CN1272600C - Phase differential nonsensitive counting method and device for node tracking mohr interference fringe signals - Google Patents
Phase differential nonsensitive counting method and device for node tracking mohr interference fringe signals Download PDFInfo
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Abstract
The present invention relates to a counting subdivision method for cross point tracking type moire (interference) fringe signals which are not sensitive to phase difference. The present invention is characterized in that 1) segmentation is carried out for a signal period in a floating mode according to the polarity and the cross points of two paths of signals; 2) the peak value and the zero level value of the two paths of signals are tracked; 3) the cross points of the two paths of signals are tracked in a floating mode; 4) counting is carried out; 5) subdivision is carried out; 6) a large number is corrected; 7) the direction of the displacement of a moire fringe is changed. A device comprises an operational amplifier, an analog-digital conversion chip, a digital signal processor, a single-chip microcomputer, a decoder and a liquid crystal display, wherein the operational amplifier is connected with the digital signal processor by the analog-digital conversion chip; the digital signal processor is simultaneously connected with the single-chip microcomputer and the decoder; the single-chip microcomputer is connected with the liquid crystal display. The defects of the DC level shift of signals, the unequal amplitude values of the two paths of signals, the influence of the counting and the subdivision caused by the nonlinearity of the signals and no orthogonality of the signals can be simultaneously overcome by the present invention; besides, the counting errors can be eliminated. Without the orthogonality of the signals, accurate counting subdivision and accurate direction recognition can be realized.
Description
Technical field:
The present invention relates to a kind of Technology of Precision Measurement, be specifically related to a kind of optics More (interference) the striped photosignal that departs from quadrature be carried out correct sensing and counting segmentation with the method for carrying out precision measurement and by the designed device of this method.
Background technology:
Ultraprecision Machining is to adapt to the needs of modern sophisticated technology and a kind of new technology of growing up, is the very important bases of technology such as Aeronautics and Astronautics, electronics, atomic energy, machinery, instrument, has important effect in the manufacturing of modern weapons.And the stripe measurement technology of utilizing More's (interference) striped to realize that accurate displacement is measured is a kind of technology that purposes is the most extensive, use is the most ripe in the ultraprecise processing.More's (interference) striped is meant light and dark optical stripe.After the laboratory, Edinburg of nineteen fifty-three Britain Ferranti company has been set up first and has been utilized the work model machine of Moire fringe (Moir é Fringe) Displacement Measurement, having occurred many kinds successively utilizes More's (interference) striped to come the optical system of precision measurement displacement, its principle is: when measured target produces certain displacement, optical system can produce proportional a string More (interference) striped, measure the digital display circuit to complete cycle signal count, segment still not constituting the signal of a complete cycle, obtain accurate displacement jointly by count value and segmentation value then.For example, when a signal period was represented 1 μ m, if the signal-count value is 500, the segmentation fragment values was 0.32 signal period, and so total displacement is 500.32 μ m.Yet, in the prior art, the counting of More's (interference) striped and the segmentation of high multiple are all based on the two-way orthogonal signal, when two paths of signals departs from orthogonal state, not only can cause subdivision error, reduce the segmentation multiple, and the correctly situation of sensing also can occur displacement less than a signal period.In addition, the existing conventional counting method, can correctly be counted when mobile at the Moire fringe folk prescription, and when the situation of movement more complicated of Moire fringe, will lose number or count phenomenon more.
Summary of the invention:
Technical matters to be solved by this invention is the defective that overcomes above-mentioned prior art, provides a kind of to the insensitive intersection point tracking mode of phase differential More (interference) stripe signal count fine separating method.
Technical matters of the present invention is to solve by following technical scheme.It is characterized in that its method comprises the steps:
(1) polarity and the intersection point by two paths of signals carries out floating type segmentation to the signal period:
According to the amplitude relative size and the polarity of two paths of signals, a signal period is divided into 8 sections, two unit are set then as the intersection point register in digital signal processor, and initialize 0; In the measuring process, the polarity and the amplitude of real-time judge two paths of signals sampled data, calculate the residing section of current sampling point, and compare with the residing section of previous sampled point that buffer memory gets off, at every turn when sampled point enters section 2 by section 1 or enters section 6 by section 5, one that amplitude in the two paths of signals is bigger deposits in the intersection point register, and this value is called intersection I; When sampled point entered section 4 by section 3 or enters section 8 by section 7, one that amplitude in the two paths of signals is bigger deposited in another intersection point register, and this value is called intersection I I; When the phasic difference of two paths of signals changed, the amplitude of intersection I and intersection I I also correspondingly changed, thereby realized the floating type segmentation to a signal period;
(2) unit is set as up-down counter in digital signal processor, and initialize 0, the residing section of previous sampled point that the residing section of current sampling point and buffer memory are got off compares then, do when sampled point enters section 2 by section 1 or enters section 6 by section 5 and once add counting, More's (interference) striped forward moves; Do when sampled point enters section 3 by section 4 or enters section 7 by section 8 and once subtract counting, More's (interference) striped oppositely moves, the every variation one-period of signal, and digital signal processor carries out counting twice;
When (3) beginning to measure, gather two channel datas, respectively it carried out normalization, judge the section of measuring the starting point place according to its polarity and size, with in the current sampled data less one deposit in the starting point register; In the measuring process, gather two channel datas, respectively it is carried out normalization, judge its residing section, and less in its a data buffer memory is advanced in the terminating point register; Simultaneously, follow the tracks of the peak value and the valley of two paths of signals, the intersection point of tracking two paths of signals also is cached in the corresponding registers; Measurement starting point, terminating point and the intersection I, the intersection I I that obtain are mapped to the displacement data table that is stored in advance in the single-chip microcomputer internal memory respectively, obtain the displacement of its amplitude correspondence, again according to the section at starting point and terminating point place, in conjunction with intersection I and intersection I I, calculate the shift value L of a signal period of less than; If the modified value in the up-down counter is N, the displacement equivalent of a signal period representative is d, then current total Displacement Measurement value L
AlwaysComputing formula be: L
Always=Nd/2+L.
The present invention has following technique effect:
1,, can overcome in traditional divided method and differentiate mistake because the two paths of signals phasic difference changes the section that causes by the tracking of floating of the intersection point to the two-way input signal;
2, need not signal in orthogonal, as long as two-way More (interference) the incomplete homophase of striped photosignal or anti-phase, just can realize counting accurately segmentation and correct sensing (comprising) to correct sensing less than a signal period displacement, break through the restriction of the necessary quadrature of traditional count fine separating method two paths of signals, had stronger environmental suitability and antijamming capability;
3, erasure signal DC level drift simultaneously, two paths of signals amplitude do not wait, signal non-linear and the non-orthogonal influence of signal to segmentation, can realize higher segmentation accuracy.
4, the counting dynamic range can reach 0Hz-500KHz, and can handle axial vibrations displacement signal, strong interference immunity;
5, reliability height, segmentation multiple height.
Description of drawings:
Fig. 1 is two-way of the present invention nonopiate signal absolute value waveform and block plan;
Fig. 2 is apparatus of the present invention structured flowchart.
Embodiment:
The present invention realizes that by following step it comprises:
1. polarity and the intersection point by two paths of signals carries out floating type segmentation to the signal period:
As shown in Figure 1, for to correct sensing of input signal and segmentation, a signal period is divided into 8 sections according to table 1.During the two paths of signals quadrature, its intersection point equates that on amplitude the pairing position of each section equates mutually; When two paths of signals was non-orthogonal, the position of intersection I (Fig. 1 mid point A, C or E) and intersection I I (Fig. 1 mid point B or D) changed, and each section also correspondingly stretches or compression.But section 1,2,3,4 length sums and section 5,6,7,8 length sums equate all the time, all corresponding half signal period, and do not change with the variation of two paths of signals phasic difference.
