CN1295765A - Thin film actuated mirror array in an optical projection system - Google Patents

Thin film actuated mirror array in an optical projection system Download PDF

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CN1295765A
CN1295765A CN98813901.4A CN98813901A CN1295765A CN 1295765 A CN1295765 A CN 1295765A CN 98813901 A CN98813901 A CN 98813901A CN 1295765 A CN1295765 A CN 1295765A
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hearth electrode
electrode
layer
top electrode
thin film
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CN1168323C (en
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黄圭昊
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WiniaDaewoo Co Ltd
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Daewoo Electronics Co Ltd
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Priority claimed from PCT/KR1998/000053 external-priority patent/WO1999049667A1/en
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Abstract

Thin film AMA is disclosed. The thin film AMA has an active matrix, a supporting member, actuating parts and a reflecting member. The supporting member has a supporting line, a rectangular ring-shaped supporting layer, anchors. Insulating members are formed from top electrodes to the supporting layer. The anchors supporting the actuating parts are formed perpendicular to the actuating parts. The initial tiltings of the actuating parts are prevented because the stress concentration line is not generated. Therefore, the desired reflection angle of the reflecting member may be regular, so the light efficiency is enhanced and the quality of the picture projected onto the screen is increased. Also, the electrical shorts generated between the top electrodes and the bottom electrodes may be prevented by the insulating members, so point defects of pixels are effectively decreased.

Description

Thin film actuated mirror array in the light projection system
The present invention has introduced the thin film actuated mirror array in a kind of light projection system, and this invention especially can effectively prevent the picture element defective, and optimizes the projection image quality on the screen.
Usually, according to its optical principle, optical modulator can be divided into two kinds.A kind of is the direct sunshine modulator, as cathode ray tube (CRT); Another kind is to transmit optical modulator, as liquid crystal display (LCD).CRT can produce the high-quality picture on screen, but the weight of CRT, volume and production cost increase with the increase of screen.The photo structure of LCD is simple, so its weight and volume is all littler than CRT.But because light polarization, the optical efficiency of LCD is very low, less than 1～2%.And also there is other problem in the liquid crystal material of LCD, as responds slowly with overheated.
Therefore, people develop digital mirror device (DMD) and actuated mirror array (AMA) to address these problems.At present, the optical efficiency of DMD is approximately 5%, and the optical efficiency of AMA is greater than 10%.AMA has strengthened the contrast of picture, and therefore, the picture on the screen is more clear bright.AMA is not subjected to the influence of polarised light, can not influence light polarization yet, and is higher than the efficient of LCD and DMD.
Fig. 1 is the engine system sketch of traditional AMA of introduction in the 5th, 126, No. 836 patents of the U.S. (U.S.Patent 5,126,836, authorize Gregory Um).Referring to Fig. 1, pass the first road slit 3 and first lens 5 from a branch of incident light of light source 1 after, be broken down into ruddiness, green glow and blue light according to RGB (RGB) system of representative color.By 7, the second mirrors 9 of first mirror and the 3rd mirror 11 reflections, by mirror 7,9, the light of 11 reflections incides AMA device 13,15 and 17 respectively respectively for the ruddiness that decomposites, green glow and blue light.AMA device 13,15,17 tilts mirror wherein, and incident light is by specularly reflected like this.In this invention, it is that the distortion of active layer causes under the mirror that the mirror in the AMA device tilts.Light by 13,15,17 reflections of AMA device passes second lens 19 and the second road slit 21, by projecting lens 23 imaging (not shown) on screen.
In most of the cases, do active layer with ZnO.But lead zirconate titanate (PZT:Pb (Zr, Ti) O 3) piezoelectricity better than ZnO.PZT is the complete solid solution of lead zirconates and lead titanates.The PZT of cubic structure is present in the high temperature paraelectric phase.Under the room temperature, according to the ratio of components of zirconium and titanium, tiltedly the PZT of square structure is present in the antiferroelectric phase, and the PZT of rhombohedral crystal structure is present in the ferroelectric phase, the PZT of square crystal structure be present in ferromagnetic mutually in.The distortion phase boundary (MPB) of regular crystal and rhombohedral crystal is consisting of Zr: Ti=1: existed in 1 o'clock.PZT has maximum insulating properties and maximum piezoelectricity at the MPB place.MPB exists on a large scale, wherein tetragonal phase and rhombus crystalline phase coexistence, but when definite composition, do not exist.About the composition of phase coexistence among the PZT, the researcher does not reach an agreement, and the origin cause of formation of phase coexistence has been proposed many theories, as thermodynamic stability, forms fluctuation and internal stress.Now, pzt thin film can be by plurality of step production, as the spin coating method, and Metalorganic chemical vapor deposition (OMCVD) method and sputtering method.
AMA is divided into bulk type AMA and film-type AMA usually.United States Patent (USP) the 5th, 469, No. 302 (U.S.Patent No.5,469,302, authorize Dae-Young Lim) have introduced bulk type AMA.In bulk type AMA, after having the potsherd that dress one deck is made up of the multi-layer ceramics that is inserted with metal electrode on the transistorized activity matrix,, mirror is fixed on this potsherd by the sawing potsherd.But the AMA of bulk type has its shortcoming: it needs point-device processing and design, and the reaction of active layer is very slow.Therefore, the method that adopts semiconductor technology to produce film AMA is developed.
Still in USPTO, be in No. the 08/792nd, 453, the United States Patent (USP) (U.S.Patent No.08/792,453) of pending status, be entitled as " thin film actuated mirror array in the light projection system and production technology thereof), list in the lump at this.
Fig. 2 is the plane graph of film AMA, and Fig. 3 is the perspective view of film AMA shown in Figure 2, and Fig. 4 is along A among Fig. 3 1-A 2The sectional view of straight line.
Referring to Fig. 2～4, film AMA has matrix 31, the exciter of making on the matrix 31 57, and the reflecting element of making at exciter 57 middle parts 55 constitutes.
The matrix 31 that comprises the electrical wiring (not shown), have one be formed on connecting terminal 33 on the electrical wiring, cover passivation layer 35 on matrix 31 and the connecting terminal 33, and passivation layer 35 on the etch stop layer 37 that covers constitute.Exciter 57 is by 43, one hearth electrodes 45 of a supporting layer, and 47, one top electrodes 49 of one deck active layer constitute via contacting 53 with one.
Referring to Fig. 3, the first of supporting layer 43 is positioned at hearth electrode 45 bottoms, and second portion exceeds hearth electrode 45 bottoms.The bottom of supporting layer 43 both sides links to each other with etch stop layer 37.The part that supporting layer 43 links to each other is called anchor 43a, and 43b is supporting exciter 57.The side of supporting layer 43 extends from the partial parallel that links to each other.The core of supporting layer 43 is made integral body with side between dual-side, the core of supporting layer 43 is a rectangle.
Hearth electrode 45 is positioned on the core and side of supporting layer 43.Active layer 47 is positioned on the hearth electrode 45, and top electrode 49 is positioned on the active layer 47.Hearth electrode 45 is a U-shaped.Active layer 47 is littler than hearth electrode 45, and shape is identical with hearth electrode 45.Top electrode 49 specific activity layers 47 are little, and shape is identical with active layer 47.When applying first signal for hearth electrode 45, when applying second signal for top electrode 49, between top electrode 49 and hearth electrode 45, just produced an electric field, cause active layer 47 under electric field action, to be out of shape.
