CN1292624C - Dynamic design method and device for plasma resonant chamber - Google Patents
Dynamic design method and device for plasma resonant chamber Download PDFInfo
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- CN1292624C CN1292624C CN 200410078293 CN200410078293A CN1292624C CN 1292624 C CN1292624 C CN 1292624C CN 200410078293 CN200410078293 CN 200410078293 CN 200410078293 A CN200410078293 A CN 200410078293A CN 1292624 C CN1292624 C CN 1292624C
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Abstract
The present invention provides a dynamic design method and a device for a plasma resonant chamber. The device comprises a cylindrical big cylinder, two fixed circular plates for sealing the big cylinder, two small cylinders, a crack between opposite end faces of the big and the small cylinders, a quartz pipe which penetrates through two small cylinders, a round through hole which is arranged at the middle part of the big cylinder and is perpendicular to a shaft of the cylinder, and two short circuit plungers, wherein the outer side end of each short circuit plunger is respectively provided with two symmetric support bars, and the fixed circular plates which penetrate through the end faces of the big cylinder are connected with rings arranged at the outer side of the big cylinder through screw adjusting devices arranged at both sides of the big cylinder. The design of the plasma resonant cavity is simple and practical by the method of the present invention, and multiple mechanical design and fabrication are avoided, and a practical plasma resonant cavity is quickly obtained.
Description
Technical field
The present invention relates to a kind of preform process equipment of plasma, the adjustable resonant cavity mechanical device of a kind of parameter that relates in particular to the manufacturing of this equipment ionic medium body resonant cavity and utilize this method to make.
Background technology
In PCVD preform manufacturing system, the microwave plasma reaction system is the key equipment that produces chemical vapour deposition (CVD), and plasma reactor is a core component wherein.Microwave energy is that the centre frequency by civilian microwave band is that 2450MHz (wavelength X is 12.24cm), power are that thousands of watts continuous wave magnetron obtains.Magnetron excites electromagnetic wave earlier in the hollow waveguide exciter of rectangle, electromagnetic wave is with H
10Pattern is delivered to plasma reactor by Wave guide system and energy transform device.Plasma reactor adopts resonant cavity usually.
Be used to make the resonant cavity that the normally cylindrical or coaxial shape of the plasma resonant of PCVD preform etc. has the angle symmetrical structure, even with the glass angle that guarantees deposition.Referring to Fig. 1, coaxial shape resonant cavity is made up of concentric the cylindrical column casing 2 and the inner cylinder of closed at both ends, and inner length a+t+b is about half-wavelength (λ/2).Inner cylinder middle part car sky becomes two inner cylindrical tubes 1,4 that the middle part disconnects a crack 5, can pass quartz ampoule in the inner cylindrical tube 1,4, and microwave energy is radiate by this crack 5, is coupled into quartz ampoule 8, excites the interior gas ionization of pipe to form plasma.Coaxial shape resonant cavity generally has 7 mechanical configuration parameters, is respectively length b, the width t in crack 5 of right roundlet column casing 4 in the length a, chamber of left roundlet column casing 1 in the thickness deltat d, chamber of outside diameter d, the roundlet column casing of inside diameter D, the roundlet column casing of great circle column casing 2 and the axial location s of microwave energy input hole 6.Conventional resonator design method is: the first step: Theoretical Calculation.According to the characteristic of the frequency of magnetron, object to be processed (load) and technological requirement etc., obtain physical dimension; Second step: drawing is drawn in design, is processed into the test resonant cavity; The 3rd step: the small-signal test, the microwave power of test is the milliwatt level.Fig. 2 is the system that is used for a kind of small-signal test macro of resonant cavity test.In Fig. 2, the 21st, sweep generator, the 22nd, amplitude stabilizer, the 23rd, tested resonant cavity, the 24th, oscilloscope, the 25th, reflectometer.This system carries out zero load to tested resonant cavity 23 respectively and the test of fictitious load two states is arranged.This test is called cold survey or static test; The 4th step: large power test.Set up the platform that to simulate production status, test macro as shown in Figure 3.If resonator design is reasonable, will in quartz ampoule 8, produce plasma, measure reflection power then and whether can be adjusted to minimum, generally must make reflection power less than 4% of incident power, promptly voltage standing wave ratio is less than 1.5, and the design of resonant cavity is just qualified.This test is called heat and surveys or dynamic test.
