CN1281235A - Insulated operating rod and its manufacturing method - Google Patents

Insulated operating rod and its manufacturing method Download PDF

Info

Publication number
CN1281235A
CN1281235A CN99110393A CN99110393A CN1281235A CN 1281235 A CN1281235 A CN 1281235A CN 99110393 A CN99110393 A CN 99110393A CN 99110393 A CN99110393 A CN 99110393A CN 1281235 A CN1281235 A CN 1281235A
Authority
CN
China
Prior art keywords
pottery
alloy
quality
insulating bar
metal parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN99110393A
Other languages
Chinese (zh)
Other versions
CN1258201C (en
Inventor
伊藤武文
河又严
小山健一
木村俊则
佐藤伸治
关谷卓
久森洋一
宫本圣一
糸谷孝行
寄田光政
丸山稔正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1019990028033A external-priority patent/KR100355119B1/en
Priority to SG9903322A priority Critical patent/SG89286A1/en
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to CNB991103939A priority patent/CN1258201C/en
Priority to DE19932939A priority patent/DE19932939B4/en
Publication of CN1281235A publication Critical patent/CN1281235A/en
Application granted granted Critical
Publication of CN1258201C publication Critical patent/CN1258201C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/001—Interlayers, transition pieces for metallurgical bonding of workpieces
    • B23K35/004—Interlayers, transition pieces for metallurgical bonding of workpieces at least one of the workpieces being of a metal of the iron group
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/03—Pressure vessels, or vacuum vessels, having closure members or seals specially adapted therefor
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
    • C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/302—Cu as the principal constituent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/3053—Fe as the principal constituent
    • B23K35/3066—Fe as the principal constituent with Ni as next major constituent
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/122—Metallic interlayers based on refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/123—Metallic interlayers based on iron group metals, e.g. steel
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/124—Metallic interlayers based on copper
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/125—Metallic interlayers based on noble metals, e.g. silver
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/126—Metallic interlayers wherein the active component for bonding is not the largest fraction of the interlayer
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/343—Alumina or aluminates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/345—Refractory metal oxides
    • C04B2237/348—Zirconia, hafnia, zirconates or hafnates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/405—Iron metal group, e.g. Co or Ni
    • C04B2237/406—Iron, e.g. steel
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/62—Forming laminates or joined articles comprising holes, channels or other types of openings
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/706—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the metallic layers or articles
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/72—Forming laminates or joined articles comprising at least two interlayers directly next to each other
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/76—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/84—Joining of a first substrate with a second substrate at least partially inside the first substrate, where the bonding area is at the inside of the first substrate, e.g. one tube inside another tube

Abstract

An insulated operating rod with good seal-in between its ceramic and metal. parts. The said operating rod is to keep good insulation to transfer operating force in sealed vacuum container. The Fe-Ni alloy, Cu composition, carbon steel or copper and its alloy and arranged with the operating rod sealed-in between its ceramic and metal parts as intermediate material. Its manufacture technology features that more than one convex and concave parts are made on the ceramic and metal parts and the ceramic and metal parts are linked by hot embedding or hot pressing, and soldering.

