CN103474312A - Traveling-wave tube clamping rod and manufacturing method thereof - Google Patents
Traveling-wave tube clamping rod and manufacturing method thereof Download PDFInfo
- Publication number
- CN103474312A CN103474312A CN2013104082241A CN201310408224A CN103474312A CN 103474312 A CN103474312 A CN 103474312A CN 2013104082241 A CN2013104082241 A CN 2013104082241A CN 201310408224 A CN201310408224 A CN 201310408224A CN 103474312 A CN103474312 A CN 103474312A
- Authority
- CN
- China
- Prior art keywords
- supporting rod
- wave tube
- ceramic
- metal
- travelling wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention discloses a traveling-wave tube clamping rod and a manufacturing method thereof. The traveling-wave tube clamping rod comprises a metal inner core and a ceramic material layer located outside the metal inner core, wherein the coefficient of linear expansion of the metal inner core is equal to or close to the coefficient of linear expansion of the ceramic material, and a metal layer or alloy layer which is made of nickel, or copper, or silver-copper alloy, or gold-copper alloy or germanium-copper alloy and a reactive metal layer which is made of titanium, or zirconium, or tantalum or niobium are arranged on the outer surface of the metal inner core. Compared with a conventional ceramic clamping rod, the ceramic clamping rod provided with the metal inner core has the advantage of being better in strength and flexibility, therefore, the traveling-wave tube clamping rod can not be broken easily when used for assembly of a slow wave structure.
Description
Technical field
The invention belongs to the microwave vacuum electronic technology field, be specifically related to travelling wave tube in the matching used ceramic supporting rod of slow wave circuit.
Background technology
Travelling wave tube is an of paramount importance class microwave, Millimeter-Wave Source in the vacuum electronics field, there are high-power, high efficiency, high-gain, wide band characteristics, be widely used in the fields such as microwave and millimeter wave radar, electronic countermeasures, guidance, communication, microwave remote sensing, microblogging measurement.Slow wave circuit amplifies the circuit of microwave and millimeter wave energy with excitation as annotated in travelling wave tube-Bo mutual effect, be the core of travelling wave tube, and its performance is directly determining the technical merit of travelling wave tube.
In the slow wave circuit of travelling wave tube, such as helix line slow-wave system, double wrap helix line slow-wave system and ring-bar slow wave system etc., used ceramic supporting rod in a large number, its shape as Fig. 1 to as shown in Fig. 3.These ceramic supporting rods, except playing dielectric insulation, also are improved the effect of slow wave circuit dispersion characteristics.Because ceramic supporting rod is all more fragile, slow wave structure is easy to because discontinuity and fracture causes the waste of lot of materials in assembling.If what use is niberlox, the beryllium oxide powder produced when fracture is highly toxic material, is easy to cause environmental pollution.In addition, when travelling wave tube is worked under the environment of high temperature, high vibration, ceramic supporting rod fragments into several parts possibly, thereby makes the hydraulic performance decline of travelling wave tube, and the life-span reduces.Therefore, be necessary very much to find a kind of high mechanical strength that both had, there is again the ceramic supporting rod of certain flexility.
Summary of the invention
The present invention proposes a kind of travelling wave tube pottery supporting rod and preparation method thereof, and this pottery supporting rod not only has higher mechanical strength, and also has certain flexility, the shortcoming of easy fracture while having overcome ceramic supporting rod assembling in the background technology.
The present invention is for achieving the above object by the following technical solutions:
The invention provides a kind of preparation method of travelling wave tube pottery supporting rod, it is characterized in that, comprise the following steps:
At first the outer surface at metal inside plates layer of metal or alloy-layer, as nickel, copper, Ag-Cu alloy, gold-copper alloy, a kind of in germanium-copper alloy etc., and then at outer surface plating one deck reactive metal of metal or alloy layer a kind of as in titanium, zirconium, tantalum, niobium.The metal or alloy layer of ground floor is easy at the temperature lower than the reactive metal fusing point to form the liquid phase alloy with reactive metal, and at this moment the titanium under liquid phase state is easy to react with ceramic surface, thereby can complete metal and ceramic sealing-in.
