can be obtained even in a system in which the relative speed between the head and the recording medium is low. ing.

Therefore, a magnetic recording / reproducing head combining a reproducing head composed of a shield type MR head having magnetic shield layers disposed above and below a magnetoresistive film (MR film) and a recording head composed of an inductive magnetic head, It is expected as a high recording density compatible system in the future. Shield type MR
When a head and an inductive magnetic head are used in combination, it is general that a shield type MR head is formed on a substrate, and an inductive magnetic head is formed on the MR head.

FIGS. 13 (a) to 13 (d) are views showing a manufacturing process of a magnetic recording / reproducing head in which a reproducing head composed of a conventional shield type MR head and a recording head composed of an inductive magnetic head are laminated. It is. A method of manufacturing a conventional magnetic recording / reproducing head will be described with reference to FIG.

That is, first, Al ₂ O _{3 not} shown is omitted.
A soft magnetic film is formed on an Al ₂ O ₃ .TiC substrate 1 and the like, and then patterned to form a lower shield layer 2. Next, an MR film 4 made of an anisotropic magnetoresistive film or a spin valve film is formed on the lower shield layer 2 via a lower reproducing magnetic gap film 3 made of an Al ₂ O ₃ film or the like. After patterning this MR film 4 into a predetermined shape,
A pair of leads 5 made of Cu or the like are formed at both ends thereof,
An MR element is manufactured (FIG. 13A).

Next, a soft magnetic film is formed via an upper reproducing magnetic gap film 6 made of an Al ₂ O ₃ film or the like, and then patterned to form an upper shield layer 7 also serving as a lower magnetic pole of a recording head. In this way, the shield type MR head 8 serving as the reproducing head is formed.
(B)).

After forming a recording magnetic gap film 9 made of an Al ₂ O ₃ film or the like on the patterned lower magnetic pole / upper shield layer 7, the recording coil 1 made of a planar coil is formed.
0 in a plating process using a resist,
An extraction electrode 11 from the MR element is formed so as to be connected to the lead 5 (FIG. 13C).

Thereafter, the recording coil 10 is covered with an insulating layer 12, a soft magnetic film is formed thereon, and then patterned to form an upper magnetic pole 13 (FIG. 13D). Thus, the magnetic recording / reproducing head 15 is completed by forming the inductive magnetic head 14 serving as the recording head.

[0010]

In the above-described method of manufacturing the conventional magnetic recording / reproducing head 15, the lower magnetic pole and upper shield layer 7 is patterned before the recording coil 10 is formed. Since there is at least a step of 3 to 4 μm corresponding to the thickness of the lower magnetic pole and upper shield layer 7, there is a problem that the formation accuracy of the recording coil 10 is reduced. In other words, the step corresponding to the thickness of the lower magnetic pole and upper shield layer 7 causes a thicker resist film and non-uniformity of the thickness when patterning the recording coil 10, and the high recording due to the PEP intersection. It is difficult to form a fine and high-definition resist pattern when forming the recording coil 10 having a fine shape wound many times in order to cope with the increase in density. Therefore, it is expected that the production yield of the recording coil 10 will be reduced.

Further, in forming the upper magnetic pole 13, in addition to the step of 3-5 μm of the recording coil and the thickness of 3-4 μm corresponding to the thickness of the lower magnetic pole and upper shield layer 7, the lower side which has been patterned in advance is used. Since the thickness of the shield layer 2 also has an effect, the upper magnetic pole 13 is formed in a portion having a step of 10 to 15 μm in total. In such a situation,
As with the above-described recording coil, it is difficult to ensure the accuracy of the recording track width defined by the tip of the medium of the upper magnetic pole 13 desired. In particular, even if the track is narrowed to achieve a high recording density of about 3 Gbpsi or more, it is expected that sufficient accuracy will not be obtained.

SUMMARY OF THE INVENTION The present invention has been made to address such a problem, and in a magnetic recording / reproducing head in which a plurality of reproducing heads and recording heads are stacked, a magnetic reproducing head positioned above or An object of the present invention is to provide a thin-film magnetic recording / reproducing head in which the accuracy of the track width of the magnetic recording head is improved.

[0013]

According to a first aspect of the present invention, there is provided a magnetic recording / reproducing head having a laminated magnetic reproducing head and a magnetic recording head. Of the magnetic reproducing head and the magnetic recording head, the magnetic head formed in the upper layer is provided with an electrode lead hole of the lower magnetic head through a part of the conductor constituting the upper magnetic head. It is characterized by being. More specifically, in the magnetic recording / reproducing head of the present invention, the magnetic head formed in the upper layer is a recording head, and the magnetic head in the lower layer is a magnetoresistive film. And a read head provided with a lead connected to the magnetoresistive film, wherein a lead electrode of the read head is formed in the electrode lead hole. More preferably, (2-1) the reproducing head is connected to the lower shield layer, a magnetoresistive film formed on the lower shield layer via a lower reproducing magnetic gap, and the magnetoresistive film. A read, an upper shield layer formed on the magnetoresistive film via an upper read magnetic gap, and the write head includes a lower magnetic pole made of a common magnetic layer with the upper shield layer;
A signal magnetic field is supplied to the recording magnetic gap formed on the lower magnetic pole layer, the upper magnetic pole facing the lower magnetic pole via the recording magnetic gap at the front end facing the medium, and the lower magnetic pole and the upper magnetic pole. And a magnetic coil. (2-2) At least one magnetic pole of the upper magnetic pole and the lower magnetic pole is connected to the front end portion close to the medium facing surface, and has a wider width in a direction parallel to the medium facing surface than the front end portion. And a rear end. (2-2-1) The rear portion of the upper magnetic pole is formed rearward from the medium facing surface with respect to the front end portion. (2-2-2) The tip portion is formed closer to the medium facing surface than the insulating layer covering the recording coil. (2-2-3-3) The electrode lead-out hole is formed behind the front end of the magnetic pole from the medium facing surface. (1-1) The magnetic head formed in the upper layer is a reproducing head having a magnetoresistive element, the magnetic head in the lower layer is a recording head, and an electrode to be connected to a recording coil of the recording head is formed in an electrode lead hole. It is characterized by having been done. (1-2) The recording head includes a lower magnetic pole and an upper magnetic pole facing each other via a recording magnetic gap at a front end portion close to a medium facing surface, and a recording coil for applying a signal magnetic field to the lower and upper magnetic poles. The read head has a lower shield layer made of a magnetic layer common to the upper magnetic pole, a magnetoresistive effect film formed on the lower shield layer via a lower read magnetic gap, and a magnetoresistive film. It is characterized by comprising a lead to be connected and an upper shield layer formed on the magnetoresistive effect film via an upper reproducing magnetic gap. (1-3) The electrode lead-out hole is formed behind the magnetoresistive effect element from the medium facing surface. (1-4) The magnetic head of the lower layer is provided with a region having a finer pattern than the other region, and the electrode lead hole is provided in the other region. (1-5) The upper magnetic head is characterized in that a pattern having a width of 1 μm or less is provided in a region close to the medium facing surface. The method of manufacturing a magnetic recording / reproducing head according to the present invention includes: (3) a step of laminating and forming a magnetic reproducing head and a magnetic recording head; and, among the magnetic reproducing head and the magnetic recording head, an electrode lead hole of a lower magnetic head. Forming a part of a conductor constituting a magnetic head having an upper layer formed thereon, a step of forming an insulating film on an inner wall of an electrode drawing hole, and forming an electrode drawing having the insulating film formed on the inner wall. Forming a lead electrode of a magnetic head formed in a lower layer in the hole. More specifically, the method of manufacturing a magnetic recording / reproducing head according to the present invention includes: (4) a lower shield layer, a pair of a lower shield layer formed on the lower shield layer via a lower read magnetic gap film, A step of forming a read head having a magnetoresistive film having leads and an upper shield layer formed on the magnetoresistive film via an upper read magnetic gap; and a step of forming a magnetic layer common to the upper shield layer. A lower magnetic pole, a recording magnetic gap formed on the lower magnetic pole, a recording coil formed on the recording magnetic gap film, and at least a tip portion formed on the recording magnetic gap, and one of the recording coils. And forming a recording head having an upper magnetic pole provided to cover the portion, after forming a recording coil,
An electrode lead-out hole is formed by processing a magnetic layer common to the upper shield layer and the lower magnetic pole. (4-1) At least after forming the recording coil, the lower shield layer is processed and patterned. (5) a lower shield layer, a magnetoresistive film formed on the lower shield layer via a lower reproducing magnetic gap film and having a pair of leads, and an upper reproducing magnetic gap film on the magnetoresistive effect film A read head having an upper shield layer formed through a lower magnetic pole, a lower magnetic pole formed of a magnetic layer common to the upper shield layer, a recording magnetic gap film formed on the lower magnetic pole, The recording head includes a recording coil formed above the gap film and an upper magnetic pole having at least a tip portion formed on the recording magnetic gap film and provided so as to cover a part of the recording coil. In manufacturing a magnetic recording / reproducing head, after forming at least the recording gap film, an electrode lead-out hole is formed in the upper shield layer and the magnetic layer common to the lower magnetic pole, and at least After forming the serial recording coil, to provide a method of manufacturing a magnetic recording reproducing head, characterized in that to draw the lead of the magnetoresistive effect film through the electrode extraction holes.