Description

Insulating bar and manufacture method thereof
The present invention relates to insulating bar and manufacture method thereof that a kind of switching device is used, described switching device must keep insulation in vacuum airtight container, and can carry out the transmission of steering force.
Figure 6 shows that as Co., Ltd. of industrial technology service centre exploitation, by pottery engage and the soldering of high-tech level as shown in the cutaway view of insulating joint in the past.In Fig. 6,2 expression metal layers, 11 expression tubular ceramic members, 12 expression joints, 13 expression Ag solders.
Below, the effect of described joint is described.The surface portion of tubular pottery 11 2 ends of oxidation aluminum forms metal layer 2, and it is heated to 820 ℃ in hydrogen, and the joint 10 with Ag solder 13 soldered joint tubular ceramic members 11 and kovar alloy system obtains insulating joint.
For keeping insulation and carry out the steering force transmission in vacuum tank, insulating bar of the present invention ties up to the metal parts of soldering high conductivity on the pottery with insulation function and the metal parts that is connected on the operating mechanism forms.When being assembled in described action bars in the vacuum tank, because action bars must carry out heat treated in a vacuum, so, to the requirement of this insulating bar be:, also still have enough joint performances even after heating.Again, described action bars also must have the joint performance that can tolerate steering force.According in the past joint method as shown in Figure 6, this method is used for the insulation of atmosphere and gas and carries out the transmission of steering force.Tubular pottery 11 solderings of Ag solder 13 of insulating bar system in this method with the joint 12 and the oxidation aluminum of kovar alloy system.Yet under the heating-up temperature when the assembling vacuum tank, fusion again takes place in solder, can not keep initial engagement state, and it is low that it engages performance; Perhaps, because composition surface and axially parallel under the tensile force effect, are born shear stress on the composition surface, be easy to generate destruction.In addition, it is joint material that described connector adopts the kovar alloy of high price, so the problem of selling at exorbitant prices is arranged.
The present invention addresses the above problem and does, and the objective of the invention is to: a kind of insulating bar and manufacture method thereof that keeps insulation and can carry out the steering force transmission in vacuum airtight container is provided.The insulating bar that described operation leverage forms pottery and metal parts joint, in above-mentioned insulating bar, engaging between described pottery and the metal parts is good.
The invention of claim 1 is a kind of steering force transmission that keeps insulating and carrying out in vacuum airtight container, and pottery and metal parts are engaged the insulating bar that forms, and it is characterized in that: between described pottery and metal parts, as intermediate materials.Being equipped with Fe-Ni is alloy, copper composite material, carbon steel or copper and alloy thereof.
The invention of claim 2 is the described insulating bar of claim 1, it is characterized in that: as the intermediate materials Fe-Ni at described pottery and metal parts is that alloy is the Fe-Ni alloy of 20～50% (quality) for Ni content; Ni content is that 20～50% (quality) and Co content are that the Fe-Ni of 3～25% (quality) is an alloy; Ni content is that 20～50% (quality) and Cr content are that the Fe-Ni of 1～12% (quality) is an alloy; Perhaps, be that 20～50% (quality) and Co content are that the Fe-Ni of 3～25% (quality) is in the alloy at above-mentioned Ni content, the Fe-Ni a kind of or two kinds that contain again in C0.5～5% (quality), Si and Mn0.1～3% (quality) are alloy.
The invention of claim 3 is the described insulating bar of claim 1, it is characterized in that: as the copper composite material of the described intermediate materials copper composite material for particle 40～90% (quality) scope of compound Mo or W in Cu; Perhaps, between two layers of Cu, to sandwich Mo, make its content reach the metal plied timber of the three-ply sandwich structure of 20～80% (quality) scope as the copper composite material of described intermediate materials.
The invention of claim 4 is an insulating bar as claimed in claim 1, it is characterized in that: as the copper of described intermediate materials or the yield stress of its alloy is 4～10kgf/mm 2
The invention system of claim 5 is as each described insulating bar of claim 1 to 4, it is characterized in that: on described intermediate materials, be provided with through hole, and pottery is embedded be engaged in the described through hole, have the intermediate materials of pottery to be arranged between above-mentioned pottery and the metal parts chimeric in the described through hole.
The invention of claim 6 is a kind of manufacture method of insulating bar, described method is a kind ofly can keep insulation and carry out steering force transmission, have the manufacture method of the insulating bar of pottery and metal parts in vacuum airtight container, it is characterized in that: in the method, between described pottery and metal parts, being provided with Fe-Ni as intermediate materials is alloy, copper composite material, carbon steel or copper and alloy thereof; With described ceramic material of this sealing-in and metal parts.
The invention of claim 7 is a kind of manufacture method of insulating bar as claimed in claim 6, it is characterized in that: with the cooling rate of 50～200 ℃ of/second scopes, carbon steel and the crunch seal as intermediate materials.
The invention of claim 8 is a kind of manufacture method of insulating bar, said method is a kind of manufacture method that can keep insulation and carry out insulating bar steering force transmission, that be made up of pottery and metal in vacuum airtight container, it is characterized in that: in the method, more than one protuberance and recess are set on described pottery and metal parts, use the chimeric shrink fit method of heating and the sealing-in method on its chimeric plane of soldering simultaneously, described pottery and metal parts are sealed up.
Insulating bar among the present invention ties up to and is provided with Fe-Ni between pottery and the metal parts is the intermediate materials of alloy, copper composite material, carbon steel or copper and alloy thereof, the described material of sealing-in forms, insulating bar of the present invention can relax or cushion the stress at the sealing-in position that produces because of thermal expansion difference ceramic and metal parts, can improve the joint performance at low cost.Again, insulating bar mat of the present invention is provided with protuberance on described pottery, and recess is set on metal parts, uses the chimeric shrink fit method of heating and the sealing-in method on its chimeric plane of soldering simultaneously, can improve it and engage performance.
Below, be that the suitable compositing range of alloy is done an explanation with regard to Fe-Ni.The suitable Fe-Ni that uses is that alloy is the Fe-Ni alloy of 20～50% (quality) as Ni content among the present invention; Ni content is that 20～50% (quality) and Co content are that the Fe-Ni of 3～25% (quality) is an alloy; Ni content is that 20～50% (quality) and Cr content are that the Fe-Ni of 1～12% (quality) is an alloy; Perhaps, be that 20～50% (quality) and Co content are that the Fe-Ni of 3～25% (quality) is in the alloy at above-mentioned Ni content, the Fe-Ni a kind of or two kinds that contain again in C0.5～5% (quality), Si and Mn0.1～3% (quality) are alloy.These Fe-Ni are that alloy also can contain just like the low bulk metal that is called as invar, permanent elasticity nickel chromium triangle spring steel, Fil Buddhist nun Ke's alloy, No. 42 alloys, kovar alloy etc.Because the scope of the ceramic thermal coefficient of expansion of oxide, nitride, carbide is all 4～12 * 10 -6/ K is the stress that the coefficient of thermal expansion differences that alleviates insulating ceramics and metal parts causes, is necessary to adjust the thermal coefficient of expansion of pottery and intermediate materials.In Fe, add the intermediate materials of Ni, Co in the scope as mentioned above, Cr, C, Si, Mn, can obtain 4～12 * 10 -6The thermal coefficient of expansion of/K.The Fe-Ni that selects its thermal coefficient of expansion to occupy between pottery and the metal parts is an alloy, can relax the stress of generation, improves to engage performance.