The metal inside that outer surface is coated with to metal level is fixed on the inside of the mould of press ceramic supporting rod;
Fill up ceramic material in the mould of press ceramic supporting rod, and start the compacting of ceramic supporting rod, pressing pressure is in the 20-30MPa left and right, and the press time is 15-25 minute;
The ceramic supporting rod suppressed is placed in the high temperature of 1500 ℃-1700 ℃ to sintering 2-4 hour, obtains ceramic supporting rod finished product.
In technique scheme, the coefficient of linear expansion of described metal inside is identical with the coefficient of linear expansion of described ceramic material or close.
In technique scheme, the material of described metal inside is the low bulk metal, as iron nickel cobalt magnetic involution gold 4J33 or 4J34.
In technique scheme, described ceramic material is a kind of in beryllium oxide ceramics, boron nitride ceramics, aluminium oxide ceramics.
In technique scheme, the shape of cross section of described ceramic supporting rod is a kind of in rectangle, circle, fan-shaped, trapezoidal, isosceles triangle; The shape of cross section of described metal inside is a kind of in the rectangle identical with ceramic supporting rod shape of cross section, circle, fan-shaped, trapezoidal, isosceles triangle.
The present invention also provides a kind of travelling wave tube pottery supporting rod, it is characterized in that: comprise metal inside and be positioned at the outer ceramic material layer of metal inside, the coefficient of linear expansion of described metal inside is identical with the coefficient of linear expansion of described ceramic material or close, and the outer surface of described metal inside is provided with at least one deck reactive metal layer.
In the technical scheme of above-mentioned a kind of travelling wave tube pottery supporting rod, the material of described metal inside is the low bulk metal, as iron nickel cobalt magnetic involution gold 4J33 or 4J34.
In the technical scheme of above-mentioned a kind of travelling wave tube pottery supporting rod, described ceramic material is a kind of in beryllium oxide ceramics, boron nitride ceramics, aluminium oxide ceramics.
In the technical scheme of above-mentioned a kind of travelling wave tube pottery supporting rod, the shape of cross section of described ceramic supporting rod is a kind of in rectangle, circle, fan-shaped, trapezoidal, isosceles triangle; The shape of cross section of described metal inside is a kind of in the rectangle identical with ceramic supporting rod shape of cross section, circle, fan-shaped, trapezoidal, isosceles triangle.
Beneficial effect of the present invention is as follows:
Therefore (1) a kind of ceramic supporting rod with metal inside provided by the present invention is compared with the ceramic supporting rod of routine, has better intensity and pliability, during for the assembling of slow wave structure, is not easy fracture.
(2) a kind of ceramic supporting rod with metal inside of the present invention not only plays the effect of dielectric insulation in slow wave structure, also plays the effect that fin loads, therefore can improve the dispersion characteristics of slow wave structure, increases the bandwidth of travelling wave tube.In addition, because the cross sectional dimensions of millimeter wave slow wave structure is very little, processing fin difficult in very undersized slow wave structure, be difficult to guarantee the precision of processing, so the present invention improved the machining accuracy of slow wave structure, also reduced manufacturing cost simultaneously.
The accompanying drawing explanation
Fig. 1 is traditional rectangular ceramic supporting rod;
Fig. 2 is traditional round ceramic supporting rod;
Fig. 3 is that traditional fan-shaped pottery is held bar;
Fig. 4 is a kind of supporting rod of the rectangular ceramic with the rectangular metal inner core of the present invention;
Fig. 5 is a kind of supporting rod of the round ceramic with the circular metal inner core of the present invention;
Fig. 6 is a kind of fan-shaped ceramic supporting rod with trapezoidal metal inside of the present invention.
In figure, 1 is ceramic material layer, and 2 is metal inside.
Embodiment
Below in conjunction with drawings and Examples, the present invention is further described, but embodiments of the present invention are not limited to this.For complete understanding the present invention, numerous details have been mentioned in the following detailed description.But it should be appreciated by those skilled in the art that the present invention can realize without these details.In other example, be not described in detail known method, process, assembly and circuit, in order to avoid unnecessarily make embodiment fuzzy.
According to an aspect of the present invention, disclose a kind of preparation method of travelling wave tube pottery supporting rod, comprised the following steps:
Select metal inside and ceramic material, the coefficient of linear expansion of described metal inside is identical with the coefficient of linear expansion of described ceramic material or close;
At first the outer surface at metal inside plates layer of metal or alloy-layer, as nickel, copper, Ag-Cu alloy, gold-copper alloy, a kind of in germanium-copper alloy etc., and then at outer surface plating one deck reactive metal of metal or alloy layer a kind of as in titanium, zirconium, tantalum, niobium.
The metal inside that outer surface is coated with to metal level is fixed on the inside of the mould of press ceramic supporting rod;
Fill up ceramic material in the mould of press ceramic supporting rod, and start the compacting of ceramic supporting rod, pressing pressure is at 20-30MPa, and the press time is 15-25 minute;
The ceramic supporting rod suppressed is placed in the high temperature of 1500 ℃-1700 ℃ to sintering 2-4 hour, obtains ceramic supporting rod finished product.
According to a further aspect in the invention, a kind of travelling wave tube pottery supporting rod is also disclosed, comprise metal inside 2 and be positioned at the outer ceramic material layer 1 of metal inside, the coefficient of linear expansion of its metal inside 2 is identical or close with the coefficient of linear expansion of the ceramic material of ceramic material layer 1, and the outer surface of described metal inside is provided with at least one deck reactive metal layer.Wherein, ceramic material is a kind of in beryllium oxide ceramics, boron nitride ceramics, aluminium oxide ceramics, the shape of cross section of pottery supporting rod is a kind of in rectangle as shown in Figures 4 to 6, circle, fan-shaped or trapezoidal, isosceles triangle, perhaps other shape, the shape of cross section of metal inside is a kind of in the rectangle identical with ceramic supporting rod shape of cross section as shown in Figures 4 to 6, circle, fan-shaped or trapezoidal, isosceles triangle, or other shape.
Embodiment mono-
It is all rectangular configuration that present embodiment be take the cross section of ceramic supporting rod and metal inside, and the central authorities that metal inside is positioned at ceramic supporting rod are example, and wherein the material of ceramic supporting rod is beryllium oxide, and the material of metal inside is iron nickel cobalt magnetic involution gold 4J34.Long limit * the minor face of rectangular channel * length is 4 * 5 * 130mm; Long limit * the minor face of rectangular ceramic supporting rod * length is 4 * 5 * 130mm; Long limit * the minor face of rectangular metal inner core cross section * length is 2 * 2.5 * 130mm.Plate respectively thick nickel dam and the titanium layer of one deck 10 μ m on the surface of metal inside, then bonding jumper is fixed on to the central authorities of groove, and fill the beryllium oxide ceramics powder in groove, carry out sintering by normal beryllium oxide ceramics sintering standard after the forcing press compacting, just formed the ceramic supporting rod with metal inside that the designed a kind of travelling wave tube of the present invention is used after sintering.
In the present embodiment, the coefficient of linear expansion of beryllium oxide ceramics is about 7.5 * 10 in 20-400 ℃ of scope
-6/ ℃, Young's modulus is 3 * 10
11n/m^2, Poisson's ratio is 0.3, rupture strength is 137N/mm^2; The coefficient of linear expansion of iron nickel cobalt magnetic involution gold 4J34 is about 6.29 * 10 in 20-400 ℃ of scope
-6/ ℃, Young's modulus is 1.568 * 10
11n/m^2, Poisson's ratio is 0.3, rupture strength is 539N/mm^2.Known, the coefficient of linear expansion of niberlox and iron nickel cobalt magnetic involution gold 4J34's is approximate, but the rupture strength of iron nickel cobalt magnetic involution gold 4J34 is niberlox 3.93 times, therefore a kind of travelling wave tube of the present invention use with the ceramic supporting rod of metal inside and comparing than conventional oxidation beryllium supporting rod, there is larger rupture strength, therefore when the assembling of slow wave structure, be not easy fracture.