The segmentation of table 1 signal complete cycle
| Sin1 polarity | Sin2 polarity | |Sin1|-|Sin2| | The signal that segmentation is selected for | |
| 1 | + | + | ＜0 | |Sin1| |
| 2 | + | + | ＞0 | |Sin2| |
| 3 | + | - | ＞0 | |Sin2| |
| 4 | + | - | ＜0 | |Sin1| |
| 5 | - | - | ＜0 | |Sin1| |
| 6 | - | - | ＞0 | |Sin2| |
| 7 | - | + | ＞0 | |Sin2| |
| 8 | - | + | ＜0 | |Sin1| |
2. the tracking of two paths of signals peak value and zero level value:
Before measuring beginning, set one section self-check program, allow Moire fringe that displacement greater than one-period is arranged.While high speed acquisition two-way input signal, its peak value and valley under judgement and the buffer memory respectively.Calculate the zero level value and the maximal value of current two-way input signal, the normalization of sampled data in first cycle when being used to measure beginning.In the measuring process, whether moved one-period according to the situation real-time judge signal of big counting number, judge simultaneously and buffer memory under the peak value and the valley of two paths of signals in this cycle, be used for the normalization of sampled data in following one-period.Determine the initial state of signal by self test mode, and in measuring process real-time follow-up two-way input signal peak value and valley, guaranteed floating of signal zero level value, overcome the influence of signal DC level drift to counting and segmentation.
3. the unsteady tracking of two paths of signals intersection point:
Two unit are set as intersection point register I and II in digital signal processor, and initialize 0.In the measuring process, the polarity and the amplitude of real-time judge two-way sampled data are calculated the residing section of current sampling point, and compare with the residing section of previous sampled point that buffer memory gets off.At every turn when sampled point entered section 2 by section 1 or enters section 6 by section 5, one that amplitude in the two paths of signals is bigger deposited intersection point register I in; When sampled point entered section 4 by section 3 or enters section 8 by section 7, one that amplitude in the two paths of signals is bigger deposited intersection point register II in.When the phasic difference of two paths of signals changed, the amplitude of intersection I and intersection I I also correspondingly changed.The real-time floating type tracking of two-way input signal intersection point has overcome phasic difference and has changed the section misjudgment that causes, and guarantees can carry out signal subdivision and sensing accurately when signal departs from quadrature.
4. count:
A unit is set as up-down counter in digital signal processor, and initialize 0, the residing section of previous sampled point that the residing section of current sampling point and buffer memory are got off compares then.Do when sampled point enters section 2 by section 1 or enters section 6 by section 5 and once add counting, the Moire fringe forward moves; Do when sampled point enters section 3 by section 4 or enters section 7 by section 8 and once subtract counting, Moire fringe oppositely moves.Like this, the every variation one-period of signal carries out counting twice.Judge that whether signal enters section by section 13 twice 2 twice or enter section by section 4, if then calculate and upgrade the zero level value by the signal peak of buffer memory and valley.Like this, in counting, realize the floating type tracking of signal zero level value and two paths of signals intersection point, eliminated the counting error that the drift of signal DC level causes, the mistake that causes section to differentiate when also having avoided signal to depart from orthogonal state, and can overcome the influence that near the high frequency components of signal zero crossing brings counting, guarantee big accurately counting number.
5. segmentation:
5.1 when beginning to measure, gather two channel datas, respectively it is carried out normalization, judge the section of measuring the starting point place according to its polarity and size; With in the normalization post-sampling data less one deposit in the starting point register;
5.2 in the measuring process, gather two channel datas, respectively it is carried out normalization, judge its residing section, and less in the data after a normalization buffer memory is advanced in the terminating point register.Follow the tracks of the peak value and the valley of two paths of signals simultaneously, the intersection point of tracking two paths of signals also is cached in the register;
5.3 measurement starting point, terminating point and intersection I, the intersection I I that will obtain table look-up respectively (promptly in advance according to the segmentation multiple, suitable unit is set in microprocessor, a signal period is stored the form of formation in order according to the data that the corresponding relation of amplitude and displacement calculates), obtain the pairing shift value of its amplitude, wherein the shift value L of intersection I amplitude correspondence
FirstThe shift value L of intersection I I amplitude correspondence
SecondThe shift value of starting point amplitude correspondence is L
OriThe shift value of terminating point amplitude correspondence is L
Stp
Suppose that signal period displacement equivalent of representative is d, when starting point at 1 section, terminating point when other section, the following calculating of displacement L of a signal period of less than:
