CN1281375C - Pressure controller of active pressure polishing optical lens grinding device - Google Patents
Pressure controller of active pressure polishing optical lens grinding device Download PDFInfo
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- CN1281375C CN1281375C CN 200310112760 CN200310112760A CN1281375C CN 1281375 C CN1281375 C CN 1281375C CN 200310112760 CN200310112760 CN 200310112760 CN 200310112760 A CN200310112760 A CN 200310112760A CN 1281375 C CN1281375 C CN 1281375C
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Abstract
The present invention relates to a pressure controller for active pressure polishing optical grinding equipment, which is characterized in that a pressure controller which acts on an active pressure polishing disk is arranged; a mechanical part of the pressure controller has the structures that a force application point is arranged on the active pressure polishing disk, and the force application point is connected with an output end of a pressure driven motor through a mechanical driving chain with a screw rod; a pressure control loop of an electric control part of the pressure controller comprises a gravity sensor which is arranged in the mechanical driving chain, and after passes through a pre-amplifier, the load bearing signal output of the gravity sensor is used as a feedback control signal and is input to a pressure regulator which is composed of an active proportional integral regulator together with an analog quantity output by a manual control computer; the output of the pressure regulator is output to the pressure driven motor; a position control loop comprises a position sensor which is arranged on the output end of the pressure driven motor, and the position control loop at least comprises two closed loops, wherein a speed closed loop is realized by a motor driver, and the PID regulating calculation of a position loop is accomplished by using a single chip computer; the pressure control loop and the position control loop alternately act on a controlled object.
Description
Technical field
The present invention relates to optics mill illuminating apparatus, particularly adopt automatic control technology to finish the active pressure polishing disk a kind of active pressure polishing of optical of the position lifting control of control of the pressure of optical mirror plane and polishing disk is ground the pressure controller of mirror device, belong to optical-mechanical and automatic control technology field.
Background technology
The demand for development astronomer of modern astronomical science can accurately determine the position of celestial body, and the more and more remoter celestial body of detection, increase the bore of astronomical telescope, the light collecting light ability that improves telescopic optical system and be one of the most effective way that realizes these targets, therefore grind heavy caliber, high-precision astronomicalc optics minute surface is the important topic of pendulum astronomicalc optics technology expert.Traditional mirror finish just needs the polishing disk that metal is done, polishing disk and optical mirror plane fit, polishing disk and minute surface produce relative motion when the mill illuminating apparatus rotates, if add grinding agent in the middle of minute surface and the polishing disk, grinding by certain hour, the just complete and polishing disk applying of the face shape of optical mirror plane, because the polishing disk of processing is the part in garden, generate sphere face shape, can obtain high-precision sphere face shape by polishing, this process is called spherical polishing, and difficulty just taken place when processing heavy caliber aspherical mirror face, because can not process the identical aspheric surface metal dish of precision and face shape and optical mirror plane, traditional method is: still adopt the polishing disk of sphere, rely on the manual amendment polishing disk to control machining accuracy, processing progress and precision directly depend on people's experience and technology, process-cycle is long, and precision can't guarantee.
The machining accuracy of large-scale astronomical optical mirror plane and speed are determined by four kinds of factors; 1. the relative velocity of grinding tool and minute surface; 2. the engineering properties of abrasive material; 3. the situation that contacts (fitness) of grinding tool and minute surface; 4. grinding tool is to the pressure of minute surface; 1. and 2. wherein binomial is understandable; skilled optician all can be selected suitable process velocity and abrasive material adding man-hour; usually 3. be to improve the key factor that grinds mirror surface accuracy and improve process velocity; classical way is to improve machining accuracy by manual amendment polished die or partial trim minute surface face shape; because machining accuracy is by manually-operated; system of processing directly depends on workman's experience and technology, in process, is subjected to multiple factor affecting; process-cycle is long, and machining reproducibility cannot guarantee.In the subject matter that adds the generation in man-hour be:
1) curvature of aspheric surface from the top to the edge reduces to lose burnt not match with causing.
