CN1276072A - 微型机电集成控制系统 - Google Patents

微型机电集成控制系统 Download PDF

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Publication number
CN1276072A
CN1276072A CN 98809689 CN98809689A CN1276072A CN 1276072 A CN1276072 A CN 1276072A CN 98809689 CN98809689 CN 98809689 CN 98809689 A CN98809689 A CN 98809689A CN 1276072 A CN1276072 A CN 1276072A
Authority
CN
China
Prior art keywords
data
equipment
sensor
command signal
manager
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN 98809689
Other languages
English (en)
Chinese (zh)
Inventor
斯特凡·A·德斯赫雷弗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STEFAAN A DE SCHRIJVER
Original Assignee
STEFAAN A DE SCHRIJVER
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STEFAAN A DE SCHRIJVER filed Critical STEFAAN A DE SCHRIJVER
Publication of CN1276072A publication Critical patent/CN1276072A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G05B19/0423—Input/output
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/21—Pc I-O input output
    • G05B2219/21005—Several slave modules connected to same I-O of master, multiplexed by master
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25093—During start, integration into machine, send module functionality to scheduler
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25187—Transmission of signals, medium, ultrasonic, radio
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25192—Infrared
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25232—DCS, distributed control system, decentralised control unit
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25323—Intelligent modules

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
CN 98809689 1997-08-07 1998-08-07 微型机电集成控制系统 Pending CN1276072A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US5495197P 1997-08-07 1997-08-07
US60/054,951 1997-08-07

Publications (1)

Publication Number Publication Date
CN1276072A true CN1276072A (zh) 2000-12-06

Family

ID=21994579

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 98809689 Pending CN1276072A (zh) 1997-08-07 1998-08-07 微型机电集成控制系统

Country Status (6)

Country Link
EP (1) EP1012683A2 (fr)
JP (1) JP2001512865A (fr)
CN (1) CN1276072A (fr)
AU (1) AU9197198A (fr)
CA (1) CA2299507A1 (fr)
WO (1) WO1999008168A2 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7565220B2 (en) 2006-09-28 2009-07-21 Lam Research Corporation Targeted data collection architecture
US7672747B2 (en) 2000-03-30 2010-03-02 Lam Research Corporation Recipe-and-component control module and methods thereof
US7814046B2 (en) 2006-09-29 2010-10-12 Lam Research Corporation Dynamic component-tracking system and methods therefor
CN101454895B (zh) * 2006-05-22 2012-12-19 弗拉多米尔·瓦格诺夫 半导体输入控制装置
CN104158134A (zh) * 2014-06-30 2014-11-19 江苏德驰电气有限公司 低压母线槽物联插接箱

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6766381B1 (en) 1999-08-27 2004-07-20 International Business Machines Corporation VLSI network processor and methods
US7356580B1 (en) 2000-03-30 2008-04-08 Lam Research Corporation Plug and play sensor integration for a process module
US6892216B2 (en) 2001-02-13 2005-05-10 Snap-On Incorporated Common platform for use in automotive services
EP2204703A1 (fr) * 2008-12-23 2010-07-07 Siemens Aktiengesellschaft Procédé de fonctionnement amélioré d'un système automatique industriel et dispositifs correspondants
JP5445904B2 (ja) * 2009-03-05 2014-03-19 横河電機株式会社 動作状態監視装置およびこれを用いた動作状態監視システム
JP2016126705A (ja) * 2015-01-08 2016-07-11 三菱日立パワーシステムズ株式会社 制御システム、制御方法およびプログラム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4734909A (en) * 1982-03-08 1988-03-29 Sperry Corporation Versatile interconnection bus
US5553220A (en) * 1993-09-07 1996-09-03 Cirrus Logic, Inc. Managing audio data using a graphics display controller
US5717737A (en) * 1995-06-01 1998-02-10 Padcom, Inc. Apparatus and method for transparent wireless communication between a remote device and a host system

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7672747B2 (en) 2000-03-30 2010-03-02 Lam Research Corporation Recipe-and-component control module and methods thereof
CN101454895B (zh) * 2006-05-22 2012-12-19 弗拉多米尔·瓦格诺夫 半导体输入控制装置
US7565220B2 (en) 2006-09-28 2009-07-21 Lam Research Corporation Targeted data collection architecture
US7814046B2 (en) 2006-09-29 2010-10-12 Lam Research Corporation Dynamic component-tracking system and methods therefor
US8010483B2 (en) 2006-09-29 2011-08-30 Lam Research Corporation Component-tracking system and methods therefor
US8295963B2 (en) 2007-03-29 2012-10-23 Lam Research Corporation Methods for performing data management for a recipe-and-component control module
CN104158134A (zh) * 2014-06-30 2014-11-19 江苏德驰电气有限公司 低压母线槽物联插接箱

Also Published As

Publication number Publication date
WO1999008168A2 (fr) 1999-02-18
EP1012683A2 (fr) 2000-06-28
AU9197198A (en) 1999-03-01
JP2001512865A (ja) 2001-08-28
CA2299507A1 (fr) 1999-02-18
WO1999008168A3 (fr) 1999-04-29

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SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication