CN1242300A - Method for fabricating actuator of inkjet printer head - Google Patents

Method for fabricating actuator of inkjet printer head Download PDF

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Publication number
CN1242300A
CN1242300A CN98111753A CN98111753A CN1242300A CN 1242300 A CN1242300 A CN 1242300A CN 98111753 A CN98111753 A CN 98111753A CN 98111753 A CN98111753 A CN 98111753A CN 1242300 A CN1242300 A CN 1242300A
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CN
China
Prior art keywords
plate
oxidation
oscillating plate
atmosphere
metal dust
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Granted
Application number
CN98111753A
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Chinese (zh)
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CN1105020C (en
Inventor
金日
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Samsung Electronics Co Ltd
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Samsung Electro Mechanics Co Ltd
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Publication of CN1242300A publication Critical patent/CN1242300A/en
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Publication of CN1105020C publication Critical patent/CN1105020C/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

The present invention provides manufacture method of actuator in ink jet printer, wherein the vibrating plate is made of metal film and cascade an anti-oxidation film in order to keep the stability of physical properties in heat treating at high temperatures, so enhancing the reliability of the printer head.

Description

The manufacture method of the actuator of ink jet-print head
The present invention relates to the manufacture method of the actuator of ink jet-print head, be particularly related to oxidation-resistant film and be formed on the oscillating plate that is integrally formed with the chamber plate, so that during the processing step that uses sintering process deposited oxide piezoelectric element, prevent the manufacture method of the actuator of the physical property of oscillating plate and the ink jet-print head that shape changes.
As everyone knows, ink jet-print head is the part of using as the actuator of piezoelectric element etc. sprays or launch the ink of drop form of ink-jet printer.
The piezoelectric element distortion makes electric power be applied to the form of oscillating plate when crooked with oscillating plate, and oscillating plate is operatively coupled on this actuator that comprises piezoelectric element, thus from fluid reservoir discharge ink outwards.
In general, the oxide piezoelectric element mainly is used as the piezoelectric element of inkjet printing head actuator.
In this printhead actuator, the oxide piezoelectric element of use produces longitudinal dilatation and contraction with the voltage that applies off and on it, so that be fixed to the oscillating plate bending of oxide piezoelectric element lower surface, the ink that is contained in the plate of chamber is outwards penetrated.Print thus.
Figure 11 shows the structure of normally used conventional ink jet-print head.
With reference to Figure 11, ink jet-print head comprises nozzle plate 100, reservoir 200, channel floor 300, current limiting plate 400, chamber plate 500 and oscillating plate 600.Nozzle plate 100, reservoir 200, channel floor 300, current limiting plate 400, chamber plate 500 have nozzle 110, reservoir 210, liquid storage ditch 310, current limiter 410 and fluid reservoir 510, are of different sizes respectively and shape.Solution path 220,320 and 420 with same diameter forms equally by reservoir 200, channel floor 300 and current limiting plate 400 respectively.Be layered on the oscillating plate 600 is bottom electrode 700, oxide piezoelectric element 800 and top electrode 900.
Oscillating plate 600 is by as zirconia (ZrO 2) pottery that waits makes.By using ceramic material to form not fired slab, then under for example about 1,500 ℃ high temperature sintering not fired slab form oscillating plate 600.
Bottom electrode 700 and oxide piezoelectric element 800 sequentially are layered on the oscillating plate 600.Particularly, use known silk-screen printing technique can obtain the lamination of oxide piezoelectric element 800.The stacked oxide piezoelectric element 800 of sintering under about 1,100 ℃ high temperature then.
The pottery that is used to form oscillating plate 600 is demonstrating relatively poor machinability in the sintering state completely.For this reason, can not use this ceramic material to form micro-structural.In addition, during using sintering process to form the processing step of the physical property relevant, may be out of shape by the structure that this ceramic material is made with pottery.
Therefore, be difficult to use the pottery preparation to have the structure of microscopic dimensions, demonstrate relatively poor frame for movement.At this moment, demonstrate high embrittlement character.
Though the sintering temperature that is layered in the piezoelectric element 800 on the oscillating plate 600 is lower than the sintering temperature of oscillating plate 600, but still very high, promptly about 1,100 ℃.For this reason, have serious problem, promptly the oscillating plate 600 of sintering physical property during the processing step of sintering piezoelectric element 800 can change.
Therefore, an object of the present invention is to provide a kind of manufacture method of actuator of ink-jet printer, wherein oscillating plate is made of and stacked anti oxidation layer sheet metal, so that at high temperature still keep its physical property and shape in the Technology for Heating Processing of carrying out, obtain the raising of the reliability relevant thus with performance.
Another purpose of the present invention provides a kind of manufacture method of actuator of ink-jet printer, can prevent to contact the corrosion that causes with ink, strengthens durability thus.
According to the present invention, provide a kind of method of making the actuator of ink-jet printer can obtain these purposes, may further comprise the steps: to form oscillating plate with chamber plate all-in-one-piece mode, on the surface of the exposure of chamber plate and oscillating plate, form the oxidation-resistant film that needs thickness, be formed with laminated piezoelectric element and top electrode on the oscillating plate of oxidation-resistant film subsequently.When the chamber plate does not have fluid reservoir, after stacked top electrode, use etching process to carry out the formation of fluid reservoir in the plate of chamber.Thus, prepare the printhead that needs.
Can carry out the formation of oxidation-resistant film in a different manner according to the chamber plate that uses and the material and the method for oxidation of oscillating plate.
When oxidation-resistant film is formed on chamber plate and the oscillating plate, laminated piezoelectric element on oscillating plate directly, its lamination needs the sintering process of high temperature.During the sintering of piezoelectric element, because the character of oxidation-resistant film, oscillating plate still keeps its physical property.Therefore, can improve the reliability of head manufacturing and products obtained therefrom further.
From below with reference to accompanying drawing to the explanation below the embodiment, other purpose of the present invention and scheme will become obviously.
Fig. 1 shows the manufacture method according to the actuator of first embodiment of the present invention ink jet-print head;
Fig. 2 shows the manufacture method of the actuator of ink jet-print head according to a second embodiment of the present invention;
Fig. 3 shows the manufacture method of the actuator of a third embodiment in accordance with the invention ink jet-print head;
Fig. 4 shows the manufacture method of the actuator of a fourth embodiment in accordance with the invention ink jet-print head;
Fig. 5 shows the processing steps in sequence that a fourth embodiment in accordance with the invention forms fluid reservoir;
Fig. 6 shows the manufacture method of the actuator of ink jet-print head according to a fifth embodiment of the invention;
Fig. 7 shows the manufacture method of the actuator of ink jet-print head according to a sixth embodiment of the invention;
Fig. 8 shows the manufacture method of the actuator of ink jet-print head according to a seventh embodiment of the invention;
Fig. 9 shows the manufacture method according to the actuator of eighth embodiment of the present invention ink jet-print head;
Figure 10 A is respectively before the oxidation-resistant film formed according to the present invention and nickel substrate and be formed on the change curve of component ratio and the nickel substrate degree of depth between the chromium layer on the nickel substrate afterwards to 10C; And
Figure 11 is the section of structure of conventional ink jet-print head.
Fig. 1 shows the manufacture method according to the actuator of first embodiment of the present invention ink jet-print head.With reference to the figure of the top of figure 1, the oscillating plate 20 that is integrally formed with chamber plate 10 provides fluid reservoir 11.
The monomer that can prepare mutual formation all-in-one-piece chamber plate 10 and oscillating plate 20.At this moment, fluid reservoir 11 is formed on subsequently corresponding in the body of chamber plate 10 that part of.In addition, can be individually formed chamber plate 10 and oscillating plate 20.Form after the fluid reservoir 11, the chamber plate 10 of gained is connected with the oscillating plate 20 that forms in chamber plate 10 separately.
The metal dust 40 of structure on being coated in chamber plate 10 and oscillating plate 20 that will comprise mutual all-in-one-piece chamber plate 10 and oscillating plate 20 then packed in the container in the heating furnace 30.
For metal dust 40, main aluminium (Al) or the chromium (Cr) that demonstrates anti-oxidation characteristics that uses.Nickel (Ni) or cobalt (Co) can add in aluminium or the chromium.
The activating agent and being used to that is used to provide the active coating of metal dust 40 can be prevented that metal dust 40 from flowing and the antiwelding agents that are sintered added in the stove 30 with Powdered the mixing with certain ratio with respect to metal dust 40 respectively.
Activating agent can comprise as sodium chloride (NaCl) or chlorination nitrogen (NH 4Cl) etc. halide.Antiwelding agent can comprise aluminium oxide (Al 2O 3) or zirconia (ZrO 2).
Heating furnace 30 under the high temperature in the atmosphere of needs then, the atmosphere that needs for example contains for example hydrogen (H 2) wait the reducing atmosphere of reducing gas or contain just like argon (Ar), helium (He) or nitrogen (N 2) wait the inert atmosphere of inert gas, and/or 10 -5Under the vacuum condition of 50Torr.
Preferably, the heating-up temperature of stove 30 is about more than 500 ℃.
Along with stove 30 is heated, metal dust 40 is melted, and is coated in thus on the exposed surface that is contained in interior chamber plate 10 of container and oscillating plate 20, forms anti-oxidation metal film 80 thus on the exposed surface of chamber plate 10 and oscillating plate 20.
The resulting structures that is coated with anti-oxidation metal film 80 is heat-treated under about 600 to 1,500 ℃ temperature in oxidizing atmosphere.By described heat treatment, oxidation is coated in the metal film 80 on chamber plate 10 and oscillating plate 20 exposed surfaces, forms oxidation-resistant film 50 thus on the exposed surface of these plates 10 and 20.
Oxidation-resistant film 50 is very fine and close, and very high interior grain density is promptly arranged, and can prevent oxidation in the metal thus.
Preferably, oxidation-resistant film 50 thickness of 0.03 to 5 μ m of having an appointment.Prescribe a time limit above last when the thickness of anti-oxidation metal film, the vibration performance of oscillating plate 20 significantly reduces.
After this, use silk-screen printing technique, deposited oxide piezoelectric element 60, sintering under about 900 to 1,100 ℃ high temperature then on the needs part of the oscillating plate 20 that is formed with oxidation-resistant film 50.At last, top electrode 70 is layered on the oxide piezoelectric element 60.Thus, make ink jet-print head.
On the surface owing to the exposure that is formed on chamber plate 10 and oscillating plate 20 according to above-mentioned method oxidation-resistant film 50, therefore can during the processing step of high temperature sintering oxide piezoelectric element 60, protect oscillating plate 20.Therefore, can prevent the physical property change or the distortion of oscillating plate 20.
Fig. 2 shows the manufacture method of the actuator of ink jet-print head according to a second embodiment of the present invention.In Fig. 2, represent by identical reference number corresponding to the element of Fig. 1.With reference to the last figure of figure 2, demonstrate and provide the oscillating plate 20 that the chamber plate 10 of fluid reservoir 11 is integrally formed.
This embodiment is characterised in that the vacuum deposition processes of using as sputter or evaporation technology etc., and anti-oxidation metal film 80 is deposited on the surface of exposure of mutual all-in-one-piece chamber plate 10 and oscillating plate 20.
Metal material by deposit oxidation on the surface of the exposure of chamber plate 10 and oscillating plate 20 can obtain anti-oxidation metal film 80.The metal material deposit anti-oxidation metal film 80 that also can contain in addition, anti-oxidation metal by deposit.
Though anti-oxidation metal film 80 has been in the state of oxidation, the chamber plate 10 and the oscillating plate 20 that are deposited with anti-oxidation metal film 80 are heat-treated under about 600 to 1,500 ℃ temperature.Thus, on the surface of the exposure of chamber plate 10 and oscillating plate 20, form very highdensity fine and close oxidation-resistant film 50.