Embodiment bis-
It is all circular configuration that present embodiment be take the cross section of ceramic supporting rod and metal inside, and the central authorities that metal inside is positioned at ceramic supporting rod are example, and wherein the material of ceramic supporting rod is aluminium oxide, and the material of metal inside is iron nickel cobalt magnetic involution gold 4J33.Radius * the length of circular recess is 4 * 100mm; Radius * the length of round ceramic supporting rod is 4 * 100mm; Radius * the length of circular metal inner core cross section is 2 * 100mm.Plate respectively thick copper layer and the titanium layer of one deck 10 μ m on the surface of metal inside, then bonding jumper is fixed on to the central authorities of groove, and fill the aluminium oxide ceramics powder in groove, carry out sintering by normal Alumina Ceramics Sintering standard after the forcing press compacting, just formed the ceramic supporting rod with metal inside that the designed a kind of travelling wave tube of the present invention is used after sintering.
In the present embodiment, the coefficient of linear expansion of aluminium oxide ceramics is about 7.01 * 10 in 20-400 ℃ of scope
-6/ ℃, Young's modulus is 3.6 * 10
11n/m^2, Poisson's ratio is 0.3, rupture strength is 323N/mm^2; The coefficient of linear expansion of iron nickel cobalt magnetic involution gold 4J33 is about 6.06 * 10 in 20-400 ℃ of scope
-6/ ℃, Young's modulus is 1.764 * 10
11n/m^2, Poisson's ratio is 0.3, rupture strength is 539N/mm^2.Known, the coefficient of linear expansion of alumina ceramic material and iron nickel cobalt magnetic involution gold 4J33's is approximate, but the rupture strength of iron nickel cobalt magnetic involution gold 4J33 is niberlox 1.67 times, therefore a kind of travelling wave tube of the present invention use with the ceramic supporting rod of metal inside and comparing than conventional aluminium oxide supporting rod, there is larger rupture strength, therefore when the assembling of slow wave structure, be not easy fracture.
" embodiment " that spoken of in this manual, " another embodiment ", " embodiment " etc., refer to specific features, structure or the characteristics described in conjunction with this embodiment, is included at least one embodiment of the application's generality description.In specification, a plurality of local appearance statement of the same race is not necessarily to refer to same embodiment.Furthermore, while in conjunction with arbitrary embodiment, describing a specific features, structure or characteristics, what advocate is to realize also falling within the scope of the invention of this feature, structure or characteristics in conjunction with other embodiment.
Although with reference to a plurality of explanatory embodiment of the present invention, invention has been described here, but, be construed as those skilled in the art and can design a lot of other modification and execution modes, these are revised and within execution mode will drop on the disclosed principle scope and spirit of the application.In particular, in the scope of the disclosed specification, drawings and the claims of the application, can carry out multiple modification and improvement to building block and/or the layout of subject combination layout.Except modification that building block and/or layout are carried out with improving, to those skilled in the art, other purposes will be also obvious.
Claims (9)
1. the preparation method of a travelling wave tube pottery supporting rod, is characterized in that, comprises the following steps:
At first at the outer surface of metal inside plating layer of metal or alloy-layer, as any in nickel, copper, Ag-Cu alloy, gold-copper alloy or germanium-copper alloy,
And then at the outer surface of metal or alloy layer plating one deck reactive metal, as any in titanium, zirconium, tantalum or niobium;
The metal inside that outer surface is coated with to metal level is fixed on the inside of the mould of press ceramic supporting rod;
Fill up ceramic material in the mould of press ceramic supporting rod, and start the compacting of ceramic supporting rod, pressing pressure is at 20-30MPa, and the press time is 15-25 minute;
The ceramic supporting rod suppressed is placed in the high temperature of 1500 ℃-1700 ℃ to sintering 2-4 hour, obtains ceramic supporting rod finished product.
2. the preparation method of a kind of travelling wave tube pottery supporting rod according to claim 1, it is characterized in that: the coefficient of linear expansion of described metal inside is identical with the coefficient of linear expansion of described ceramic material or close.
3. the preparation method of a kind of travelling wave tube pottery supporting rod according to claim 1, it is characterized in that: the material of described metal inside is the low bulk metal, as iron nickel cobalt magnetic involution gold 4J33 or 4J34.
4. the preparation method of a kind of travelling wave tube pottery supporting rod according to claim 1 is characterized in that: described ceramic material is a kind of in beryllium oxide ceramics, boron nitride ceramics, aluminium oxide ceramics.
