CN1267764C - 与光学mems装置一起使用的成像技术 - Google Patents

与光学mems装置一起使用的成像技术 Download PDF

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Publication number
CN1267764C
CN1267764C CN02120339.3A CN02120339A CN1267764C CN 1267764 C CN1267764 C CN 1267764C CN 02120339 A CN02120339 A CN 02120339A CN 1267764 C CN1267764 C CN 1267764C
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CN
China
Prior art keywords
mems device
micro
reflector
optical
picture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN02120339.3A
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English (en)
Chinese (zh)
Other versions
CN1393710A (zh
Inventor
兰迪·C·吉尔斯
戴维·T·尼尔森
罗兰德·赖夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nokia of America Corp
Original Assignee
Lucent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucent Technologies Inc filed Critical Lucent Technologies Inc
Publication of CN1393710A publication Critical patent/CN1393710A/zh
Application granted granted Critical
Publication of CN1267764C publication Critical patent/CN1267764C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
    • G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Lenses (AREA)
CN02120339.3A 2001-06-29 2002-05-23 与光学mems装置一起使用的成像技术 Expired - Lifetime CN1267764C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/896,005 US6647172B2 (en) 2001-06-29 2001-06-29 Imaging technique for use with optical MEMS devices
US09/896,005 2001-06-29

Publications (2)

Publication Number Publication Date
CN1393710A CN1393710A (zh) 2003-01-29
CN1267764C true CN1267764C (zh) 2006-08-02

Family

ID=25405445

Family Applications (1)

Application Number Title Priority Date Filing Date
CN02120339.3A Expired - Lifetime CN1267764C (zh) 2001-06-29 2002-05-23 与光学mems装置一起使用的成像技术

Country Status (6)

Country Link
US (1) US6647172B2 (enExample)
EP (1) EP1271200B1 (enExample)
JP (1) JP4410457B2 (enExample)
CN (1) CN1267764C (enExample)
CA (1) CA2384072C (enExample)
DE (1) DE60200124T2 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3973944B2 (ja) * 2002-03-26 2007-09-12 オリンパス株式会社 光接続モジュール及び赤外光用光学系
CN1265229C (zh) * 2003-03-20 2006-07-19 株式会社日立制作所 光开关及光开关系统
CN100357783C (zh) * 2004-10-09 2007-12-26 明基电通股份有限公司 光学成像系统
US7539371B2 (en) 2005-04-11 2009-05-26 Capella Photonics, Inc. Optical apparatus with reduced effect of mirror edge diffraction
US7362930B2 (en) * 2005-04-11 2008-04-22 Capella Photonics Reduction of MEMS mirror edge diffraction in a wavelength selective switch using servo-based rotation about multiple non-orthogonal axes
US7263253B2 (en) * 2005-04-11 2007-08-28 Capella Photonics, Inc. Optimized reconfigurable optical add-drop multiplexer architecture with MEMS-based attenuation or power management
US7756368B2 (en) * 2005-04-11 2010-07-13 Capella Photonics, Inc. Flex spectrum WSS
US7352927B2 (en) 2005-04-11 2008-04-01 Capella Photonics Optical add-drop multiplexer architecture with reduced effect of mirror edge diffraction
US7346234B2 (en) * 2005-04-11 2008-03-18 Capella Photonics Reduction of MEMS mirror edge diffraction in a wavelength selective switch using servo-based multi-axes rotation
CN101283491A (zh) * 2005-07-08 2008-10-08 晶体纤维公司 光耦器件及其制造和使用方法
US7567756B2 (en) * 2005-08-03 2009-07-28 Capella Photonics Method of automatic adjustment of dither amplitude of MEMS mirror arrays
CN102342825B (zh) * 2011-03-23 2013-04-03 无锡微奥科技有限公司 低成本内窥镜微型光学探头
US10416429B2 (en) * 2017-09-15 2019-09-17 Agile Focus Designs, LLC Dynamic focus and zoom system for use with wide-field, confocal and multiphoton microscopes
US11550210B2 (en) 2020-05-29 2023-01-10 Mega1 Company Ltd. Projecting apparatus
US12372658B2 (en) 2020-10-12 2025-07-29 Raytheon Company Negative obstacle detector using micro-electro-mechanical system (MEMS) micro-mirror array (MMA) beam steering
US12066574B2 (en) 2021-01-15 2024-08-20 Raytheon Company Optical system for object detection and location using a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) beamsteering device
US11477350B2 (en) * 2021-01-15 2022-10-18 Raytheon Company Active imaging using a micro-electro-mechanical system (MEMS) micro-mirror array (MMA)
US11550146B2 (en) 2021-01-19 2023-01-10 Raytheon Company Small angle optical beam steering using micro-electro-mechanical system (MEMS) micro-mirror arrays (MMAS)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3508401B2 (ja) 1996-07-12 2004-03-22 富士通株式会社 増幅回路および多段増幅回路
EP1102096B1 (en) 1999-11-17 2005-03-23 Lucent Technologies Inc. Optical crossconnect using tilting mirror MEMS array
CA2325611C (en) 1999-12-01 2004-04-20 Lucent Technologies Inc. An optical cross connect employing a curved optical component
US20020172451A1 (en) * 2001-03-19 2002-11-21 Pavan Gupta Apparatus and method for fabricating scalable optical fiber cross-connect core

Also Published As

Publication number Publication date
CN1393710A (zh) 2003-01-29
JP4410457B2 (ja) 2010-02-03
US6647172B2 (en) 2003-11-11
US20030002782A1 (en) 2003-01-02
DE60200124T2 (de) 2004-09-16
EP1271200B1 (en) 2003-12-10
CA2384072A1 (en) 2002-12-29
DE60200124D1 (de) 2004-01-22
EP1271200A1 (en) 2003-01-02
CA2384072C (en) 2005-08-30
JP2003114392A (ja) 2003-04-18

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Granted publication date: 20060802