Secondly, do an explanation with regard to the suitable compositing range of copper composite material.The suitable copper composite material that uses is the copper composite material of particle 40～90% (quality) scope of compound Mo or W in Cu among the present invention; Perhaps, for to sandwich Mo between two layers of Cu, its content reaches the metal plied timber of the three-decker of 20～80% (quality) scope as the copper composite material of described intermediate materials.This is in order to obtain approaching pottery 4～12 * 10 -6The thermal coefficient of expansion of/K and the structure selected constitutes.Select the copper composite material of its thermal coefficient of expansion between pottery and metal parts, can relax the stress of generation, improve the joint performance.Have, the metal plied timber that accompanies Mo in Cu also has the effect that available buffer betides the thermal stress between pottery and the metal parts again.
The thermal expansion character of phase transformation directly engaged with pottery, so it is easy with engaging of metal parts when carbon steel can utilize cooling.Below, do an explanation with regard to the suitable cooling rate of sealing-in carbon steel.Known, eutectoid carbon steel (0.9% carbon) is heated to 875 ℃, it is organized after the austenitizing, when shrend was cooled to 300 ℃, its volumetric expansion was compared with the volumetric expansion in when heating, has shown less thermal expansion; As directly being cooled to the temperature below 300 ℃, then the eutectoid carbon steel is organized formation of martensite, and volume expands on the contrary.Carbon steel has promptly utilized the less characteristic of this thermal expansion to carry out with engaging of pottery.Cooling rate is 50～200 ℃/second preferably.This is because less than 50 ℃/second, the thermal expansion when then its thermal coefficient of expansion is with heating is identical, can't utilize low bulk directly to carry out soldering as cooling rate; On the other hand, surpass 200 ℃/second as cooling rate, then pottery may go to pot because of thermal shock.
The effect of the stress that the buffering that has copper and alloy thereof takes place because of the thermal expansion difference between pottery and the metal parts by this, can obtain good joint.The yield stress of copper and alloy thereof is preferably at 4～10kgf/mm 2Its reason is 4kgf/mm 2Stress value system decide according to the yield stress of fine copper, as its upper limit yield value of stress above 10kgf/mm 2, then can not obtain the effect that available buffer betides junction stress.In addition, copper and the alloy thereof that has shown the yield stress of above-mentioned scope can be enumerated: oxygen-free copper (4kgf/mm 2), tough pitch copper (7kgf/mm 2), Cu-0.03～0.15% (weight) Ag alloy (annealed material, 8kgf/mm 2), Cu-0.8% (weight) Cr alloy (annealed material, 9kgf/mm 2), Cu-0.15% (weight) Zr alloy (annealed material, 9kgf/mm 2) etc.Select for use the reason of above-mentioned copper and alloy thereof to be described below.
In the time of in vacuum tank that insulating bar is packed into, normally in a vacuum, be heated to 800～1000 ℃ temperature, carry out the assembling of vacuum tank.And metals such as Al, Pb, In, Bi, Zn, Sn, Mg, and the copper series alloy that contains these metals has shown and has been lower than 10kgf/mm 2Yield value of stress.If in a vacuum described metal or the copper series alloy that contains these metals are heated to 800～1000 ℃, then above-mentioned low-melting-point metal becomes metal vapors, thereby, pollute vacuum tank inside and ceramic surface, produce the low problem of insulation characterisitic.Again, yield stress described here is the stress value when to produce length be the permanent elongation of raw footage 0.2%.
The working of an invention mode
Execution mode 1
Below, do an explanation with regard to embodiments of the present invention 1.Figure 1 shows that the cutaway view of insulating bar of the present invention.In Fig. 1,1 is insulating ceramics, and 2 is metal layer, and 3 is the coat of metal, and 4 is intermediate materials, and 5 is solder a, and 6 is metal parts, and 7 is solder b.
Execution mode 1 is that middle material is used Fe-Ni is alloy, the explanation of using the insulating bar of Mo-Mn method sealing-in to do.On the composition surface of the oxidation aluminum insulating ceramics 1 of diameter 15mm, long 25mm, making thick is the metal layer 2 of 30 μ m, on metal layer 2, forms the Ni coating 3 of thick 1mm again with electrolysis.In addition, use Fe-42% (quality) Ni, Fe-29% (quality) Ni-17% (quality) Co, and three kinds of intermediate materials 4 of Fe-32% (quality) Ni-5% (quality) Co-2% (quality) Si-0.2% (quality) Mn.At intermediate materials 4 with impose between the insulating ceramics 1 of the coat of metal, being provided with thick is the metal forming of solder 5 of the BNi-7 (Ni-13%Cr-10%P) of 50 μ m, when adding 1kg load, in a vacuum, above-mentioned laminated material carried out 950 ℃ * 20 minutes the heat sealing that adds.Then, for on the intermediate materials 4 that is engaged on the insulating ceramics 1, engaging stainless steel (SUS304) the system metal parts 6 of diameter 15mm, long 25mm, the metal forming of the solder 7 of BAg-18 (Ag-30%Cu-10%Sn-0.025%P) is positioned between intermediate materials 4 and the metal parts 6, when adding 1kg load, in a vacuum, above-mentioned laminated material is carried out 820 ℃ * 20 minutes heating, obtain closure.The comparative example material is not then established intermediate materials 4 and is to use BNi-7, by the Mo-Mn method, in a vacuum, oxidation aluminum insulating ceramics 1 and SUS304 is made the heat sealing that adds that metal parts 6 carried out 950 ℃ * 20 minutes.Examine or check the joint performance of described insulating bar,, record its sealing strength by visual examination and tension test.The results are shown in execution mode 1 (No.1～3) sample of table 1.Do not see on the No.1 of embodiments of the present invention, No.2, the No.3 sample peeling off, being out of shape of ceramic be full of cracks and junction surface arranged.And taking place on the comparative example No.12 sample, pottery chaps.The result of tension test shows that also the hot strength of embodiment of the present invention No.1, No.2, No.3 sample is respectively: No.115kgf/mm 2, No.223kgf/mm 2, with the hot strength 3kgf/mm of comparative example No.12 sample 2Compare, hot strength of the present invention significantly improves.Again, the plane of disruption after the tension test shows that near the pottery that the described plane of disruption betides the junction surface is inner, this shows, the intensity at described junction surface obtains firm joint greater than the intensity of pottery itself.In addition, in the present embodiment, be to use the Ni solder that insulating ceramics and intermediate materials are carried out soldered joint, but, also can use the solder of Cu, Au, Ag etc. to engage.
Execution mode 2
Execution mode 2 is that middle material is used the copper composite material, and the insulating bar that uses the Mo-Mn method to engage describes.On the composition surface of the oxidation aluminum insulating ceramics 1 of diameter 15mm, long 25mm, make the Mo-Mn metal layer 2 of thick 30 μ m, on metal layer 2, forming thick with electrolysis again is the Ni coating 3 of 5 μ m.On Ni coating 3, dispose thick be 1mm Cu-20% (quality) W, Cu-50% (quality) Mo, and Cu/Mo/Cu (1: 2: 1,47 quality % Cu) three kinds of intermediate materials 4 and impose between the insulating ceramics 1 of the coat of metal, being provided with thick is the metal forming of solder a5 of the BNi-7 (Ni-13%Cr-10%P) of 50 μ m.When adding 1kg load, in a vacuum, described laminated material carried out 950 ℃ * 20 minutes the thermal bonding that adds.Then, be stainless steel (SUS304) the system metal parts 6 of soldering diameter 15mm, long 25mm on the intermediate materials 4 that is engaged on the insulating ceramics 1, with the metal forming of the solder b7 of BAg-18 (Ag-30%Cu-10%Sn-0.025%P).Place between intermediate materials 4 and the metal parts 6, when adding 1kg load, heated in a vacuum 820 ℃ * 20 minutes, obtain closure.The comparative example material is not then established intermediate materials 4 and is to use BNi-7, by