CN1616712A - Method for reaction plasma spraying nano crystal titanium nitride coating - Google Patents
Method for reaction plasma spraying nano crystal titanium nitride coating Download PDFInfo
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- CN1616712A CN1616712A CN 200410072551 CN200410072551A CN1616712A CN 1616712 A CN1616712 A CN 1616712A CN 200410072551 CN200410072551 CN 200410072551 CN 200410072551 A CN200410072551 A CN 200410072551A CN 1616712 A CN1616712 A CN 1616712A
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Abstract
The reaction and plasma spraying process of preparing nano crystal titanium nitride coating on alloy base layer in metal or ceramic substrate includes the main steps of: pre-treating substrate, feeding mixed ion gas to start arc, feeding self-melting alloy powder into plasma flow for spraying to form the alloy base layer; and feeding nitrogen-containing reacting gas into the reaction chamber and feeding metal powder into the flame flow for spraying to form nano crystal titanium nitride coating on the alloy base layer. The process can form coating with raised toughness, wear resistance, friction reducing property and heat shock resistance, as well as thickness up to 600 microns, high smelting point, high hardness and excellent chemical stability. The present invention is mainly used in preparing high smelting point nano nitride ceramic coating.
Description
Technical field
The invention belongs to ceramic processing technology, particularly a kind of method of reaction plasma spraying nano crystal nitride coatings.
Background technology
Nitride not only has general ceramic inherent excellent properties, also shows metallic characters such as good toughness, conduction, heat conduction, because of its special performances, is more and more paid close attention to by people.
The preparation method that nitride coatings is present: adopt physical vaporous deposition (cathodic arc deposition) and chemical Vapor deposition process (magnetron sputtering, cathodic arc evaporation method, filtered arc deposition, multi-arc ion coating technology, plasma enhanced CVD method).
Abroad, the Akira Kobayashi (Akira kobayashi.Formation of TiN coatings by gas tunneltype plasma reactive spraying, Surface and Coatings Technology.132 (2000) 152-157) of Japan prepares the TiN coating that thickness is 150 μ m with gas tunnel type plasma gun reactive spray; At home, the main ion plating method that adopts prepares TiN coating (R.S.Lima, A.Kucuk, C.C.Berndt.Integrity of nanostructured partially stabilized zirconiaafter plasma spraying processing.Materials Science and Engeering.A313 (2001) 75-82).These coatings all are the brilliant coatings of micron, are not nanocrystalline coatings.And coating is thinner, the thickest 150 μ m.
Relevant nano coating, new through looking into, You.wang (You Wang as the U.S., Stephen Jiang, Meidong Wang, Shihe Wang, T.Danny Xiao, Peter R.Strutt.Abrasive wear characteristics of plasma sprayednanosrtuctured alumina-titania coatings.Wear.237 (2000) 176-185) Al of preparation
2O
3/ TiO
2Nano coating.
The shortcoming of nano coating is: (1) used starting material all are nanometer powders, and the quality of nanometer powder is little, directly inject difficulty in the plasma flame flow; the feeding that must be suitable for spraying with the method preparation of mist projection granulating or sintering crushing; complex process, the cost height, and the coating compactness of preparation is poor.(2) nano particle has high surface energy, very easily melts in spraying process and grows up, and is difficult to control and makes nano material keep original nanometer state.(3) from the selection of nano material, generally be that two kinds of different fusing point materials are compound, adopt single-material to make the ideal nanocrystalline material, difficulty is very big.
Summary of the invention
The object of the invention is to provide a kind of method of reaction plasma spraying nano crystal titanium nitride coating.The present invention is that a kind of preparation technology is simple, the novel method of the nanocrystalline nitride coatings of preparation that cost is low.Adopt the method for reaction and plasma spraying to prepare coat-thickness and reach 600 μ m, the nanocrystalline nitride coatings of high-melting-point, high rigidity, good chemical stability, good obdurability, higher red hardness.The present invention can overcome the fragility of nitride ceramics effectively, the toughness of raising coating and wear resistance, anti-attrition, thermal shock resistance.The present invention has realized using lower powered plasma spraying equipment, adopts the micron order metal-powder, prepares dystectic ceramic coating, has solved a difficult problem for preparing the brilliant ceramic coating of high melting point nm with plasma spraying method.