With the same in the first embodiment of the present invention, the have an appointment thickness of 0.03 to 5 μ m of preferred oxidation-resistant film 50.
After this, deposited oxide piezoelectric element 60, sintering under about 900 to 1,100 ℃ high temperature then on the needs part of the oscillating plate 20 that is formed with oxidation-resistant film 50.At last, top electrode 70 is layered on the oxide piezoelectric element 60.Thus, make ink jet-print head.
According to a second embodiment of the present invention, advantage is not need to use the stove 30 that requires among first embodiment, be since simply on the surface of the exposure of chamber plate 10 and oscillating plate 20 deposit anti-oxidation metal film 80 just can form oxidation-resistant film 50.Yet compare the formation decrease in efficiency of oxidation-resistant film 50 this moment with first embodiment.
According to a second embodiment of the present invention, can during the processing step of high temperature sintering oxide piezoelectric element 60, protect oscillating plate 20, can prevent that thus the physical property of oscillating plate 20 from changing or distortion.
Fig. 3 shows the manufacture method of the actuator of a third embodiment in accordance with the invention ink jet-print head.In Fig. 3, represent by identical reference number corresponding to the element of Fig. 1 and 2.With reference to the last figure of figure 3, demonstrate and provide the fluid reservoir oscillating plate 20 that 11 Room plates 10 are integrally formed.
Chamber plate 10 and oscillating plate 20 have the material that contains anti-oxidation metal to make.
When heat-treating under about 600 to 1,500 ℃ temperature, its exposure surperficial oxidized forms oxidation-resistant film 50 thus thereon to the chamber plate 10 that contains anti-oxidation metal and oscillating plate 20.
The same with the last embodiment of the present invention, the have an appointment thickness of 0.03 to 5 μ m of preferred oxidation-resistant film 50.
After this, deposited oxide piezoelectric element 60, sintering under about 900 to 1,100 ℃ high temperature then on the needs part of the oscillating plate 20 that is formed with oxidation-resistant film 50.At last, top electrode 70 is layered on the oxide piezoelectric element 60.Thus, make ink jet-print head.
Fig. 4 shows the manufacture method of the actuator of a fourth embodiment in accordance with the invention ink jet-print head.In Fig. 4, represent by identical reference number corresponding to the element of Fig. 1.This embodiment be characterised in that oscillating plate 20 with not with slab integral ground, the chamber formation of fluid reservoir.According to this embodiment, be formed with the fluid reservoir that needs at last treatment step chamber plate 10.
When the chamber plate 10 of band fluid reservoir 11 used with first to the 3rd embodiment the samely, physical property can change during the oscillating plate 20 on covering fluid reservoir 11 tops was heat-treated under the high temperature in forming oxidation-resistant film 50, was because it is made up of thin plate.
When heat treatment oscillating plate under about 600 to 1,500 ℃ high temperature 20 forms oxidation-resistant film, its physical property changes, so the oscillating plate distortion.
For this reason, a fourth embodiment in accordance with the invention, oscillating plate 20 is connected to the chamber plate 10 that does not form fluid reservoir, so that prevent change in physical during the heat treatment of high temperature.
According to the 4th embodiment, the structure that will comprise mutual all-in-one-piece chamber plate 10 and oscillating plate 20 is then packed into the lip-deep metal dust 40 of the exposure that is coated in chamber plate 10 and oscillating plate 20 in the container in the heating furnace 30.
For metal dust 40, main aluminium or the chromium that demonstrates anti-oxidation characteristics that uses.Nickel or cobalt can add in aluminium or the chromium.
The activating agent and being used to that is used to provide the active coating of metal dust 40 can be prevented that metal dust 40 from flowing or the antiwelding agent that is sintered to add in the stove 30 with the form of the powder of certain ratio with respect to metal dust 40 respectively.
Activating agent can comprise as sodium chloride (NaCl) or chlorination nitrogen (NH 4Cl) etc. halide.Antiwelding agent can comprise aluminium oxide (Al 2O 3) or zirconia (ZrO 2).
Heating furnace 30 under the high temperature in the atmosphere of needs then, the atmosphere that needs for example contains for example hydrogen (H 2) wait the reducing atmosphere of reducing gas or contain just like argon (Ar), helium (He) or nitrogen (N 2) wait the inert atmosphere of inert gas, and/or 10 -5Under the vacuum condition of 50Torr.Along with stove 30 is heated, metal dust 40 is melted, and is coated in thus on the exposed surface that is contained in interior chamber plate 10 of container and oscillating plate 20, forms anti-oxidation metal film 80 thus on the exposed surface of chamber plate 10 and oscillating plate 20.
Preferably, the heating-up temperature of stove 30 is about more than 500 ℃.
The resulting structures that is coated with anti-oxidation metal film 80 is heat-treated under about 600 to 1,500 ℃ temperature in oxidizing atmosphere.By described heat treatment, oxidation is coated in the metal film 80 on chamber plate 10 and oscillating plate 20 exposed surfaces, forms oxidation-resistant film 50 thus on the exposed surface of these plates 10 and 20.
Oxidation-resistant film 50 is very fine and close, and very high interior grain density is promptly arranged, and can prevent oxidation in the metal thus.
Preferably, oxidation-resistant film 50 thickness of 0.03 to 5 μ m of having an appointment.Prescribe a time limit above last when the thickness of anti-oxidation metal film, the vibration performance of oscillating plate 20 significantly reduces.
After this, use silk-screen printing technique, deposited oxide piezoelectric element 60, sintering under about 900 to 1,100 ℃ high temperature then on the needs part of the oscillating plate 20 that is formed with oxidation-resistant film 50.Then, top electrode 70 is layered on the oxide piezoelectric element 60.
At last, fluid reservoir 11 is formed on the lower surface of chamber plate 10.