More specifically, the method of manufacturing a magnetic recording / reproducing head of the present invention comprises: (6) a lower shield layer; and a lower magnetic layer formed on the lower shield layer via a lower magnetic gap gap film; Forming a read head having a magnetoresistive film having a pair of leads, and an upper shield layer formed on the magnetoresistive film via an upper read magnetic gap; and a magnetic material common to the lower shield layer. Forming a recording head having an upper magnetic pole composed of layers, a lower magnetic pole facing the upper magnetic pole via a recording magnetic gap, and a recording coil for applying a current magnetic field to the upper magnetic pole and the lower magnetic pole. Then, after the lead or the magnetoresistive film is formed, an electrode lead hole penetrating a magnetic layer common to the lower shield layer and the upper magnetic pole is formed.

According to the magnetic recording / reproducing head of the present invention, the upper electrode, for example, the recording head is provided with the electrode lead-out hole for extracting the lower electrode, for example, the electrode of the reproducing head. It is possible to provide a high-precision and fine recording or reproducing track width in a portion where fine processing is required, such as a magnetic pole and an upper magnetic pole, particularly a magnetic pole tip facing a recording medium. As a result, 3Gbp
It is possible to cope with a higher recording density than si.

In the first method of manufacturing a magnetic recording / reproducing head according to the present invention, after forming a recording coil or the like in advance, a magnetic layer common to the upper shield layer and the lower magnetic pole is processed to obtain a magnetoresistance effect. Since the film leads are drawn out, the recording coil and the like can be formed on a flat surface. As a result, the formation accuracy of the recording coil and the like in the PEP process and the like is improved, and as a result, a fine recording coil and an upper magnetic pole corresponding to a high recording density can be formed with high precision. Further, by processing the lower shield layer after forming the recording coil and the like, it is possible to further improve the formation accuracy of the recording coil and the like.

According to a second method of manufacturing a magnetic recording / reproducing head of the present invention, an electrode lead-out hole for leading out a lead of the magnetoresistive film is formed in a magnetic layer common to an upper shield layer and a lower magnetic pole. Since the lead of the magnetoresistive film is drawn out through the electrode lead-out hole after forming the coil and the like, the recording coil and the like can be formed on a flat surface except for the small electrode lead-out hole. As a result, the formation accuracy of the recording coil and the like in the PEP process and the like is improved, and as a result, a fine recording coil and an upper magnetic pole corresponding to a high recording density can be formed with high precision.

[0018]

Embodiments of the present invention will be described below. 1 and 2 are views showing the configuration of a thin-film magnetic recording / reproducing head according to one embodiment of the present invention. FIG. 1 shows a cross section along the line AA ′ in FIG.
FIG. 2 is a plan view observed from above before depositing the protective film 45 of FIG. The magnetic recording / reproducing head 2 shown in these figures
Numeral 0 is composed of a reproducing head 30 composed of a shield type magnetoresistive head (MR head) and a recording head 40 composed of an induction type magnetic head laminated on the reproducing head 30.

A reproducing head 30 composed of a shield type MR head has a structure in which a nonmagnetic layer (not shown) such as an Al ₂ O ₃ layer is formed on a main surface of a substrate 31 of Al ₂ O ₃ .TiC or the like. A lower shield layer 32 of a thickness of about 0.5 to 3 μm made of a soft magnetic material is formed. This lower shield layer 3
2, a magnetoresistive film (MR film) 34 is formed via a lower reproducing magnetic gap film 33 of a thickness of about 50 to 200 nm made of a nonmagnetic insulating material.

At both ends of the MR film 34, a pair of leads 35 made of Cu or the like for supplying a sense current to the MR film 34 are provided.
(Only one of the leads is shown in FIG. 1), and the width of the magneto-sensitive region of the MR film 34 sandwiched between the pair of leads 35 is a substantial reproduction track width (perpendicular to the paper surface). . On the MR element composed of the MR film 34 and the pair of leads 35, a lower readout layer 32 is formed through an upper readout magnetic gap film 36 made of the same nonmagnetic insulating material as the lower readout magnetic gap film 33. An upper shield layer 37 made of a soft magnetic material and having a thickness of about 0.5 to 3 .mu.m is formed, thereby forming a reproducing head 30 composed of a shield type MR head.