The step of the method for reaction plasma spraying nano crystal titanium nitride coating of the present invention is: its matrix is workpiece metal or pottery, its surface is an alloy underlayer, be coating above the bottom, comprise: the workpiece pre-treatment, send into and in plasma jet, send into spraying after hybrid ionic gas, the starting the arc again and spray the formation alloy underlayer with metal self-fluxing powder foot couple workpiece surface; Sending into nitrogenous reactant gases advances reaction chamber, send metal-powder to enter flame stream spraying formation nano crystal titanium nitride coating on alloy underlayer;
1) said hybrid ionic gas comprises nitrogen, argon gas and hydrogen, and it consists of: argon gas: 0.05～0.065m
3/ h; Nitrogen: 0.016～0.050m
3/ h; Hydrogen: 0.02～0.07m
3/ h;
2) said metal self-fluxing alloy is Ni90, and the weight ratio of metal-powder Ni and Al is 9: 1, and granularity is: 140～320 orders;
3) said workpiece pre-treatment is that sandblast on the body material (ball) is handled;
4) processing parameter of said spraying formation alloy underlayer is as follows:
Powder feeding gas flow: 0.03m
3/ h,
Arc power: 24.5KW,
Spray gun distance: 120mm,
Coat-thickness 0.2mm.
The processing parameter of said spraying formation nano crystal titanium nitride coating is as follows:
Powder feeding gas flow: 0.03m
3/ h
Arc power: 35～42KW
Spray gun distance: 15～30mm
Reaction gas flow speed is: 1.5～2.5m
3/ h
The spraying number of times is 2-3 time, each 1.5-3 minute.
The said nitrogenous reactant gases atmosphere of the present invention can be high-purity nitrogen (99.9%); The granularity of said spraying titanium valve is 200～500 orders; The thickness of said spraying titanium nitride coating is 1-600 μ m.
The present invention is suitable for preparing the nitride coatings of metals such as Ti, Al, Mg, Ca, In, Gr, Ga, W and Mo.
The present invention is a raw material with the micron order metal powder material, adopts conventional plasma spraying method to prepare nanocrystalline nitride material.Method is simple, and cost is low, improves the preparation efficiency of TiN coating, prepares the thick 600 μ m coatings that reach in the short period of time, has fundamentally solved with PVD, CVD legal system to be equipped with the problem that the TiN film exists.The present invention has opened up new way for the preparation of nano material, has also fundamentally solved with nano-powder material to prepare the nanocrystalline difficult problem of growing up that nano material runs into.Nanotechnology is used for inter-metallic compound material, thereby prepares the novel material that existing ceramic characteristics has metallic character again.
The method of employing reaction and plasma spraying prepares coating and has high-melting-point, high rigidity, good chemical stability, good obdurability and higher characteristics such as red hardness.The present invention can overcome the fragility of nitride ceramics effectively, the toughness of raising coating and wear resistance, anti-attrition, thermal shock resistance.The present invention has realized using lower powered plasma spraying equipment, adopts the micron order metal-powder, prepares dystectic ceramic coating, has solved a difficult problem for preparing the brilliant ceramic coating of high melting point nm with plasma spraying method.
Description of drawings
Fig. 1 is the secondary electron image on the surface of TiN coating among the embodiment 1.
Fig. 2 is a TiN coating X-ray diffraction spectral line among the embodiment 1.
Fig. 3 is the transmission electron microscope photo such as nanocrystal such as axle such as grade of TiN coating among the embodiment 1.
Fig. 4 is the secondary electron image of TiN coatings cross-section among the embodiment 1.
Fig. 5 is a TiN microhardness of coating impression secondary electron image among the embodiment 1.
Fig. 6 is the transmission electron microscope photo of dislocation (light field) in the TiN coating among the embodiment 1.
Fig. 7 be among the embodiment 1 TiN coating and rapid steel wear volume with the load change curve.
Fig. 8 is the surface microscopic secondary electron image of TiN coating among the embodiment 2.