1.. terminating point is when 1 section
L
Stp＞L
OriThe time positive-displacement: L=L
Stp-L
Ori
L
Ori＞L
StpShi Fanxiang displacement: L=L
Ori-L
Stp
2.. terminating point is when 2 sections
During positive-displacement: L=|L
First-L
Ori|+| L
First-L
Stp|
Oppositely during displacement: L=d-(| L
First-L
Ori|+| L
First-L
Stp|)
3.. terminating point is when 3 sections
During positive-displacement: L=|L
First-L
Ori|+L
First+ L
Stp
Oppositely during displacement: L=L
Ori+ d/2+L
Second+ | L
Secondt-L
Stp|)
4.. terminating point is when 4 sections
During positive-displacement: L=|L
First-L
Ori|+d/4+|L
Second-L
Stp|
Oppositely during displacement: L=L
Ori+ d/2+L
Stp
5.. terminating point is when 5 sections
During positive-displacement: L=|L
First-L
Ori|+d/4+L
Second+ L
Stp
Oppositely during displacement: L=L
Ori+ d/4+L
Second+ | L
Second-L
Stp|
6.. terminating point is when 6 sections
During positive-displacement: L=|L
First-L
Ori|+d/2+|L
First-L
Stp|
Oppositely during displacement: L=L
Ori+ 2L
Second+ L
Stp
7.. terminating point is when 7 sections
During positive-displacement: L=|L
First-L
Ori|+d/2+L
First+ L
Stp
Oppositely during displacement: L=L
Ori+ L
Second+ | L
Second-L
Stp|
8.. terminating point is when 8 sections
During positive-displacement: L=d-(L
Ori+ L
Stp)
Oppositely during displacement: L=L
Ori+ L
Stp
When starting point during at other section, similar computing formula is also arranged, do not list one by one.
Starting point and terminating point are got one less in the two-way normalization data, make segmentation can avoid the relatively poor section of the signal linearity; When calculating the displacement of a signal period of less than, adopt look-up table, can effectively overcome the non-linear subdivision error that brings of signal.
6. the correction of big counting number value
The situations of many countings can appear in above-mentioned big counting number in some cases, for example move for forward, if starting point 1 or 8 section, and terminating point will be counted a number at 2 or 3 sections more; If starting point is at 1 or 8 section, and terminating point will be counted two numbers at 6 or 7 sections more.Therefore must revise accordingly big counting number value.Move for forward, have in 64 the situation needs consider according to starting point and terminating point position different; In like manner, for oppositely moving, also exist 64 kinds of situations to need to consider.Through anatomizing, we have provided forward and reverse " Karnaugh map " that is used to revise count value when mobile of signal, shown in table 2 and table 3.
When moving, table 2 signal forward revises " Karnaugh map " of count value
Annotate: in the table 1 " count value subtracts 1 ", with " 1 " expression; " count value subtracts 2 " is with " 2 " expression; To the odd number section " starting point amplitude＞terminating point amplitude, count value subtracts 2; The dual numbers section " starting point amplitude＜terminating point amplitude, count value subtracts 2; Otherwise do not subtract ", with "-" expression; If " not revising count value " is with " X " expression.
When moving, table 3 signal negative sense revises " Karnaugh map " of count value
Annotate: in the table 2 " count value subtracts 1 ", with " 1 " expression; " count value subtracts 2 " is with " 2 " expression; To the odd number section " starting point amplitude＜end point amplitude, count value subtracts 2; Dual numbers section " starting point amplitude＞terminating point amplitude, count value subtracts 2, otherwise does not subtract " otherwise do not subtract ", with "-" expression; If " not revising count value " is with " X " expression.
7. the sensing of More's (interference) stripe displacement
If big counting number value is not 0, then by positive and negative definite sense of displacement of count value.Count value is for just, and displacement is a forward; Count value is for negative, and displacement is a negative sense.
Big counting number value is 0 o'clock, and sense of displacement is judged by measuring starting point and the residing section of terminating point, and is as shown in table 4.If starting point and terminating point are in same section, sense of displacement is judged according to the monotonicity of signal.
The judgement of sense of displacement when the big counting number of table 4 is zero
Annotate: in the table 4 "+", the expression positive-displacement; "-" represents reverse displacement
According to the section at starting point and terminating point place,, calculate the shift value L of a signal period of less than in conjunction with intersection I and intersection I I; If revised big counting number is N as a result, then current total Displacement Measurement value L
AlwaysComputing formula be
L
Always=Nd/2+L
The present invention according to the designed device of said method as shown in Figure 2, it is by operational amplifier 1,2, modulus conversion chip 3,4, digital signal processor 5, single-chip microcomputer 6, code translator 7, LCD 8,40M clock 9 formations such as grade.Wherein operational amplifier 1,2 links to each other with modulus conversion chip 3,4 respectively, and modulus conversion chip 3,4 is AD9225, and its highest sampling rate can reach 20M/s, and they all join with signal processor 5; Digital signal processor 5 is apparatus of the present invention core component, and its arithmetic speed is up to 80MHz, and it links with single-chip microcomputer 6 and code translator 7 simultaneously; Single-chip microcomputer 6 joins with LCD 8 again, shows measurement result in real time.