For the design of conventional resonant cavity, above-mentioned manufacture method and step are highly effective.For example, be example with the coaxial type resonant cavity.Analyze theoretically, when resonant cavity was unloaded, its length was the integral multiple of half-wavelength.When load is arranged, when promptly considering processed material, only need the characteristic of this material, technological requirement etc. are revised the size of resonant cavity, and increase tuner and get final product.But for plasma resonant, above-mentioned conventional method has three difficult points and shortcoming: the first, as the load of resonant cavity, promptly processed material is liquid or solid normally.Their dielectric constant be on the occasion of, and excursion is little, is more or less the same when the data of Design Theory and practical application, revises the size of resonant cavity a little and just can design practical resonant cavity very soon.And the load as resonant cavity is a plasma among the PCVD.The dielectric constant of plasma is a negative value, and its numerical value and many relating to parameters such as gas ionization degree, gaseous species, gas pressure, flow, flow velocity and microwave power, the desirable simulation dummy load that also test is not used as small-signal at present, this brings difficulty just for the test of Theoretical Calculation and small-signal.The second, after resonator design is finished, metal material processing must be become the test resonant cavity, after a certain sized data correction, must reprocess the resonant cavity that makes new advances.General above-mentioned steps need carry out repeatedly, revise repeatedly and repeatedly processing, and these processes are loaded down with trivial details, processing capacity but also very big not only.The 3rd: the PCVD plasma resonant is to work in about 1200 ℃ hot environment, tuner is installed in resonant cavity can't be operated when work.In a word, with conventional manufacture method and step, can not design qualified plasma resonant very soon.
Summary of the invention
The object of the invention provides a kind of manufacture method of plasma resonant, and this method overcomes the shortcoming of carrying out the small-signal test in the conventional manufacture process of resonant cavity, need not to revise repeatedly the resonant cavity size data, repeatedly processing and fabricating, test resonant cavity repeatedly.
Another object of the present invention provides the adjustable resonant cavity mechanical device of a kind of parameter.
The manufacture method of a kind of plasma resonant of the present invention may further comprise the steps: the physical dimension of calculating this plasma resonant cavity; Be processed into the mechanical device of the test resonant cavity that a plurality of parameters can independent regulation; A dynamic test platform of this test resonant cavity mechanical device of test is provided, carries out high-power dynamic simulant test; It is characterized in that this dynamic simulant test may further comprise the steps:
Regulate the outside and the inside dimension of this test resonant cavity mechanical device, make gas ionization generation plasma in the quartz ampoule;
Measure microwave incident power and reflection power;
Regulate the adjustable external dimensions of this test resonant cavity mechanical device, obtain 4% reflection power less than incident power thereby change the intra resonant cavity size;
When the mechanical dimension that obtains less than many groups reflection power of 4% of incident power, therefrom optimize the physical dimension data of one group of this resonant cavity mechanical device the best.
The resonant cavity mechanical device that a kind of parameter of the present invention is adjustable comprises: a columniform great circle column casing that has water-cooling channel, and length is about 1.5 λ; Two fixing circular slabs are used to seal the both sides of described great circle column casing, and described fixedly circular slab middle part has the circular shape concentric through hole of internal thread, and this through hole radially both sides respectively has a symmetrical circular small through hole; Two diameters are identical with thickness, equal in length or close roundlet column casing, and the length of each described roundlet column casing is about λ; Form a crack between two described roundlet column casing opposing end faces; Pass two quartz ampoules in the described roundlet column casing; A manhole is positioned at described great circle column casing middle part and vertical with the axle of described great circle column casing, and this manhole connects waveguide, is used to import microwave energy; It is characterized in that: the outboard end of each described roundlet column casing has a segment length to be about the external screw thread of λ/4, is connected with the internal thread of the described fixedly circular slab of described great circle column casing both sides respectively; Two identical short-circuit plungers are installed in inboard, two ends in the described great circle column casing respectively; The outboard end of each described short-circuit plunger is installed the support bar of two symmetries respectively, this support bar has external screw thread, that passes described great circle column casing end face is described with deciding circular slab, is connected with annulus outside the described great circle column casing by the screw adjusting device of described great circle column casing both sides.Wherein λ by in the deposition optical fiber prefabricating rod motion the wavelength of use microwave.