The upper shield layer 37 of the above-mentioned shield type MR head is composed of the recording head 4 composed of an induction type magnetic head.
The lower magnetic pole 0 also serves as a lower magnetic pole. On the upper shield layer and lower magnetic pole 37, a recording magnetic gap film 41 of about 200 nm thick made of a nonmagnetic insulating material such as Al2 O3, a recording coil 43, and a recording coil 43 are formed. An upper magnetic pole 42 is formed via an insulating layer 44 that covers the coil 43. The width (in the direction perpendicular to the paper) of the tip 42 a of the upper magnetic pole 42 located on the medium facing surface ABS side is determined by the recording track width of the recording head 40 (in the medium facing surface, the tip 42 a of the upper magnetic pole and the lower magnetic pole 37.
Is the width facing the recording gap film 41. ).

Between the lower magnetic pole 37 and the upper magnetic pole 42,
A recording coil 43 made of Cu or the like for supplying a current magnetic field to a magnetic circuit formed by these components is formed. The recording coil 43 is formed on the recording magnetic gap film 41 and is embedded in an insulating layer 44 made of a coating type organic insulating material or the like. A rear portion 42b of the upper magnetic pole 42 is formed so as to cover a part of the recording coil 43, and the lower magnetic pole 37 and the recording magnetic gap film 41 are formed behind the medium facing surface.
Connect through. In the present invention, it is also possible to directly connect both magnetic poles without using the magnetic gap film 41 for the magnetic connection at the rear.

A protective film 45 is formed on the upper magnetic pole 42, the insulating layer 44, and the lead electrode 46. Here, of the read head 30 and the write head 40, the extraction of the electrode from the read head 30 located on the lower side is performed through the electrode lead hole 46 provided in the lower magnetic pole 37 also serving as the upper shield layer. Have been done. That is, the upper shield layer and lower magnetic pole 37 of the recording head 40 located on the upper side.
Are formed so as to be connected to a pair of leads 35 of the MR element, respectively. Since a conductive material is usually used for the upper shield layer and lower magnetic pole 37, the side wall surfaces of the electrode lead holes 46 are covered with an insulating layer 47. Then, a pair of leads 35 of the MR element is formed through such an electrode lead-out hole 46.
And read head lead-out electrodes 38, 38 'are formed so as to be electrically connected to the respective electrodes.

As described above, the coil 43 and the upper magnetic pole 4
2, in particular, since the tip portion 42a is formed on a surface having substantially no step, adverse effects such as pattern collapse due to thick resist coating are reduced. Therefore, according to the magnetic recording / reproducing head of the first embodiment, the pattern accuracy and the track width of the recording coil of the magnetic recording / reproducing head are fine and high-precision, so that the production yield is improved and good recording characteristics are obtained. can get.

Regarding the fine shape of the tip of the recording magnetic pole, 3
It is suitable for a high-density head requiring a fine track width Tw of 1 μm or less, particularly 1 μm or less. Further, as a result of many trial productions by the present inventors, it was found that the processing limit of the track width by the conventional method was 0.6 μm. Therefore,
The present invention exerts a remarkable effect at a track width of 0.6 μm or less. In addition, these fine shapes can be similarly applied to a reproduction track width Tw ′ to be described later, a fine pattern at the leading end close to the medium facing surface, and a plurality of patterns having a fine distance between each other.

Further, the fine pattern on the medium facing surface is not limited to the magnetic recording / reproducing head of the above-described embodiment. For example, as described in JP-A-7-296328, a lower magnetic pole and an upper magnetic pole are used. Notch structure for obtaining a fine track width when forming the leading end of the substrate by plating or the like, a fine shield facing width and a distance between leads in the medium facing surface as described in JP-A-7-307012. And a magnetic head having the width of the magnetic field response portion of the magnetoresistive element.

Next, the magnetic recording / reproducing head 20 according to the first embodiment is manufactured by, for example, the following manufacturing methods. First, a first embodiment of a method for manufacturing the magnetic recording / reproducing head 20 will be described with reference to FIGS. 3 (a) to 3 (d).

A soft magnetic film is formed on an Al ₂ O ₃ .TiC substrate 31 having a non-magnetic layer (not shown) such as Al ₂ O ₃ formed on the main surface, and the soft magnetic film is formed into a predetermined shape. By patterning, a lower magnetic shield layer 32 is formed. After forming the lower read magnetic gap film 33 on the patterned lower magnetic shield layer 32, the formation and patterning of the MR film 34 and the formation and patterning of the good conductor film to be the pair of leads 35 are sequentially performed. . Next, the upper reproducing magnetic gap film 3 is formed on the MR element including the MR film 34 and the lead 35.
6, a soft magnetic layer 37 'serving as the lower magnetic pole and upper magnetic shield layer 37 of the recording head 40 is formed. At this point, the soft magnetic layer 37 'is not patterned. Then, a recording magnetic gap film 41 is formed on the soft magnetic layer 37 '(FIG. 3A).

Next, an electrode lead hole 46 is formed in the recording magnetic gap film 41 and the soft magnetic layer 37 'until the surface of the lead 35 of the MR element is exposed, for example, by ordinary PEP.
It is formed using a process and etching such as milling or RIE (FIG. 3B). Here, this electrode lead-out hole 46
Can be easily filled by adjusting the viscosity of the resist to be applied in the next manufacturing step of the recording coil 43, and the flatness of the resist surface is maintained. Therefore, there is no adverse effect on the manufacturing process of the recording coil 43. Electrode extraction hole 46
Is formed, a plating seed layer (not shown) and a resist pattern (not shown) for forming the recording coil 43 by, for example, a frame plating method are formed on the recording magnetic gap film 41 to form the recording coil 43. A good conductor film is formed. At this time, since the electrode lead-out hole 46 is filled with the applied resist film, no step is caused due to the thickness of the lower magnetic pole and upper magnetic shield layer 37. Therefore,
There is no decrease in the shape accuracy or the like of the recording coil 43 requiring a fine pattern.

Next, the resist pattern is turned off, and the plating seed layer left under the resist pattern is removed to form the recording coil 43 (FIG. 3C). At this time, the resist in the electrode lead hole 46 is also removed. After this,
On the recording coil 43, an insulating layer 44 of a coating type organic insulating material having excellent shape followability is formed. At this time, an insulating layer 47 is simultaneously formed on the side wall of the electrode lead hole 46 (FIG. 3).
(C)).

Thereafter, a conductive soft magnetic film is formed, and the soft magnetic film is patterned into a predetermined shape to form an upper magnetic pole 42 including a tip portion 42a and a rear portion 42b. Through the electrode lead hole 46
A read head lead electrode 38 is connected to the lead 35 of the MR element.