Be arranged in via hole 51 via contact 53, pass hearth electrode 45, supporting layer 43, etch stop layer 37 and passivation layer 35 from active layer 47, arrive connecting terminal 33 via hole 51.Via contact 53 hearth electrode 45 is communicated with connecting terminal 33.
Reflection reflection of incident light device 55 is positioned at the middle part of supporting layer 43.The thickness of reflector 55 is predetermined, for from the surface of supporting layer 43 to a side of active layer 47.Reflector 55 is the rectangular mirror of one side preferably.
Hereinafter will introduce a kind of technology of producing film AMA.
Fig. 5 A～5D has showed the production stage of film AMA.
Referring to Fig. 5 A, passivation layer 35 is positioned on the matrix 31 that electrical wiring (not shown) and connecting terminal 33 are installed.Electrical wiring and connecting terminal 33 receive first signal (picture intelligence) from the external world, then first signal is sent to hearth electrode 45.Electrical wiring is preferably carried out switching manipulation by a metal-oxide semiconductor (MOS) (MOS) transistor.Connecting terminal 33 is made of metal, as tungsten (W).Connecting terminal 33 links to each other with electrical wiring.Passivation layer 35 is made by the chemical vapor deposition (CVD) method by phosphorus-silicate glass (PSG), and the thickness of resulting passivation layer 35 is 0.1 micron～1.0 microns.In production process subsequently, the matrix 31 that 35 pairs of passivation layers are equipped with electrical wiring and connecting terminal 33 has protective effect.
Etch stop layer 37 usefulness nitride are deposited on the passivation layer 35 by low-pressure chemical vapor deposition (LPCVD) method, and the thickness of the etch stop layer 37 that obtains is 1000 dusts～2000 dusts.Etch stop layer 37 can be protected passivation layer 35 and matrix 31 in etching step subsequently.
Sacrifice layer 39 usefulness PSG are deposited on the etch stop layer 37 by atmospheric pressure CVD method, and the thickness of resulting sacrifice layer 39 is 0.5 micron～4.0 microns.In this case, the smoothness of resulting sacrifice layer 39 is very poor, because sacrifice layer 39 has covered the top of the matrix 31 that electrical wiring and connecting terminal 33 are installed.Therefore, by in rotation on glass (SOG) method or chemico-mechanical polishing (CMP) method, the surface of sacrifice layer 39 is flattened.Then, its first and second portion close with it of sacrifice layer 39 that has down connecting terminal 33 is etched, makes it have the first of etch stop layer 37 of connecting terminal 33 down and the second portion close with it exposes, so that make supporting layer 43.
Referring to Fig. 5 B, on first and second parts of etch stop layer 37 and sacrifice layer 39, make ground floor.Ground floor is made by rigid material such as nitride or metal.Ground floor is made by the LPCVD method, and the thickness of resulting ground floor is 0.1 micron～1.0 microns.Ground floor should carry out patterned process, so that make supporting layer 43.
Bottom electrode layer is by conducting metal, and as platinum (Pt), tantalum (Ta) or platinum-tantalum (Pt-Ta) are made on ground floor.Bottom electrode layer is made by sputtering method or CVD method, and the thickness of resulting bottom electrode layer is 0.1 micron～1.0 microns.Then, bottom electrode layer is evenly cut, and to isolate single bottom electrode layer, like this, each pixel of film AMA receives first signal that comes from the outside independently by electrical wiring and connecting terminal 33.Bottom electrode layer should carry out patterned process, so that make hearth electrode 45.
The second layer is by piezoelectric, as PZT (Pb (Zr, Ti) O 3Or PLZT ((Pb, La) (Zr, Ti) O 3Make on bottom electrode layer, the thickness of the resulting second layer is about 0.1 micron～1.0 microns.Best, the thickness of the second layer is 0.4 micron.After generating the second layer, adopt rapid thermal annealing (RTA) technology that the second layer is carried out annealing in process with gel method, sputtering method or CVD method.The second layer should carry out patterned process, so that make active layer 47.
Use conducting metal, as aluminium (Al), platinum (Pt) or silver (Ag) are made top electrode layer on the second layer.Top electrode layer can obtain by sputtering method or CVD method, and the thickness of resulting top electrode layer is 0.1 micron～1.0 microns.Top electrode layer should be carried out patterned process, so that make top electrode 49.
Referring to Fig. 5 C, on top electrode layer, apply after the first photoresist (not shown) with the spin coating technology, by photoresist as the etching cover, top electrode layer is patterned to make top electrode 49.Like this, top electrode 49 is a U-shaped.Second signal (bias voltage signal) is applied in to top electrode 49, thereby produces electric field between top electrode 49 and hearth electrode 45.
After etching is removed first photoresist, on the top electrode 49 and the second layer, apply the second photoresist (not shown) with the spin coating technology.By second photoresist as the etching cover, the second layer is patterned to make active layer 47.Active layer is a U-shaped, and is wideer than top electrode 49.After etching is removed second photoresist, on top electrode 49, active layer 47 and bottom electrode layer, apply the 3rd photoresist (not shown) with the spin coating technology.By the 3rd photoresist as the etching cover, bottom electrode layer is patterned to make hearth electrode 45.Bottom electrode layer is a U-shaped, and specific activity layer 47 is wideer.Then, remove the 3rd photoresist with etching.
Then, active layer 47, hearth electrode 45, ground floor, etch stop layer 37 and passivation layer 35 parts are etched, with make from active layer 47 extend through connecting terminal 33 via hole 51.Be arranged in via hole 51 via contact 53, use conducting metal, as tungsten (W), platinum, aluminium and titanium are made.Can obtain by sputtering method or CVD method via contact 53, can extend through hearth electrode 45 from connecting terminal 33 via contact 53 like this.Via contact 53 connecting terminal 33 and hearth electrode 45 are communicated with.
Referring to Fig. 5 D, on hearth electrode 45, apply after the 4th photoresist with the spin coating technology, by the 4th photoresist (not shown) as the etching cover, ground floor is patterned to make supporting layer 43.Supporting layer 43 is made of side and core.The part of the bottom of the side of supporting layer 43 links to each other with etch stop layer 37 and is called anchor 43a, 43b.With continuous part is starting point, and the side of supporting layer 43 is positioned at the top of etch stop layer 37, and parallel with it.The core of supporting layer 43 is made integral body with side between dual-side.Supporting layer 43 is a rectangle.Subsequently, the 4th photoresist is removed in etching.When the ground floor patterning, sacrifice layer 39 parts are exposed.
Apply the 5th photoresist with the spin coating technology on the exposed part of sacrifice layer 39 and supporting layer 43 after, the 5th photoresist is etched so that the core of supporting layer 43 exposed.In the centre of supporting layer 43, use reflecting material, as silver, platinum or aluminium are made reflector 55.Can obtain reflector 55 by sputtering method or CVD method, the thickness of resulting reflector 55 is 0.3 micron～2.0 microns.The shape that is used for the reflection of incident light device 55 that the reflection source (not shown) sends is identical with the centre shape of supporting layer 43.Then, remove the 5th photoresist and sacrifice layer 39, so just obtained exciter 57 with hydrogen fluoride (HF) gas.After sacrifice layer 39 is removed, on its original position one air gap 41 can appear.