the Mo-Mn method, in a vacuum, oxidation aluminum insulating ceramics 1 and SUS304 is made the thermal bonding that adds that metal parts 6 carried out 950 ℃ * 20 minutes.Examine or check the joint performance of described insulating bar,, record its sealing strength by visual examination and tension test.The results are shown in execution mode 2 (No.4～6) sample of table 1.Do not see on No.4 in the present embodiment～6 samples peeling off, being out of shape of ceramic be full of cracks and junction surface arranged.And the pottery be full of cracks takes place in the No.12 sample of comparative example.The result who carries out tension test shows that also the hot strength of sample of the present invention is at 23kgf/mm 2More than, with the No.12 sample comparison of comparative example, sealing strength of the present invention significantly improves.Again, the cross section after the tension test shows that near the pottery that the plane of disruption betides the junction surface is inner, this shows, the sealing strength at described junction surface is greater than the inner bond strength of pottery.In addition, in the present embodiment, be to use the Mo-Mn method to carry out soldered joint between insulating ceramics 1 and the intermediate materials 4, but, also can use the reactive metal method of Ti-Ag-Cu solder, Zr-Ag-Cu solder, Ti-Cu solder etc. to carry out soldered joint.Again, described copper composite material also can be with Cr, WC, C, Al 2O 3, the particle of SiC etc. and the copper composite material that the compound back of Cu forms.
Execution mode 3
In above-mentioned execution mode 2, tie up to the occasion of the copper composite material that among the Cu the compound back of the particle of Mo or W is formed with regard to described copper composite material, and just use the occasion of the composite bed metal material of Cu/Mo/Cu to be illustrated.But also can be the situation shown in the cross section of Fig. 2: on copper and alloy 8 thereof through hole is set, the copper composite material of the pottery 9 that in its through hole heating is embedded carries out sealing-in as intermediate materials 4.Below, should example do an explanation.
Heating embeds the copper composite material that engages and ties up on the oxygen-free copper 8 of diameter 30mm, long 10mm, setting is with the through hole of 7 diameter 5.000mm, the aluminium oxide ceramics 9 of diameter 5.002mm, long 10mm is heated to 1000 ℃, and embedding is engaged in the described through hole.Obtain the ceramic volumetric rate and be 20% fastener.Then, between the metal parts 6 that the alumina insulation pottery that the intermediate materials 4 of described copper composite material is disposed at diameter 30mm, long 25mm and the stainless steel (SUS304) of diameter 30mm, long 25mm are made, between described alumina insulation pottery 1 and intermediate materials 4, reach the metal forming of the active metallic soldering material 10 that Cu-28% (weight) Ti is set between metal parts 6 and intermediate materials 4.When adding 1kg load, in a vacuum, carry out 950 ℃ * 20 minutes heating with regard to described laminated material, obtain closure.Figure 3 shows that the longitudinal sectional view of insulating bar.Examine or check the joint performance of described insulating bar,, record its sealing strength by visual examination and tension test.The results are shown in the execution mode 3No.7 sample of table 1.This routine binding ability is good, and hot strength is at 23kgf/mm 2More than.
Execution mode 4
Execution mode 4 is the low thermal expansion characteristics when just utilizing the cooling rate of controlling carbon steel, and directly the example that ceramic and carbon steel are engaged describes.
Between the intermediate materials 4 of the carbon steel (S45C) of the zirconium system insulating ceramics 1 of diameter 15mm, long 25mm and diameter 15mm, thick 1mm, be configured to the metal forming of the active metallic soldering material 8 of Cu-28% (weight) Ti.
When adding 1kg load, in a vacuum, carry out 950 ℃ * 20 minutes heating with regard to described laminated material.In order to obtain the cooling rate more than 50 seconds, above-mentioned material limit in cooling bath to be moved, sealing-in is carried out on the limit.Then, stainless steel (SUS304) system metal parts 6 for sealing-in diameter 15mm, long 25mm on the carbon steel intermediate materials 4 that engages on the zirconium system insulating ceramics 1, the solder b7 of BAg-18 (Ag-30%Cu-10%Sn-0.025%P) is arranged between intermediate materials 4 and the metal parts 6, when adding 1kg load, in a vacuum, carry out 820 ℃ * 20 minutes heating, obtain closure.Figure 4 shows that the cutaway view of the insulating bar of the present invention that is suitable for the reactive metal method.Comparative example material system will cool off in the cooling rate below 50 seconds, sealing-in zirconia insulating ceramics 1 and intermediate materials 4 form.
For examining or check the joint performance of described insulating bar,, record its sealing strength by visual examination and tension test.It the results are shown in the sample of execution mode 4 (No.8) of table 1.Not seeing on the sample of the present invention has peeling off, being out of shape of ceramic be full of cracks and junction surface, obtains good joint.And the pottery be full of cracks takes place in comparative example No.12 sample.The result who carries out tension test shows that the hot strength of sample of the present invention is at 23kgf/mm 2More than.Again, the cross section after the tension test shows that near the pottery that the plane of disruption betides the junction surface is inner, illustrates, the sealing strength at junction surface is greater than the intensity of pottery itself.The cooling rate of the sample of comparative example No.13 is below 50 ℃/second, and peel off at its junction surface.This shows that carbon steel is feasible as the joint of intermediate materials, engages easily with metal parts.Again, in the present embodiment, be to use carbon steel, also had same effect but metal parts directly engaged as carbon steel and insulating ceramics as intermediate materials.In addition, joint method also can use the Mo-Mn method except the reactive metal method.
Execution mode 5
In execution mode 5, be to be 4～10kgf/mm just with yield stress 2Copper and alloy thereof be arranged between insulating ceramics 1 and the metal parts 6 as intermediate materials, situation about engaging with the Mo-Mn method describes.
On the composition surface of the oxidation aluminum insulating ceramics 1 of diameter 15mm, long 25mm, making thick is the metal layer 2 of the Mo-Mn of 30 μ m, and forming thick by electrolysis more thereon is the Ni coating 3 of 5 μ m.Then, with thick be that the no-oxygen copper plate (C1020) of .5mm and Cu-0.8% (weight) Cr two kinds are as intermediate materials 4, in the metal forming of the solder a5 that imposes the BNi-7 that is configured to thick 50 μ m between the pottery of plating.When adding 1kg load, in a vacuum, carry out 950 ℃ * 20 minutes the heat sealing that adds.Then, for soldering diameter 15mm on the intermediate materials 4 that engages on the insulating ceramics 1, length are the stainless steel of 25mm (SUS304) system metal parts 6, the solder b7 of BAg-18 (Ag-30%Cu-10%Sn-0.025%P) is arranged between intermediate materials 4 and the metal parts 6, when adding 1kg load, in a vacuum, carry out 820 ℃ * 20 minutes heating, obtain closure.Comparative example material system does not establish intermediate materials 4, engages the stainless steel metal parts 6 of SUS304, under vacuum, and mat Mo-Mn method, the heat sealing that adds with BNi-7 carries out 950 ℃ * 20 minutes obtains using yield stress at 17.5kgf/mm 2Cu-30% (weight) Ni as the closure of intermediate materials 4.For examining or check the joint performance of described insulating bar,, record its sealing strength by visual examination and tension test.(N0.9 is No.10) in the sample to the results are shown in the execution mode 5 of table 1.The No.9 of embodiment of the present invention 5, not seeing on the No.10 sample has peeling off, being out of shape of ceramic be full of cracks and junction surface.The result who carries out tension test shows that the hot strength of sample of the present invention is at 23kgf/mm 2More than.Compare its sealing strength height with the No.12 and the No.14 sample of comparative material.In addition, the plane of disruption after the tension test shows that near the pottery that the plane of disruption betides the junction surface is inner, this shows, the sealing strength at described junction surface is greater than the intensity of pottery itself.In the present embodiment, the joint of insulating ceramics and intermediate materials 4 is to use the Mo-Mn method to carry out, but the reactive metal method of the also available use of the present invention Ti-Ag-Cu solder, Zr-Ag-Cu solder and Ti-Cu solder etc. engages.