According to the above-described method of manufacturing the magnetic recording head 20, since the electrode lead-out hole 46 is small and easily filled when a resist is applied, non-uniformity of the thin resist does not occur. Surface flatness can be ensured. Furthermore, since the step of the upper magnetic shield layer 37 also serving as the lower magnetic pole does not substantially exist when the recording coil 43 and the upper magnetic pole 42 are formed, the unevenness of the resist thickness for forming the recording coil 43 is improved. can do. Accordingly, the PEP tolerance in forming the recording coil 43 and the upper magnetic pole 42, particularly the tip 42a, becomes smaller, whereby the recording coil 43 for which miniaturization is desired and the upper magnetic pole 42 for which a narrower track is required. Tip 42a
Can be formed with high precision.

In other words, according to the manufacturing method of the present embodiment, the soft magnetic layer 37 'does not need to be pre-panned, so that the recording coil 43' is formed on the flat soft magnetic layer 37 '.
And the upper magnetic pole 42 can be formed. Thereby, the recording coil 43 of the recording head 40 and the upper magnetic pole 42
It is possible to improve the formation accuracy of the. Further, according to the manufacturing method of the present embodiment, the insulating layer 4 of the recording coil 43 is formed.
4 and the insulating layer 47 covering the side wall of the electrode extraction hole 46, and furthermore, the upper magnetic pole 42 and the reproducing head extraction electrode 38 are formed at the same time, thereby reducing the number of manufacturing steps.

In the manufacturing method of the present embodiment, the electrode lead-out hole 46 may be formed after the upper magnetic pole 42 of the recording head 40 has been formed.
6 and the upper magnetic pole 42 are formed without the electrode lead-out hole 46, so that the electrode lead-out hole can be formed without controlling the size of the electrode lead-out hole, the viscosity of the applied resist, and the like. However, in this case, the insulating layer 47 covering the side wall of the electrode lead hole 46 and the read head lead electrode 38 must be formed separately from the insulating layer 44 of the recording coil 43 and the upper magnetic pole 42.

Next, a second embodiment of the method of manufacturing the magnetic recording / reproducing head 20 shown in FIGS. 1 and 2 will be described with reference to FIGS. 4 (a) to 4 (d). First, in the same manner as in the manufacturing process according to the first embodiment, the substrate 31
On top, a soft magnetic layer 32 'to be the lower magnetic shield layer 32, a lower read magnetic gap film 33, a MR film 34, and patterning, a pair of leads 35 for film formation and patterning, upper read The formation of the magnetic gap film 33, the formation of the soft magnetic layer 37 'serving as the upper magnetic shield layer 37 also serving as the lower magnetic pole of the recording head 40, and the formation of the recording magnetic gap film 41 are performed in this order. In the manufacturing method of this embodiment, the lower magnetic shield layer 32 is not patterned in advance, and the above-described layers are formed on the flat soft magnetic layer 32 '. Therefore, there is substantially no step corresponding to the thickness of the lower magnetic shield layer 32. Then, the recording coil 43 is formed on such a flat recording magnetic gap film 41 (FIG. 4A).

As described above, in addition to the thickness of the soft magnetic layer 37 ', the step corresponding to the thickness of the lower shield layer 32 is substantially eliminated, and the upper surface of the recording magnetic gap film 41 is flat. The surface of the resist used for producing the recording coil 43 can be made even more flat and its thickness can be made uniform and thin. Therefore, the recording coil 43 to be formed later can be formed finely and with high precision. The upper magnetic pole 4
The same applies to No. 2, and the tip portion 42a having a narrow track in order to achieve a high recording density can be formed with sufficient accuracy.

Next, an electrode lead-out hole 46 is formed in the recording magnetic gap film 41 and the soft magnetic layer 37 'in the same manner as in the above-described embodiment (FIG. 4B). Simultaneously with the formation of the layer 44, an insulating layer 47 is formed on the side wall of the electrode lead-out hole 46 (FIG. 4).
(C)).

Thereafter, a soft magnetic film to be the upper magnetic pole 42 is formed, and the soft magnetic film is patterned into a predetermined shape to form the upper magnetic pole 42, and at the same time, an electrode lead hole whose side wall is covered with the insulating layer 47. 46, leads 3 of the MR element
5 is connected to a readout lead electrode 38 (FIG. 4).
(D)).

According to the manufacturing method of the second embodiment,
When the recording coil 43 and the upper magnetic pole 42 are formed, there is substantially no step between the lower shield layer 32 and the lower magnetic pole / upper magnetic shield layer 37, so that the minute recording coil 43 is formed.
Further, the upper magnetic pole 42 having a narrow track can be formed with higher accuracy.

That is, in the manufacturing method of this embodiment, an electrode lead-out hole 46 is formed in the recording magnetic gap film 41 and the soft magnetic layer 37 'serving as the upper magnetic shield layer 37 also serving as the lower magnetic pole. Since the electrodes of the reproducing head 30 are drawn through the lead holes 46, it is not necessary to previously perform the soft magnetic layer 37 ', and the soft magnetic layer 32' serving as the lower magnetic shield layer 32 is also patterned by the upper magnetic pole 42. After the formation, the recording coil 43 and the upper magnetic pole 4 are placed on the flattened surface.
2 can be formed. As a result, the resist thickness for patterning can be reduced and the surface thereof becomes flat, so that the formation accuracy of the recording coil 43 and the upper magnetic pole 42 of the recording head 40 can be greatly improved.

According to the manufacturing method of the second embodiment, the insulating layer 44 of the recording coil 43 and the electrode lead hole 46
Since the insulating layer 47 covering the side wall of the first embodiment and the upper magnetic pole 42 and the reproducing head lead-out electrode 38 are formed at the same time, the number of manufacturing steps is reduced.

As shown in FIG. 5, for example, the upper magnetic pole 42 is formed in advance (FIG. 5A), and thereafter, the electrode lead hole 46 is formed (FIG. 5B), and the electrode lead hole 46 is formed. The formation of the insulating layer 47 on the side wall and the connection formation of the extraction electrode 38 (FIG. 5C) may be performed. According to such a manufacturing process, when the upper magnetic pole 42 is formed, the electrode lead-out hole 46 does not exist, so that the forming accuracy of the upper magnetic pole 42 can be further improved. However, in this case, the insulating layer 47 covering the side wall of the electrode lead hole 46 and the read head lead electrode 38 must be formed separately from the insulating layer 44 of the recording coil 43 and the upper magnetic pole 42.