2) the irregular not match that radially can cause astigmatism with tangential slope.
3) radial buckling changes the not match that causes coma.
The optical technology expert of countries in the world is exploring the processing method that solves large diameter optical mirror face, solve the fitting problems of polished die and minute surface, the active pressure polishing is a kind of new technology, it mainly solves the cycle and the precision of the processing of aperture aspherical optical mirror plane, in process, according to position and the angle of polishing disk at minute surface, initiatively in real time polishing disk is deformed into the non-face of asking of appropriate section on the minute surface, make the face shape of polishing disk always consistent with needed minute surface face shape, so can process the astronomical minute surface of the high-precision aspheric surface of heavy caliber with the method that grinds spherical mirror, this technology is called the active pressure polishing.The classical polishing grinding pan that uses when grinding minute surface is lighter, therefore polishing disk is relatively easy to the pressurization of minute surface, usually as long as on polishing disk, add the weight of a constant weight, make polishing disk a pressure be arranged to optical mirror plane, the size of this pressure is by the deadweight of polishing disk and the summation of additional weight, the weight of increase and decrease additional weight just can be regulated the pressure size to minute surface, just can regulate the pressure size of polishing disk to minute surface.After having adopted the active optics polishing disk, the polishing disk dead weight is heavier, necessary off-load in process, and keep the constant pressure of polishing disk to optical mirror plane.The nineties in last century, Steward observatory of U.S. Ya Lisangna university minute surface laboratory (SOML) doctor HMMartin has proposed application strain disc (Stressed-lep) and has ground large-scale aspherical mirror, improved widely and ground large-scale aspherical mirror working (machining) efficiency, 1998 by SCWest, in " Practical designand derformance of the stressed lap polishing tool " literary composition that HMMartin etc. deliver, design of active pressure polishing disk and characteristics have been narrated, but how do not relate to the press polish dish to minute surface pressurization and control, can only see the profile of polishing disk from some pictures that obtain.Find out from profile, this is the large-scale polishing of optical mill illuminating apparatus of gantry pattern, the pressure of the active pressure polishing disk of this equipment, lifting structure be complexity very, it has the deflection and the control of fairly perfect pressure balance, polishing disk rotating shaft, its advantage be control simple relatively, each mechanism finishes a function (action), but frame for movement is relatively complicated, only is adapted at using in the large-scale optics mill mirror device.The way that adopts air pressure is abroad arranged, the way that adopts lever balance is also arranged, but it is complicated that structure is all disliked, the domestic numerical control optics mill illuminating apparatus that little mill polishing is also arranged, adopt mechanical spring to be used as pressure apparatus, it can not randomly changing pressure size, also can produce the kick of pressure because of stressed direction more complicated.
Summary of the invention
The objective of the invention is to overcome above-mentioned defective, a kind of pressure controller of active pressure polishing of optical mill mirror device is provided, use automatic control technology and finish following work: 1. the active pressure polishing disk keeps constant pressure to minute surface; 2. the off-load of active pressure polishing disk and balance; 3. the active pressure polishing disk is done rotation, is moved back and forth along minute surface face shape track, finishes the active pressure polishing disk to the pressure of minute surface and the elevating function of polishing disk.
Above-mentioned purpose of the present invention is achieved in that
A kind of pressure controller of active pressure polishing of optical mill mirror device, contain the bistrique and the bistrique dish that are installed on the mill illuminating apparatus vertical rotation axis, bistrique has the active pressure polishing disk, the processed optical mirror plane relative with the active pressure polishing disk places on the chassis workbench of rotation, it is characterized in that being provided with a pressure controller that acts on the active pressure polishing disk, it comprises machinery and automatically controlled two parts, the structure of mechanical part is: on the active pressure polishing disk point of application is set, the point of application is connected in the output of pressure-driven motor by the mechanical drive train that has screw mandrel, and the pressure-driven motor is fixed on the bistrique dish; The electric control part branch comprises pressure control and two loops of Position Control, pressure control loop contains the gravity sensor that is arranged in the mechanical drive train, the given analog quantity that its load-bearing signal output is exported with industrial computer as feedback control signal behind preamplifier inputs to the pressure regulator that active proportional and integral controller constitutes, pressure regulator export the pressure-driven motor to, position control loop contains the position sensor that is arranged at the pressure-driven motor output end, position in the mechanical mechanism is by the position sensor evaluation, position sensor export industrial computer to, position control loop is at least two closed loops, speed closed loop is realized by motor driver, the PID of position closed loop regulates to calculate and is finished by single-chip microcomputer, the position is given is exported by industrial computer, be aided with suitable computer software, pressure control and two loop alternating actions of Position Control are in controlled device.The point of application that is provided with on the active pressure polishing disk can be that the center of gravity of active pressure polishing disk also can be symmetrically arranged three points in active pressure polishing disk edge.The electric bridge that gravity sensor adopts resistance strain gage to constitute, position sensor adopts rotary photoelectric encoder.
Advantage of the present invention and effect: 1, active pressure polishing disk overall structure is fairly simple; 2, control flexibly can extended function software, finishes other and grind function; 3, stable performance, price are cheaper; 4, have the minute surface defencive function, this point is to mirror finish process particular importance; 5, adopt the strain-type gravity sensor; the linearity and heat endurance are all fine; its frequency response is lower, through the reality test, 3～5HZ is only arranged; this is its weak point; but optical mirror plane is when polishing, and often the rotating speed of main shaft can be very not high; can satisfy polishing processing request and less expensive fully, in control system, can use as minute surface protection sensor simultaneously.
Description of drawings
Fig. 1 is an active pressure polishing disk frame for movement schematic diagram that uses in the prior art optics mill illuminating apparatus;
Fig. 2 is the pressure controller frame for movement schematic diagram among the present invention;
Fig. 3,4 is respectively automatically controlled block diagram of the pressure controller among the present invention and structure chart;
Fig. 5 is certain some position analysis figure on the active pressure polishing card.
The specific embodiment
Fig. 1 is an active pressure polishing disk frame for movement of using in the prior art optics mill illuminating apparatus, it has 12 motors, per three motors are formed one group of afterburning group, one has four afterburning groups, be evenly distributed in metal dish around, when group of motors adds different power as requested, make the metal dish facial disfigurement, when reinforcing suitable, just can obtain desired shape, the optics that is specifically designed to that utilizes that this principle and structure form adds and is called initiatively polishing disk as the metal mould of fine grinding and polishing process man-hour.The pressure that the deadweight of active pressure polishing disk is pressed on the optical mirror plane is too heavy, can not carry out optical polish processing, and the optics that has mill illuminating apparatus bed is to add balanced controls in addition, again polishing disk (mould) is added a constant pressure, guarantees processing request.We imagine, the deadweight of active pressure polishing disk is exactly a pressure source, adopt a kind of simple mechanical mechanism and control corresponding method, alleviate the pressure (off-load) of active pressure polishing disk, and guarantee that polishing disk in the process remains unchanged to the pressure of minute surface minute surface.As seen from Figure 1, the active pressure polishing disk is a symmetrical structure, reasonably Machine Design, we can be used as a Plane Rigid Body to it and consider, its equivalent center of gravity is at the vertical centre of active pressure polishing disk, its equivalent weight is G, act on equivalent center of gravity O point, like this, if on the isometrical circumference of active pressure polishing disk, evenly add three lifting force P1, P2, P3 (or adding a lifting force P) in the center of gravity O of active pressure polishing disk point, according to the equilibrium principle of plane force system, if P1+P2+P3=G then is P1=P2=P3, then can prove P1=P2=P3=1/3G=G ', each lifting force promotes 1/3rd of gross weight.When the active pressure polishing disk is pressed on the optical mirror plane, and add three lifting force P1, P2, P3 respectively at three hoist points of polishing disk, if lifting force is less than the component G ' of active pressure polishing disk, polishing disk can't be mentioned, still be pressed on the optical mirror plane, obviously the pressure that is pressed on the minute surface reduces, and the gross pressure that be pressed on the minute surface this moment is assumed to be N.The equivalent pressure N ' of three hoist points also is 1/3rd of gross pressure N, and it can be represented with following formula:
N′＝G′-KW(S) ①
Wherein N ' be a some position in three hoist points of active pressure polishing disk to the equivalent pressure of minute surface, its gross pressure N is these three equivalent pressure value sums.