First signal by electrical wiring, connecting terminal 33 with pass to hearth electrode 45 from the external world via contacting 53.Simultaneously, when secondary signal is passed to top electrode 49 by a common line (not shown), between top electrode 49 and hearth electrode 45, just produced electric field.Active layer 47 between top electrode 49 and hearth electrode 45 deforms under effect of electric field.Active layer 47 deforms in the direction vertical with electric field.Exciter 57 with active layer 47 is energized along the direction with supporting layer 43 position opposite.That is, exciter 57 is upwards encouraged, because the inclination of exciter 57, the supporting layer 43 that links to each other with hearth electrode 45 is also upwards encouraged.
Reflection is the same with exciter 57 from the reflection of incident light device 55 of light source, also tilts, because reflector 55 is positioned at the core of supporting layer 43.Therefore, reflector reflexes to light on the screen, thereby obtains image on screen.
But in above-mentioned film AMA, the part that hearth electrode evenly cuts (iso-cutted) from the second layer (active layer) to the other parts of the second layer, has crackle to produce, because the second layer is after bottom electrode layer is by the pixel of even cutting with separating film AMA, be formed on the bottom electrode layer.Therefore and since top electrode and hearth electrode by the crackle in the active layer by locally connected, between top electrode and hearth electrode, may produce short circuit.When short circuit occurred, exciter can not be energized, thereby caused occurring among the film AMA point defect of pixel.
And, be patterned at sacrifice layer and can produce the stress concentration line when making the anchor that supports exciter.Since the distortion actuating force, as non-homogeneous residual stress and stress gradient, act on the stress concentration line, may cause exciter when nothing adds first and second signals with regard to run-off the straight.Since when exciter when initial condition just tilts, the reflection angle of reflector can depart from predetermined angle, thereby causes the optical efficiency of incident light to reduce, the image quality on the screen is decline thereupon also.
Therefore, consider above-mentioned traditional problem, target of the present invention just provides the thin film actuated mirror array in a kind of light projection system that can effectively avoid the picture element defective, and this patent need not evenly cut hearth electrode, optimizes image quality on the screen by the optical efficiency that improves incident light.
For realizing above-mentioned target, the present invention introduces the thin film actuated mirror array in a kind of light projection system, comprising an activity matrix, and a supporter, first exciting element, second exciting element and a reflector.
Activity matrix comprises: a matrix, and the metal oxide semiconductor transistor that carries out switching manipulation is equipped with in its inside; The first metal layer, wherein be equipped with the metal-oxide semiconductor (MOS) that transmits first signal from the extended leakage substrate of leak.
Supporter comprises: Support Line, supporting layer, one first anchor and two second anchors.Support Line is positioned on the activity matrix, and supporting layer and Support Line are made integral body.The supporting layer side of being annular.First anchor and second anchor lay respectively between the part of contiguous Support Line in activity matrix and the supporting layer.
First exciting element comprises: first hearth electrode, first active layer and first top electrode.First hearth electrode receives first signal.First hearth electrode is positioned at the supporting layer first vertical with Support Line, corresponding first hearth electrode of first top electrode.First top electrode receives secondary signal, produces first electric field.First active layer deforms under first electric field action between first top electrode and first hearth electrode.
Second exciting element comprises: second hearth electrode, second active layer and second top electrode.Second hearth electrode receives first signal.Second hearth electrode is positioned at the supporting layer second portion vertical with Support Line, corresponding second hearth electrode of second top electrode.Second top electrode receives secondary signal, produces second electric field.Second active layer is formed between second top electrode and second hearth electrode, deforms under second electric field action.
Reflector is positioned at the top of first exciting element and second exciting element, so that the reflection incident light.Activity matrix is preferably in and applies one deck first passivation layer on the first metal layer on the matrix, applies second metal level on first passivation layer, applies second passivation layer on second metal level, applies etch stop layer on second passivation layer.
First hearth electrode is a rectangle, and a ledge, first active layer are arranged is the rectangle littler than first hearth electrode, and first top electrode is the rectangle littler than first active layer.And second hearth electrode is a rectangle, and the one and first hearth electrode ledge opposing projections are arranged, and second active layer is the rectangle littler than second hearth electrode, and second top electrode is the rectangle littler than second active layer.
First hearth electrode is preferably L shaped, and it is corresponding L shaped with first hearth electrode that second hearth electrode is preferably.
First anchor is positioned at the below of first exciting element and second exciting element, and is between the two, has the first of the activity matrix that leaks substrate to link to each other with the below, and each second anchor lays respectively at the outer below of first exciting element and second exciting element.Each second anchor respectively with activity matrix first near second link to each other with third part.
Thin film actuated mirror array preferably also has one via contact, is used for coming first signal of natural leak substrate to send first hearth electrode and second hearth electrode to; And from via contact up to the first hearth electrode connector of the extension of first hearth electrode with from via the second hearth electrode connector that contacts up to the extension of second hearth electrode.Be arranged in via the hole via contact, this hole from first anchor up to leaking substrate.Make by conducting metal via contact, the first hearth electrode connector and the second hearth electrode connector, as silver, platinum, tantalum or platinum-tantalum.
More excellent structure is that thin film actuated mirror array is the common line of Ying Youyi transmission secondary signal also; By the part of first top electrode a part up to supporting layer, first insulating part of making via the part of first hearth electrode; From common line to first top electrode, the first top electrode connector of making via first insulating part; From the part of second top electrode a part up to supporting layer, second insulating part of making via the part of second hearth electrode; And from common line up to second top electrode, the second top electrode connector of making via second insulating part.Common line is positioned on the Support Line.
First insulating part and second insulating part are by amorphous silicon or low temperature oxide, as silicon dioxide (SiO 2) and phosphorus pentoxide (P 2O 5) make.
The first and second top electrode connectors are made by conducting metal, as silver, platinum, tantalum or platinum-tantalum.
The core of reflector and supporting layer with Support Line at a distance of system one post between the parallel part, with the supporting reflex device.
Among the film AMA among the present invention, first signal that comes from the outside is applied in to first and second hearth electrodes via the leakage substrate of the MOS transistor in the matrix, the first metal layer, via contacting, reaching the first and second hearth electrode connectors.Simultaneously, the secondary signal that comes from the outside is applied in to first and second top electrodes via the common line and the first and second top electrode connectors.Like this, between first top electrode and first hearth electrode, just produce first electric field, between second top electrode and second hearth electrode, produced second electric field.First active layer between first top electrode and first hearth electrode deforms under first effect of electric field.Second active layer between second top electrode and second hearth electrode deforms under second effect of electric field.The direction that first and second active layers deform is respectively perpendicular to the direction of first and second electric fields.Have first exciting element and second exciting element of first active layer, be energized by direction with the supporting layer position opposite with second active layer.That is, first exciting element and second exciting element are upwards encouraged, and according to the angle of inclination of first and second exciting elements, the supporting layer that links to each other with first and second hearth electrodes is also upwards encouraged.
The post that is positioned on the supporting layer is supporting reflector.Reflection is also tilted with the inclination of first and second exciting elements from the reflection of incident light device of light source.Like this, reflector reflexes to light on the screen, thus imaging on screen.
According to the present invention, first and second anchors that support exciting element are vertical with the direction of exciting element.Because between each anchor and exciting element, there is not the stress concentration line, exciting element surface level, no initial tilt.Like this, the required angle of reflection of the reflector on the exciting element has rule to follow, so the optical efficiency raising, and the image quality of projection also is improved on the screen.
And insulating part has been avoided the short circuit between top electrode and hearth electrode, therefore, has effectively reduced the point defect of pixel among the film AMA.
Hereinafter, make objects and advantages of the present invention become more obvious with reference to the detailed introduction of accompanying drawing to preferred embodiment.In the accompanying drawing:
Fig. 1 is the sketch of the automotive engine system of traditional actuated mirror array.