Execution mode 6
In execution mode 6, be to do an explanation with the execution mode of the face bonding of using solder to engage with regard to the shrink fit method of utilizing pottery to engage simultaneously with the thermal expansion difference of metal.Figure 5 shows that the longitudinal sectional view of insulating bar of the present invention.Among the figure, 1 for its junction surface is the insulating ceramics of convex, and 6 for its junction surface is the metal parts of concavity, and 8 is active metallic soldering material.
The recess that the protuberance of preparing external diameter 20mm, long 60mm, its junction surface is of a size of the aluminium oxide potting porcelain 1 of diameter 14.001mm, high 5mm and another external diameter 20mm, long 30mm, its junction surface is of a size of diameter 14.000mm, the SUS304 of 5mm makes metal parts 6 deeply.Make the junction surface of above-mentioned insulating ceramics 1 and metal parts 6 chimeric mutually, its to axially vertical face on, the active metallic soldering material 10 of configuration Cu-28% (weight) Ti.When adding 1kg load, in a vacuum, carry out 950 ℃ * 20 minutes heating with regard to described laminated material, carry out chimeric and soldering simultaneously, obtain closure.Material is as a comparative example prepared cylindric insulating ceramics 1 and metal parts 6 with the same size of embodiment, carries out face with same joint method and engages.
Carry out tension test with regard to insulating bar of the present invention, it the results are shown in the sample of the No.11 of execution mode 6.The hot strength of sample of the present invention is at 23kgf/mm 2More than.The hot strength of the No.15 sample of comparative material is at 7.5kgf/mm 2Observe the closure that destroys, can see, it is inner that the plane of disruption of material of the present invention betides pottery, this shows, the sealing strength at junction surface is greater than the bond strength of pottery itself.And the plane of disruption of comparative material No.15 sample betides the interface of pottery and solder.Presentation of results thus, the hot strength of comparative material is lower than the present invention.The present invention can obtain good joint by the face bonding of also using the chimeric and solder of shrink fit method.In the present embodiment, be only just to be illustrated at the insulating bar that protuberance is set on the pottery and recess is set on metal parts, but as recess and protuberance more than two are set, also can carry out the joint of the bigger closure of its sealing-in area.
Figure 9911039300111
According to the invention of claim 1, can make a kind of insulating bar with excellent Joint Properties, Described insulating bar ties up to and keeps insulation in the vacuum airtight container and carry out the steering force transmission, with pottery and metal The insulating bar of components bonding is between the pottery and metal parts of described insulating bar, as intermediate wood Material, being provided with Fe-Ni is alloy, copper composite material, carbon steel or copper and alloy thereof, by this, can alleviate, The stress that buffering produces because of thermal expansion difference.
According to the invention of claim 2, can make the insulating bar with more excellent Joint Properties, institute The Fe-Ni that states the insulating bar intermediate materials be alloy for Ni content be that the Fe-Ni of 20～50% (quality) closes Gold; Ni content is that 20～50% (quality) and Co content are that the Fe-Ni of 3～25% (quality) is alloy; Ni content is that 20～50% (quality) and Cr content are that the Fe-Ni of 1～12% (quality) is alloy; Perhaps, Be that 20～50% (quality) and Co content are that the Fe-Ni of 3～25% (quality) is alloy at above-mentioned Ni content In, the Fe-Ni a kind of or two kinds that contain again in C0.5～5% (quality), Si and Mn0.1～3% (quality) are alloy, thus, can provide more excellent Joint Properties.
According to the invention of claim 3, can make the insulating bar with more excellent Joint Properties, institute Between stating among the insulating bar copper composite material of material for the particle 40 that in Cu, is compounded with Mo or W～The copper composite material of 90% (quality) scope; Perhaps, as the copper composite material of described intermediate materials be Sandwich Mo between two layers of Cu, make its content reach the Metal coating of the three-decker of 20～80% (quality) scope Material thus, can provide more excellent Joint Properties.
According to the invention of claim 4, can make the insulating bar with more excellent Joint Properties, among the described insulating bar between the copper of material or the yield stress of its alloy be 4～10kgf/mm2, thus, can So that more excellent Joint Properties to be provided.
According to the invention of claim 5, can make the insulating bar with more excellent Joint Properties, institute Material is provided with through hole between stating among the insulating bar, and pottery is embedded in the described through hole, passes through described Chimeric in the through hole have the intermediate materials of pottery to be arranged between above-mentioned pottery and the metal parts, thus, can provide More excellent Joint Properties.
According to the invention of claim 6, can make the insulating bar with more excellent Joint Properties, institute State invention and be and a kind ofly can in vacuum airtight container, keep insulation and carry out steering force transmitting, have pottery and metal The manufacture method of the insulating bar of parts, between described pottery and metal parts, as intermediate materials, Being provided with Fe-Ni is alloy, copper composite material, carbon steel or copper and alloy thereof; Engage described ceramic material with this Material and metal parts by this, can alleviate, cushion the stress that produces because of thermal expansion difference, make to have excellence The insulating bar of Joint Properties.
According to the invention of claim 7, by this, can make the insulation operation with more excellent Joint Properties Bar, the carbon steel of the intermediate materials of described insulating bar are with the cooling velocity of 50～200 ℃ of/second scopes, with pottery Porcelain carries out sealing-in.
Invention according to Claim 8 can make the insulating bar with more excellent Joint Properties, institute The manufacture method of stating insulating bar is a kind ofly can keep insulation and carry out steering force passing in vacuum airtight container The manufacture method of the insulating bar of failing, be made up of pottery and metal is in above-mentioned manufacture method, described More than one protuberance and recess are set on pottery and the metal parts, use simultaneously the chimeric shrink fit of heating The sealing-in method on method and its chimeric plane of soldering, like this, engaging force increases, thus, can make have more excellent The insulating bar of different Joint Properties.
The simple declaration of accompanying drawing
Fig. 1 is the cutaway view of an execution mode of insulating bar of the present invention.
Fig. 2 is the cross-sectional view of an execution mode of copper composite material.
Fig. 3 is the longitudinal section of an execution mode of insulating bar of the present invention.
Fig. 4 is the cutaway view of an execution mode of the insulating bar of the present invention of use reactive metal method.
Fig. 5 is the cutaway view of an execution mode of the insulating bar of the present invention that uses shrink fit method and face bonding simultaneously.
Fig. 6 is the cutaway view of insulating joint in the past.
Among the figure, 1 is insulating ceramics, and 2 is metal layer, and 3 is electrodeposited coating, and 4 is intermediate materials, 5 is solder a, and 6 is metal parts, and 7 is solder b, and 8 is copper and alloy thereof, and 9 is pottery, 10 is active metallic soldering material, and 11 is the tubular ceramic member, and 12 is connecting joint, and 12 is the Ag solder.

