CN1274980C - Nanometer class ballscrew and driving method thereof - Google Patents
Nanometer class ballscrew and driving method thereof Download PDFInfo
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- CN1274980C CN1274980C CN 03151119 CN03151119A CN1274980C CN 1274980 C CN1274980 C CN 1274980C CN 03151119 CN03151119 CN 03151119 CN 03151119 A CN03151119 A CN 03151119A CN 1274980 C CN1274980 C CN 1274980C
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- ball screw
- screw rod
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- nanometer class
- precision
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Abstract
The present invention discloses a nanometer class ball screw rod and a driving method thereof. The nanometer class ball screw rod is orderly provided with a nanometer class driving component, a screw rod and a ball cylindrical nut and is fixed by a supporting base, wherein the nanometer class driving component is provided with a semiconductor refrigerator and a driving surface and is driven by a driving device. The driving method for the nanometer class ball screw rod comprises the steps that the ball screw rod completes a primary feeding and is cooled by the semiconductor refrigerator, namely that the precision of the primary feeding can be enhanced and the influence of heat generated during the transmission of the screw rod for environment temperature can be reduced; the driving component completes a secondary feeding and the screw rod lengthens or shortens in a nanometer class through the slight variation of the semiconductor refrigerator to control the feeding amount to achieve 10 nm precision. Compared with a ball screw rod with traditional structure, the present invention has the advantages of 10 nm positioning precision, 500kg driving force, simple structure and easy installation.
Description
Technical field
The present invention relates to a kind of nano ball screw.
Background technique
Ball screw pair from 1874 in the U.S.'s existing more than 100 year history that patents so far, development and the production history in more than 40 year are also arranged in China.Its function is from initial " quick economize can transmission " (40～fifties of last century) to " precision positioning " (seventies～), again from " big helical pitch fast driving " (eighties～) to " high speed and precision drivings " (nineties～), the continuous upgrading of product obtains each qualitative leap in this process.The accuracy of manufacturing and the Location accuracy that improve ball screw pair are the unremitting pursue of manufacturing enterprise all the time.The sixties in last century China's precision machine tool unite the tackling key problem established solid foundation for precision machine tool thread grinding technology.Thread grinding Laser feedback lead error Automatic Calibration Technique that Beijing Machine Tool Inst. succeeded in developing in the eighties in last century and the great lead ball lead screw pair of finishing the latter stage eighties " the Seventh Five-Year Plan " tackling key problem, the grinding accuracy of circular arc screw thread finds effective technology approach inside and outside the big angle of lead in order to improve.The enforcement period of the ninth five-year plan the Hanjiang lathe Co., Ltd. totally-enclosed CNC lead screw grinding machine of SK7432 type 2m, HJ031 type CNC ball nut grinding machine, SK7450 type 5m Large CNC lead screw grinding machine of succeeding in developing is for the development of high speed and precision ball screw pair provides the critical process equipment.The gap of China and industrially-advanced country's thread grinding technical merit is convergence just day by day, and ball screw pair improves the alignment technique of Location accuracy in the CNC servo feed system also constantly perfect.
The high speed and precision ball screw pair is as the mechanical transmission of " rollingization ", though many characteristics that are better than pyrotechnical actuator are arranged, its Location accuracy, actuating speed, adds (subtracting) speed a physics limit is arranged.For this reason, relevant manufactory constantly takes measures both at home and abroad, improves the high speed performance of ball screw.Major measure has: (1) suitably strengthens rotating speed, helical pitch and the number of starts of ball screw, and the point-to-point speed of ball screw pair is the product of leading screw helical pitch and leading screw rotating speed.It is favourable to strengthening point-to-point speed to improve the leading screw rotating speed, can aggravate temperature rise, thermal distortion, vibration and the noise of lead screw pair but improve rotating speed, and therefore, the raising of leading screw rotating speed has certain restriction.(2) improve structure, improve the fluency of ball motion: improve the ball-recirculation reversing device; Improve the structure of ball nut; " the hollow cold by force " technology of employing (is exactly that the constant temperature cooling liquid is fed in the hole of hollow leading screw, ball screw is forced cooling, keep the constant of ball screw pair temperature.This measure in improving, large-scale ball screw high speed performance and operating accuracy be very effective); Can adopt the kind of drive that leading screw is fixed, nut rotates.(3) further improve the workmanship of ball screw.The high speed ball screw is the mechanical transmission component of a class super high precision, and is not only well-designed, more will make meticulously.From choices of raw materials, heat treatment method, be machined to assembling, all very exquisite.Fine finishing and assembling are generally all carried out at constant temperature workshop, adopt various high-precision processing and testing apparatus (as high precision numerical control thread-grinding machine, Laser feedback thread-grinding machine, the comprehensive journey error detector of ball screw pair, give tight torque measurer etc.) to make, also can use Error Compensation Technology further to improve the operating accuracy of ball screw pair.