When More's (interference) striped photosignal Sin1, Sin2 that two-way has certain phasic difference by after the operational amplifier 1,2, be admitted to modulus conversion chip 3,4, analog to digital conversion synchronously under the control of digital signal processor 5, inversion frequency is 5M/s.Digital signal processor 5 calls the sampled data that the Interrupt Process subroutine is obtained two paths of signals after receiving the serial look-at-me.5 pairs of sampled datas of digital signal processor are carried out above-mentioned processing and judgement, calculate the section and the amplitude at current sampling point place, and follow the tracks of two paths of signals peak value and valley, the amplitude of following the tracks of intersection I and intersection I I.Single-chip microcomputer 6 obtains data after digital signal processor 5 calculates by inner direct memory (IDMA) mode of visiting, obtain measuring starting point, terminating point, intersection I and the pairing shift value of intersection I I amplitude by the mode of tabling look-up, carry out sensing, calculating is by the shift value of measuring the signal period of less than that starting point and current sampling point constitute, and big counting number value revised, at last total shift value and sense of displacement are sent to liquid crystal display.Because adopted high speed analog-to-digital conversion chip 3,4 and digital signal processor 5 on the hardware, the dynamic range of system is very wide, can be from 0Hz-500KHz.The maximum data output of this device can reach 40k/s, can satisfy the needs of machining high speed test fully.
In addition, segmentation multiple as requested is different with the modulus conversion chip of selecting for use (ADC) figure place, and the two paths of signals phasic difference limit that this count fine separating method can correctly be handled is different, and is as shown in table 5.If the phasic difference of two paths of signals exceeds this ultimate value, then be subjected to the signal effect of nonlinear more serious, can not realize desired resolution.
The phasic difference limit of the two paths of signals of table 5 segmentation multiple and the decision of ADC figure place
If the segmentation multiple of having relatively high expectations (as 2000 times), the situation in the time of simultaneously can handling two paths of signals again and depart from quadrature (is 1 ° as the two paths of signals phasic difference) on a large scale will be selected the above ADC of 14bit for use.But,,, can guarantee that generally the two paths of signals phasic difference in 90 ° ± 60 °, is not subjected to the signal non-linear effects so can select the modulus conversion chip of lower-order digit for use fully by adjusting light path for actual moire frange signal.
Through actual test, apparatus of the present invention are under 1000 the condition adopting 10Bit analog to digital converter and segmentation multiple, are 20 ° signal sensing correctly, counting and segmentation to the two-way phasic difference, can satisfy the needs of Moire fringe test fully.
The present invention carries out dynamic tracking by the intersection point to the two-way input signal, put residing section according to signal sampling and carry out sensing, counting and segmentation, erasure signal DC level drift simultaneously, two paths of signals amplitude do not wait, two paths of signals is non-orthogonal and the non-linear influence to counting and segmentation of signal, and can handle the axial vibrations displacement signal, have stronger environmental suitability and antijamming capability.