Claims (8)

1. one kind keeps insulation and carries out the steering force transmission in vacuum airtight container, insulating bar with pottery and metal parts sealing-in, it is characterized in that: between described pottery and metal parts, as intermediate materials, being provided with Fe-Ni is alloy, copper composite material, carbon steel or copper and alloy thereof.
2. insulating bar as claimed in claim 1 is characterized in that: as the material Fe-Ni in the middle of described pottery and metal parts is that alloy is the Fe-Ni alloy of 20～50% (quality) for Ni content; Ni content is that 20～50% (quality) and Co content are that the Fe-Ni of 3～25% (quality) is an alloy; Ni content is that 20～50% (quality) and Cr content are that the Fe-Ni of 1～12% (quality) is an alloy; Perhaps, be that 20～50% (quality) and Co content are that the Fe-Ni of 3～25% (quality) is in the alloy at above-mentioned Ni content, the Fe-Ni a kind of or two kinds that contain again in C0.5～5% (quality), Si and Mn0.1～3% (quality) are alloy.
3. insulating bar as claimed in claim 1 is characterized in that: as the copper composite material of the described intermediate materials copper composite material for particle 40～90% (quality) scope of compound Mo or W in Cu; Perhaps, between two layers of Cu, to sandwich Mo, make its content reach the metal plied timber of the three-decker of 20～80% (quality) scope as the copper composite material of described intermediate materials.
4. insulating bar as claimed in claim 1 is characterized in that: as the copper of described intermediate materials or the yield stress of its alloy is 4～10kgf/mm 2
5. as each described insulating bar of claim 1～4, it is characterized in that: on described intermediate materials, be provided with through hole, and pottery is embedded in the described through hole, has the intermediate materials of pottery to be arranged between above-mentioned pottery and the metal parts chimeric in the described through hole.
6. the manufacture method of an insulating bar, described method is a kind ofly can keep insulation and carry out steering force transmission, have the manufacture method of the insulating bar of pottery and metal parts in vacuum airtight container, it is characterized in that: between described pottery and metal parts, as intermediate materials, being provided with Fe-Ni is alloy, copper composite material, carbon steel or copper and alloy thereof; With described ceramic material of this sealing-in and metal parts.
7. the manufacture method of insulating bar as claimed in claim 6, it is characterized in that: with the cooling rate of 50～200 ℃ of/second scopes, sealing-in is as the carbon steel and the pottery of intermediate materials.
8. the manufacture method of an insulating bar, said method is a kind of manufacture method that can keep insulation and carry out insulating bar steering force transmission, that be made up of pottery and metal in vacuum airtight container, it is characterized in that: more than one protuberance and recess are set on described pottery and metal parts, use the chimeric shrink fit method of heating and the sealing-in method on its chimeric plane of soldering simultaneously, engage described pottery and metal parts.
CNB991103939A 1999-07-12 1999-07-14 Insulated operating rod and its manufacturing method Expired - Fee Related CN1258201C (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
SG9903322A SG89286A1 (en) 1999-07-12 1999-07-13 Insulating operating rod and manufacturing method therefor
CNB991103939A CN1258201C (en) 1999-07-12 1999-07-14 Insulated operating rod and its manufacturing method
DE19932939A DE19932939B4 (en) 1999-07-12 1999-07-14 Insulating working rod and a method that produces it

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR1019990028033A KR100355119B1 (en) 1999-07-12 1999-07-12 Insulating operating rod and manufacturing method therefor
SG9903322A SG89286A1 (en) 1999-07-12 1999-07-13 Insulating operating rod and manufacturing method therefor
CNB991103939A CN1258201C (en) 1999-07-12 1999-07-14 Insulated operating rod and its manufacturing method
DE19932939A DE19932939B4 (en) 1999-07-12 1999-07-14 Insulating working rod and a method that produces it

Publications (2)

Publication Number Publication Date
CN1281235A true CN1281235A (en) 2001-01-24
CN1258201C CN1258201C (en) 2006-05-31

Family

ID=27430056

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB991103939A Expired - Fee Related CN1258201C (en) 1999-07-12 1999-07-14 Insulated operating rod and its manufacturing method

Country Status (3)

Country Link
CN (1) CN1258201C (en)
DE (1) DE19932939B4 (en)
SG (1) SG89286A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103474312A (en) * 2013-09-09 2013-12-25 电子科技大学 Traveling-wave tube clamping rod and manufacturing method thereof
CN111670261A (en) * 2018-02-06 2020-09-15 三菱电机株式会社 Electric contact and vacuum valve using same
CN114014683A (en) * 2021-11-16 2022-02-08 西安赛尔电子材料科技有限公司 Brazing method for improving sealing strength of metal lead and ceramic insulator

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2574807B1 (en) * 2011-09-30 2014-11-12 Maxon Motor AG Connection between a shaft and a collar component and method for producing the connection
USD808616S1 (en) 2014-02-28 2018-01-30 Milwaukee Electric Tool Corporation Single control button for an article of clothing
USD787160S1 (en) 2015-10-09 2017-05-23 Milwaukee Electric Tool Corporation Garment
USD799161S1 (en) 2015-10-09 2017-10-10 Milwaukee Electric Tool Corporation Garment
USD794281S1 (en) 2015-10-09 2017-08-15 Milwaukee Electric Tool Corporation Garment
USD808125S1 (en) 2015-10-09 2018-01-23 Milwaukee Electric Tool Corporation Garment

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3014645C2 (en) * 1980-04-16 1982-12-02 MTU Motoren- und Turbinen-Union München GmbH, 8000 München Metal-ceramic component and process for its manufacture
JPS59160533U (en) * 1983-04-09 1984-10-27 日本特殊陶業株式会社 Ceramic and metal bonding structure
DE3345219C1 (en) * 1983-12-14 1985-03-21 Daimler-Benz Ag, 7000 Stuttgart Soldering foil for the tension-free connection of ceramic bodies with metal
JPS60127271A (en) * 1983-12-14 1985-07-06 株式会社日立製作所 Method of bonding non-oxide ceramics and metal
JPH01176284A (en) * 1987-12-28 1989-07-12 Ngk Insulators Ltd Conjugate of metal and ceramics
US5372298A (en) * 1992-01-07 1994-12-13 The Regents Of The University Of California Transient liquid phase ceramic bonding
JP3746594B2 (en) * 1997-06-20 2006-02-15 日本碍子株式会社 Ceramic bonding structure and manufacturing method thereof

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103474312A (en) * 2013-09-09 2013-12-25 电子科技大学 Traveling-wave tube clamping rod and manufacturing method thereof
CN103474312B (en) * 2013-09-09 2016-08-10 电子科技大学 A kind of travelling-wave tube supporting rod and preparation method thereof
CN111670261A (en) * 2018-02-06 2020-09-15 三菱电机株式会社 Electric contact and vacuum valve using same
CN111670261B (en) * 2018-02-06 2021-11-26 三菱电机株式会社 Electric contact and vacuum valve using same
CN114014683A (en) * 2021-11-16 2022-02-08 西安赛尔电子材料科技有限公司 Brazing method for improving sealing strength of metal lead and ceramic insulator
CN114014683B (en) * 2021-11-16 2023-12-22 西安赛尔电子材料科技有限公司 Brazing method for improving sealing strength of metal lead and ceramic insulator

Also Published As

Publication number Publication date
DE19932939A1 (en) 2001-01-18
CN1258201C (en) 2006-05-31
SG89286A1 (en) 2002-06-18
DE19932939B4 (en) 2008-04-17

Similar Documents

Publication Publication Date Title
US4624897A (en) Clad brazing filler for bonding ceramic to metal, glass, or other ceramic and composites using such filler
US4740429A (en) Metal-ceramic joined articles
US4723862A (en) Ceramic-metal joint structure
CN1258201C (en) Insulated operating rod and its manufacturing method
JPS61158876A (en) Direct liquid phase bonding for ceramic to metal
JP2001010874A (en) Production of composite material of inorganic material with metal containing aluminum and product related to the same
WO2017098863A1 (en) Thermoelectric conversion module and method for manufacturing same
USRE34819E (en) Gold-nickel-titanium brazing alloy
US4598025A (en) Ductile composite interlayer for joining by brazing
JP2012004534A (en) Heat radiation insulating substrate and method of manufacturing the same
US5340658A (en) Composites made of carbon-based and metallic materials
JPH0777989B2 (en) Method for manufacturing ceramic-metal bonded body
WO2021085451A1 (en) Copper/ceramic assembly, insulated circuit board, method for producing copper/ceramic assembly, and method for producing insulated circuit board
JPS60166165A (en) Joining method of metal and ceramics
JP2019079957A (en) Power module
TW419623B (en) Insulating operating rod and manufacturing method therefor
Chakravarty et al. Formation of intermetallics during brazing of alumina with Fe, Ni and Cr using Ag–30 Cu–10 Sn as filler metal
Do Nascimento et al. Brazing Al2O3 to sintered Fe-Ni-Co alloys
JP2000128655A (en) Joined structure of ceramic member to metal member, joining of ceramic member to metal member, and ceramic heater using the same
CN1327438A (en) Joining method for ceramic and metal and joined body of ceramics and metal joined by the method
JP3119906B2 (en) Joint of carbon material and metal
JPH01205053A (en) Joining stress buffer alloy of ceramics and metal and joined body of ceramics and metal formed by using said buffer alloy
Nakao et al. Bonding of aluminum nitride to copper for reducing thermal stress
KR100355119B1 (en) Insulating operating rod and manufacturing method therefor
JP3977875B2 (en) Brazing alloy and joined body for joining of alumina-based ceramics-aluminum alloy

Legal Events

Date Code Title Description
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C06 Publication
PB01 Publication
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20060531

Termination date: 20150714

EXPY Termination of patent right or utility model