Next, a third embodiment of the method of manufacturing the magnetic recording / reproducing head shown in FIGS. 1 and 2 will be described with reference to FIG. First, similarly to the manufacturing process according to the above-described second embodiment, a lower magnetic shield layer 32 and a lower magnetic shield layer 32 are formed on a substrate 31 on which a nonmagnetic material layer (not shown) such as Al ₂ O ₃ is formed on a main surface. Forming a soft magnetic layer 32 ′, forming a lower reproducing magnetic gap film 33, forming and patterning an MR film 34, forming and patterning a pair of leads 35, forming an upper reproducing magnetic gap film 33, and recording. Soft magnetic layer 37 ′ serving as upper magnetic shield layer 37 also serving as the lower magnetic pole of head 40
And the formation of the recording magnetic gap film 41 are sequentially performed.

The upper surface of the recording magnetic gap film 41 is extremely flat as in the above-described embodiment, and the recording coil 43 and the recording coil 4 are formed on this flat surface.
The insulating layer 44 is formed on the substrate 3 (FIG. 6A).
As described above, the required thickness of the resist on the flat surface is small and the thickness can be made uniform, so that the fine recording coil 43 can be formed with high precision. Also,
Similarly, for the upper magnetic pole 42, it is possible to form the tip portion 42a having a narrow track to achieve high recording density with sufficient accuracy.

Next, the upper magnetic shield layer 37 also serving as the lower magnetic pole and the upper reproducing magnetic gap film 36 are patterned, and the rear portions thereof are removed to expose the surfaces of the leads 35 of the MR element (FIG. 6B). . Thereafter, a read head take-out electrode 38 is connected to the exposed surface of the lead 35 (FIG. 6C).

According to such a manufacturing method, the recording coil 43 and the upper magnetic pole 42 can be formed with high accuracy. In the above embodiment, the patterning of the lower shield layer 32 is also performed after the formation of the recording coil 43 and the upper magnetic pole 42. However, the patterning of the upper magnetic shield layer 37, which also serves as the lower magnetic pole, is performed at least.
The formation accuracy of the recording coil 43 and the upper magnetic pole 42 can be increased by performing the process after the formation of the second magnetic pole 2, as compared with the conventional manufacturing process.

Next, a fourth embodiment of the magnetic recording / reproducing head and the manufacturing method according to the second embodiment of the present invention will be described with reference to FIGS. 7A to 7C and FIGS. 8A to 8.
A description will be given with reference to the cross-sectional views for each step in FIG.

In the magnetic recording / reproducing head of this embodiment, as shown in FIG. 8B, the upper magnetic pole 42 of the recording head is
Magnetic pole tip portion 42a, magnetic pole rear portion 42b, and upper and lower magnetic pole connecting portions 4
2c. In a magnetic recording / reproducing head having such a structure, as described later in detail,
The top end of the magnetic pole 42 has not only the steps caused by the upper and lower shield layers 32 ', 37' but also the steps corresponding to the thicknesses of the recording coil 43 and its insulating layer 44.
Since a can be formed, a finer track width Tw can be obtained. Therefore, according to this magnetic recording / reproducing head, it is possible to achieve a high recording density with a narrow track and high accuracy.

First, in the same manner as in the manufacturing process according to each of the above-described embodiments, a soft magnetic layer 32 ′ to be the lower magnetic shield layer 32, a lower magnetic reproducing gap film 33,
Formation and patterning of the R film 34, formation and patterning of the pair of leads 35, formation of the upper magnetic reproducing gap film 33, formation of the soft magnetic layer 37 ′ serving as the upper magnetic shield layer 37 also serving as the lower magnetic pole of the recording head 40. The film formation and the formation of the recording magnetic gap film 41 are sequentially performed.

The upper surface of the recording magnetic gap film 41 is extremely flat similarly to the above-described embodiment, and the magnetic pole tip portion 42a of the upper magnetic pole 42 and the upper and lower magnetic pole coupling portions 42c are formed on this flat surface. That is, on the flat recording magnetic gap film 41, a soft magnetic film to be the upper magnetic pole tip portion 42a and the upper and lower magnetic pole coupling portions 42c is formed, and this soft magnetic film is patterned by ion milling or the like to form the upper magnetic pole tip portion 4.
2a and the upper and lower magnetic pole coupling portions 42c are formed. Then, an insulating layer 48 made of SiOx or the like is formed including the upper magnetic pole tip 42a and the upper and lower magnetic pole coupling portions 42c, and the upper magnetic pole tip 42 is formed by etch-back or polishing.
a and the surface of the upper and lower magnetic pole coupling portions 42c are flattened (FIG. 7A).

Alternatively, a flat recording magnetic gap film 41
An insulating layer 48 made of SiOx or the like is formed thereon, and the upper magnetic pole tip portion 42a and the upper and lower magnetic pole connecting portions 42
After a trench (groove) is formed in a portion corresponding to c by reactive ion etching or the like, a soft magnetic material to be the upper magnetic pole tip portion 42a and the upper and lower magnetic pole coupling portions 42c is buried in the trench, and the film is formed by etch back or polishing. It may be flattened. In addition, the soft magnetic material may be embedded by forming a metal layer serving as a seed layer on the surface of the magnetic gap film 41 and plating it.

Next, the recording coil 43 is placed on a plane including the upper end 42a of the upper magnetic pole, the upper and lower magnetic pole coupling portions 42c, and the upper surface of the insulating layer 48, which has been flattened by etch-back or polishing, in the same manner as in the above-described embodiments. Form (Fig. 7
(B)). Thereby, the fine recording coil 43 can be formed with high accuracy.

Next, the electrode drawing hole 46 is formed in the insulating layer 48, the recording magnetic gap film 41 and the soft magnetic layer 37 '.
Is formed in the same manner as in the above-described embodiment (FIG. 7C).
After that, the insulating layer 44 is formed on the recording coil 43, and at the same time, the insulating layer 47 is formed on the side wall of the electrode lead hole 46 (FIG. 8A).

Thereafter, the soft magnetic film to be the magnetic pole rear portion 42b of the upper magnetic pole 42 is attached to the magnetic pole tip portion 42a and the upper and lower magnetic pole connecting portions 4a.
2c, and the soft magnetic film is patterned into a predetermined shape to form an upper magnetic pole 42 including a magnetic pole tip 42a, a magnetic pole rear 42b, and an upper and lower magnetic pole coupling portion 42c. Is connected to the lead 35 of the MR element through the electrode lead-out hole 46 covered with the insulating layer 47.

FIG. 8C is a sectional view of the tip of the magnetic recording / reproducing head of this embodiment in which the protective film 45 is formed and the ABS facing the medium is exposed by polishing or the like. The upper magnetic pole tip 42a is surrounded by the insulating layer 48. As described above, the width Tw on the medium facing surface is determined by lithography, and the recording track width T
give w.