The resonant cavity mechanical device that resonant cavity dynamic design approach that parameter according to the present invention is adjustable and parameter are adjustable, by regulating resonant cavity each several part size, can produce plasma faster, many groups resonant cavity size that accommodation reflex power is little, therefrom can preferably obtain satisfied resonant cavity size faster, produce the resonant cavity that satisfies technological requirement at last, make the design plasma resonant very quick, simple and feasible, avoid using the repeatedly Machine Design and the processing of sum of errors of simulation dummy load generation, can obtain practical plasma resonant very soon.
Description of drawings
Fig. 1 is the schematic diagram of the coaxial shape resonant cavity of half-wavelength;
Fig. 2 is a kind of small-signal test macro that is used to test resonant cavity;
Fig. 3 is the dynamic test system that is used for the PCVD plasma resonant;
Fig. 4 is the schematic diagram that is used for the tunable cavity mechanical device of PCVD plasma resonant multivariable dynamic method for designing of the present invention;
Fig. 5 is the schematic diagram of the parameters of structural dimension of the tunable cavity mechanical device that is used for PCVD plasma resonant multivariable dynamic method for designing of the present invention.
Embodiment
Below in conjunction with specific embodiment the present invention is explained in detail.The present invention is that example is illustrated with the resonant cavity of the coaxial shape structure of half-wavelength, and the present invention also is applicable to the manufacturing of similar plasma resonant.
Fig. 4 represents an embodiment of tunable cavity mechanical device of the present invention.In Fig. 4, the 41st, left roundlet column casing, the 42nd, great circle column casing, the 43rd, right fixedly circular slab, the 44th, screw adjusting device, the 45th, right support bar, the 46th, right annulus, the 47th, right roundlet column casing, the 48th, have the right short-circuit plunger of elastic construction, the 49th, the discharge crack, the 50th, the microwave energy input hole, the 51st, have the left short-circuit plunger of elastic construction, the 52nd, a left side is circular slab fixedly, the 53rd, screw adjusting device, the 54th, left support bar, the 55th, left annulus.The tunable cavity mechanical device is made up of several sections: great circle column casing 42, about two roundlet column casings 41 and 47, great circle column casing two ends fixedly circular slab 43 and 52, can short-circuit plunger 48 and 51, governor motion comprise left and right support bar 45 and 54, annulus 46 and 55, screw adjusting device 44 and 53 in axial sliding between big or small cylindrical drum.Great circle column casing 42 has water-cooling channel (do not draw among the figure, can referring to Chinese patent application number 03157394.0) to be connected with extraneous water cooled pipeline.