In order to form fluid reservoir 11, at first photoresist film 90 is coated on the lower surface of chamber plate 10, use suitably composition of mask according to exposure, development and developing technique then.That is, remove photoresist film 90 partly and stay the figure that is less than or equal to fluid reservoir 11 areas that will form.Make with photoresist figure make mask, the corroding chamber plate 10 then, form fluid reservoir 11 thus.
Thus, prepare the ink jet-print head that needs.
Fig. 6 shows the manufacture method of the actuator of a fourth embodiment in accordance with the invention ink jet-print head.In Fig. 6, the element that corresponds respectively to Figure 4 and 5 is represented by identical reference number.This embodiment is similar to the 4th embodiment and is the same with the 4th embodiment, and oscillating plate 20 integrally forms with the chamber plate 10 with fluid reservoir not.
According to this embodiment, use vacuum deposition processes as sputter or evaporation technology etc., anti-oxidation metal film 80 is deposited on the surface of exposure of mutual all-in-one-piece chamber plate 10 and oscillating plate 20.
Metal material by deposit oxidation on the surface of the exposure of chamber plate 10 and oscillating plate 20 can obtain anti-oxidation metal film 80.The metal material deposit anti-oxidation metal film 80 that also can contain in addition, anti-oxidation metal by deposit.
Though anti-oxidation metal film 80 has been in the state of oxidation, the chamber plate 10 and the oscillating plate 20 that are deposited with anti-oxidation metal film 80 are heat-treated under about 600 to 1,500 ℃ temperature.Thus, on the surface of the exposure of chamber plate 10 and oscillating plate 20, form very highdensity fine and close oxidation-resistant film 50.
With the same in the first embodiment of the present invention, the have an appointment thickness of 0.03 to 5 μ m of preferred oxidation-resistant film 50.
After this, deposited oxide piezoelectric element 60, sintering under about 900 to 1,100 ℃ high temperature then on the needs part of the oscillating plate 20 that is formed with oxidation-resistant film 50.Then, top electrode 70 is layered on the oxide piezoelectric element 60.
At last, fluid reservoir 11 is formed on the lower surface of chamber plate 10.
In order to form fluid reservoir 11, at first photoresist film 90 is coated on the lower surface of chamber plate 10, use suitably composition of mask according to exposure, development and developing technique then.That is, remove photoresist film 90 partly and stay the figure that is less than or equal to fluid reservoir 11 areas that will form.Make with photoresist figure make mask, the corroding chamber plate 10 then, form fluid reservoir 11 thus.
Thus, prepare the ink jet-print head that needs.
Fig. 7 shows the manufacture method of the actuator of ink jet-print head according to a sixth embodiment of the invention.In Fig. 7, correspond respectively to Fig. 4 and represent by identical reference number with 6 element.Except oscillating plate 20 and the chamber plate 10 with fluid reservoir not integrally form, this embodiment is similar to the 3rd embodiment.According to of the present invention the 6th, the same with the 3rd embodiment, chamber plate 10 and oscillating plate 20 are made by the material that contains anti-oxidation metal.
When the chamber plate 10 and the oscillating plate 20 that contain anti-oxidation metal are heat-treated under about 600 to 1,500 ℃ temperature, the surface of its exposure of oxidation forms very highdensity fine and close oxidation-resistant film 50 thus thereon.
The have an appointment thickness of 0.03 to 5 μ m of preferred oxidation-resistant film 50.
After this, deposited oxide piezoelectric element 60, sintering under about 900 to 1,100 ℃ high temperature then on the needs part of the oscillating plate 20 that is formed with oxidation-resistant film 50.Then, top electrode 70 is layered on the oxide piezoelectric element 60.
At last, fluid reservoir 11 is formed on the lower surface of chamber plate 10.
In order to form fluid reservoir 11, at first photoresist film 90 is coated on the lower surface of chamber plate 10, use suitably composition of mask according to exposure, development and developing technique then.That is, remove photoresist film 90 partly and stay the figure that is less than or equal to fluid reservoir 11 areas that will form.Make with photoresist figure make mask, the corroding chamber plate 10 then, form fluid reservoir 11 thus.
Thus, prepare the ink jet-print head that needs.
Fig. 8 shows the manufacture method of the actuator of ink jet-print head according to a seventh embodiment of the invention.In Fig. 8, the element that corresponds respectively to Fig. 1 is represented by identical reference number.According to this embodiment, the same with first embodiment, oscillating plate 20 integrally forms with the chamber plate 10 of band fluid reservoir.The structure that will comprise mutual all-in-one-piece chamber plate 10 and oscillating plate 20 is then packed into the lip-deep metal dust 40 of the exposure that is coated in chamber plate 10 and oscillating plate 20 in the container in the heating furnace 30.
For metal dust 40, main aluminium or the chromium that demonstrates anti-oxidation characteristics that uses.Nickel or cobalt can add in aluminium or the chromium.
The activating agent and being used to that is used to provide the active coating of metal dust 40 can be prevented that metal dust 40 from flowing or the antiwelding agent that is sintered to add in the stove 30 with the form of the powder of certain ratio with respect to metal dust 40 respectively.
Activating agent can comprise as sodium chloride (NaCl) or chlorination nitrogen (NH 4Cl) etc. halide.Antiwelding agent can comprise aluminium oxide (Al 2O 3) or zirconia (ZrO 2).
Heating furnace 30 under the high temperature in the atmosphere of needs then, the atmosphere that needs for example contains for example hydrogen (H 2) wait the reducing atmosphere of reducing gas or contain just like argon (Ar), helium (He) or nitrogen (N 2) wait the inert atmosphere of inert gas, and/or 10 -5Under the vacuum condition of 50Torr.
Preferably, the heating-up temperature of stove 30 is about more than 500 ℃.
Along with stove 30 is heated, metal dust 40 is melted, and is coated in thus on the exposed surface that is contained in interior chamber plate 10 of container and oscillating plate 20, forms anti-oxidation metal film 80 thus on the exposed surface of chamber plate 10 and oscillating plate 20.