G ' is a locational equivalent weight of point in three lift points of polishing disk.
KW (S) is a lifting force closed-loop control system, and from 1. formula as can be seen, when KW (S)=0, the equivalent pressure N '=G ' of this location point then has two kinds of situations this moment:
1, as the KW of one or two some position (S)=0, and the KW of another location point (S) ≠ 0, this is not allow situation about occurring, and should be placed restrictions in control system.
2, as the KW of three some positions (S)=0, illustrate that whole active pressure polishing disk all is pressed on the minute surface, this is not wish situation about occurring man-hour adding, at this moment optics mill illuminating apparatus does not allow start, and sends alarm signal.
When KW (S)=G ' time, at this moment two kinds of situations are arranged also:
1, the KW (S)=0 of three some positions, this moment, the active pressure polishing disk did not contact with minute surface, and the active pressure polishing disk is in the raised position duty.
2, the KW (S)=0 of one or two some position, this moment, the local edge position of active pressure polishing disk contacted with minute surface, the active pressure polishing disk is in abnormal working position, at this moment, each motion (rotation) axle of optics mill illuminating apparatus does not allow starting, and takes corresponding measure, rapidly the active pressure polishing disk is risen to a certain desired location, polishing disk is broken away from and the contacting of minute surface, enter the start SBR.
When 0≤KW (S)≤G ' time, the active pressure polishing disk contacts with optical mirror plane, polishing disk pressurizes to minute surface, its pressure size is 0≤N '≤G, and KW (S) is a lifting force control system, provides the lifting force set-point by computer, can obtain constant lifting force value, according to 1. formula, can obtain the constant pressure of polishing disk to minute surface.
Should be noted that, the size of control lifting force, come down in the full contact of active pressure polishing disk and minute surface and between separating in very small distance range, the distance between control polishing disk and the minute surface, it has and the diverse characteristics of other position control systems.
Be exactly the frame for movement of pressure controller in the frame of broken lines among Fig. 2, frame is outward pressure controller and polishing disk, mill illuminating apparatus frame for movement connection diagram.1 expression optical mirror plane among the figure, relative with it is polishing disk (pitch layer) 2, polishing disk links to each other with the rotating shaft 3 of mill illuminating apparatus, 4,5 is bistrique and bistrique dish, and bistrique and bistrique dish all are slidingly fitted on the beam guideway 6, and optical mirror plane 1 places on the chassis along with the chassis coaxial rotation, because the chassis of mill illuminating apparatus is different with the rotating speed of polishing disk, rotation direction also can be inconsistent, and optical mirror plane and polishing disk will produce relative motion like this, and finish the elemental motion requirement of mill illuminating apparatus.7 is worm gear, gearratio is 8.75, modulus is 1.5,8 is the pressure-driven motor, model is the 45LCX-2 DC torque motor unit that tests the speed, Beijing micro machine head factory is produced, be equipped with suitable motor driver, drive motors drives a high precision ball screw mandrel 9 by suitable mechanical transmission mechanism, helical pitch 4mm, buyable, ball screw press the plumb line direction and install, be connected by the hoist point of connector with the active polishing disk, the driving moment motor also makes its reversible operation, and this hoist point can be gone up, move down, 10 for being installed in the gravity sensor in the mechanical drive train, model is CFBHL-20, Bengbu, the Anhui Province clever sensor technology of height research institute produces, and 11 is connecting rod, and what use in this device for carrying out said is the steel wire cable of Φ 6mm, 12 connecting plates that are connected with the press polish dish for pressure controller, connecting plate are connected with screw with polishing disk to be tightened.