Fig. 2 is the plane graph of thin film actuated mirror array in the light projection system disclosed in the previous application of a present assignee.
Fig. 3 is the perspective view of thin film actuated mirror array in the light projection system shown in Figure 2.
Fig. 4 is along A among Fig. 3 1-A 2The sectional view of straight line.
Fig. 5 A～5D is the production stage of thin film actuated mirror array in the light projection system shown in Figure 4.
Fig. 6 is the plane graph according to thin film actuated mirror array in the light projection system of the present invention;
Fig. 7 is the perspective view of thin film actuated mirror array in the light projection system shown in Figure 6;
Fig. 8 is along B among Fig. 7 1-B 2The sectional view of straight line;
Fig. 9 is along C among Fig. 7 1-C 2The sectional view of straight line;
Figure 10 A～10G is the production stage according to thin film actuated mirror array in the light projection system of the present invention.
Hereinafter, will the preferred embodiments of the present invention be introduced in more detail in conjunction with appended each figure.
Fig. 6 is the plane graph according to thin film actuated mirror array in the light projection system of the present invention, and Fig. 7 is the perspective view of thin film actuated mirror array in the light projection system shown in Figure 6; Fig. 8 is along B among Fig. 7 1-B 2The sectional view of straight line; Fig. 9 is along C among Fig. 7 1-C 2The sectional view of straight line.
Referring to Fig. 6 and Fig. 7, according to the present invention, film AMA comprises a supporter 175 on an activity matrix 100, the activity matrix 100, lay respectively at first exciting element 210 on the supporter 175 and the reflector 260 on second exciting element 211, first exciting element 210 and second exciting element 211.
Referring to Fig. 8, activity matrix 100 comprises a matrix 101, the individual P-MOS transistor 120 of M * N (M, N are integer) is wherein arranged, from the source 110 and leakage 105 extended the first metal layers 135, first passivation layer 140 of P-MOS transistor 120, second metal level, 145, the second passivation layers 150 and etch stop layer 155.The first metal layer 135 is positioned on the matrix 101, and first passivation layer 140 is positioned on the first metal layer 135 and the matrix 101.Second metal level 145 is positioned on first passivation layer 140, and second passivation layer 150 is positioned on second metal level 145.Etch stop layer 155 is positioned on second passivation layer 150.
There is one to leak substrate and extend to first anchor, 171, the first anchors 171 below between first exciting element 210 and second exciting element 211 in the first metal layer 135 from the leakage 105 of P-MOS transistor 120.Second metal level 145 comprises a titanium layer and a titanium nitride layer.The leakage substrate that the first metal layer 135 that is positioned at its below is arranged in hole 147, the second metal levels is arranged in second metal level 145.
Referring to Fig. 7 to 9, supporter 175 comprises a Support Line 174, supporting layer 170, the first anchors 171 and two second anchor 172a, 172b.Support Line 174 and supporting layer 170 are positioned on the etch layer 155.First air gap, 165 boundaries are between etch stop layer 155 and Support Line 174.First air gap 165 is gone back the boundary between etch stop layer 155 and supporting layer 170.
Common line 240 is positioned on the Support Line 174.The effect of Support Line 174 is to support common line 240.Supporting layer 170 sides of being annular.Supporting layer 170 is made integral body with Support Line 174.
First anchor 171 is below between two arms of the supporting layer 170 of side annular.Two arms of supporting layer 170 vertically stretch out from Support Line 174.First anchor 171 links to each other with the first of etch stop layer 155, and the leakage substrate of the first metal layer 135 is equipped with in the below of etch stop layer 155.First anchor 171 is made integral body with two arms of supporting layer 170.Two second anchor 172a, 172b are respectively formed at the outer below of two arms of supporting layer 170.Two arms of the second anchor 172a, 172b and supporting layer 170 are whole to be formed and links to each other with third part with second of etch stop layer 155 respectively.First anchor 171 and two second anchor 172a, 172b link to each other below the part of supporting layer 170 contiguous Support Lines 174.First anchor 171 and two second anchor 172a, 172b together support supporting layer 170, and like this, first anchor 171 and two second anchor 172a, 172b are supporting first exciting element 210 and second exciting element 211.First anchor 171 and two second anchor 172a, 172b are square frame shape.
The core of supporting layer 170 is supported by first anchor 171, and the sidepiece of supporting layer 170 is supported by the second anchor 172a, 172b.Like this, the vertical component of supporter 175 is a T shape as shown in Figure 8.
Via the surface of hole 270,, extend through the leakage substrate of the first metal layer 135 via the hole 147 and first passivation layer 149 in etch stop layer 155, second passivation layer 150, second metal level 145 from the core of first anchor 171.There is one in the hole 270 via contact 280.
First exciting element 210 and second exciting element 211 lay respectively on two arms of supporting layer 170.First exciting element 210 is parallel with second exciting element 211.First exciting element 210 is by one first hearth electrode 180; First active layer 190 and first top electrode 200 constitute.Second exciting element 211 is by one second hearth electrode 181; Second active layer 191 and second top electrode 201 constitute.
First hearth electrode 180 is arranged on the arm of 170 liang of arms of supporting layer.First hearth electrode 180 is a rectangle, and a ledge is arranged, and is preferably L shaped.First hearth electrode 180 has certain distance apart from Support Line 174.The ledge of first hearth electrode 180 is as the downward extension of step.The ledge of first hearth electrode 180 extends to contiguous first anchor, 171 parts via hole 270.First active layer 190 is positioned at the top of hearth electrode 180.First active layer 190 is the rectangle littler than first hearth electrode 180.First top electrode 200 is positioned on first active layer 190.First top electrode 200 is the rectangle littler than first active layer 190.
Second hearth electrode 181 is arranged on another arm of 170 liang of arms of supporting layer.Second hearth electrode 181 is a rectangle, and a ledge is arranged, and is preferably corresponding L shaped with first hearth electrode 180.Second hearth electrode 181 also has certain distance apart from Support Line 174.The ledge of second hearth electrode 181 is similar to the ledge of first hearth electrode 180, also extends to contiguous first anchor, 171 parts via hole 270.Like this, the ledge of first and second hearth electrodes 180,181 is around correspondingly forming via hole 270.Second active layer 191 is positioned at the top of second hearth electrode 181.Second active layer 191 is the rectangle littler than second hearth electrode 181.Second top electrode 201 is positioned on second active layer 191.Second top electrode 201 is the rectangle littler than second active layer 191.
Via contact 280 from the leakage substrate of the first metal layer 135 up to top via hole 270.The first hearth electrode connector 290 from via the contact 280 ledges up to first hearth electrode 180.First hearth electrode 180 links to each other with the leakage substrate of the first metal layer 135 by the contact 280 and first hearth electrode connector 290.And, the second hearth electrode connector 291 from via the contact 280 ledges up to second hearth electrode 181.Second hearth electrode 181 links to each other with the leakage substrate of the first metal layer 135 by via the contact 280 and second hearth electrode connector 291.
The part that first insulating part 220 is close to Support Lines 174 from the part of first top electrode 200 up to supporting layer 170.The first top electrode connector 230 has constituted the part of first top electrode 200 to common line 240 via first insulating part 220.The first top electrode connector 230 is communicated with first top electrode 200 with common line 240.First insulating part 220 prevents that first top electrode 200 links to each other with first hearth electrode 180, and therefore, first insulating part 220 has prevented the short circuit between first top electrode 200 and first hearth electrode 180.