After this, deposited oxide piezoelectric element 60 on the needs part of the oscillating plate 20 that is formed with anti-oxidation metal film 80 carries out sintering by heat treatment then in oxidizing atmosphere.By described heat treatment, the metal film 80 that is coated on the exposed surface of chamber plate 10 and oscillating plate 20 is also oxidized, forms oxidation-resistant film 50 on these plates 10 and 20 the exposed surface thus.
Compare with first embodiment, described the 7th embodiment is characterised in that the oxide piezoelectric element 60 that is stacked on the oscillating plate 20 by sinter layer forms oxidation-resistant film 50.In first embodiment, before stacked oxide piezoelectric element 60, form oxidation-resistant film 50.
At last, top electrode 70 is layered on the oxide piezoelectric element 60.Thus, make ink jet-print head.
Fig. 9 shows the manufacture method according to the actuator of eighth embodiment of the present invention ink jet-print head.In Fig. 9, the element that corresponds respectively to Fig. 8 is represented by identical reference number.This embodiment different with the 7th embodiment and with the similar part of the 4th embodiment be oscillating plate 20 with not with slab integral ground, the chamber formation of fluid reservoir.According to this embodiment, be formed with the fluid reservoir that needs at last treatment step chamber plate 10.
According to the 8th embodiment, the structure that will comprise mutual all-in-one-piece chamber plate 10 and oscillating plate 20 is then packed into the lip-deep metal dust 40 of the exposure that is coated in chamber plate 10 and oscillating plate 20 in the container in the heating furnace 30.
For metal dust 40, main aluminium or the chromium that demonstrates anti-oxidation characteristics that uses.Nickel or cobalt can add in aluminium or the chromium.
The activating agent and being used to that is used to provide the active coating of metal dust 40 can be prevented that metal dust 40 from flowing or the antiwelding agent that is sintered to add in the stove 30 with the form of the powder of certain ratio with respect to metal dust 40 respectively.
Activating agent can comprise as sodium chloride (NaCl) or chlorination nitrogen (NH 4Cl) etc. halide.Antiwelding agent can comprise aluminium oxide (Al 2O 3) or zirconia (ZrO 2).
Heating furnace 30 under the high temperature in the atmosphere of needs then, the atmosphere that needs for example contains for example hydrogen (H 2) wait the reducing atmosphere of reducing gas or contain just like argon (Ar), helium (He) or nitrogen (N 2) wait the inert atmosphere of inert gas, and/or 10 -5Under the vacuum condition of 50Torr.
Preferably, the heating-up temperature of stove 30 is about more than 500 ℃.
Along with stove 30 is heated, metal dust 40 is melted, and is coated in thus on the exposed surface that is contained in interior chamber plate 10 of container and oscillating plate 20, forms anti-oxidation metal film 80 thus on the exposed surface of chamber plate 10 and oscillating plate 20.
After this, deposited oxide piezoelectric element 60 on the needs part of the oscillating plate 20 that is formed with anti-oxidation metal film 80 carries out sintering by heat treatment then in oxidizing atmosphere.By described heat treatment, the metal film 80 that is coated on the exposed surface of chamber plate 10 and oscillating plate 20 is also oxidized, forms oxidation-resistant film 50 on these plates 10 and 20 the exposed surface thus.
Sintering temperature is about 600 to 1,500 ℃.
Top electrode 70 is layered on the oxide piezoelectric element 60 then.Subsequently, photoresist film 90 is coated on the lower surface of chamber plate 10, uses suitably composition of mask according to exposure, development and developing technique then.That is, remove photoresist film 90 partly and stay the figure that is less than or equal to fluid reservoir 11 areas that will form.Make with photoresist figure make mask, the corroding chamber plate 10 then, form fluid reservoir 11 thus.
Thus, prepare the ink jet-print head that needs.
In above-mentioned embodiment, the oxidation-resistant film 50 that is coated on the exposed surface of chamber plate 10 and oscillating plate 20 is made up of chrome green film or di-aluminium trioxide film.In order to form this oxidation-resistant film 50, need in oxidizing atmosphere, carry out about heat treatment more than one hour.
Very stable by this oxidation-resistant film 50 that chrome green film or di-aluminium trioxide film are formed, be because it is highdensity dense oxidation film.Because through no longer carrying out further oxidation after certain section oxidization time, oxidation-resistant film 50 thickness of formation are constant.
For example, the same with the of the present invention the first, the 4th with the 8th embodiment, in the time of when mainly be deposited on these chamber plates 10 in the stove 30 and oscillating plate 20 by chamber plate of making for the nickel of anti-oxidation metal and chromium 10 and oscillating plate 20 on, resulting structures demonstrates the proportion of composing between the nickel and chromium in the state that Figure 10 A is shown in deposit chromium.With reference to figure 10A, can find substrate be form certain thickness on the surface of nickel substrate be the chromium layer of anti-oxidation metal.When under about 600 to 1,500 ℃ temperature during this structure of heat treatment, the border between nickel substrate and chromium layer goes out the component ratio marked change between nickel and the chromium, shown in Figure 10 B.When heat-treating in oxidizing atmosphere, that part of chromium layer that boundary exists between nickel substrate and chromium layer becomes the chrome green film for oxidation-resistant film.At this moment, that part of nickel substrate that boundary exists between nickel substrate and chromium layer becomes increases degree of depth place at the nickel substrate and contains and reduce the chrome-nickel film of nickel of the chromium of composition and increase composition.
That is, because oxidation gradually becomes the chrome green film from the surperficial chromium floor of chamber plate 10 and oscillating plate 20.Thus, highdensity fine and close oxidation-resistant film is formed on the surface of chamber plate 10 and oscillating plate 20 and is inner.Oxidation-resistant film demonstrates in the increase degree of depth place of chamber plate 10 and oscillating plate 20 density and descends.The nickel substrate still maintains certain degree of depth of chamber plate 10 and oscillating plate 20.
The oxidation-resistant film that is formed on after the oxidation on chamber plate 10 and the oscillating plate 20 works to prevent oxygen penetration in chamber plate 10 and oscillating plate 20, prevents that thus chamber plate 10 and oscillating plate 20 are by oxidation further.Oxidation-resistant film also demonstrates high temperature resistant.Therefore, chamber plate 10 and oscillating plate 20 remain in the stable status.
Particularly, when sintered oxide piezoelectric element 60 forms oxidation-resistant film 50 before or simultaneously on oscillating plate 20, the temperatures involved of using in the sintering of the not oxidated thing piezoelectric element 60 of oscillating plate 20.Therefore, can prevent the physical property or the alteration of form of oscillating plate 20.
When oxidation-resistant film 50 also is formed on the inner surface of the fluid reservoir 11 that is limited in the chamber plate 10, can prevent to limit that part of chamber plate 10 of fluid reservoir 11 and ink corrosion that oscillating plate 20 is touched them.
Because oxidation-resistant film 50 demonstrates insulating property (properties) usually, therefore before oxide piezoelectric element 60 is deposited on oscillating plate 20, use as the thick film of silk-screen printing technique etc. forms technology formation bottom electrode.Electric wire also can be formed on the oxidation-resistant film 50, so that provide stable voltage to oxide piezoelectric element 60.
When in oxidizing atmosphere when being layered in anti-oxidation metal film 80 on chamber plate 10 and the oscillating plate 20 and heat-treating, anti-oxidation metal film 80 is oxidized and become oxidation-resistant film 50.Between the described heat of oxidation, the Volume Changes in chamber plate 10 and the oscillating plate 20 is very big.
For this reason, when oxidation-resistant film 50 only is formed on the oscillating plate 20, can not obtain the connection between chamber plate 10 and the oscillating plate 20 fully.Therefore, carry out the formation of oxidation-resistant film 50 after preferred chamber plate 10 and oscillating plate 20 integrally link together.
When printing the preparation of head in mode above-mentioned, even oscillating plate 20 slight deformation are also no problem.This is because the distortion of oscillating plate 20 and the distortion of chamber plate 10 take place simultaneously.Therefore, favourable advantage is and can be subjected to ectocine by the above printhead of mentioning preparation reliably.
Though, those skilled in the art will appreciate that, can make and variously change shape, additional and replace, and can not deviate from the scope and spirit essence of the present invention that appended claims is put down in writing for the purpose of showing discloses the preferred embodiment of the present invention.

Claims (54)

1. the manufacture method of the actuator of an ink jet-print head may further comprise the steps:
To form oscillating plate with chamber plate all-in-one-piece mode with fluid reservoir;
Component ratio with needs, to activate the activating agent of described coated technique and be used to prevent that described metal dust antiwelding agent mobile and that be sintered from mixing with metal dust, described metal dust will be coated on the described chamber plate and described oscillating plate that integral body links together, produce mixture of powders thus, in the stove of then mixture and described chamber plate and described oscillating plate being packed into together;
In the atmosphere of needs, at high temperature heat described stove, on the exposed surface of described chamber plate and described oscillating plate, form the anti-oxidation metal film thus;
In oxidizing atmosphere,, on the described exposed surface of described chamber plate and described oscillating plate, form oxidation-resistant film thus with the mode heat treatment described chamber plate and the described oscillating plate of the described anti-oxidation metal film of oxidation;
On the upper surface of the described oscillating plate that is coated with described oxidation-resistant film, utilize sintering process deposited oxide piezoelectric element; And
Upper electrode layer is stacked on the described oxide piezoelectric element.
2. according to the process of claim 1 wherein that described metal dust mainly comprises aluminium.
3. according to the process of claim 1 wherein that described metal dust mainly comprises chromium.
4. according to the process of claim 1 wherein that described metal dust comprises aluminium and the chromium that adds nickel and cobalt.
5. according to the process of claim 1 wherein that the atmosphere of described stove is reducing atmosphere.
6. according to the process of claim 1 wherein that the atmosphere of described stove is the inert atmosphere that contains inert gas.
7. according to the process of claim 1 wherein that the atmosphere of described stove is about 10 -5Vacuum atmosphere to 50Torr.
8. according to the process of claim 1 wherein that in described oxidizing atmosphere the described heat treatment that described chamber plate and described oscillating plate are carried out is to carry out under 600 to 1,500 ℃ temperature.
9. the manufacture method of the actuator of an ink jet-print head may further comprise the steps:
To form oscillating plate with chamber plate all-in-one-piece mode with fluid reservoir;
On the exposed surface of described chamber plate that integrally links together and described oscillating plate, utilize vacuum deposition processes deposit anti-oxidation metal film;
Mode heat treatment described chamber plate and described oscillating plate with the described anti-oxidation metal film of oxidation form oxidation-resistant film thus on the described exposed surface of described chamber plate and described oscillating plate;
Utilizing sintering process to be coated with deposited oxide piezoelectric element on the upper surface of described oscillating plate of described oxidation-resistant film; And
Upper electrode layer is stacked on the described oxide piezoelectric element.
10. according to the method for claim 9, wherein said metal dust mainly comprises aluminium.
11. according to the method for claim 9, wherein said metal dust mainly comprises chromium.
12. according to the method for claim 9, wherein said metal dust comprises aluminium and the chromium that adds nickel and cobalt.
13. according to the method for claim 9, the state that described anti-oxidation metal film is oxidation before stacked anti-oxidation metal film wherein.
14. according to the method for claim 9, wherein said anti-oxidation metal film contains anti-oxidation metal.
15. according to the method for claim 9, wherein the described heat treatment of in described oxidizing atmosphere described chamber plate and described oscillating plate being carried out is to carry out under 600 to 1,500 ℃ temperature.