Fig. 9 is the X-ray diffraction spectral line of TiN coating among the embodiment 2.
Figure 10 is the transmission electron microscope photo of TiN coating among the embodiment 2.
Figure 11 is the stereoscan photograph of TiN coating among the embodiment 2.
Figure 12 is the nanocrystalline transmission electron microscope photo (light field) such as axle such as grade of TiN coating different shape among the embodiment 2.
Figure 13 is a TiN coating microhardness impression secondary electron image among the embodiment 2.
Figure 14 is the change curve of the coefficient of friction of TiN coating and rapid steel among the embodiment 2 with load.
Figure 15 is projection electron picture and this regional selected area electron diffraction style of TiN coating among the embodiment 3.
Figure 16 is the cross section secondary electron image of TiN coating among the embodiment 3.
Figure 17 is a TiN coating fracture secondary electron image among the embodiment 3.
Figure 18 is the X-ray diffraction spectral line of TiN coating among the embodiment 3.
Figure 19 is a TiN microhardness of coating impression secondary electron image among the embodiment 3.
Figure 20 prepares the schema of titanium nitride coating.
Figure 21 is the A-A cross-sectional view of reaction and plasma spray gun reaction chamber.
Figure 22. the side-view of reaction and plasma spray gun reaction chamber
Embodiment is as follows:
As shown in figure 20, spray coating on the Q235 steel in the following order:
(1) at Q235 steel surface spray corundum (Al
2O
3), make surface coarsening, and expose fresh metallic surface;
(2) 500g, 140-320 purpose Nickel Aluminium Alloy Powder (Ni90) powder feeder of packing into; Powder feeder is that Beijing entropy Ker Co.,Ltd produces; Nickel Aluminium Alloy Powder is that Beijing chemical metallurgy institute produces.
(3) connect spraying equipment housing power supply; Spraying equipment is that Jiujiang spraying equipment factory produces;
(4) sending flow is 0.02m
3Industrial nitrogen and the 0.01m of/h
3The industrial argon gas of/h;
(5) connect the spray gun power supply, adjust airshed, the control arc power is 24.5KW, spray distance 120mm, powder feeding gas flow 0.03m
3/ h is at metal base surface spraying alumel (Ni90) bottom; Spray gun is that Beijing entropy Ker Co.,Ltd produces;
(6) (reaction chamber structure is seen applicant's application on the same day, and name is called: reaction plasma spraying reaction chamber apparatus: structure is that plasma gun and reaction chamber constitute reaction chamber to be installed before spray gun; Reaction chamber is connected with plasma gun.Reaction chamber is made of interior cover 1, overcoat 2, water inlet pipe 3, rising pipe 4, inlet pipe 5 and powder feeding hole 6.Interior cover and outer tube weld together the agent structure that constitutes reaction chamber, the space between interior cover and outer tube and the cooling segment of water inlet pipe and rising pipe anabolic reaction chamber, rising pipe and water inlet pipe are welded in the outer of reaction chamber and put, and take away certain heat by flowing fast of water coolant, the cooling reaction chamber.The interior cover of inlet pipe ligation chamber welds together with the interior cover and the overcoat of reaction chamber, sees Figure 21, Figure 22).
(7) with 500g, the 300 purpose titanium valves powder feeder of packing into;
(8) metallic matrix that is sprayed with alloy underlayer is put on the cooling plate.
(9) send hydrogen, nitrogen, argon gas, airshed is respectively 0.030m
3/ h, nitrogen 0.055m
3/ h, 0.035m
3/ h argon gas; Logical nitrogen in reaction chamber, airshed is 2.0m
3/ h;
(10) logical spray gun power supply is adjusted airshed, and the control arc power is 35KW, and the spray gun distance is 15mm, and the powder feeding gas flow is 0.5m
3/ h, the spray titanium valve is 3 times on the alumel bottom, and each 1.5 minutes, preparation TiN coating.
After testing:
Coat-thickness is 600 μ m
(1) composition of TiN coating, tissue, structure
Accompanying drawing 1 is the stereoscan photograph of the surface topography of TiN coating, and clearly, the TiN coatingsurface has many spheroidal particle, and the Ti powder reacts the TiN particle that has formed about 1 μ m by the particle of 40 μ m in the reactive spray process.