5. the preparation method of a kind of travelling wave tube pottery supporting rod according to claim 1, the shape of cross section of described ceramic supporting rod is a kind of in rectangle, circle, fan-shaped, trapezoidal, isosceles triangle; The shape of cross section of described metal inside is a kind of in the rectangle identical with ceramic supporting rod shape of cross section, circle, fan-shaped, trapezoidal, isosceles triangle.
6. travelling wave tube pottery supporting rod, it is characterized in that: comprise metal inside and be positioned at the outer ceramic material layer of metal inside, the coefficient of linear expansion of described metal inside is identical with the coefficient of linear expansion of described ceramic material or close, and the outer surface of described metal inside is provided with at least one deck reactive metal layer.
7. travelling wave tube according to claim 6 pottery supporting rod, it is characterized in that: the material of described metal inside is the low bulk metal, as iron nickel cobalt magnetic involution gold 4J33 or 4J34.
8. travelling wave tube according to claim 6 pottery supporting rod is characterized in that: described ceramic material is a kind of in beryllium oxide ceramics, boron nitride ceramics, aluminium oxide ceramics.
9. travelling wave tube according to claim 6 pottery supporting rod is characterized in that: the shape of cross section of described ceramic supporting rod is a kind of in rectangle, circle, fan-shaped, trapezoidal, isosceles triangle; The shape of cross section of described metal inside is a kind of in the rectangle identical with ceramic supporting rod shape of cross section, circle, fan-shaped, trapezoidal, isosceles triangle.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310408224.1A CN103474312B (en) | 2013-09-09 | 2013-09-09 | A kind of travelling-wave tube supporting rod and preparation method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310408224.1A CN103474312B (en) | 2013-09-09 | 2013-09-09 | A kind of travelling-wave tube supporting rod and preparation method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103474312A true CN103474312A (en) | 2013-12-25 |
CN103474312B CN103474312B (en) | 2016-08-10 |
Family
ID=49799116
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310408224.1A Expired - Fee Related CN103474312B (en) | 2013-09-09 | 2013-09-09 | A kind of travelling-wave tube supporting rod and preparation method thereof |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103474312B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114538933A (en) * | 2020-11-24 | 2022-05-27 | 娄底市安地亚斯电子陶瓷有限公司 | Method for manufacturing travelling wave tube clamping rod |
CN114864360A (en) * | 2022-05-17 | 2022-08-05 | 电子科技大学 | Ultra-wideband helix traveling wave tube and helix slow wave structure thereof |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4264842A (en) * | 1977-10-28 | 1981-04-28 | Elettronica S.P.A. | Helix type traveling-wave tubes with auxiliary selective shielding provided by conductive elements applied upon dielectric supports |
CN1088898A (en) * | 1992-12-28 | 1994-07-06 | 有限会社亚道陶瓷研究所 | Ceramic sintered products with metallic bones |
EP0702388A1 (en) * | 1994-08-17 | 1996-03-20 | Kabushiki Kaisha Toshiba | Slow-wave circuit assembly for traveling-wave tube and method of manufacturing a slow-wave circuit assembly |
JP2000215819A (en) * | 1999-01-22 | 2000-08-04 | Nec Corp | Traveling wave tube |
CN1281235A (en) * | 1999-07-12 | 2001-01-24 | 三菱电机株式会社 | Insulated operating rod and its manufacturing method |
US20060097669A1 (en) * | 2004-11-08 | 2006-05-11 | Nec Microwave Tube, Ltd. | Electron tube |
CN101533750A (en) * | 2009-04-27 | 2009-09-16 | 安徽华东光电技术研究所 | Effective radiator structure of millimeter wave traveling wave tube slow-wave system with wide frequency band and realizing method thereof |
-
2013