16. the manufacture method of the actuator of an ink jet-print head may further comprise the steps:
To form the oscillating plate that contains anti-oxidation metal with chamber plate all-in-one-piece mode with fluid reservoir;
Described chamber plate and described oscillating plate so that the mode heat treatment at high temperature of the exposed surface of oxidation described chamber plate and described oscillating plate integrally links together form oxidation-resistant film thus on described exposed surface;
On the upper surface of the described oscillating plate that is coated with described oxidation-resistant film, utilize sintering process deposited oxide piezoelectric element; And
Upper electrode layer is stacked on the described oxide piezoelectric element.
17. according to the method for claim 16, wherein said metal dust mainly comprises aluminium.
18. according to the method for claim 16, wherein said metal dust mainly comprises chromium.
19. according to the method for claim 16, wherein the described heat treatment of in described oxidizing atmosphere described chamber plate and described oscillating plate being carried out is to carry out under 600 to 1,500 ℃ temperature.
20. the manufacture method of the actuator of an ink jet-print head may further comprise the steps:
To form oscillating plate with chamber plate all-in-one-piece mode with fluid reservoir;
Component ratio with needs, to activate the activating agent of described coated technique and be used to prevent that described metal dust antiwelding agent mobile and that be sintered from mixing with metal dust, described metal dust will be coated on the described chamber plate and described oscillating plate that integral body links together, produce mixture of powders thus, in the stove of then mixture and described chamber plate and described oscillating plate being packed into together;
In the atmosphere of needs, at high temperature heat described stove, on the exposed surface of described chamber plate and described oscillating plate, form the anti-oxidation metal film thus;
In oxidizing atmosphere,, on the described exposed surface of described chamber plate and described oscillating plate, form oxidation-resistant film thus with the mode heat treatment described chamber plate and the described oscillating plate of the described anti-oxidation metal film of oxidation;
On the upper surface of the described oscillating plate that is coated with described oxidation-resistant film, utilize sintering process deposited oxide piezoelectric element;
Upper electrode layer is stacked on the described oxide piezoelectric element; And
The described chamber of composition plate limits the fluid reservoir in the plate of described chamber thus.
21. according to the method for claim 20, wherein said metal dust mainly comprises aluminium.
22. according to the method for claim 20, wherein said metal dust mainly comprises chromium.
23. according to the method for claim 20, wherein said metal dust comprises aluminium and the chromium that adds nickel and cobalt.
24. according to the method for claim 20, the atmosphere of wherein said stove is reducing atmosphere.
25. according to the method for claim 20, the atmosphere of wherein said stove is the inert atmosphere that contains inert gas.
26. according to the method for claim 20, the atmosphere of wherein said stove is about 10 -5Vacuum atmosphere to 50Torr.
27. according to the method for claim 20, wherein the described heat treatment of in described oxidizing atmosphere described chamber plate and described oscillating plate being carried out is to carry out under 600 to 1,500 ℃ temperature.
28. the manufacture method of the actuator of an ink jet-print head may further comprise the steps:
To form oscillating plate with chamber plate all-in-one-piece mode with fluid reservoir;
On the exposed surface of described chamber plate that integrally links together and described oscillating plate, utilize vacuum deposition processes deposit anti-oxidation metal film;
Mode heat treatment described chamber plate and described oscillating plate with the described anti-oxidation metal film of oxidation form oxidation-resistant film thus on the described exposed surface of described chamber plate and described oscillating plate;
On the upper surface of the described oscillating plate that is coated with described oxidation-resistant film, utilize sintering process deposited oxide piezoelectric element;
Upper electrode layer is stacked on the described oxide piezoelectric element; And
The described chamber of composition plate limits the fluid reservoir in the plate of described chamber thus.
29. according to the method for claim 28, wherein said metal dust mainly comprises aluminium.
30. according to the method for claim 28, wherein said metal dust mainly comprises chromium.
31. according to the method for claim 28, wherein said metal dust comprises aluminium and the chromium that adds nickel and cobalt.
32. according to the method for claim 28, the state that described anti-oxidation metal film is oxidation before stacked anti-oxidation metal film wherein.
33. according to the method for claim 28, wherein said anti-oxidation metal film contains anti-oxidation metal.
34. according to the method for claim 28, wherein the described heat treatment of in described oxidizing atmosphere described chamber plate and described oscillating plate being carried out is to carry out under 600 to 1,500 ℃ temperature.
35. the manufacture method of the actuator of an ink jet-print head may further comprise the steps:
To form the oscillating plate that contains anti-oxidation metal with chamber plate all-in-one-piece mode with fluid reservoir;
Described chamber plate and described oscillating plate so that the mode heat treatment at high temperature of the exposed surface of oxidation described chamber plate and described oscillating plate integrally links together form oxidation-resistant film thus on described exposed surface;
On the upper surface of the described oscillating plate that is coated with described oxidation-resistant film, utilize sintering process deposited oxide piezoelectric element;
Upper electrode layer is stacked on the described oxide piezoelectric element; And
The described chamber of composition plate limits the fluid reservoir in the plate of described chamber thus.
36. according to the method for claim 35, wherein said metal dust mainly comprises aluminium.
37. according to the method for claim 35, wherein said metal dust mainly comprises chromium.
38. according to the method for claim 35, wherein the described heat treatment of in described oxidizing atmosphere described chamber plate and described oscillating plate being carried out is to carry out under 600 to 1,500 ℃ temperature.