Nowadays to realize that high speed feed can adopt: ball screw; Linear electric motor; The parallel virtual axis mechanism.Generally speaking, ball screw is after speed up improves, in can continuing on for, low-grade high-speed machine tool.High-grade and medium-to-high grade high-speed machining center and Ultra-High Speed Machine Tools should first-selected linear electric motor, it and electric main shaft together, " zero transmission " of round Realization high-speed numeric control lathe.With the novel feeding system of parallel virtual axis mechanism as the high-speed numeric control lathe, relate to the fundamental change of whole machine arrangement, the problem more complicated can only progressively advance.
Summary of the invention
The purpose of this invention is to provide a kind of nano ball screw.
Nano ball screw has nanometer driver part, leading screw, ball cylindrical nut successively, and is fixed by supporting base, is provided with semiconductor cooler, drive surface on the nanometer driver part, and the nanometer driver part is driven by drive unit.Drive unit is made up of inductance probe, microprocessor, power supply, amount of feed setting device, demonstration, printer, semiconductor power amplifier, semiconductor cooler and leading screw, wherein microprocessor joins with power supply, amount of feed setting device, demonstration, printer, semiconductor power amplifier, inductance probe respectively, and semiconductor power amplifier and semiconductor cooler, leading screw join.
Advantage of the present invention:
1) one-level, secondary feeding are integrated.Coarse feed is finished in the one-level feeding, and fast near moving target, the secondary feeding is finished by the nanometer driver part, and the control amount of feed reaches the 10nm precision, the driving force of 500kg.The two can move step by step, also concurrently-acting.
2) heat radiation is integrated with compensation.At the ultraprecise manufacture field, the error that is caused by thermal distortion accounts for total machining error 40%～70%, produce a large amount of heats during the ball screw running, the innovative idea of nanometer driver part is to change in the conventional method thermal distortion passive is compensated for as initiatively feeding, just be based on this thought, the principle of driver part is that the variation by thermal source or low-temperature receiver power comes the controlled deformation body to reach nano level feeding.Adopt this configured balls leading screw that nanometer driver part and ball screw are combined together, by semiconductor cooler leading screw is lowered the temperature during the one-level feeding, promptly can improve the influence of the heat that produces when the one-level feed precision can reduce lead screw transmission again to ambient temperature, during the secondary feeding, make the growth of length nanometer or the shortening of leading screw by the faint variation of semiconductor cooler power.
3) have fewer environmental impacts.Because of adopting the secondary feed mechanism, the second level is nanometer, and the amount of feed is less, and is longer relatively because of ball screw again, so only need the power of faint change semiconductor cooler, just can realize the nanometer feeding.
4) simple in structure, easy for installation.Not needing to do structural modification for existing ball screw application can use.
Description of drawings
Fig. 1 is the tomograph of nano ball screw;
Fig. 2 is the tomograph of the ball screw of end driving;
Fig. 3 is that the secondary feed drive unit constitutes block diagram;
Fig. 4 is applied to grinding machine structural principle sketch; Among the figure: nanometer driver part 1, leading screw 2, ball
11, grinding head body 12, emery wheel 13, part to be processed 14, heat insulation device 15.
Embodiment
Nano ball screw has nanometer driver part 1, leading screw 2, ball cylindrical nut 3 successively, and fixing by supporting base 4, is provided with semiconductor cooler 5, drive surface 6 on nanometer driver part 1, and nanometer driver part 1 is driven by drive unit.Drive unit is made up of microprocessor, power supply, amount of feed setting device, demonstration, printer, semiconductor power amplifier, semiconductor cooler and leading screw, wherein microprocessor joins with power supply, amount of feed setting device, demonstration, printer, semiconductor power amplifier respectively, and semiconductor power amplifier and semiconductor cooler, leading screw join.
1. nanometer driver part
Carried out the theoretical validation of key technology before the test: because metallic material generally has bigger compressive strength, so the nanometer driver part that is applied to test can be served as by different metallic material, thermal source is a semiconductor cooler, only needs to change the purpose that voltage just can change its heating and freeze and control the amount of feed to reach.Apply big driving force device in the laboratory and adopt the lever principle design, can apply different feed forces such as 50kg, 100kg, 150kg, 200kg, 250kg, 500kg.
The driver part metallic material is 45#, thermal capacity c=486, thermal conductivity λ=45, density p=7753, heat exchange coefficient α=100, linear expansion coeffcient α
t=0.00001159, the testing program framework is made up of nanometer driver part, augmentor, highi degree of accuracy inductance probe, WS16PC-VH sampling interface card, detection and control computer, drive system, the actuator based on deformable body.Highi degree of accuracy inductance probe resolution is 2nm, and range is 80 μ m.
2. integrated ball screw
The manufacturing of ball screw pair: diameter 80mm, helical pitch 10mm, precision 0.05mm/300mm, reach 1500m, leading screw total length 2500mm, wherein nanometer driver part cross section is a square (40 * 40mm), its symmetry center overlaps with the center of leading screw, as shown in Figure 1.The material of ball screw is a cf-53 quenching and tempering hardness steel, and surface hardness reaches HRC58-62, and place, axle center and ball screw two ends are through quenching with Subsequent tempering; The material of ball nut is 16MnCr5, and the back device is an inner loop mode.(leading screw and nut can be selected other material) double nut adopts pin pretension or pad pretension.Fig. 2 is the structural drawing that an end drives, and wherein semiconductor cooler is circular.
The processing technology of ball screw: scheme one, car-mill-quench-roughly grind-finish grind;
Scheme two roll-is milled-quench-grind (being fit to save man-hour and expense in enormous quantities).
Test is carried out on the vibration isolation table of thermostatic chamber, adopts to control based on the bimodal control strategy of monodrome model algorithm, has verified that by a large amount of test result the precision that can control the amount of feed when 1.2 ℃ of the temperature variation is 10nm.
To sum up, adopt and control, two kinds of structures illustrated in figures 1 and 2 have been carried out a large amount of tests, all obtained nano level control effect based on the bimodal control strategy of monodrome model algorithm.Sum up the characteristics of this structure: (1) all has long retard time the incipient stage in heating, has tangible retardation phenomenon, so should be avoided in this stage during the work of nanometer driver part; (2) speed of response of driver part is slower, therefore adopts secondary feeding scheme for improving feeding efficient; (3) shorten greatly the retard time of working stage, this is one of reason that can reach the nanometer feed accuracy with roughing feed power.Just being based at above 3 has determined the present invention to have broad application prospects in the less demanding quasistatic drive unit of speed of response requiring to have the nano grade positioning precision of roughing feed power.
3. application example
This ball screw is applied to the feeding that surface grinding machine is finished the Z direction, and the nanometer driver part can be worked after the deformable body temperature field reaches balance, and work this moment longer relatively stand-by period; Also can be operated in the lack of equilibrium stage, Fig. 4 is the structural principle sketch that is applied to surface grinding machine.
Working principle: still guarantee the working principle of original grinding machine, just replaced original ball screw with the new pattern rolling ball leading screw.
Working procedure: workpiece is fixed on the work stage, drives grinding head body fast near workpiece,, stop the one-level feeding, start the nanometer driver part, the nanometer positioning precision that reaches when emery wheel during soon near workpiece by the one-level feeding of ball screw.Processing at last.
The definition of (notion differentiation) deformable body: in nanometer driver part experimental stage, deformable body is exactly a testpieces.Feeding is called ball screw to integrated back ball screw at the first order, and is referred to as deformable body at second level feeding, and semiconductor cooler elongates or shortens the leading screw nanometer by heating and the refrigeration to whole ball screw.
Claims (1)
1. nano ball screw, it is characterized in that it has nanometer driver part (1) successively, leading screw (2), ball cylindrical nut (3), and it is fixing by supporting base (4), on nanometer driver part (1), be provided with semiconductor cooler (5), drive surface (6), nanometer driver part (1) is driven by drive unit, drive unit is by inductance probe, microprocessor, power supply, amount of feed setting device, show, printer, semiconductor power amplifier, semiconductor cooler and leading screw are formed, wherein microprocessor respectively with power supply, amount of feed setting device, show, printer, semiconductor power amplifier, inductance probe joins, semiconductor power amplifier and semiconductor cooler, leading screw joins.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03151119 CN1274980C (en) | 2003-09-16 | 2003-09-16 | Nanometer class ballscrew and driving method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03151119 CN1274980C (en) | 2003-09-16 | 2003-09-16 | Nanometer class ballscrew and driving method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1525085A CN1525085A (en) | 2004-09-01 |
| CN1274980C true CN1274980C (en) | 2006-09-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03151119 Expired - Fee Related CN1274980C (en) | 2003-09-16 | 2003-09-16 | Nanometer class ballscrew and driving method thereof |
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| CN (1) | CN1274980C (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8666534B2 (en) * | 2006-03-02 | 2014-03-04 | Mikron Agie Charmilles Ag | Method and apparatus for a displacement correction for a machine tool |
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2003
- 2003-09-16 CN CN 03151119 patent/CN1274980C/en not_active Expired - Fee Related
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| CN1525085A (en) | 2004-09-01 |
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