- 2013-09-09 CN CN201310408224.1A patent/CN103474312B/en not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4264842A (en) * | 1977-10-28 | 1981-04-28 | Elettronica S.P.A. | Helix type traveling-wave tubes with auxiliary selective shielding provided by conductive elements applied upon dielectric supports |
CN1088898A (en) * | 1992-12-28 | 1994-07-06 | 有限会社亚道陶瓷研究所 | Ceramic sintered products with metallic bones |
EP0702388A1 (en) * | 1994-08-17 | 1996-03-20 | Kabushiki Kaisha Toshiba | Slow-wave circuit assembly for traveling-wave tube and method of manufacturing a slow-wave circuit assembly |
JP2000215819A (en) * | 1999-01-22 | 2000-08-04 | Nec Corp | Traveling wave tube |
CN1281235A (en) * | 1999-07-12 | 2001-01-24 | 三菱电机株式会社 | Insulated operating rod and its manufacturing method |
US20060097669A1 (en) * | 2004-11-08 | 2006-05-11 | Nec Microwave Tube, Ltd. | Electron tube |
CN101533750A (en) * | 2009-04-27 | 2009-09-16 | 安徽华东光电技术研究所 | Effective radiator structure of millimeter wave traveling wave tube slow-wave system with wide frequency band and realizing method thereof |
Non-Patent Citations (2)
Title |
---|
王洪潇: "氧化铝陶瓷与金属活性封接技术研究", 《中国优秀硕士学位论文全文数据库工程科技Ⅰ辑》 * |
肖清等: "V波段宽带螺旋线行波管的模拟研究", 《中国电子学会真空电子学分会第十九届学术年会论文集(上册)》 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114538933A (en) * | 2020-11-24 | 2022-05-27 | 娄底市安地亚斯电子陶瓷有限公司 | Method for manufacturing travelling wave tube clamping rod |
CN114538933B (en) * | 2020-11-24 | 2022-11-22 | 娄底市安地亚斯电子陶瓷有限公司 | Method for manufacturing travelling wave tube clamping rod |
CN114864360A (en) * | 2022-05-17 | 2022-08-05 | 电子科技大学 | Ultra-wideband helix traveling wave tube and helix slow wave structure thereof |
Also Published As
Publication number | Publication date |
---|---|
CN103474312B (en) | 2016-08-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103094646B (en) | Substrate integration waveguide load dielectric resonator filter | |
CN103474312A (en) | Traveling-wave tube clamping rod and manufacturing method thereof | |
CN112259939A (en) | Waveguide energy transmission window capable of inhibiting ghost mode oscillation and manufacturing method thereof | |
JP2011061290A (en) | Microstrip line-waveguide converter | |
CN103354199B (en) | One adds ridge microstrip line plane slow wave structure | |
CN110431920B (en) | Component for controlling electromagnetic field | |
CN203573934U (en) | Ceramic clamping rod for travelling wave tube | |
CN201838555U (en) | High-frequency window applying molybdenum-copper-nickel alloy | |
CN110190366B (en) | Miniaturized sectional waveguide ferrite phase shifter | |
CN102721707B (en) | Device for measuring LTCC shrinkage and dielectric constant | |
CN103474806B (en) | Preparation method for millimeter wave signal transmission terminal applying low-loss ceramics | |
Tan et al. | Measurement of relative permittivity of LTCC ceramic at different temperatures | |
CN102509820A (en) | Transverse electromagnetic (TEM)-mode coaxial dielectric ceramic filter and manufacturing method for same | |
CN105355527A (en) | Frame-pole slow-wave structure | |
JP4035024B2 (en) | Dielectric constant measurement method | |
CN102306599A (en) | Curved ridge-loading rectangular slot waveguide slow wave line | |
CN102543632A (en) | Energy transfer window used for X band space traveling wave tube | |
CN103414006A (en) | Ultra-thin passive wireless acoustic surface wave sensor | |
CN103681174B (en) | A kind of flat multi-level depressurization collector | |
Kory et al. | Microfabricated 94 GHz TWT | |
EP3555952B1 (en) | Method for making a composite substrate circulator component | |
CN207265226U (en) | The substrate of high radiation efficiency integrates medium resonator antenna array | |
CN112670692A (en) | Integral untwistable terahertz soft waveguide structure and preparation method thereof | |
CN101281848A (en) | Method and apparatus for eliminating high power case-shaped output window ghost mode | |
CN201918352U (en) | Slow wave system structure for helixes |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160810 Termination date: 20210909 |