GB2339724B - Method for fabricating actuator of inkjet printer head - Google Patents

Method for fabricating actuator of inkjet printer head

Info

Publication number
GB2339724B
GB2339724B GB9902053A GB9902053A GB2339724B GB 2339724 B GB2339724 B GB 2339724B GB 9902053 A GB9902053 A GB 9902053A GB 9902053 A GB9902053 A GB 9902053A GB 2339724 B GB2339724 B GB 2339724B
Authority
GB
United Kingdom
Prior art keywords
inkjet printer
printer head
fabricating
actuator
fabricating actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9902053A
Other versions
GB9902053D0 (en
GB2339724A (en
Inventor
Il Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electro Mechanics Co Ltd
Original Assignee
Samsung Electro Mechanics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electro Mechanics Co Ltd filed Critical Samsung Electro Mechanics Co Ltd
Publication of GB9902053D0 publication Critical patent/GB9902053D0/en
Publication of GB2339724A publication Critical patent/GB2339724A/en
Application granted granted Critical
Publication of GB2339724B publication Critical patent/GB2339724B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
GB9902053A 1998-07-22 1999-01-29 Method for fabricating actuator of inkjet printer head Expired - Fee Related GB2339724B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR19980029374 1998-07-22

Publications (3)

Publication Number Publication Date
GB9902053D0 GB9902053D0 (en) 1999-03-17
GB2339724A GB2339724A (en) 2000-02-09
GB2339724B true GB2339724B (en) 2000-06-14

Family

ID=19544792

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9902053A Expired - Fee Related GB2339724B (en) 1998-07-22 1999-01-29 Method for fabricating actuator of inkjet printer head

Country Status (5)

Country Link
JP (1) JP3037672B2 (en)
CN (1) CN1105020C (en)
DE (1) DE19859914A1 (en)
GB (1) GB2339724B (en)
NL (1) NL1011157C2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6439693B1 (en) * 2000-05-04 2002-08-27 Silverbrook Research Pty Ltd. Thermal bend actuator
US6417757B1 (en) * 2000-06-30 2002-07-09 Silverbrook Research Pty Ltd Buckle resistant thermal bend actuators
JP3833070B2 (en) * 2001-02-09 2006-10-11 キヤノン株式会社 Liquid ejecting head and manufacturing method
JP4933765B2 (en) * 2005-10-03 2012-05-16 富士フイルム株式会社 Method for manufacturing liquid discharge head
JP4911669B2 (en) 2005-12-13 2012-04-04 富士フイルム株式会社 Piezoelectric actuator, liquid discharge head manufacturing method, liquid discharge head, and image forming apparatus
JP2015150713A (en) * 2014-02-12 2015-08-24 セイコーエプソン株式会社 Liquid ejection head and liquid ejection device
US11292255B2 (en) * 2017-07-15 2022-04-05 Sae Magnetics (H.K.) Ltd. Thin-film piezoelectric actuator

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0649008A2 (en) * 1993-10-14 1995-04-19 Ngk Insulators, Ltd. Zirconia diaphragm structure, method of producing the same, and piezoelectric/electrostrictive film element having the zirconia diaphragm structure

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4421007A1 (en) * 1994-06-18 1995-12-21 Philips Patentverwaltung Electronic component and method for its production
JP3501860B2 (en) * 1994-12-21 2004-03-02 日本碍子株式会社 Piezoelectric / electrostrictive film type element and manufacturing method thereof
DE69600167T2 (en) * 1995-04-03 1998-10-22 Seiko Epson Corp Inkjet printhead and its manufacturing process

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0649008A2 (en) * 1993-10-14 1995-04-19 Ngk Insulators, Ltd. Zirconia diaphragm structure, method of producing the same, and piezoelectric/electrostrictive film element having the zirconia diaphragm structure

Also Published As

Publication number Publication date
NL1011157A1 (en) 2000-01-25
GB9902053D0 (en) 1999-03-17
CN1242300A (en) 2000-01-26
NL1011157C2 (en) 2000-08-22
JP3037672B2 (en) 2000-04-24
GB2339724A (en) 2000-02-09
JP2000037877A (en) 2000-02-08
CN1105020C (en) 2003-04-09
DE19859914A1 (en) 2000-02-03

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20090129