And, the part that second insulating part 221 is close to Support Lines 174 from the part of second top electrode 201 up to supporting layer 170.The second top electrode connector 231 has constituted the part of second top electrode 201 to common line 240 via second insulating part 221.The second top electrode connector 231 is communicated with second top electrode 201 with common line 240.Second insulating part 221 and the second top electrode connector 231 are parallel to first insulating barrier 220 and the first top electrode connector 230 respectively.Second insulating part 221 prevents that second top electrode 201 links to each other with second hearth electrode 181, and therefore, second insulating part 221 has prevented the short circuit of making between second top electrode 201 and second hearth electrode 181.
Certain position of the supporting layer 170 of post 250 sides of being positioned at annular does not have first exciting element 210 and second exciting element 211 (that is to say that the part of supporting layer 170 has certain distance and parallel with it apart from Support Line 174) on this position.Post 250 is supporting reflector 260.Reflector 260 is preferably rectangle.
The core of reflector 260 is supported by post 250.The parallel sided of reflector 260 is positioned at first exciting element 210 and second exciting element, 211 tops.Interstice 310 boundaries are between the lateral parts and first and second exciting elements 210,211 of reflector 260.The state that reflector 260 is energized according to first exciting element 210 and second exciting element 211 produces, and reflector 260 reflects the incident lights from the light source (not shown) according to predetermined angle like this.
Hereinafter to introduce the production technology of the film AMA actuated mirror array in the light projection system among the present invention.
Figure 10 A to 10G is the production stage of film AMA actuated mirror array of the present invention.Among Figure 10 A to 10G, with parts identical among Fig. 7 with same reference numbers.
Referring to Figure 10 A, insulating barrier 125 is positioned at matrix 101 tops, so that form the back on silicon substrate 101 at the matrix of being made up of silicon 101, by the local oxidation of silicon technology, active region and place is separated.Matrix 101 is N type silicon chip preferably.Then, at grid 115 at P +Source 110 and P +Leak 105 make after, along with P +Source 110 and P +Leak 105 and on the active region, make, correspondingly make M * N (M, N are integer) individual P-type mos (MOS) transistor 120.P-MOS transistor 120 receives first signal (picture signal) that comes from the outside, and carries out switching manipulation.
After making a layer insulating 130 on the matrix 101 that P-MOS transistor 120 is housed, insulating barrier 130 belows be equipped with Lou 105 and the part in source 110 made the hole respectively, leak 105 and source 110 thereby expose.After making the coating that one deck is made up of titanium (Ti), titanium nitride (TiN), tungsten (W) and nitride on the porose insulating barrier 130, this coating is patterned to make the first metal layer 135.For transmitting first signal, the first metal layer 135 has one to leak substrate extends to support supporting layer 170 from the leakage 105 of P-MOS transistor 120 first anchor 171.
First passivation layer 140 is positioned on matrix 101 and the first metal layer 135.First passivation layer 140 is made by phosphorus-silicate glasses (PSG), and first passivation layer 140 obtains by the chemical vapor deposition (CVD) method, thickness circle of resulting passivation layer 140 in 8000 dusts between 9000 dusts.First passivation layer 140 shields to the matrix 101 that contains P-MOS transistor 120 in production stage subsequently.
Second metal level 145 is positioned on first passivation layer 140.Second metal level 145 is made up of titanium layer and titanium nitride layer.For making second metal level 145, at first, on first passivation layer 140, make titanium layer with sputtering method, the about boundary of the thickness of resulting titanium layer in 300 dusts between 500 dusts.Then, make titanium nitride layer with physical vaporous deposition on titanium layer, the thickness of resulting titanium nitride layer is about 1000 dusts～1200 dusts.Incident light on second metal level, the 145 isolated matrixes 101, like this, second metal level 145 has prevented that the light Leakage Current runs off from matrix 101.Then, contain the part of leaking substrate in second metal level 145 and be etched, make hole 147.Hole 147 is keeping apart via contact 280 and second metal level 145.
Second passivation layer 150 is positioned at the top in second metal level 145 and hole 147.Second passivation layer 150 is made by phosphorus-silicate glasses.Second passivation layer 150 obtains by the CVD method.The thickness of resulting passivation layer 150 is about 2000 dusts～3000 dusts.Second passivation layer 150 shields to the combination layer on second metal level 145 and the matrix 101 in production stage subsequently.
Etch stop layer 155 is positioned at the top of second passivation layer 150, by low temperature oxide (LTO), as silicon dioxide (SiO 2), phosphorus pentoxide (P 2O 5) form.Etch stop layer 155 is made between 350 ℃～450 ℃ by low pressure chemical vapor deposition method (LPCVD), and the thickness of resulting etch stop layer 155 is about 0.2 micron～0.8 micron.Etch stop layer 155 shields to the combination layer on second passivation layer 150 and the matrix 101 in production stage subsequently.Like this, activity matrix 100 has just been made, and comprises matrix 101, the first metal layer 135, the first passivation layer 140, the second metal levels, 145, the second passivation layers 150 and etch stop layers 155.
First sacrifice layer 160 is positioned on the etch stop layer 155, makes with many silicon when temperature is lower than about 500 ℃.First sacrifice layer 160 obtains by the LPCVD method, and the thickness of gained first sacrifice layer 160 extremely is about 2.0 microns～3.0 microns.In this case, the smoothness of first sacrifice layer 160 is very poor, because first sacrifice layer 160 has covered the top of activity matrix 100, and MOS transistor 120 and combination layer is arranged in the activity matrix 100.Therefore, by flattening on rotation on glass (SOG) or chemico-mechanical polishing (CMP) the method surface to first sacrifice layer 160, the thickness of resulting first sacrifice layer 160 is about 1.1 microns.
Figure 10 B is the plane graph of first sacrifice layer 160 behind the patterning.
Referring to Figure 10 B, after applying the first photoresist (not shown) and patterning on first sacrifice layer 160, the hole 147 in second metal level 145 is wherein contained in the first of first sacrifice layer 160; And second and third part of contiguous first are etched to and expose etch stop layer 155 in first sacrifice layer 160.Make first anchor 171 and the second anchor 172a, 172b in the exposed section of etch stop layer 155.The exposed part of these etch stop layers 155 is the rectangle that certain intervals is arranged.First photoresist is removed then.
Referring to Figure 10 C, ground floor 169 is positioned at the top of the exposed part of etch stop layer 155, and the exposed part of these etch stop layers 155 is a rectangle, and is positioned on first sacrifice layer 160.Ground floor 169 is made up of as nitride or metal rigid material.Ground floor 169 obtains by the LPCVD method, and the thickness of resulting ground floor 169 is about 0.1 micron～1.0 microns.Ground floor 169 will be patterned, to make the supporter 175 that comprises supporting layer 170, Support Line 174, the first anchors 171 and two second anchor 172a, 172b.When the time comes, first anchor 171 is positioned at the center of the exposed part of etch stop layer 155, and two second anchor 172a, 172b then lay respectively at other exposed part of etch stop layer 155.
Hearth electrode 179 is positioned on the ground floor 169.Hearth electrode 179 is made by conducting metal such as platinum (Pt), tantalum (Ta) or platinum-tantalum (Pt-Ta).Bottom electrode layer 179 can obtain by sputtering method or CVD method, and the thickness of resulting bottom electrode layer 179 is about 0.1 micron～1.0 microns.Bottom electrode layer 179 is patterned, to make the first relative hearth electrode 180 of ledge and second hearth electrode 181.