Accompanying drawing 2 is X-ray diffraction spectral lines of TiN coating.Mainly be the TiN phase in the coating, illustrate that the reaction of the metal titanium that sprays into and the nitrogen in the reaction chamber has generated TiN, there is the omission of N element in mutually in TiN, and the metallicity of TiN is strengthened, and helps improving the toughness of coating.
The transmission electron microscope photo of TiN coating as shown in Figure 3, coating mainly is made up of axle nanocrystal such as equally distributed, the grain size distribution scope is narrower, diameter is between 60～70nm.
By accompanying drawing 1,2,3 as can be known the coating structure of reaction and plasma spraying mainly be TiN, dense structure, and crystal grain is nano level.
Accompanying drawing 4 is the secondary electron image of reaction and plasma spraying TiN coating.The TiN coating presents the typical wave pattern of plasma sprayed coating, and layer bonded between layer is very tight, the coating densification.Combine all rightly with the Ni90 bond coating, do not have tangible interface between the two.
(2) performance of coating:
A, TiN microhardness of coating
Accompanying drawing 5 is TiN microhardness of coating impression secondary electron images, and impression is very clear, and the border slyness does not have seamed edge, and crackle does not appear in the impression border.Illustrated that coating has good toughness.The light field transmission electron microscope photo of TiN coating has a large amount of mobile dislocations as shown in Figure 6 in the coating, rather than is wrong network, and Fig. 5, Fig. 6 illustrate that the TiN coating has excellent toughness, can produce bigger viscous deformation.Experiment finds that TiN coating average microhardness can reach HV
100g1311, maximum hardness reaches HV
100g1553.6 and have excellent toughness.
The friction and wear behavior accompanying drawing 7 of B, TiN coating be TiN coating and quenching W6Mo5Cr4V2 (M2 steel) rapid steel sample under the same conditions volume wear with the relation curve of load change.Applied load in 490～1470N scope, linear velocity 0.4ms
-1, along with the increase of load, the abrasion loss of TiN coating is all the time less than quenching M2 steel, and in low load, TiN coating and M2 steel abrasion loss are more approaching; When load increased to 1470N, the abrasion loss of M2 steel was 2.5 times of TiN coating.The wear resistance of reaction and plasma spraying TiN coating under unlubricated condition particularly born the characteristic of high-load wearing and tearing far above quenching M2 rapid steel.
Preparation flow is identical with embodiment 1, and the processing parameter of spraying alloy underlayer is identical with embodiment 1, and the processing parameter of spraying TiN coating is different with embodiment 1.
Spray coating on the Q235 steel in the following order:
(1) at Q235 steel surface spray corundum (Al
2O
3), make surface coarsening, and expose fresh metallic surface;
(2) 500g ,-140～+ 320 purpose Nickel Aluminium Alloy Powders (Ni90) powder feeder of packing into; Powder feeder is that Beijing entropy Ker Co.,Ltd produces;
(3) connect spraying equipment housing power supply; Spraying equipment is that Jiujiang spraying equipment factory produces;
(4) sending flow is 0.02m
3Industrial nitrogen and the 0.01m of/h
3The industrial argon gas of/h;
(5) connect the spray gun power supply, adjust airshed, the control arc power is 24.5KW, spray distance 120mm, powder feeding gas flow 0.03m
3/ min is at metal base surface spraying alumel (Ni90) bottom; Spray gun is that Beijing entropy Ker Co.,Ltd produces;
(6) reaction chamber is installed before spray gun;
(7) with 500g, the 200 purpose titanium valves powder feeder of packing into;
(8) be sent from sub-gas hydrogen, nitrogen, argon gas, airshed is respectively 0.047m
3/ h, nitrogen 0.050m
3/ h, 0.030m
3/ h argon gas; Logical nitrogen in reaction chamber, airshed is 2.5m
3/ h;
(9) logical ion gas spray gun power supply is adjusted the gas flow of ions amount, and the control arc power is 39.5KW, and the spray gun distance is 20mm, and the powder feeding gas flow is 0.033m
3/ h, the spray titanium valve is 2 times on the alumel bottom, and each 2 minutes, preparation TiN coating.
Test detects:
Coat-thickness 470 μ m
(1) composition of TiN coating, tissue, structure
Accompanying drawing 8 is stereoscan photographs of TiN coating, the feature that obviously reflects the drop sputter among the figure, there is tiny crack in the surface, crack propagation runs into crystal grain, terminate in the intersection of hole and crystal grain, increase the path of crack propagation, consumed the energy of crack propagation, thereby improved the mechanical property of material itself.
Accompanying drawing 9 is X-ray diffraction spectral lines of TiN coating, mainly is the TiN phase in the coating, has a spot of Ti
3O, it is lower to have reacted in this coating oxide content, and the base peak of diffraction peak is more, has amorphous in the coating, and showing has the Quench phenomenon in the TiN coating forming procedure.
Accompanying drawing 10 is the particle in the reaction and plasma spraying TiN coating and the transmitted electron image of extended dislocation, has the extended dislocation (being illustrated by arrow) of herring-bone form among the figure, and this is the fault of being surrounded by the Shockley partial dislocation, has the parallel stripes that shows fault.
Accompanying drawing 11 is TiN coating stereoscan photograph pictures.There is tiny crack (Figure 11) in the coating perpendicular to the spraying face.The gas that produces during spraying is overflowed in coating deposition back, stays the pore of inwall slyness, can hinder the expansion of crackle, plays toughness reinforcing effect.
Accompanying drawing 12 is nanocrystalline transmission electron microscope photo pictures (light field) such as axle such as grade of the different shape of coating.The TiN coating is made up of the different crystal grain of orientation, existing equiax crystal (bottom right among the figure), and grain-size is between 70～100nm; Lamellar structure is arranged again, and the about 70nm of crystal grain diameter is about 500nm.
(2) performance of TiN coating
A, TiN microhardness of coating
Accompanying drawing 13 is TiN microhardness of coating impression secondary electron images, and TiN coating impression shape does not have cracking around the rule under the 100gf load, and coating itself has higher intensity and toughness, shows its σ
sValue is higher than quenching M2 steel, its σ
bValue is apparently higher than Al
2O
3Ceramic coating.The average microhardness of coating reaches HV
100g1405.
The anti-attrition performance accompanying drawing 14 of B, TiN coating is TiN coating and the coefficient of friction of rapid steel when the unlubricated abrasion change curve with load, and the increase of the The friction coefficient load of TiN coating is rapid downward trend; The The friction coefficient load increase of quenching M2 steel is then constant substantially, remains on about 0.35.The antifriction performance of TiN coating is far above the quenching M2 steel with condition.
Preparation flow is identical with embodiment 1, and the processing parameter of spraying alloy underlayer is identical with embodiment 1, and the processing parameter of spraying TiN coating is different with embodiment 1,2
Spray coating on the Q235 steel in the following order
(1) at Q235 steel surface spray corundum (Al
2O
3), make surface coarsening, and expose fresh metallic surface;
(2) 500g ,-140～+ 320 purpose Nickel Aluminium Alloy Powders (Ni90) powder feeder of packing into; Powder feeder is that Beijing entropy Ker Co.,Ltd produces;
(3) connect spraying equipment housing power supply; Spraying equipment is that Jiujiang spraying equipment factory produces;
(4) sending flow is the industrial nitrogen of 1.5L/h and the industrial argon gas of 1.5L/h;
(5) connect the spray gun power supply, adjust airshed, the control arc power is 26KW, spray distance 110mm, and powder feeding gas flow 0.03m/h is at metal base surface spraying alumel (Ni90) bottom; Spray gun is that Beijing entropy Ker Co.,Ltd produces;
(6) homemade reaction chamber is installed before spray gun;
(7) with 500g, the 500 purpose titanium valves powder feeder of packing into;
(8) send hydrogen, nitrogen, argon gas, airshed is respectively 0.04m
3/ h, nitrogen 0.050m
3/ h, 0.040m
3/ h argon gas; Logical nitrogen in reaction chamber, airshed is 1.5m
3/ h;
(9) logical spray gun power supply is adjusted gas flow, and the control arc power is 42KW, and spray distance is 30mm, and the powder feeding gas flow is 0.027m
3/ h, the spray titanium valve is 2 times on the alumel bottom, and each 3 minutes, preparation TiN coating.