According to the manufacturing method of the fourth embodiment,
When the recording coil 43 and the upper magnetic pole 42 are formed, there is substantially no step of the lower shield layer 32 and a step of the upper magnetic shield layer 37 also serving as the lower magnetic pole. At the time of formation, there is no step corresponding to the thickness of the recording coil 43 and the thickness of the insulating layer 44 thereof.
Since there is no step of about m, the formation accuracy of the recording coil 43 and the upper magnetic pole 42 is remarkably improved. Accordingly, it is possible to form the recording coil 43 for which miniaturization is desired and the upper magnetic pole 42 for which narrowing of track is required with extremely high precision.

Before the formation of the recording magnetic gap film 41, for example, a low molecular weight resin is spin-coated on the upper magnetic shield layer 37 also serving as the lower magnetic pole, and baked in an atmosphere of about 473K to clean the resin surface. After the flattening process, if the etch back is performed by ion milling at an incident angle of about 40 °, the soft magnetic layer 37 ′ serving as the lower magnetic pole and the upper magnetic shield layer 37 and the resin can be etched at the same speed. The surface shape can be transferred to the surface of the soft magnetic film 37 '. Thereby, the above-described MR film 34
And the step caused by the lead 35 can be further reduced, and the formation accuracy of the recording coil 43 and the upper magnetic pole 42 can be improved. This flattening step is more effective when both the lower magnetic shield layer 32 and the upper magnetic shield layer 37 serving as the lower magnetic pole are not patterned because the resin can be uniformly coated.

When manufacturing the above-described magnetic recording / reproducing head, the patterning of at least the upper magnetic shield layer 37 also serving as the lower magnetic pole is performed after the formation of the recording coil 43 and the upper magnetic pole 42, thereby achieving the conventional manufacturing method. The formation accuracy of the recording coil 43 and the upper magnetic pole 42 can be improved as compared with the process. The step of forming the electrode lead hole 46 may be performed after the formation of the magnetic pole rear part 42b of the upper magnetic pole 42. In this case, the processing accuracy and alignment accuracy of the magnetic pole rear part 42b are also improved, and the magnetic pole tip part 42a and the magnetic pole rear part are formed. The contact area with 42b can be controlled accurately. Further, the magnetic recording / reproducing head described above also
For example, the read head lead-out electrode 38 can be formed in the same manner as in the manufacturing process shown in FIG.

As shown in FIGS. 9A and 9B,
Upper magnetic pole tip 4 above the medium than the tip of the coil insulation layer
The recording efficiency is improved by forming 2a and making the depth (throat height Ls) of the front end portion 42a behind the medium facing surface as shallow as possible. Thus, to make it shallower,
It is necessary to form a fine resist pattern, and a shallow throat height La can be obtained by using the manufacturing method according to the first to fourth embodiments.

Next, the third embodiment of the magnetic recording / reproducing head of the present invention will be described.
Will be described with reference to FIGS. 10A and 10B. FIG. FIG. 10A shows a cross section taken along the line AA ′ of FIG. Magnetic recording and reproducing head of this embodiment, Al ₂ O ₃ · TiC nonmagnetic thin layer of Al ₂ O ₃ or the like is formed on the main surface
A magnetic recording head 90 and a magnetic reproducing head 91 laminated on the magnetic recording head 90. The magnetic recording head 90 includes a soft magnetic layer 62 serving as a lower magnetic pole, a recording gap layer 63 formed on the surface thereof, and a recess in the medium facing surface ABS, and an insulating layer 64 in which the recording tip 67a is embedded. A coil 65 made of a metal layer of Cu or the like formed by being wound many times on the insulating layer 64; and a coil and a conductor layer such as a soft magnetic layer formed thereon to cover the coil. A coil insulating layer 66 that insulates the coil, an upper magnetic pole 67 made of a soft magnetic layer formed thereover,
A coil electrode 7 formed through an insulating layer 71 in a hole formed on the upper magnetic pole 67 and reaching both ends of the coil.
2, 72 '. The magnetic reproducing head 91 has a lower shield layer 67 as an upper magnetic pole 67 of the magnetic recording head 90, a reproducing magnetic gap 68 made of a nonmagnetic insulating layer formed on the lower magnetic layer 67, and an M formed on the reproducing magnetic gap.
R element 69, a pair of leads 70 and 70 ′ connected to both ends of this MR element 69, this surface and lower shield layer 6
7 and an upper shield layer 75 formed on the surface thereof. As shown in FIG. 10A, the reproduction track width of the magnetic reproduction head 91 is defined by the distance between the leads 70, 70 'on the medium facing surface.

In this embodiment, after the coil 65 and the coil insulating layer 66 are formed, a pair of leads 70, 7 formed on the surface flattened by the upper magnetic pole 67.
0 'is formed, and the interval (reproduction track width Tw') is fine and highly accurate. This is because the coil electrodes 72 and 72 'connected to the coil 65 are drawn out from the surface of the insulating layer 80 on the lead, and the insulating layer 80, the lower shield layer 67, and the coil insulating layer 66 are provided behind the medium facing surface ABS. Is formed in the drawer hole. An insulating layer 71 is formed on the inner wall of the lead hole, and a coil electrode 72,
72 'and the lower shield layer 67 are insulated from each other.

Next, a method of manufacturing the magnetic recording / reproducing head will be described with reference to FIGS. Al ₂ O ₃
Al ₂ O ₃ with a non-magnetic layer (not shown) formed on the main surface
A soft magnetic material is formed on the TiC substrate 61 by a sputtering method or the like, and the lower shield layer 62 is formed. A non-magnetic layer which becomes the recording magnetic gap 63 is formed on the surface of the lower shield layer 62 by a sputtering method or the like, and a non-magnetic insulating layer such as SiO2 is formed by a CVD method or the like.
Anisotropic etching such as IE and milling is performed to form an insulating layer 64 having a desired groove in the medium facing surface ABS. A metal layer (not shown) serving as a seed layer for plating growth is formed on the insulating layer, and a resist pattern serving as a frame for plating growth is formed on the outer periphery of the coil by a PEP process. Then, a conductive film such as Cu is formed from the seed layer surrounded by the frame pattern, and the coil is formed by removing the frame. The surface of the coil 65 is covered with a coil insulating film 66 formed by a CVD method, a PEP process, and patterning by etching.

Then, a soft magnetic layer having a high saturation magnetic flux density is buried in the groove by a sputtering method or the like to form a tip 67a of the upper magnetic pole. Thereafter, a rear portion 67 of the upper magnetic pole which is in surface contact with the front end portion 67a is formed by a sputtering method or the like (FIG. 11A). In the present embodiment, since the rear portion 67 of the upper magnetic pole also serves as the lower shield layer 67 of the magnetic reproducing head 91, it needs to be formed at least wider than the width of the MR element.