Utilize the wavelength of the microwave that uses in apparatus of the present invention deposition optical fiber prefabricating rod motion to be λ.The length of great circle column casing 42 is about 1.5 λ, and both sides are sealed with right, left fixedly circular slab 43,52, and each fixedly has a concentric pylone that has internal thread in the middle part of circular slab, and through hole radially both sides respectively has a symmetrical circular small through hole.The middle part of great circle column casing 42 have one with the vertical manhole of great circle column casing axle, be connected with corresponding waveguide, be used to import microwave energy, the diameter of two left and right roundlet column casings 41,47, equal in length or close identical with thickness.The length of each roundlet column casing is about λ.On one section about λ/4 length in each roundlet column casing 41,47 1 end outside, external screw thread is arranged, be connected with the internal thread of the fixedly circular slab 43,52 of great circle column casing 42 both sides respectively.Rotation roundlet column casing 41,47 can be regulated the axial location of roundlet column casing at great circle column casing 42, does not contact between two roundlet column casings, 41,47 opposing end faces, forms a crack 49.Two identical short-circuit plungers 48,51 are installed in the inboard at great circle column casing 42 two ends respectively, and the flexible constructional device of the medial extremity of each short-circuit plunger closely contacts with the outer wall of great circle column casing 42 inwalls with roundlet column casing 41,47 respectively.The outboard end of each short-circuit plunger is installed the support bar 45,54 of two symmetries respectively, every support bar has external screw thread, pass the fixedly circular slab 43,52 of great circle column casing 42 end faces respectively, screw adjusting device 44,53 by great circle column casing 42 both sides is connected with the annulus 46,55 in great circle column casing 42 outsides, and the adjusting nut of rotary screw adjusting device 44,53 can make short-circuit plunger 48,51 endwisely slip in great circle column casing 42 respectively.The length of suitable selection left side support bar 54 guarantees the total length A of the end face of left side short-circuit plunger 51 to left annulus 55 inboards
1Equate (A with the length A of left roundlet column casing 41
1=A).Also suitably select the length of right support bar 45, guarantee the total length B of right side short-circuit plunger end face to right annulus 46 inboards
1Equate (B with the length B of right roundlet column casing 47
1=B).Also can select A
1Greater than A, A
1-A=Δ a.Equally, also can select B
1Greater than B, B
1-B=Δ b, the length of Δ a and Δ b should be less than λ/4, and Δ a and Δ b can equate or be close, still, can not select A
1Less than A and B
1Less than B.
The parameters of structural dimension of adjustable parameter resonant cavity shown in Figure 4 is illustrated among Fig. 5.In Fig. 5, L is the length of great circle column casing 42, and D is the internal diameter of great circle column casing 42, and d is the external diameter of roundlet column casing 41,47, Δ d is the thickness of roundlet column casing 41,47, a is the length of the left roundlet column casing 41 in the chamber, and b is the length of the right roundlet column casing 47 in the chamber, and t is the width in crack 49, s is the axial location of microwave energy input hole 50, A is the length of left roundlet column casing 41, and B is the length of right roundlet column casing 47, A
1Be the distance of the inboard of the inboard of left short-circuit plunger 51 and left annulus 55, B
1Be the distance of right short-circuit plunger 48 inboards with right annulus 46 inboards, A
2Be the distance of the left side and left annulus 55 inboards of great circle column casing 42, B
2Distance for the inboard of the right side of great circle column casing 42 and right annulus 46, Δ A is the distance of the inboard of the outer face of left roundlet column casing 41 and left annulus 55, Δ B is the distance of the inboard of the outer face of right roundlet column casing 47 and right annulus 46, and T is the distance between left and right two roundlet column casing outer faces.
Above-mentioned parameter except D, d, Δ d immobilize, other 4 parameters of structural dimension a, b, t and s, and interior cavity length=a+b+t can be respectively by the outside adjusting device independent regulation of resonant cavity.And work as A
1During=A, a=Δ A perhaps works as A
1During greater than A, a=Δ A-Δ a; Work as B
1During=B, b=Δ B perhaps works as B
1During greater than B, b=Δ B-Δ b, t=T-(A+B), s=L/2+A
2-A
1Here A, B, A
1, B
1, Δ a, Δ b and L can do accurately to measure Δ A, Δ B, A in advance
2, B
2Can do accurately measurement in the tunable cavity outside with T, thereby obtain the exact value of a, b, t and s.If select A
1Less than A, then a forms " blind area " from the partial-length of 0-Δ a, can not regulate by the outside to obtain, so can not select A
1Less than A.In like manner, if select B
1Less than B, then b forms " blind area " from the partial-length of 0-Δ b, can not regulate by the outside to obtain, so can not select B
1Less than B.
Fig. 3 represents that the tunable cavity mechanical device is installed in the situation on the platform.In Fig. 3, the 31st, continuous wave magnetron, the 32nd, waveguide excitation device, the 33rd, circulator, the 34th, directional coupler, the 35th, incident power dial gauge, the 36th, energy conversion device, the 37th, the gas supply cabinet, the 38th, quartz ampoule, the 39th, tunable cavity mechanical device, the 310th, plasma, the 311st, vacuum pump, the 312nd, reflection power dial gauge.Fig. 3 can be used for testing the mechanical device of PCVD plasma resonant of the present invention.The dynamic test system of testing this mechanical device use comprises: continuous wave magnetron (M) 31, and adopting operating frequency usually is that 2450MHz (operation wavelength is 12.24cm), peak power output are the permanent magnetism packaged type continuous wave magnetron of 6Kw; The Wave guide system of power transfer, the part of this system is: waveguide excitation device 32, circulator 33, energy conversion device 36; Power detection part comprises: directional coupler 34, incident power dial gauge 35 and reflection power dial gauge 312; The gas flow system comprises: gas supply cabinet (G) 37, insert the quartz ampoule 38 in the tuning resonator mechanical device 39, and the input of quartz ampoule 38 is connected with this gas supply cabinet (G) 37, with the vacuum pump (P) 311 that is connected with quartz ampoule 38 outputs.Energy transmission system among Fig. 3 adopts BJ-26 type rectangular waveguide to make usually, and magnetron 31 excites H in waveguide excitation device 32
10Microwave energy is propagated to the right, and circulator is a ferrite microwave device that folk prescription is arranged to propagation performance, and the reflection power of returning can only enter the 3rd end and be absorbed, thereby guarantees the operate as normal of magnetron 31.Energy conversion device is transferred to microwave power in the resonant cavity effectively.Gas flow cabinet (G) but 37 the supply of nitrogen and oxygen.Vacuum pump (P) 311 should have the bigger speed of exhaust, to guarantee keeping 10KPa with interior low pressure in the quartz ampoule 38.By regulating each dimensional parameters in the resonant cavity respectively, microwave energy by these crack 35 radiation, be coupled into quartz ampoule 38, excite gas in the pipe, until in quartz ampoule 38, producing plasma 310.
After above-mentioned enforcement is finished, system can be started, set the data of one group of variable resonant cavity.By the PCVD process conditions gas flow in the quartz ampoule, reaction pressure etc. are set, apply certain microwave power, record incident power and reflection power are regulated some variablees reflection power are reduced, 310, one groups of experiments of gas ionization generation plasma are promptly accused and are finished in quartz ampoule.After this set the data of second group of resonant cavity again, repeat said process.Like this, can very fast acquisition organize reflection power less than incident power 4%, promptly voltage standing wave ratio is less than the data of 1.5 resonant cavity more.After obtaining many groups of data, can analyze and sum up rule, optimize the physical dimension data of one group of resonant cavity wherein again, design work is promptly accused and is finished.
Select great circle column casing inside diameter D and roundlet column casing outside diameter d according to technological requirement.For example, be the PCVD system of 1.0 Grams Per Minutes for deposition rate, the crystal reaction tube overall diameter is chosen great circle column casing inside diameter D, roundlet column casing outside diameter d and small column barrel thickness Δ d in view of the above about 26mm.In addition, the device that manufactures and designs should meet the following conditions: big column tube length degree should be about 1.5 λ; Small column tube length degree should be about λ; Small column barrel thickness Δ d should be between (1/100-1/20) λ; The crack adjustable extent is between 0-λ/5; The axial location s of microwave energy input hole is between 0-λ/2, and left and right sides short circuit face adjustable extent is between λ/10-λ/2.
This method can comparatively fast obtain reflection power less than 4% of incident power, and promptly voltage standing wave ratio is therefrom chosen one group of suitable data then and is processed into resonant cavity less than 1.5 many groups of cavity sizes.Use this dynamic approach, can obtain each size of resonant cavity rapidly, avoided using the sum of errors Machine Design and the processing repeatedly of simulation dummy load generation, can obtain practical plasma resonant very soon.
The multiple PCVD plasma resonant that manufactures with manufacture method of the present invention, good with the microwave system coupling, reflection power is less than 4% of incident power, be that voltage standing wave ratio is less than 1.5, being respectively applied for deposition rate is that result of use is good in the PCVD preform manufacturing system of 0.5 Grams Per Minute, 1.0 Grams Per Minutes, 1.5 Grams Per Minutes.
Claims (4)
1. resonant cavity mechanical device that parameter is adjustable comprises:
A columniform great circle column casing that has water-cooling channel, length by 1.5 times of use microwave wavelength;
Two fixing circular slabs are used to seal the both sides of described great circle column casing, and described fixedly circular slab middle part has the circular shape concentric through hole of internal thread, and this through hole radially both sides respectively has a symmetrical circular small through hole;
Two diameters are identical with thickness, the roundlet column casing of equal in length, the length of each described roundlet column casing by 1 times of use microwave wavelength;
Two described roundlet column casings insert along great circle column casing axis direction from great circle column casing two ends, and two described roundlet column casings and the coaxial arrangement of great circle column casing form a discharge crack between the end face that medium position two roundlet column casings are adjacent in the great circle column casing;
The quartz ampoule that is used to deposit preform inserts in the two roundlet column casings and runs through two roundlet column casings along the axis direction of two roundlet column casings;
Offer a manhole on the barrel of described great circle column casing middle part, this manhole makes great circle column casing internal cavity and waveguide be interconnected, and is used for importing microwave energy from waveguide in the great circle column casing;
It is characterized in that:
The outboard end of each described roundlet column casing have a segment length by 1/4 times external screw thread of use microwave wavelength, be connected with the internal thread of the described fixedly circular slab of described great circle column casing both sides respectively;
Two identical short-circuit plungers are installed in inboard, two ends in the described great circle column casing respectively;
The outboard end of each described short-circuit plunger is installed the support bar of two symmetries respectively, this support bar has external screw thread, pass the described fixedly circular slab of described great circle column casing end face, the screw adjusting device by described great circle column casing both sides is connected with the annulus in the described great circle column casing outside.
2. the resonant cavity mechanical device adjustable according to the parameter of claim 1 is characterized in that:
The medial extremity of described short-circuit plunger has the elastic construction device, closely contacts with described small column drum outer wall with described great circle column casing inwall respectively, and can endwisely slip.
3. the resonant cavity mechanical device adjustable according to the parameter of claim 1 or 2 is characterized in that:
The length of the inboard of described short-circuit plunger and the distance 〉=described roundlet column casing of corresponding annulus inboard, its difference is less than 1/4 times of use microwave wavelength.
4. the resonant cavity mechanical device adjustable according to the parameter of claim 1 or 2 is characterized in that:
Length in the described roundlet column casing chamber is between 1/10 to 1/2 times of use microwave wavelength;
The width in described discharge crack is between 0 to 1/5 times of use microwave wavelength;
The position dimension of the manhole of described microwave energy input is between 0 to 1/2 times of use microwave wavelength;
The thickness of described roundlet column casing is between 1/100 to 1/20 times of use microwave wavelength.
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| CN101853768B (en) * | 2010-04-09 | 2012-07-04 | 长飞光纤光缆有限公司 | Cylindrical plasma resonant cavity |
| CN102263000B (en) * | 2011-06-24 | 2013-05-15 | 长飞光纤光缆有限公司 | Plasma microwave cavity |
| JP6037688B2 (en) * | 2012-07-09 | 2016-12-07 | 東京エレクトロン株式会社 | Anomaly detection method in microwave introduction module |
| CN103529520B (en) * | 2013-10-21 | 2015-10-28 | 天津大学 | Based on tunable multichannel WDM device and the multiplexing method of microfluid regulation and control |
| CN107843911B (en) * | 2017-10-16 | 2019-07-02 | 中国计量科学研究院 | A kind of device improving alanine dosemeter measurement signal-to-noise ratio |
| CN110418486A (en) * | 2019-07-19 | 2019-11-05 | 武汉光盛通设备咨询有限公司 | A kind of double plasma resonator |
| CN110779653B (en) * | 2019-10-31 | 2021-08-24 | 杭州翔毅科技有限公司 | Gas pressure detector and system based on optical fiber structure resonant cavity principle |
| CN113382528A (en) * | 2021-05-21 | 2021-09-10 | 清华大学 | Electron linear accelerator |
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