Claims (2)
1, a kind of to the insensitive intersection point tracking mode of phase differential Moire fringe signal-count divided method, it is characterized in that it comprises the steps:
(1) polarity and the intersection point by two paths of signals carries out floating type segmentation to the signal period:
According to the amplitude relative size and the polarity of two paths of signals, a signal period is divided into 8 sections, two unit are set then as the intersection point register in digital signal processor, and initialize 0; In the measuring process, the polarity and the amplitude of real-time judge two paths of signals sampled data, calculate the residing section of current sampling point, and compare with the residing section of previous sampled point that buffer memory gets off, at every turn when sampled point enters section 2 by section 1 or enters section 6 by section 5, one that amplitude in the two paths of signals is bigger deposits in the intersection point register, and this value is called intersection I; When sampled point entered section 4 by section 3 or enters section 8 by section 7, one that amplitude in the two paths of signals is bigger deposited in another intersection point register, and this value is called intersection I I; When the phasic difference of two paths of signals changed, the amplitude of intersection I and intersection I I also correspondingly changed, thereby realized the floating type segmentation to a signal period;
(2) unit is set as up-down counter in digital signal processor, and initialize 0, the residing section of previous sampled point that the residing section of current sampling point and buffer memory are got off compares then, do when sampled point enters section 2 by section 1 or enters section 6 by section 5 and once add counting, the Moire fringe forward moves; Do when sampled point enters section 3 by section 4 or enters section 7 by section 8 and once subtract counting, Moire fringe oppositely moves, the every variation one-period of signal, and digital signal processor carries out counting twice;
When (3) beginning to measure, gather two channel datas, respectively it carried out normalization, judge the section of measuring the starting point place according to its polarity and size, with in the current sampled data less one deposit in the starting point register; In the measuring process, gather two channel datas, respectively it is carried out normalization, judge its residing section, and less in its a data buffer memory is advanced in the terminating point register; Simultaneously, follow the tracks of the peak value and the valley of two paths of signals, the intersection point of tracking two paths of signals also is cached in the corresponding registers; Measurement starting point, terminating point and the intersection I, the intersection I I that obtain are mapped to the displacement data table that is stored in advance in the single-chip microcomputer internal memory respectively, obtain the displacement of its amplitude correspondence, again according to the section at starting point and terminating point place, in conjunction with intersection I and intersection I I, calculate the shift value L of a signal period of less than; If the modified value in the up-down counter is N, the displacement equivalent of a signal period representative is d, then current total Displacement Measurement value L
AlwaysComputing formula be: L
Always=Nd/2+L.
2, according to claim 1 to the insensitive intersection point tracking mode of phase differential moire frange signal count fine separating method, it is characterized in that: starting point in section 1, terminating point when other section, the following calculating of displacement L of a signal period of less than:
When 1) terminating point is in section 1
L
Stp＞L
OriThe time positive-displacement: L=L
Stp-L
Ori
L
Ori＞L
StpShi Fanxiang displacement: L=L
Ori-L
Stp
When 2) terminating point is in section 2
During positive-displacement: L=|L
First-L
Ori|+| L
First-L
Stp|
Oppositely during displacement: L=d-(| L
First-L
Ori|+| L
First-L
Stp|)
When 3) terminating point is in section 3
During positive-displacement: L=|L
First-L
Ori|+L
First+ L
Stp
Oppositely during displacement: L=L
Ori+ d/2+L
Second+ | L
Second-L
Stp|)
When 4) terminating point is in section 4
During positive-displacement: L=|L
First-L
Ori|+d/4+|L
Second-L
Stp|
Oppositely during displacement: L=L
Ori+ d/2+L
Stp
When 5) terminating point is in section 5
During positive-displacement: L=|L
First-L
Ori|+d/4+L
Second+ L
Stp
Oppositely during displacement: L=L
Ori+ d/4+L
Second+ | L
Second-L
Stp|
When 6) terminating point is in section 6
During positive-displacement: L=|L
First-L
Ori|+d/2+|L
First-L
Stp|
Oppositely during displacement: L=L
Ori+ 2L
Second+ L
Stp
When 7) terminating point is in section 7
During positive-displacement: L=|L
First-L
Ori|+d/2+L
First+ L
Stp
Oppositely during displacement: L=L
Ori+ L
Second+ | L
Second-L
Stp|
When 8) terminating point is in section 8
During positive-displacement: L=d-(L
Ori+ L
Stp)
Oppositely during displacement: L=L
Ori+ L
Stp
L in the above-mentioned formula
FirstBe the shift value of intersection I amplitude correspondence, L
SecondBe the shift value of intersection I I amplitude correspondence, L
OriBe the shift value of starting point amplitude correspondence, L
StpShift value for terminating point amplitude correspondence; Starting point is when other section, and computing formula is identical.
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| CN103115573B (en) * | 2013-01-30 | 2015-08-12 | 清华大学 | Displacement measurement method |
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| CN110500960B (en) * | 2019-07-02 | 2021-02-12 | 广东工业大学 | Grating signal compensation method and compensation system |
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