Next, a non-magnetic insulating layer 68 as a reproducing magnetic gap is formed on the surface of the lower shield layer 67.
An MR element 69 is formed facing the medium facing surface, and leads 70 and 70 'connected to both ends thereof are formed (FIG. 11).
(B)). The spacing between the leads 70, 70 'determines the reproduction track width Tw'.
It is expected that the size will be reduced to the minimum processing size due to the etching accuracy. As the miniaturization progresses, it is desired to perform patterning with a thinner resist. In this embodiment, since the leads 70 and 70 'are patterned on the flat surface of the lower magnetic shield layer, patterning with a thin resist is possible, and a higher precision and finer track width Tw' can be obtained.

Next, the MR element 69, the leads 70 and 70 '
After forming the nonmagnetic insulating layer 80 covering the medium, the medium facing surface AB
The reproducing magnetic gap 68 and the lower shield layer 6 behind S
7, and a lead hole that penetrates through the coil insulating layer 66 and reaches the coil 65 is formed by the PEP process and etching such as RIE (FIG. 11C).

Subsequently, the inner surface of the hole is covered with an insulating layer 71, and coil electrodes 72 and 72 'connected to the coil 65 are formed. An insulating layer covering the coil electrodes 72 and 72 'is formed, and an upper shield layer 75 covering the MR element 69 is formed.
To form Further, the surface of the upper shield layer 75 is covered with a protective film (not shown) to complete the magnetic recording / reproducing head of this embodiment.

In each of the above embodiments, the shield layer 3
The soft magnetic layers constituting 2, 37, 62, 67, etc. are made of NiF
e alloy, CoZrNb amorphous alloy, AlABSi
Fe-based sendust or the like can be used.

In each of the above embodiments, the MR film 34,
69, for example, Ni80Fe whose electric resistance changes depending on the angle between the direction of the current and the magnetization moment of the magnetic layer.
Anisotropic magnetoresistive effect film consisting of 20 or more, has a laminated structure of a magnetic film and a non-magnetic film, and exhibits a so-called spin valve effect in which the electric resistance changes depending on the angle formed by the magnetization of each magnetic layer. Examples thereof include a spin valve film made of a Co90Fe10 / Cu / Co90Fe10 laminated film, an artificial lattice film exhibiting a giant magnetoresistance effect, a granular film, a corrosal MR (CMR) film using a perovskite-based manganese oxide, or the like.

Next, a magnetic recording / reproducing apparatus equipped with the magnetic recording / reproducing head of the present invention will be described with reference to FIGS.
This will be described with reference to FIG. FIG. 12A shows the positional relationship between the magnetic recording / reproducing head 80 and the medium.
FIG. 2B is a diagram illustrating a configuration of a magnetic recording / reproducing apparatus.

In FIG. 12A, the head 80 is shown, and the relationship between the track and track width of the track 182 of the medium and the medium traveling direction is shown. In the magnetic recording / reproducing apparatus 140 shown in FIG.
The magnetic recording / reproducing head 150 is mounted on the slider 148 so as to maintain a constant flying height d from the magnetic recording disk 144 or to contact the magnetic recording disk 144. The slider 148 is connected to a head suspension assembly 155 that transmits a write signal So and a read signal Si. The disk support board 142 is rotated by a motor 146, and its control is performed by a control signal C sent to the motor from a control circuit provided inside or outside the magnetic recording / reproducing device 140. The present magnetic recording / reproducing apparatus is equipped with a magnetic recording / reproducing head having the above-described effects,
Fine and high-precision recording / reproduction becomes possible.

[0071]

As described above, according to the present invention,
Since it is possible to greatly improve the formation accuracy of the recording coil, upper magnetic pole, etc. of the magnetic head located on the upper side, it is possible to stably provide a magnetic recording / reproducing head suitable for high recording density. Becomes

[Brief description of the drawings]

FIG. 1 is a cross-sectional view illustrating a schematic configuration of a magnetic recording / reproducing head according to a first embodiment of the present invention.

FIG. 2 is a plan view of the magnetic recording / reproducing head shown in FIG.

FIG. 3 is a sectional view for explaining a first embodiment of the method for manufacturing the magnetic recording / reproducing head shown in FIG. 1;

FIG. 4 is a sectional view for explaining steps in a second embodiment of the method of manufacturing the magnetic recording / reproducing head shown in FIG. 1;

FIG. 5 is a cross-sectional view illustrating a modification of the manufacturing method according to the second embodiment.

FIG. 6 is a cross-sectional view for explaining steps, explaining a third embodiment of the method of manufacturing the magnetic recording / reproducing head shown in FIG. 1;

FIG. 7 is a sectional view for explaining a manufacturing method according to a fourth embodiment of the present invention.

FIG. 8 is a cross-sectional view showing a manufacturing process after a main portion manufacturing process shown in FIG. 7, and a magnetic recording / reproducing head according to a third embodiment of the present invention.

FIG. 9 is a sectional view illustrating a modification of the magnetic recording / reproducing head according to the third embodiment of the present invention.

FIG. 10 is a sectional view and a plan view for explaining a fourth embodiment of the magnetic recording / reproducing head of the present invention.

11 is a sectional view for explaining a method of manufacturing the magnetic recording / reproducing head shown in FIG. 10;

FIG. 12 is a diagram showing a configuration diagram of a magnetic recording / reproducing apparatus equipped with the magnetic recording / reproducing head of the present invention.

FIG. 13 is a cross-sectional view of a conventional magnetic recording / reproducing head for each manufacturing process.

[Explanation of symbols]

15, 20 magnetic recording / reproducing head 8, 30, 911 reproducing head composed of shielded MR head 32 lower shield layer 67 lower shield layer 33 serving also as upper magnetic pole 33, 68 Lower reproducing magnetic gap film 34, 69 MR film 35, 35 ', 70, 70' A pair of leads 36, 80 Upper reproducing magnetic gap film 37 Upper shield layer 38 also serving as lower magnetic pole 38 '... read head lead electrode 40, 90 ... recording head 41, 63 consisting of an induction type magnetic head ... recording magnetic gap film 42 ... upper magnetic pole 43, 65 ... recording coil 46 ... electrode lead hole 72, 72 '... coil electrode

──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Naoyuki Inoue 72 Horikawa-cho, Saiwai-ku, Kawasaki City, Kanagawa Prefecture Inside the Toshiba Corporation Kawasaki Office (72) Inventor Yuichi Osawa 72-Horikawacho, Saiwai-ku, Kawasaki City, Kanagawa Prefecture Toshiba Corporation Within the Kawasaki Office (72) Inventor Susumu Hashimoto 72 Horikawa-cho, Saiwai-ku, Kawasaki-shi, Kanagawa Prefecture Toshiba Corporation Kawasaki Office (72) Inventor Norio Ozawa 72-Horikawacho, Sachi-ku, Kawasaki-shi, Kanagawa Prefecture Toshiba Kawasaki Office ( 72) Inventor Takeo Sakakubo 72, Horikawa-cho, Saiwai-ku, Kawasaki-shi, Kanagawa Prefecture Inside the Toshiba Kawasaki Plant (72) Inventor Teruo Sasho 3500 Matsuoka, Oita-shi Oita-shi Oita Plant (56) References JP Japanese Patent Laid-Open No. 9-22512 (JP, A) Japanese Patent Laid-Open No. 9-16925 (JP, A) Japanese Patent Laid-Open No. 7-182625 (JP, A) Japanese Patent Laid-Open No. 3-269814 (JP, A) JP flat 9-185808 (JP, A) JP flat 8-167123 (JP, A) JP flat 6-215321 (JP, A) (58 ) investigated the field (Int.Cl. ⁷ , DB name) G11B 5/39

Claims (16)

(57) [Claims] In a magnetic recording / reproducing head having a magnetic reproducing head and a magnetic recording head formed in a stacked manner, of the magnetic reproducing head and the magnetic recording head, a magnetic head formed in an upper layer has a lower magnetic layer. A magnetic recording / reproducing head, wherein an electrode lead hole of the head is provided so as to penetrate a part of a conductor constituting the upper magnetic head. 2. The magnetic head formed on the upper layer is a recording head having a recording magnetic pole and a recording coil, and the lower magnetic head is connected to a magnetoresistive film and the magnetoresistive film. 2. The magnetic recording / reproducing head according to claim 1, wherein the reproducing head is provided with a lead, and a lead electrode electrically connected to the lead is formed in the electrode lead hole. 3. The magnetic read head comprises an upper shield layer formed on the magnetoresistive film via a read magnetic gap, and the magnetic recording head comprises a lower magnetic layer common to the upper shield layer. 3. The apparatus according to claim 2, further comprising a side magnetic pole, an upper magnetic pole facing the lower magnetic pole, a recording magnetic gap interposed between the magnetic poles, and the magnetic coil for supplying a signal magnetic field to the magnetic pole. Magnetic recording and reproducing head. 4. A magnetic head according to claim 1, wherein said magnetic pole has a front end portion close to said medium facing surface and a rear portion magnetically connected to said front end portion and having a region wider in width in a direction parallel to said medium facing surface than said front end portion. 3. The magnetic recording / reproducing head according to claim 2, wherein: 5. The magnetic pole rear part is formed at a predetermined distance from a surface facing a medium.
The magnetic recording / reproducing head according to the above. 6. The magnetic recording / reproducing head according to claim 4, wherein the front end is surrounded by an insulating layer whose surfaces are flush with each other. 7. A magnetic recording / reproducing head according to claim 1, wherein said electrode lead-out hole is formed apart from a medium facing surface. 8. The magnetic head formed in the upper layer is a magnetic read head having a magnetoresistive element and a lead electrically connected to the magnetoresistive element, and the lower magnetic head includes a recording magnetic pole and a recording pole. 2. The magnetic recording / reproducing head according to claim 1, wherein the magnetic recording head includes a coil, and an electrode electrically connected to the recording coil is formed in the electrode lead hole. 9. The recording head includes a lower magnetic pole and an upper magnetic pole opposed to each other via a recording magnetic gap at a tip end close to the medium facing surface, and a recording coil for applying a signal magnetic field to the lower and upper magnetic poles. The read head includes a shield layer made of a magnetic layer common to the upper magnetic pole, and the magnetoresistive film and the lead formed on the shield layer via a read magnetic gap. 9. The magnetic recording / reproducing head according to claim 8, wherein the magnetic recording / reproducing head is the shield layer. 10. The magnetic recording / reproducing apparatus according to claim 1, wherein the upper magnetic head has a tip portion which is closer to a medium facing surface having a finer pattern than a region where the electrode lead-out holes are formed. head. 11. The magnetic recording / reproducing head according to claim 10, wherein the upper magnetic head has a pattern having a width of 1 μm or less at a tip portion close to the medium facing surface. 12. A step of laminating a magnetic reproducing head and a magnetic recording head, and forming a magnetic head in which an electrode lead hole of a lower magnetic head of the magnetic reproducing head and the magnetic recording head is formed in an upper layer. Forming an insulating film on an inner wall of the electrode lead-out hole, forming a part of the conductor so as to penetrate the same, and forming a lower layer in the electrode lead-out hole having the insulating film formed on the inner wall. Forming a lead electrode of the head. 13. A step of forming a magnetoresistive film of a reproducing head, a lead connected to the magnetoresistive film, and a shield layer formed on the magnetoresistive film via a reproducing magnetic gap. A lower magnetic pole composed of a shield layer and a common magnetic material layer, a recording magnetic gap formed on the lower magnetic pole, a recording coil formed on the recording magnetic gap film, Forming a recording head having an upper magnetic pole formed on the recording magnetic gap and covering a part of the recording coil, and after forming the recording coil,
13. The method of manufacturing a magnetic recording / reproducing head according to claim 12, wherein the electrode drawing hole is formed by processing a magnetic layer common to the upper shield layer and the lower magnetic pole. 14. The method according to claim 13, wherein the lower shield layer is patterned after at least forming the recording coil. 15. A lower shield layer, a magnetoresistive film formed on the lower shield layer via a lower reproducing magnetic gap film and having a pair of leads, and an upper surface on the magnetoresistive film. A read head having an upper shield layer formed with a read magnetic gap film interposed therebetween; a lower magnetic pole formed of a magnetic layer common to the upper shield layer; and a recording magnetic layer formed on the lower magnetic pole. A gap film, a recording coil formed above the recording magnetic gap film,
In manufacturing a magnetic recording / reproducing head having at least a tip portion formed on the recording magnetic gap film and having an upper magnetic pole provided so as to cover a part of the recording coil, at least After forming a recording gap film, an electrode lead-out hole is formed in the upper shield layer and the magnetic layer common to the lower magnetic pole, and after forming at least the recording coil, the magnetoresistive effect film is passed through the electrode lead-out hole. A method for manufacturing a magnetic recording / reproducing head, comprising: 16. A lower shield layer, a magnetoresistive film formed on the lower shield layer via a lower reproducing magnetic gap film and having a pair of leads, and an upper surface on the magnetoresistive film. Forming a read head having an upper shield layer formed through a read magnetic gap; an upper magnetic pole formed of a magnetic layer common to the lower shield layer; and the upper magnetic pole formed through a recording magnetic gap. Forming a recording head having a lower magnetic pole opposed to a recording coil that applies a current magnetic field to the upper magnetic pole and the lower magnetic pole, and after forming the read or the magnetoresistive film. Forming the electrode lead-out hole penetrating through a common magnetic layer to the lower shield layer and the upper magnetic pole.