The second layer 189 is positioned on the bottom electrode layer 179.The second layer 189 is by piezoelectric, as PZT (Pb (Zr, Ti) O 3Or PLZT ((Pb, La) (Zr, Ti) O 3On bottom electrode layer, make, generate the second layer 189 by gel method, sputtering method or CVD method.The thickness of the resulting second layer 189 is about 0.1 micron～1.0 microns.According to gel method, the second layer 189 preferably adopts sputtering method to be made by PZT.The thickness of the resulting second layer is about 0.4 micron.Adopt rapid thermal annealing (RTA) technology that the second layer 189 is carried out annealing in process then.The second layer 189 should carry out patterned process, so that be formed in first active layer 190 and second active layer 191 that can deform under first and second electric field actions.
Top electrode layer 199 is positioned on the second layer 189.Top electrode layer 199 is made by conducting metal, as tantalum, platinum or silver (Ag).Top electrode layer 199 can obtain by sputtering method or CVD method.The thickness of resulting top electrode layer 199 is about 0.1 micron～1.0 microns.Top electrode layer 199 will be patterned, to make first top electrode 200 and second top electrode 201 that keeps at a certain distance away.
Referring to Figure 10 D, after on top electrode layer 199, applying the second photoresist (not shown) with the spin coating technology, top electrode layer 199 is patterned, so that by second photoresist is used as the etching cover, makes first top electrode 200 and second top electrode, 201 (see figure 7)s of rectangle.First top electrode 200 and second top electrode 201 are parallel to each other.Secondary signal (bias voltage signal) is applied in to first top electrode 200 and second top electrode 201 by common line 240.Then, second photoresist is removed.
The second layer 189 is patterned, so that through the step identical with top electrode layer 199, it is parallel to each other to make first active layer 190 and second active layer, 191, the first active layers 190 and second active layer 191.In this case, first active layer 190 and second active layer 191 are rectangle, and be wideer than first top electrode 200 and second top electrode 201 respectively, as shown in Figure 7.
Bottom electrode layer 179 is patterned, so that through the step identical with top electrode layer 199, make first hearth electrode 180 and second hearth electrode 181.First hearth electrode 180 and second hearth electrode 181 are rectangle all, and ledge is arranged.First hearth electrode 180 is preferably L shaped, and second hearth electrode 181 is preferably corresponding L shaped with first hearth electrode 180.First hearth electrode 180 and second hearth electrode 181 are wideer than first active layer 190 and second active layer 191 respectively.
When making first hearth electrode 180 and second hearth electrode 181, on the part of ground floor 169, make common line 240 simultaneously.And ground floor 169 will be patterned, to make Support Line 174.Common line 240 is vertical with second hearth electrode 181 with first hearth electrode 180, as shown in Figure 7.Common line 240 separates at a certain distance between the common line 240 and first hearth electrode 180 and second hearth electrode 181, so can not contact with second hearth electrode 181 with first hearth electrode 180.First exciting element 210 and second exciting element 211 like this, have just been made.First exciting element 210 comprises: first hearth electrode, 180, the first active layers 190 and first top electrode 200, and second exciting element 211 comprises: second hearth electrode, 181, the second active layers 191 and second top electrode 201.
Then, ground floor 169 is patterned, so that make supporter 175, supporter 175 comprises: supporting layer 170, Support Line 174, the first anchors 171 and two second anchor 172a, 172b.At this moment, in the ground floor 169 that the exposed part with etch stop layer 155 links to each other, first anchor 171 is positioned at the center of the exposed part of etch stop layer 155, and two second anchor 172a, 172b then lay respectively at other exposed part of etch stop layer 155.Hole 147 in second metal level 145 is positioned at the below of first anchor 171.Supporting layer 170 sides of being annular is made an integral body with the Support Line 174 of etch stop layer 155 tops.After removing first sacrifice layer 160, just made supporter 175, as shown in Figure 7.
Below between two arms of first anchor, 171 side's of being positioned at ring-type supporting layers 170.Two arms of supporting layer 170 vertically stretch out from Support Line 174.The center of the exposed part of first anchor 171 and etch stop layer 155, promptly first exposed part of etch stop layer 155 links to each other, comprising the leakage substrate of the first metal layer 135 that is positioned at its below.First anchor 171 is made integral body with two arms of supporting layer 170.Two second anchor 172a, 172b divide the outer below that is positioned at 170 liang of arms of supporting layer in addition.Two arms of the second anchor 172a, 172b and supporting layer 170 are made an integral body, and link to each other with third part with second of etch stop layer 155 respectively.First anchor 171 and two second anchor 172a, 172b link to each other below the part of supporting layer 170 contiguous Support Lines 174.First exciting element 210 and second exciting element 211 lay respectively on two arms of supporting layer 170.Like this, first anchor 171 is positioned at the below of 211 of first exciting element 210 and second exciting elements, and the second anchor 172a, 172b lay respectively at the outer below of 211 of first exciting element 210 and second exciting elements.First anchor 171 and two second anchor 172a, 172b together support supporting layer 170, and like this, first anchor 171 and two second anchor 172a, 172b are supporting first exciting element 210 and second exciting element 211 respectively.
Referring to Figure 10 E, after applying the 3rd photoresist (not shown) on supporter 175, the first exciting elements 210 and second exciting element 211, the 3rd photoresist is patterned so that common line 240, supporter 175, the first top electrodes 200 and second top electrode 201 are exposed.The ledge of first hearth electrode 180 and second hearth electrode 181 also comes out simultaneously.
Then, adopt the LPCVD method, after making LTO on the exposed part of supporter 175, the first top electrodes 200 and second top electrode 201, first insulating part 220 and second insulating part 221 are by making LTO, as silicon dioxide (SiO 2) and phosphorus pentoxide (P 2O 5) patterning and making.First insulating part 220 is from first top electrode 200, via first active layer 190 and first hearth electrode 180, up to supporting layer 170.Second insulating part 221 is from second top electrode 200, via second active layer 190 and second hearth electrode 180, up to supporting layer 170.Thickness circle of first insulating part 220 and second insulating part 221 is preferably 0.3 micron between 0.2 micron and 0.4 micron.
Figure 10 F is the sectional view via contact 280.Referring to Figure 10 F, from first anchor 171,, pass the hole 147 of second metal level 145, up to the leakage substrate of the first metal layer 135 through etching etch stop layer 155, the second passivation layers 150 and first passivation layer 140 via hole 270.Then, in via hole 270, make via contact 280.The first hearth electrode connector 290 and the second hearth electrode connector 291 from via hole 270, extend to the ledge of first hearth electrode 180 and second hearth electrode 181 respectively.Simultaneously, the first top electrode connector 230 passes first insulating part 220 and supporting layer 170 from common line 240, extends to the somewhere of first top electrode 200.The second top electrode connector 231 passes second insulating part 221 and supporting layer 170 also from common line 240, extends to the somewhere of second top electrode 201, as shown in Figure 7.The first top electrode connector 230 is parallel with the second top electrode connector 231.
Via contacting 280, the first hearth electrode connector 290, the second hearth electrode connectors, 291, the first top electrode connectors 230 and the second top electrode connector 231 generally all with sputtering method or CVD method, make by conducting metal, as platinum, tantalum or platinum-tantalum.Thickness separately via contact 280, the first hearth electrode connector 290, the second hearth electrode connectors, 291, the first top electrode connectors 230 and the second top electrode connector 231 all is 0.1 micron～0.2 micron.The first top electrode connector 230 and the second top electrode connector 231 couple together common line 240 respectively with first top electrode 200, second top electrode 201.The ledge of first hearth electrode 180 links to each other with the leakage substrate by via the contact 280 and first hearth electrode connector 290.The ledge of second hearth electrode 181 links to each other with the leakage substrate by via the contact 280 and second hearth electrode connector 291.
Referring to Figure 10 G, on first exciting element, 210, the second exciting elements 211 and supporter 175, make second sacrifice layer 300.Second sacrifice layer 300 is made by the LPCVD method by polysilicon.Second sacrifice layer 300 has covered first exciting element 210 and second exciting element 211.Then, flatten, so that it is evenly smooth with the surface of CMP method to second sacrifice layer 300.
Then, for a part that makes reflector 260 and post 250, the second sacrifice layers 300 is etched, expose the part of supporting layer 170, this part has certain distance and parallel with it with Support Line 174.That is, the part that does not comprise first exciting element 210 and second exciting element 211 in the supporting layer is exposed.After making the layer of metal layer on the exposed part of supporting layer 170 and the sacrifice layer 300, after having reflexive metal layer patternization, make post 250 and reflector 260 simultaneously.Reflector 260 and post 250 are all made by sputtering method or CVD method with aluminium.The core of reflector 260 is supported by post 250, and the sidepiece of reflector 260 is positioned at the top of first exciting element 210 and second exciting element 211, and parallel to each other.Reflector 260 is preferably rectangle.
Like this, at first sacrifice layer 160 and second sacrifice layer, 300 usefulness bromine fluoride (BrF 3Or BrF 5) gas or xenon fluoride (XeF 2, XeF 4, XeF 6) after the removal, by flushing, drying has just been finished the making of film AMA shown in Figure 7.On the original position of second sacrifice layer 300, make interstice 310, on the original position of first sacrifice layer 160, make first air gap 165.
Hereinafter will introduce utilization according to film AMA in the light projection system of the present invention.
Among the film AMA among the present invention, first signal that comes from the outside is by the MOS transistor 120 in the matrix 101, and the leakage substrate of the first metal layer 135 is via the contact 280 and first and second hearth electrode connectors 290,291, be applied in to first and second hearth electrodes 180,181.Simultaneously, the secondary signal that comes from the outside is applied in to first and second top electrodes 200,201 by common line 240, the first and second top electrode connectors 230,231.Like this, between first top electrode 200 and first hearth electrode 180, produce first electric field, between second top electrode 201 and second hearth electrode 181, produce second electric field.First active layer 190 of boundary between first hearth electrode 180 and first top electrode 200 deforms under first effect of electric field, and second active layer 191 of boundary between second hearth electrode 181 and second top electrode 201 deforms under second effect of electric field.The direction that first active layer 190 and second active layer 191 deform is respectively perpendicular to the direction of first and second electric fields.First exciting element 210 that contains first active layer 190 is energized along the direction with supporting layer 170 position opposite with second exciting element 211 that contains second active layer 191.That is, first, second exciting element 210,211 is upwards encouraged, and according to the excitation of first, second exciting element 210,211, the supporting layer 170 that links to each other with first, second hearth electrode 180,181 is also upwards encouraged.
Reflector 260 is supported by the post 250 that is positioned at somewhere on the supporting layer 170.Reflection from the reflection of incident light device 260 of light source with first, second exciting element 210,211 run-off the straights.Like this, reflector 260 reflexes to light on the screen, imaging on screen.
In the thin film actuated mirror array in the light projection system of the present invention, supporter is by Support Line, the supporting layer of side's annular, and first anchor and second anchor constitute.First, second exciting element is two arms of the annular supporting layer in the side of formation respectively.Each anchor that supports exciting element is vertical with exciting element.The exciting element surface level, no initial tilt is not because can produce the stress concentration line between anchor and exciting element.Like this, the angle of reflection of the reflector on the exciting element just has rule to have followed, thereby has improved optical efficiency, has optimized image quality.
And, avoided short circuit phenomenon between top electrode and the hearth electrode with insulating part.Therefore, effectively reduced the point defect of pixel among the film AMA.
Although what introduce is preferred embodiments of the invention, will be appreciated that the present invention is not confined to present embodiment, those skilled in the art can make improvements it in essence that does not break away from claim and limited and scope.

Claims (20)

1. by the thin film actuated mirror array in the light projection system of first and second signal excitation, described thin film actuated mirror array comprises:
An activity matrix has: a matrix, and the metal oxide semiconductor transistor that carries out switching manipulation is equipped with in its inside; The first metal layer wherein has from the extended leakage substrate of leak of the metal-oxide semiconductor (MOS) that transmits first signal;
A supporter comprises: 1) Support Line above described activity matrix; 2) supporting layer of side's annular, described supporting layer and Support Line are made integral body; 3) first anchor and two second anchors, first anchor and second anchor lay respectively between the supporting layer of described activity matrix and contiguous described Support Line;
One first exciting element comprises: a) receive first hearth electrode of first signal, described first hearth electrode is positioned at the described supporting layer first vertical with described Support Line; B) first top electrode of described first hearth electrode of response, described first top electrode receives secondary signal, produces first electric field; C) first active layer deforms under first electric field action between described first top electrode and described first hearth electrode;
One second exciting element has: ⅰ) receive second hearth electrode of first signal, described second hearth electrode is positioned at the described supporting layer second portion vertical with described Support Line; ⅱ) second top electrode of corresponding described second hearth electrode, described second top electrode receives secondary signal, produces second electric field, and ⅲ) second active layer between second top electrode and second hearth electrode deforms under second electric field action; With
A catoptrical reflector, described reflector are positioned at the top of described first exciting element and described second exciting element.
2. according to the thin film actuated mirror array in the light projection system of claim 1, wherein said activity matrix also comprises:
Be positioned at first passivation layer of the top of described the first metal layer and described matrix;
Be positioned at second metal level of described first passivation layer top;
Be positioned at second passivation layer of described second metal level top; With
Be positioned at the etch stop layer of described second passivation layer top.
3. according to the thin film actuated mirror array in the light projection system of claim 1, wherein said first hearth electrode is a rectangle, one ledge is arranged, described first active layer is than the little rectangle of described first hearth electrode, described first top electrode is than the little rectangle of described first active layer, described second hearth electrode is a rectangle, one ledge corresponding with the ledge of described first hearth electrode also arranged, described second active layer is than the little rectangle of described second hearth electrode, and described second top electrode is than the little rectangle of described second active layer.
4. according to the thin film actuated mirror array in the light projection system of claim 3, wherein said first hearth electrode is for L shaped, and described second hearth electrode is corresponding with described first hearth electrode L shaped.
5. according to the thin film actuated mirror array in the light projection system of claim 3, wherein said first anchor is positioned at the below between described first exciting element and described second exciting element, there is the first of the described activity matrix that leaks substrate to link to each other with the below, described each second anchor lays respectively at the outer below of described first exciting element and described second exciting element, described two second anchors respectively with described activity matrix in second the linking to each other of contiguous first with third part.
6. according to the thin film actuated mirror array in the light projection system of claim 5, wherein said thin film actuated mirror array also comprises:
One via contact, is used for coming first signal of natural leak substrate to send described first hearth electrode and described second hearth electrode to; Describedly be arranged in one via the hole via contact, this hole from described first anchor through to leaking substrate;
One first hearth electrode connector, this connector from described via contact through to the ledge of described first hearth electrode; With
One second hearth electrode connector, this connector from described via contact through to the ledge of described second hearth electrode.
