AU9197198A - Micro-electro-mechanical integrated control systems - Google Patents

Micro-electro-mechanical integrated control systems

Info

Publication number
AU9197198A
AU9197198A AU91971/98A AU9197198A AU9197198A AU 9197198 A AU9197198 A AU 9197198A AU 91971/98 A AU91971/98 A AU 91971/98A AU 9197198 A AU9197198 A AU 9197198A AU 9197198 A AU9197198 A AU 9197198A
Authority
AU
Australia
Prior art keywords
electro
micro
control systems
integrated control
mechanical integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU91971/98A
Inventor
Stefaan A. De Schrijver
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STEFAAN A DE SCHRIJVER
Original Assignee
STEFAAN A DE SCHRIJVER
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STEFAAN A DE SCHRIJVER filed Critical STEFAAN A DE SCHRIJVER
Publication of AU9197198A publication Critical patent/AU9197198A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G05B19/0423—Input/output
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/21—Pc I-O input output
    • G05B2219/21005—Several slave modules connected to same I-O of master, multiplexed by master
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25093—During start, integration into machine, send module functionality to scheduler
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25187—Transmission of signals, medium, ultrasonic, radio
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25192—Infrared
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25232—DCS, distributed control system, decentralised control unit
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25323—Intelligent modules

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
AU91971/98A 1997-08-07 1998-08-07 Micro-electro-mechanical integrated control systems Abandoned AU9197198A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US5495197P 1997-08-07 1997-08-07
US60054951 1997-08-07
PCT/US1998/016490 WO1999008168A2 (en) 1997-08-07 1998-08-07 Micro-electro-mechanical integrated control systems

Publications (1)

Publication Number Publication Date
AU9197198A true AU9197198A (en) 1999-03-01

Family

ID=21994579

Family Applications (1)

Application Number Title Priority Date Filing Date
AU91971/98A Abandoned AU9197198A (en) 1997-08-07 1998-08-07 Micro-electro-mechanical integrated control systems

Country Status (6)

Country Link
EP (1) EP1012683A2 (en)
JP (1) JP2001512865A (en)
CN (1) CN1276072A (en)
AU (1) AU9197198A (en)
CA (1) CA2299507A1 (en)
WO (1) WO1999008168A2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7565220B2 (en) 2006-09-28 2009-07-21 Lam Research Corporation Targeted data collection architecture
US7672747B2 (en) 2000-03-30 2010-03-02 Lam Research Corporation Recipe-and-component control module and methods thereof
US7814046B2 (en) 2006-09-29 2010-10-12 Lam Research Corporation Dynamic component-tracking system and methods therefor

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6766381B1 (en) 1999-08-27 2004-07-20 International Business Machines Corporation VLSI network processor and methods
US7356580B1 (en) * 2000-03-30 2008-04-08 Lam Research Corporation Plug and play sensor integration for a process module
US6892216B2 (en) * 2001-02-13 2005-05-10 Snap-On Incorporated Common platform for use in automotive services
KR20090033184A (en) * 2006-05-22 2009-04-01 블라디미르 바가노프 Semiconductor input control device
EP2204703A1 (en) * 2008-12-23 2010-07-07 Siemens Aktiengesellschaft Method for improved operating of an industrial automation system and corresponding devices
JP5445904B2 (en) * 2009-03-05 2014-03-19 横河電機株式会社 Operating state monitoring device and operating state monitoring system using the same
CN104158134A (en) * 2014-06-30 2014-11-19 江苏德驰电气有限公司 Low-voltage bus duct IOT (Internet of Things) plug box
JP2016126705A (en) * 2015-01-08 2016-07-11 三菱日立パワーシステムズ株式会社 Control system, control method and program

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4734909A (en) * 1982-03-08 1988-03-29 Sperry Corporation Versatile interconnection bus
US5553220A (en) * 1993-09-07 1996-09-03 Cirrus Logic, Inc. Managing audio data using a graphics display controller
US5717737A (en) * 1995-06-01 1998-02-10 Padcom, Inc. Apparatus and method for transparent wireless communication between a remote device and a host system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7672747B2 (en) 2000-03-30 2010-03-02 Lam Research Corporation Recipe-and-component control module and methods thereof
US7565220B2 (en) 2006-09-28 2009-07-21 Lam Research Corporation Targeted data collection architecture
US7814046B2 (en) 2006-09-29 2010-10-12 Lam Research Corporation Dynamic component-tracking system and methods therefor
US8010483B2 (en) 2006-09-29 2011-08-30 Lam Research Corporation Component-tracking system and methods therefor
US8295963B2 (en) 2007-03-29 2012-10-23 Lam Research Corporation Methods for performing data management for a recipe-and-component control module

Also Published As

Publication number Publication date
WO1999008168A2 (en) 1999-02-18
WO1999008168A3 (en) 1999-04-29
EP1012683A2 (en) 2000-06-28
CA2299507A1 (en) 1999-02-18
CN1276072A (en) 2000-12-06
JP2001512865A (en) 2001-08-28

Similar Documents

Publication Publication Date Title
AU1071697A (en) Micro-electro-mechanics systems (mems)
EP0884909A3 (en) Camera control system
AU5261398A (en) Improved microfluidic systems
AU6250998A (en) Mems valve
AU6969298A (en) Microbellows actuator
AU2721597A (en) Self-sealed irrigation system
AU7952398A (en) Control device
AU6629698A (en) Ventilation systems
AU2009299A (en) Turbomachine-driven environmental control system
AU6842898A (en) Integrated dispense system
AU9197198A (en) Micro-electro-mechanical integrated control systems
AU8821298A (en) Remote control system
AU9191198A (en) Actuator
AU7952298A (en) Control device
AU5430099A (en) Environmental control system
AU6930598A (en) Identity systems
AU4891697A (en) Individual mirror control system
AU8136798A (en) Control device
AU2638597A (en) Access control system
AU9175398A (en) Novel control system
AU3715699A (en) Control system
AU2006899A (en) Multi-diaphragm actuator
AUPO445697A0 (en) Manufacturing system
AU5944098A (en) A risk based control system
AUPO685597A0 (en) Respiratory-analysis systems

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase