CN1256463C - Corrosion-resistant bydrophilic multi-layer film forming method by plasma - Google Patents
Corrosion-resistant bydrophilic multi-layer film forming method by plasma Download PDFInfo
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- CN1256463C CN1256463C CN 01139919 CN01139919A CN1256463C CN 1256463 C CN1256463 C CN 1256463C CN 01139919 CN01139919 CN 01139919 CN 01139919 A CN01139919 A CN 01139919A CN 1256463 C CN1256463 C CN 1256463C
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- plasma body
- hydrophilic
- corrosion
- engineering room
- erosion resistance
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Abstract
The present invention discloses a corrosion-resistant hydrophilic multi-layer film forming method by a plasma body. An upper electrode and a lower electrode are arranged in an engineering chamber. The upper electrode and the lower electrode are used as negative electrodes. Material used as a positive electrode passes between the upper electrode and the lower electrode to be positioned in a vacuum space. Mixed gas of hexamethyldisiloxane and helium gas is injected into the vacuum space. Simultaneously, a direct current power supply is exerted to the material, the upper electrode and the lower electrode, and a plasma body is formed. The surface of the material forms a corrosion-resistant layer by the plasma body. The material formed into the corrosion-resistant layer is put into the vacuum space again, and the mixed gas of hydrogen series of gas and helium gas is injected. Simultaneously, the direct current power supply is exerted, and a plasma body is formed. The surface of the material forms a hydrophilic layer by the plasma body. Accordingly, a multi-layer film which has the corrosion resistance and the hydrophilicity is formed. Aluminum of radiation fins of an air conditioner can improve the corrosion resistance and the hydrophilicity of material by the method.
Description
Technical field
What the present invention relates to is a kind ofly to utilize plasma body to form to have the method for erosion resistance and hydrophilic multilayer film.
Background technology
Usually the cabinet inside of air-conditioner outdoor unit has heat exchanger, and this heat exchanger is made up of the bracing frame of steel and the radiator element and the copper pipe of aluminium matter.
The heat exchanger of above-mentioned off-premises station requires heat-exchange capacity strong, because the heat exchanger of off-premises station mainly is arranged on the open air, so contact with wind facies with rainwater, also needs the requirement of aspect such as corrosion-resistant.
The material of radiator element is most popular to be aluminium.Though aluminum profile extrusion is easy, corrosion-resistant, heat-exchange capacity is good since in the South-West Asia or the coastland high temperature in South East Asia how wet, and salt is big, so off-premises station still is corroded easily with the radiator element of heat exchanger.
In order to adapt to above-mentioned harsh climate condition, the air-conditioning outdoor heat exchanger radiator element of this area utilizes chromium plating to carry out corrosion-resistance treatment.By above-mentioned electroplating processes, prolonged work-ing life to a certain extent, but do not made the well-content erosion resistance of user, through being corroded after a while.
In addition, though have a lot of carry out surface treatment about material surface at radiator element after the technology aspect the surperficial high molecular polymerization film hydrophilic treatment of material again, but the heat exchanger radiator element of making by the material after this processing still can be corroded, and hydrophilic film comes off.
Summary of the invention
The objective of the invention is in order to overcome the shortcoming that prior art exists, provide following method: on the surface of the metallic substance that is used to make heat exchanger, form anti-corrosion layer, form hydrophilic layer on the surface that forms anti-corrosion layer then, form multilayer film, make material have erosion resistance and wetting ability simultaneously.In order to make material have erosion resistance and wetting ability simultaneously, provide the suitable plasma body formation that utilizes to have the method for erosion resistance and hydrophilic multilayer film.
In order to solve the problems of the technologies described above, the technical solution used in the present invention is: the method that forms anti-corrosion layer and hydrophilic layer for the surface of idle call metallic substance, provide the plasma body formation that utilizes to have the method for erosion resistance and hydrophilic multilayer film with following characteristics, utilize plasma body to form and have the method for erosion resistance and hydrophilic multilayer film, be divided into hydrophilic layer that the anti-corrosion layer with erosion resistance forms stage and possess hydrophilic property and form the stage and carry out successively:
1. Engineering Room inside is provided as the upper electrode and the lower electrode of negative pole, to be positioned at Engineering Room inside as the anodal material simultaneously, under above-mentioned state, Engineering Room's pressure inside is kept specified vacuum state, inject hexamethyldisiloxane and helium to above-mentioned Engineering Room inside with the ratio of 1500sccm: 2100sccm simultaneously, simultaneously above-mentioned upper electrode, lower electrode and material are applied volts DS 1100V～1300V, form plasma body, utilize this plasma body to excite mixed gas to form anti-corrosion layer at material surface with erosion resistance.
2. the above-mentioned materials that will form anti-corrosion layer is put under the state of Engineering Room inside, inject hydrocarbon serial gas and helium to Engineering Room inside with the ratio of 700sccm: 2100sccm, simultaneously above-mentioned upper electrode, lower electrode and material are applied volts DS 1000V～1300V, form plasma body.Utilize this plasma body to excite mixed gas to form the hydrophilic layer of possess hydrophilic property at material surface.
According to aforesaid method, the polymerization of its anti-corrosion layer is to form continuously on through Engineering Room's material surface.
According to aforesaid method, the polymerization of its hydrophilic layer is to form continuously on the process material surface of Engineering Room.
According to aforesaid method, be reentered in the Engineering Room carrying out corrosion-resistant and material hydrophilic treatment, in Engineering Room, inject the air of 1500sccm, simultaneously to applying volts DS 700～800V as the anodal material with as the upper electrode and the lower electrode of negative pole, produce plasma body, utilize above-mentioned plasma body to carry out aftertreatment processing and improve wetting ability.
According to aforesaid method, the thickness of its anti-corrosion layer is 50 , and the thickness of hydrophilic layer is 500 .
The method that the present invention utilizes plasma body to form erosion resistance wetting ability multilayer film has following effect: be positioned at vacuum space inside as the anodal material, to the inner mixed gas that injects hexamethyldisiloxane and helium of vacuum space.Under above-mentioned state, apply direct supply and form plasma body.Utilize plasma body to form anti-corrosion layer on the surface of material.Then, the material that forms anti-corrosion layer is passed through vacuum space again, inject the mixed gas of hydrocarbon serial gas and helium.Under above-mentioned state, apply direct supply and form plasma body.Utilize plasma body on the surface of material, to form hydrophilic layer.So formed and had erosion resistance and hydrophilic multilayer film.The radiator element aluminium of air conditioning machinery can improve the erosion resistance and the wetting ability of material by aforesaid method.
Description of drawings
Fig. 1 is the structural representation that forms the multilayer film device among the present invention;
Fig. 2 is the material profile figure that the present invention forms multilayer film;
Fig. 3 utilizes the present invention to form the material surface resistance of multilayer film and the surface resistivity comparison diagram of prior art chrome-plated material;
Fig. 4 utilizes the present invention to form the material wetting ability of multilayer film and the wetting ability comparison diagram of prior art chrome-plated material.
Among the figure:
101 Engineering Room, 102 upper electrodes
103 lower electrodes, 104 materials
105 Abrollhaspels uncoiling chambers 106
107 up-coilers coiling chambers 108
109 guide deflection sheaves, 111 injection tubes
112 vapor pipes, 113 off-gas pumps
121 anti-corrosion layers, 122 hydrophilic layers
123 multilayer films
Embodiment
Below in conjunction with the drawings and specific embodiments the present invention is described in further detail:
Fig. 1 forms the apparatus structure synoptic diagram with erosion resistance and hydrophilic multilayer film among the present invention.As shown in the figure, the upside of box-type Engineering Room 101 inside is fixed with upper electrode 102, and the downside of this upper electrode 102 is fixed with lower electrode 103.
Front end in above-mentioned Engineering Room 101 has uncoiling chamber 106, and Abrollhaspel 105 is arranged in the uncoiling chamber 106, and Abrollhaspel 105 is to the banded aluminium 104 of Engineering Room's 101 inner supplies.In the rear end of Engineering Room 101 coiling chamber 108 is arranged, up-coiler 107 is set in coiling chamber 108, the material 104 that up-coiler 107 is reeled and come out from Engineering Room 101.The a pair of guide deflection sheave 109 that the guiding material 104 that has the inlet portion of the export department of uncoiling chamber 105 and coiling chamber 108 moves.
In addition, in order to provide volts DS, be provided with direct supply to upper electrode 102, lower electrode 103.Make Abrollhaspel 105 and up-coiler 107 motor rotating in addition.
The following describes the poly-unit that utilizes said structure forms anti-corrosion layer and hydrophilic layer to the surface of metallic substance method.
Apply power supply,, make Abrollhaspel 105, up-coiler 107 is rotated according to clockwise direction according to rotation counterclockwise by the driving of motor.Be wrapped in banded aluminium 104 on the Abrollhaspel 105 by between the upper electrode 102 and lower electrode 103 that are arranged on Engineering Room 101 inside, be wrapped in continuously on the up-coiler 107 then.
Under above-mentioned state, by gas injection tube 111 with hexamethyldisiloxane and helium according to the gas of the mixed of 1500sccm: 2100sccm to Engineering Room's 101 inner injections, on electrode 102 and material 104, apply simultaneously the voltage that changes in 1100V～1300V scope, so form plasma body between upper electrode 102, lower electrode 103 and the material 104, mixed gas is excited, and forms the high molecular polymerization film of anti-corrosion layer 121 on the surface of the material 104 that moves continuously.
After the surface of above-mentioned materials 104 forms anti-corrosion layer 121, change engineering gas, use with a kind of method and form hydrophilic layers 122 on strip material 104 surfaces that form anti-corrosion layer 121.Describe said process below in detail.
The material 104 that forms anti-corrosion layer 121 coilings is installed on Abrollhaspel 105 and the up-coiler 107, applies power supply,, make Abrollhaspel 105, up-coiler 107 is rotated according to clockwise direction according to rotation counterclockwise by the driving of motor.Anti-corrosion layer 121 is identical with forming, and is wrapped in the banded aluminium 104 that forms anti-corrosion layer 121 on the Abrollhaspel 105 by between the upper electrode 102 and lower electrode 103 that are arranged on Engineering Room 101 inside, is wrapped in continuously on the up-coiler 107 then.
Under above-mentioned state, by gas injection tube 111 with hydrocarbon serial gas and helium according to the gas of the mixed of 700sccm: 2100sccm to Engineering Room's 101 inner injections, on electrode 102 and above-mentioned materials 104, apply simultaneously the voltage that changes in 1100V～1300V scope, so form plasma body between upper electrode 102, lower electrode 103 and the material 104, mixed gas is excited, and forms the hydrophilic layer 122 of hydrophilic macromolecule polymeric membrane on the surface that forms anti-corrosion layer 121 of the material 104 that moves continuously.As shown in Figure 2, form thick anti-corrosion layer of 50 121 and the thick hydrophilic layer 122 of 500 on the surface of material 104 successively.
According to circumstances, be reentered in the Engineering Room 101 carrying out corrosion-resistant and material 104 hydrophilic treatment, inject the air of 1500sccm, apply volts DS 700～800V and produce plasma body by gas injection tube 111, make the alramenting of hydrophilic layer 122, improve wetting ability.
Fig. 3 utilizes EIS (electrochemical impedance spectrogram) method to measure the sheet resistance value of material after material surface resistance value after the corrosion-resistance treatment of the present invention and the chromium plating.Wherein, X-axis is a frequency, in order to find out the responsive scope of corrosion measurement EIS value, selected certain specific frequency.Y-axis is represented the absolute value of impedance with resistance.
As shown in the figure, the resistance value of chromed material is than little 3 powers of resistance value that form layered film material 123.Here, the big more erosion resistance of resistance value is good more, so we can improve the erosion resistance of material certainly greatly by method for anticorrosion-treating of the present invention.
Fig. 4 is that the present invention forms the material wetting ability of multilayer film 123 and the figure that the chromed material wetting ability of prior art compares.As shown in the figure, with material is carried out 10 minutes oven dry and wetting be that a circulation continues to carry out repeatedly, determine hydrophilic yardstick then and soak into the angle, it is very little to soak into the angle on the chromed material of prior art, and drying and watering cycle is descended to soak into rapid the increasing in angle repeatedly and reached more than 50 degree.Yet the present invention forms multilayer film 123 materials and soaks into angles through 600 circulation backs and still keep very little state, can keep high-hydrophilic for a long time so can be sure of the material that the present invention forms multilayer film 123.
Claims (5)
1. one kind is utilized plasma body formation to have the method for erosion resistance and hydrophilic multilayer film, it is characterized in that utilizing plasma body to form and have the method for erosion resistance and hydrophilic multilayer film, be divided into hydrophilic layer that the anti-corrosion layer with erosion resistance forms stage and possess hydrophilic property and form the stage and carry out successively:
1). Engineering Room (101) inside is provided as the upper electrode (102) and the lower electrode (103) of negative pole, to be positioned at Engineering Room (101) inside as anodal material (104) simultaneously, under above-mentioned state, Engineering Room (101) pressure inside is kept vacuum state, inject hexamethyldisiloxane and helium to the inner ratio of above-mentioned Engineering Room (101) simultaneously with 1500sccm: 2100sccm, simultaneously to above-mentioned upper electrode (102), lower electrode (103) and material (104) apply volts DS 1100V～1300V, form plasma body, utilize this plasma body to excite mixed gas to form anti-corrosion layer (102) at material surface with erosion resistance;
2). the above-mentioned materials (104) that will form anti-corrosion layer (121) is put under the inner state of Engineering Room (101), inject hydrocarbon serial gas and helium to Engineering Room (101) inside with the ratio of 700sccm: 2100sccm, simultaneously above-mentioned upper electrode (102), lower electrode (103) and material (104) are applied volts DS 1000V～1300V, form plasma body, utilize this plasma body to excite mixed gas to form the hydrophilic layer (122) of possess hydrophilic property at material surface.
2. utilize plasma body formation to have the method for erosion resistance and hydrophilic multilayer film according to claim 1 is described, the polymerization that it is characterized in that anti-corrosion layer (121) is to form continuously on through material (104) surface of Engineering Room (101).
3. utilize plasma body formation to have the method for erosion resistance and hydrophilic multilayer film according to claim 1 is described, the polymerization that it is characterized in that hydrophilic layer (122) is to form continuously on through material (104) surface of Engineering Room (101).
4. utilize plasma body formation to have the method for erosion resistance and hydrophilic multilayer film according to claim 1 is described, it is characterized in that carrying out corrosion-resistant and material (104) hydrophilic treatment is reentered in the Engineering Room (101), in Engineering Room (101), inject the air of 1500sccm, to applying volts DS 700～800V, produce plasma body simultaneously as anodal material (104) with as the upper electrode (102) and the lower electrode (103) of negative pole.
5. utilize plasma body formation to have the method for erosion resistance and hydrophilic multilayer film according to claim 1 is described, the thickness that it is characterized in that anti-corrosion layer (121) is 50 , and the thickness of hydrophilic layer (122) is 500 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01139919 CN1256463C (en) | 2001-11-19 | 2001-11-19 | Corrosion-resistant bydrophilic multi-layer film forming method by plasma |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01139919 CN1256463C (en) | 2001-11-19 | 2001-11-19 | Corrosion-resistant bydrophilic multi-layer film forming method by plasma |
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| Publication Number | Publication Date |
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| CN1420207A CN1420207A (en) | 2003-05-28 |
| CN1256463C true CN1256463C (en) | 2006-05-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 01139919 Expired - Fee Related CN1256463C (en) | 2001-11-19 | 2001-11-19 | Corrosion-resistant bydrophilic multi-layer film forming method by plasma |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| DE602004024454D1 (en) * | 2004-04-06 | 2010-01-14 | Lg Electronics Inc | METHOD FOR PRODUCING A METAL PRODUCT COATED WITH A ULTRAHYDROPHILIC THIN FILM AND A METAL PRODUCT COATED WITH A ULTRAHYDROPHILIC THIN FILM |
| CN103634960A (en) * | 2013-12-06 | 2014-03-12 | 阳泉市新鑫科技研究所有限责任公司 | Plasma helium and xenon high-pressure gas heater |
| CN108091666A (en) * | 2018-01-05 | 2018-05-29 | 中山大学 | A kind of non-volatile resistance-variable storing device and preparation method thereof |
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Granted publication date: 20060517 Termination date: 20091221 |