7. according to the thin film actuated mirror array in the light projection system of claim 6, wherein saidly make by conducting metal, as silver, platinum, tantalum or platinum-tantalum via contact, the described first hearth electrode connector and the described second hearth electrode connector.
8. according to the thin film actuated mirror array in the light projection system of claim 1, wherein said thin film actuated mirror array also comprises:
Article one, transmit the common line of secondary signal, described common line is positioned at the top of described Support Line;
One first insulating part, this insulating part is made via described first hearth electrode by the part of described first top electrode part up to described supporting layer;
One first top electrode connector, this connector, are made via described first insulating part to described first top electrode from described common line;
One second insulating part, this insulating part is made via the part of described second hearth electrode from the part of described second top electrode part up to described supporting layer;
One second top electrode connector, this connector, are made via described second insulating barrier up to described second top electrode from described common line.
9. the thin film actuated mirror array in the light projection system according to Claim 8, wherein said first insulating part and second insulating part are made by amorphous silicon.
10. the thin film actuated mirror array in the light projection system according to Claim 8, wherein said first insulating part and second insulating part are made by a kind of low temperature oxide.
11. according to the thin film actuated mirror array in the light projection system of claim 10, wherein said first insulating part and second insulating part are by silicon dioxide (SiO 2) or phosphorus pentoxide (P 2O 5) make.
12. the thin film actuated mirror array in the light projection system according to Claim 8, wherein said first top electrode connector and the described second top electrode connector are made by conducting metal, as silver, platinum, tantalum or platinum-tantalum.
13. the thin film actuated mirror array in the light projection system according to Claim 8, wherein said thin film actuated mirror array also comprises the post that supports described reflector, described post in the core of described reflector and described supporting layer with described Support Line at a distance of between the parallel part.
14. by the thin film actuated mirror array in the light projection system of first signal and secondary signal excitation, described thin film actuated mirror array comprises:
An activity matrix comprises: a matrix, and the metal oxide semiconductor transistor that carries out switching manipulation is equipped with in its inside; The first metal layer wherein has from the extended leakage substrate of leak of the metal-oxide semiconductor (MOS) that transmits first signal;
A supporter has: 1) Support Line above described activity matrix; 2) supporting layer of side's annular, described supporting layer and Support Line are made integral body; 3) first anchor and two second anchors, first anchor and second anchor lay respectively between the supporting layer of described activity matrix and contiguous described Support Line;
One first exciting element has: a) receive first hearth electrode of first signal, it has a ledge, and described first hearth electrode is positioned at the described supporting layer first vertical with described Support Line; B) first top electrode of corresponding described first hearth electrode, described first top electrode receives secondary signal, produces first electric field; C) first active layer deforms under first electric field action between described first top electrode and described first hearth electrode;
One second exciting element has: ⅰ) receive second hearth electrode of first signal, it has a ledge corresponding to the ledge of described first hearth electrode, and described second hearth electrode is positioned at the described supporting layer second portion vertical with described Support Line; ⅱ) second top electrode of corresponding described second hearth electrode, described second top electrode receives secondary signal, produces second electric field, and ⅲ) second active layer between second top electrode and second hearth electrode, under second electric field action, deform; With
Article one, transmit the common line of secondary signal, described common line is positioned at the top of described Support Line;
One first top electrode connector, this connector is made to described first top electrode from described common line;
One second top electrode connector, this connector is made to described second top electrode from described common line; And
A catoptrical reflector, described reflector are positioned at the top of described first exciting element and described second exciting element.
15. according to the thin film actuated mirror array in the light projection system of claim 14, wherein said first anchor is positioned at the below between described first exciting element and described second exciting element, there is the first of the described activity matrix that leaks substrate to link to each other with the below, described each second anchor lays respectively at the outer below of described first exciting element and described second exciting element, described each second anchor respectively with described activity matrix in second the linking to each other of contiguous first with third part.
16. according to the thin film actuated mirror array in the light projection system of claim 14, described thin film actuated mirror array also comprises:
One via contact, is used for coming first signal of natural leak substrate to send described first hearth electrode and described second hearth electrode to; Describedly be arranged in one via the hole via contact, this hole from described first anchor through to leaking substrate;
One first hearth electrode connector, this connector from described via contact through to the ledge of described first hearth electrode; With
One second hearth electrode connector, this connector from described via contact through to the ledge of described second hearth electrode.
17. according to the thin film actuated mirror array in the light projection system of claim 14, described thin film actuated mirror array also comprises:
One first insulating part, this insulating part is positioned at the below of the described first top electrode connector, from the somewhere of described first top electrode, via the somewhere of described first hearth electrode, up to the somewhere of described supporting layer; With
One second insulating part, this insulating part is positioned at the below of the described second top electrode connector, from the somewhere of described second top electrode, via the somewhere of described second hearth electrode, up to the somewhere of described supporting layer.
18. according to the thin film actuated mirror array in the light projection system of claim 17, described first insulating part and second insulating part are made by amorphous silicon or low temperature oxide, as silicon dioxide and phosphorus pentoxide.
19. by the thin film actuated mirror array in the light projection system of first signal and secondary signal excitation, described thin film actuated mirror array also comprises:
An activity matrix comprises: a matrix, and the metal oxide semiconductor transistor that carries out switching manipulation is equipped with in its inside; The first metal layer wherein has from the extended leakage substrate of leak of the metal-oxide semiconductor (MOS) that transmits first signal;
A supporter has: 1) Support Line above described activity matrix; 2) supporting layer of side's annular, described supporting layer and Support Line are made integral body; 3) first anchor and two second anchors, first anchor and second anchor lay respectively between the supporting layer of described activity matrix and contiguous described Support Line;
One first exciting element has: a) receive first hearth electrode of first signal, it has a ledge, and described first hearth electrode is positioned at the described supporting layer first vertical with described Support Line; B) first top electrode of corresponding described first hearth electrode, described first top electrode receives secondary signal, produces first electric field; And c) first active layer deforms under first electric field action between described first top electrode and described first hearth electrode;
One second exciting element has: ⅰ) receive second hearth electrode of first signal, it has a ledge corresponding to the ledge of described first hearth electrode, and described second hearth electrode is positioned at the described supporting layer second portion vertical with described Support Line; ⅱ) second top electrode of corresponding described second hearth electrode, described second top electrode receives secondary signal, produces second electric field, and ⅲ) second active layer between second top electrode and second hearth electrode, under second electric field action, deform;
One via contact, is used for coming first signal of natural leak substrate to send described first hearth electrode and described second hearth electrode to; Describedly be arranged in one via the hole via contact, this hole from described first anchor through to leaking substrate;
One first hearth electrode connector, this connector from described via contact through to the ledge of described first hearth electrode; With
One second hearth electrode connector, this connector from described via contact through to the ledge of described second hearth electrode;
Article one, transmit the common line of secondary signal, described common line is positioned at the top of described Support Line;
One first top electrode connector, this connector is made to described first top electrode from described common line;
One second top electrode connector, this connector is made up to described second top electrode from described common line;
A catoptrical reflector, described reflector are positioned at the top of described first exciting element and described second exciting element.
20. according to the thin film actuated mirror array in the light projection system of claim 19, wherein said first insulating part and second insulating part are made as silicon dioxide or phosphorus pentoxide by amorphous silicon or low temperature oxide.
CNB988139014A 1998-03-20 1998-03-20 Thin film actuated mirror array in an optical projection system Expired - Fee Related CN1168323C (en)

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