When the work of mill illuminating apparatus, bistrique rotating shaft 3 is rotated, pressure-driven motor 8 is along with coaxial rotation, press polish dish 2 also will rotate, and the radial direction that the bistrique axle of mill illuminating apparatus also will be made minute surface moves, because the face shape of minute surface changes, the pressure that is added in obviously on the minute surface also can change, the effect of pressure controller is exactly when the work of mill illuminating apparatus, because when the work of each rotation (moving) axle makes polishing disk change generation to the pressure of minute surface, pressure controller must be controlled in real time, and pressure-driven motor-driven transmission mechanism is done, move down, guarantee that the press polish dish remains constant to the pressure of minute surface.
Among Fig. 3, pressure control sensor adopts gravity sensor 10, it is the resistance bridge that is made of resistance strain gage, when not load-bearing, there is not signal output, when the gravity sensor load-bearing, export corresponding direct current signal, after preamplifier amplifies, value of feedback as control system, form complete closed-loop system, the signal of gravity sensor must be through the row precise calibration, precision is ± 10g, the pressure regulator parameter can be selected according to motor of selecting and mechanical configuration parameter, adopt PID control, the set-point of control system can be provided as requested by industrial computer (host computer) or single-chip microcomputer (slave computer), by the input of 12 D/A converter conversion back output analog signals as pressure controller, operation principle according to pressure controller, the input quantity of this input is the gravity amount, under the effect of control system, can obtain the constant gravity of one of them hoist point of active pressure polishing disk, but, this result, can only be under the condition of 0≤P '≤G ' at the lifting force that promotes motor, the ability operate as normal, press polish this moment dish must could be worked on the position of regulation, and promptly the press polish dish all contacts with minute surface, and polishing disk all is pressed on the minute surface and polishing disk all breaks away between these two positions of minute surface and could work, therefore, if the active pressure polishing disk does not enter the working region, the structured flowchart that figure four provides can't be used, and optical mirror plane is a kind of accurate especially glass component, if suffer the accidental shock of polishing disk, serious consequence will be produced, also irremediable loss can be brought sometimes, therefore, it is very important operation that polishing disk is successfully contacted with optical mirror plane, should be at when design stability of attention, the consideration of reliability.
As seen from Figure 4, pressure controller is made up of two control loops, its main control loop is a pressure control loop, when pressure control work, master controller as Position Control is an AT89C51 single-chip microcomputer, utilizes its intelligence effect, and the output perseverance that makes this loop is zero, position control loop is inoperative, and single chip computer AT 89C51 only makes position display.When promoting work in the position, automatically switch by industrial computer, make pressure signal be added on control system without end, this system has become a typical position control system, frame of broken lines is an AT89C51 single-chip microcomputer with interior part, and it is bearing the Position Control groundwork, and the mathematical expression in each square among Fig. 4 is the transfer function of each link, S is an operator, can calculate suitable control parameter according to selected electrical equipment and mechanical configuration parameter and system requirements.The direct current torque motor unit 8 that tests the speed comprises 81 torque motors, and model is 45LCX-2, and Beijing micro machine head factory is produced: 40 volts of voltage at peak torques, 0.44 N of rice of peak torque.In the frame, the 1/Ce=0.00625 volt/rev/min, T
e=0.002 second, these two parameters were to be determined T by the parameter of electric machine
m'=0.1 second, be the mechanical time constant of conversion, it can determine according to drive motors and frame for movement designed, that select, 82 tachometer generators, model is the same, than 0.02 volt/rev/min of electromotive force, K
γBe the dividing potential drop coefficient, be generally less than 1, by the decision of the potentiometer adjustment on the motor driver panel, it influences the rotating speed of drive motors, T in the frame
γ=0.001 second is the slot ripples filter factor of tachometer generator.Mechanical transmission mechanism worm gear 7, transmission velocity ratio are 8.75, and modulus is 1.5, and the helical pitch of outsourcing ball-screw is 4, these two parameter decision K
SNumerical value, K
S=1/8.75 * 4 are the machine driving gain.13 is photoelectric encoder, adopts Rotary Optoelectrical Encoder of Incremental Type, outsourcing, and 400 line/commentaries on classics, 5 volts of voltages, wherein, K
θ=400 is photoelectric encoder groove number, and position resolution is 0.01mm.9 is gravity sensor and preposition amplification, and model is the CFEHL-20 load 20kg that weighs, output sensitivity 2.264mv/V, and the model of preamplifier is the instrument amplifier that U.S. AD company produces, model is AD524, K
2K
5Overall gain is 454, and (calculated value) is K
5K
2=454, K wherein
5Be the output sensitivity of gravity sensor, K
2Gain for preamplifier.T
2For the power filter coefficient, get T
2=0.001 second.14 is pressure regulator, and pressure regulator is formed the active proportional and integral controller of standard, wherein K by device operational amplifier TL064
0Be ratio amplification correction parameter, T
0Be pressure regulator integral correction parameter.K
0=20, T
0=0.02 second, the pattern of the active proportional and integral controller of standard can be referring to " Automatic Control Theory " books of arbitrary version.8 for motor driver (comprising speed regulator and pwm power amplifier), and the motor driver mathematic(al) representation for having simplified in the frame is the outsourcing product, what adopt is ADS 50/5 motor driver that Switzerland maxonmotor company produces, 50 volts of voltages, operating current 5 peaces, (K among Fig. 4
1, T
1Numerical value obtain K by the adjustable potentiometer of adjusting on the motor driver panel
1Be motor driver speed regulator overall gain, T
1Be speed regulator integral correction parameter).15 are position control (finishing) in the AT89C51 single-chip microcomputer, its single-chip microcomputer adopts the assembler language programming.Formula in the square frame 15 is the PID operational formula of Position Control, in the formula, and K
3Be ratio amplification correction parameter, T
4Be integral correction parameter, T
3It is the differential correction parameter.
Control pressurer system is different from other control system, when does not change on the chassis of the mill illuminating apparatus that optical mirror plane is installed, in the pressure controller working region, a given constant pressure, the pressure of each hoist point of active pressure polishing disk can not change, the operating position of active pressure polishing disk is constant, promoting motor does not change, the press polish dish is the setting pressure value to the pressure of minute surface, when optics grinds the main axis rotation of illuminating apparatus, whether the boost in pressure motor rotates will be decided in the crossbeam position according to active pressure polishing disk at that time, when the position of polishing disk is zero degree (on the summit of optical mirror plane), polishing disk can not change to the pressure of minute surface yet, the boost in pressure motor does not still change, only move to from 0 ° the reciprocal process at edge of optical mirror plane at polishing disk, because the variation of parabolic mirror rise difference, the pressure unanimity that keeps three hoist points of polishing disk, keep each hoist point of polishing disk and fitting tightly of minute surface, the boost in pressure motor must respond rapidly according to the face shape of minute surface, and reversible operation as requested, the rise difference is big more, and rotation speed change is big more, and remains the constant pressure of active pressure polishing disk to minute surface.When the active pressure polishing disk is reciprocating along crossbeam, (at this moment, the active pressure polishing disk must rotate) velocity of rotation of boost in pressure motor changes more frequent, it will do forward and reverse motion with the double frequency of press polish dish velocity of rotation, its percentage speed variation is decided by the speed of crossbeam, and therefore, pressure controller not only requires reliability and stability, and control system needs enough rapidities equally.From its motion mode, pressure controller is a servomechanism, and the motion of boost in pressure motor and corresponding position are to change along with the position of active pressure polishing disk rotating speed, crossbeam and velocity variations, and it possesses the base attribute of servomechanism.
Yet; a pure pressure control loop is to use as the pressure controller of active pressure polishing disk; must make polishing disk and optical mirror plane contact with each other (within the relative position that requires) because enter the pressure state of a control; carry out also needing polishing disk is stopped to appointed positions when optical detection and mill illuminating apparatus need be shut down; therefore; also need a position control loop to guarantee the realization of these basic functions; control by computer and chain; pressure control is switched to Position Control, finish and use required exercises and the machining functions of active pressure polishing disk.Position control loop is typical three close loop control circuits, ring is realized by the commodity motor driver in the speed, and position closed loop is finished by one chip microcomputer AT89C51, position in the mechanical mechanism is by rotation photoelectric encoder evaluation, the PID of position closed loop regulates to calculate and is finished by single-chip microcomputer, and the position set-point is provided by industrial computer.
The control of some position: provide the target location by computer, make polishing disk promote or drop to the target location and stop, this control mode is the usual way of active pressure polishing disk control.
Position Tracking Control: calculate the positional value of three hoist points of polishing disk respectively as specified rate by computer according to Fig. 5 and formula, the input position control system, polishing disk is moved by minute surface face shape, be subjected to the restriction of position sensor resolution ratio and position mechanism processing and debugging precision, the precision of this working method can be very not high, can be used as the preliminary working operation on the function.
Because initiatively the work of polishing disk is dynamic, be that card is in rotation, its center also will move back and forth along crossbeam, card that is to say that along with the diverse location of central point on minute surface also will tilt initiatively polishing disk is in the middle motion that also has a lifting/decline of process of rotation (distortion simultaneously) simultaneously.Also need to keep the active polishing disk to the control of the pressure in the minute surface in the process of lifting/decline, this is a very complicated control problem.Be Z
C≡ f (X
1, θ
1, ρ, t) along with the change of time, X
1And θ
1Can change again.
The motion schematic diagram of active pressure polishing disk and optics mill illuminating apparatus is seen shown in Figure 5, and directions X is the crossbeam moving direction among the figure, and polishing disk is with O
1Be the axle center rotation, the C point is the position of one of them hoist point, and ρ is the radius of hoist point to the axle center, the ρ of each polishing disk is a fixed value, and the A point is the central point of active polishing disk, and the B point is that the polishing disk center is by the position of A point to the pitch summit, the thickness of polishing disk is d, R
ApekBe paraboloidal vertex curvature radius.
If initiatively polishing disk is V along the movement velocity of crossbeam
1(mm/s)
Initiatively self rotary speed of polishing disk is V
2(o/s)
Then have
As tan α=(V
1T+X
0) (1+d/R
Apex)/R
Apex
Order
W＝1+d/R
apex
Then the C position equation of ordering is
It can be calculated by computer real-time and obtain, and also can provide the initiatively real time position of three hoist points of polishing disk by computer by the good form of calculated in advance.
Owing to adopted position coder and single-chip microcomputer, show by the control interface of single-chip microcomputer to be used for the positional value of three hoist points the position prison and to show.
State natural sciences fund key project " the astronomical minute surface of high-precision heavy-caliber grinds technology " has been accepted by Chinese Academy Of Sciences Country Observatory Nanjing Astronomical Optics Technology Research Institute, this project has been developed an optics mill illuminating apparatus that can carry out the active pressure polishing technology, having processed a diameter is 0.91m, coke ratio is the parabolic minute surface of f/2, precision prescribed is: low frequency (RMS)≤1/14 λ, high frequency (RMS)≤1/30 λ, explore and experiment processing has been finished polishing and ground through three wheat harvesting period technologies, (approximately need one-year age with classic methods, may also not reaching high precision) machining accuracy reaches low frequency (RSM)≤1/30 λ, high frequency (RSM)≤1/30 λ, surpassed original goal in research, the parabolic minute surface of this piece experiment processing, its parabolic summit is 28mm to edge rise difference, the actual edge that promotes vows that difference is about 43mm, crossbeam moves ultimate range (summit by minute surface is counted) in the 345mm scope, the crossbeam translational speed is 30～60mm/min, process through actual detected and optics processing shows that this pressure controller has satisfied the pressure control requirement of active pressure polishing mill mirror device.According to calculating and test, active pressure polishing disk actual weight is 49.5kg, after adopting pressure controller, the pressure that is pressed on the minute surface is 1.5～10kg, (active pressure polishing disk pitch layer card diameter is φ 300mm) static pressure error is 10～30g, under this areal extent, it is very little that the pressure (pressure) of minute surface is changed, and satisfies the requirement that large diameter optical mirror face grinds fully.
Claims (3)
1, a kind of pressure controller of active pressure polishing of optical mill mirror device, contain the bistrique and the bistrique dish that are installed on the mill illuminating apparatus vertical rotation axis, bistrique has the active pressure polishing disk, the processed optical mirror plane relative with the active pressure polishing disk places on the chassis workbench of rotation, it is characterized in that being provided with a pressure controller that acts on the active pressure polishing disk, it comprises machinery and automatically controlled two parts, the structure of mechanical part is: on the active pressure polishing disk point of application is set, the point of application is connected in the output of pressure-driven motor by the mechanical drive train that has screw mandrel, and the pressure-driven motor is fixed on the bistrique dish; The electric control part branch comprises pressure control and two loops of Position Control, pressure control loop contains the gravity sensor that is arranged in the mechanical drive train, the given analog quantity that its load-bearing signal output is exported with industrial computer as feedback control signal behind preamplifier inputs to the pressure regulator that active proportional and integral controller constitutes, pressure regulator export the pressure-driven motor to, position control loop contains the position sensor that is arranged at the pressure-driven motor output end, position in the mechanical mechanism is by the position sensor evaluation, position sensor export industrial computer to, position control loop is at least two closed loops, speed closed loop is realized by motor driver, the PID of position closed loop regulates to calculate and is finished by single-chip microcomputer, the position is given is exported by industrial computer, be aided with suitable computer software, pressure control and two loop alternating actions of Position Control are in controlled device.
2,, it is characterized in that the point of application that is provided with on the active pressure polishing disk can be that the center of gravity of active pressure polishing disk also can be symmetrically arranged three points in active pressure polishing disk edge according to the pressure controller of the described active pressure polishing of optical of claim 1 mill mirror device.
3, according to the pressure controller of claim 1 or 2 described active pressure polishing of optical mill mirror devices, it is characterized in that the electric bridge that gravity sensor adopts resistance strain gage to constitute, position sensor adopts rotary photoelectric encoder.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100486767C (en) * | 2006-01-16 | 2009-05-13 | 中国科学院国家天文台南京天文光学技术研究所 | Force control method for lap surface control of stressed lap and equipment thereof |
| CN102501187A (en) * | 2011-11-04 | 2012-06-20 | 厦门大学 | Polishing disk capable of adjusting regional pressure |
| CN102490110A (en) * | 2011-12-02 | 2012-06-13 | 浙江理工大学 | Control device for crystal grinding machine |
| CN102528607B (en) * | 2012-01-20 | 2014-07-23 | 厦门大学 | Large-caliber planar optical element polishing device |
| CN102773798B (en) * | 2012-07-21 | 2014-09-03 | 北京工业大学 | Test piece clamping device for force feedback adaptive grinding and polishing machine |
| CN105773397B (en) * | 2016-03-09 | 2017-09-29 | 天津华海清科机电科技有限公司 | Chemically-mechanicapolish polish multi-region pressure On-line Control algorithm |
| CN110744431B (en) * | 2019-11-18 | 2024-05-03 | 浙江工业大学 | Pressure detection system for linear hydrodynamic polishing device |
| CN112605789B (en) * | 2020-11-29 | 2022-05-24 | 厦门理工学院 | Track control type polishing mechanism with adjustable gravity center and polishing method |
| CN112621458A (en) * | 2020-11-29 | 2021-04-09 | 厦门理工学院 | Spring type polishing disc mechanism with adjustable gravity center and polishing method |
| CN112536675B (en) * | 2020-12-03 | 2022-06-03 | 中国工程物理研究院激光聚变研究中心 | Splicing device for numerical control machining of square optical element |
-
2003
- 2003-12-25 CN CN 200310112760 patent/CN1281375C/en not_active Expired - Fee Related
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| CN1554513A (en) | 2004-12-15 |
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