39. the manufacture method of the actuator of an ink jet-print head may further comprise the steps:
To form oscillating plate with chamber plate all-in-one-piece mode with fluid reservoir;
Component ratio with needs, to activate the activating agent of described coated technique and be used to prevent that described metal dust antiwelding agent mobile and that be sintered from mixing with metal dust, described metal dust will be coated on the described chamber plate and described oscillating plate that integral body links together, produce mixture of powders thus, in the stove of then mixture and described chamber plate and described oscillating plate being packed into together;
In the atmosphere of needs, at high temperature heat described stove, on the exposed surface of described chamber plate and described oscillating plate, form the anti-oxidation metal film thus;
In oxidizing atmosphere,, on the described exposed surface of described chamber plate and described oscillating plate, form oxidation-resistant film thus with the mode heat treatment described chamber plate and the described oscillating plate of the described anti-oxidation metal film of oxidation;
Deposited oxide piezoelectric element on the upper surface of the described oscillating plate that is coated with described oxidation-resistant film, and utilize the described oxide piezoelectric element of sintering process sintering in oxidizing atmosphere, the exposed surface of simultaneous oxidation described chamber plate and described oscillating plate; And
Upper electrode layer is stacked on the described oxide piezoelectric element.
40. according to the method for claim 39, wherein said metal dust mainly comprises aluminium.
41. according to the method for claim 39, wherein said metal dust mainly comprises chromium.
42. according to the method for claim 39, wherein said metal dust comprises aluminium and the chromium that adds nickel and cobalt.
43. according to the method for claim 39, the atmosphere of wherein said stove is reducing atmosphere.
44. according to the method for claim 39, the atmosphere of wherein said stove is the inert atmosphere that contains inert gas.
45. according to the method for claim 39, the atmosphere of wherein said stove is about 10 -5Vacuum atmosphere to 50Torr.
46. according to the method for claim 39, wherein the described heat treatment of in described oxidizing atmosphere described chamber plate and described oscillating plate being carried out is to carry out under 600 to 1,500 ℃ temperature.
47. the manufacture method of the actuator of an ink jet-print head may further comprise the steps:
To form oscillating plate with chamber plate all-in-one-piece mode with fluid reservoir;
Component ratio with needs, to activate the activating agent of described coated technique and be used to prevent that described metal dust antiwelding agent mobile and that be sintered from mixing with metal dust, described metal dust will be coated on the described chamber plate and described oscillating plate that integral body links together, produce mixture of powders thus, in the stove of then mixture and described chamber plate and described oscillating plate being packed into together;
In the atmosphere of needs, at high temperature heat described stove, on the exposed surface of described chamber plate and described oscillating plate, form the anti-oxidation metal film thus;
Deposited oxide piezoelectric element on the upper surface of the described oscillating plate that is coated with described oxidation-resistant film, and utilize the described oxide piezoelectric element of sintering process sintering in oxidizing atmosphere, the exposed surface of simultaneous oxidation described chamber plate and described oscillating plate;
Upper electrode layer is stacked on the described oxide piezoelectric element; And
The described chamber of composition plate limits the fluid reservoir in the plate of described chamber thus.
48. according to the method for claim 47, wherein said metal dust mainly comprises aluminium.
49. according to the method for claim 47, wherein said metal dust mainly comprises chromium.
50. according to the method for claim 47, wherein said metal dust comprises aluminium and the chromium that adds nickel and cobalt.
51. according to the method for claim 47, the atmosphere of wherein said stove is reducing atmosphere.
52. according to the method for claim 47, the atmosphere of wherein said stove is the inert atmosphere that contains inert gas.
53. according to the method for claim 47, the atmosphere of wherein said stove is about 10 -5Vacuum atmosphere to 50Torr.
54. according to the method for claim 47, wherein the described heat treatment of in described oxidizing atmosphere described chamber plate and described oscillating plate being carried out is to carry out under 600 to 1,500 ℃ temperature.
CN98111753A 1998-07-22 1998-12-24 Method for fabricating actuator of inkjet printer head Expired - Fee Related CN1105020C (en)

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KR19980029374 1998-07-22

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DE (1) DE19859914A1 (en)
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CN100335278C (en) * 2000-06-30 2007-09-05 西尔弗布鲁克研究有限公司 Buckle resistant thermal bend actuators
CN104827773A (en) * 2014-02-12 2015-08-12 精工爱普生株式会社 Liquid ejecting head and liquid ejecting apparatus
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JP3833070B2 (en) 2001-02-09 2006-10-11 キヤノン株式会社 Liquid ejecting head and manufacturing method
JP4933765B2 (en) * 2005-10-03 2012-05-16 富士フイルム株式会社 Method for manufacturing liquid discharge head
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JP3280799B2 (en) * 1993-10-14 2002-05-13 日本碍子株式会社 Thin zirconia diaphragm structure, method for producing the same, and piezoelectric / electrostrictive film element using the same
DE4421007A1 (en) * 1994-06-18 1995-12-21 Philips Patentverwaltung Electronic component and method for its production
JP3501860B2 (en) * 1994-12-21 2004-03-02 日本碍子株式会社 Piezoelectric / electrostrictive film type element and manufacturing method thereof
EP0736385B1 (en) * 1995-04-03 1998-02-25 Seiko Epson Corporation Printer head for ink jet recording and process for the preparation thereof

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CN1310825C (en) * 2000-05-04 2007-04-18 西尔弗布鲁克研究有限公司 Thermal bend actuator with corrugate profile
CN100335278C (en) * 2000-06-30 2007-09-05 西尔弗布鲁克研究有限公司 Buckle resistant thermal bend actuators
CN104827773A (en) * 2014-02-12 2015-08-12 精工爱普生株式会社 Liquid ejecting head and liquid ejecting apparatus
CN104827773B (en) * 2014-02-12 2017-01-11 精工爱普生株式会社 Liquid ejecting head and liquid ejecting apparatus
CN110121422A (en) * 2017-07-15 2019-08-13 新科实业有限公司 Film piezoelectric actuator
CN110121422B (en) * 2017-07-15 2022-06-10 新科实业有限公司 Thin film piezoelectric actuator

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GB2339724A (en) 2000-02-09
NL1011157C2 (en) 2000-08-22
CN1105020C (en) 2003-04-09
JP3037672B2 (en) 2000-04-24
GB9902053D0 (en) 1999-03-17
JP2000037877A (en) 2000-02-08
GB2339724B (en) 2000-06-14
NL1011157A1 (en) 2000-01-25

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