After testing: coat-thickness 510 μ m
(1) microstructure of TiN coating, structure, composition analysis
The transmission electron microscope photo pattern of accompanying drawing 15 reactive spray TiN coatings and this regional selected area electron diffraction style.The selected area electron diffraction style is to be the concentric debye ring (Debye ring) in the center of circle with the transmission spot, and debye ring proof coated grains is nano level; Because all between 50～70nm, relatively large, diffraction ring is being mingled with some faint diffraction spots to nanocrystalline size.
The transverse section microtexture stereoscan photograph picture of coating as shown in figure 16.The interface does not have tangible layering in conjunction with good between coating, bottom, the matrix.The TiN coating is the wavy multilayer tissue of typical sprayed coating.
Accompanying drawing 17 is TiN coating fracture secondary electron images.Do not occur tangible cleavage step in the TiN coating fracture, whole fracture surface is rough and uneven in surface, big rise and fall, and the crack propagation path is very tortuous.The particle and the fibrous tissue that have a lot of nanoscales in the coating because fibrous tissue has the effect of strengthening and toughening, can improve the K of TiN coating
ICValue.
Accompanying drawing 18 is X-ray diffraction spectral lines of TiN coating.Mainly be the TiN phase in the coating, have a spot of Ti
3O.
(2) performance of TiN coating
The TiN microhardness of coating
Accompanying drawing 19 is TiN microhardness of coating impression secondary electron images.The micro-impression of coating is bigger, and catercorner length is about 10.6 μ m, and depth of indentation obviously increases.The impression ambient conditions are good, and no cracking phenomena, impression have run through a plurality of TiN thin layers, and do not ftracture between the layer, reacted the coating interior tissue and had higher binding strength.The average microhardness of coating reaches HV
100g1413.
Claims (5)
1, a kind of method of reaction plasma spraying nano crystal titanium nitride coating, body material is workpiece metal or pottery, its surface is an alloy underlayer, it above the bottom coating, comprise: the workpiece pre-treatment, send into and in plasma jet, send into spraying after hybrid ionic gas, the starting the arc again and spray the formation alloy underlayer, send into reactant gases and advance reaction chamber with self-fluxing powder foot couple workpiece surface, send into the reacting metal powder enter flame stream, on alloy underlayer spraying nano crystal titanium nitride coating, it is characterized in that:
1) said hybrid ionic gas comprises nitrogen, argon gas and hydrogen, and it consists of: argon gas: 0.05～0.065m
3/ h; Nitrogen: 0.016～0.05m
3/ h; Hydrogen: 0.02～0.07m
3/ h;
2) said metal self-fluxing alloy is Ni90, and the weight ratio of metal-powder Ni and Al is 9: 1, and granularity is: 140～320 orders;
3) said workpiece pre-treatment is sandblasting on the body material;
4) processing parameter of said spraying formation alloy underlayer is as follows:
Powder feeding gas flow: 0.03m
3/ h,
Arc power: 24.5KW,
Spray gun distance: 120mm,
Coat-thickness 0.2mm.
2,, it is characterized in that the processing parameter of said spraying formation nano crystal titanium nitride coating is as follows according to the method for the said reaction plasma spraying nano crystal titanium nitride coating of claim 1:
Powder feeding gas flow: 0.03m
3/ h
Arc power: 35～42KW
Spray gun distance: 15～30mm
Reaction gas flow speed is: 1.5～2.5m
3/ h
The spraying number of times is 2-3 time, each 1.5～3 minutes.
3,, it is characterized in that said reactant gases atmosphere is that purity is 99.9% nitrogen according to the method for the said reaction plasma spraying nano crystal titanium nitride coating of claim 1.
4, according to the method for the said reaction plasma spraying nano crystal titanium nitride coating of claim 1, the granularity that it is characterized in that said spraying titanium valve is-200～+ 500 orders.
5, according to the method for the said reaction plasma spraying nano crystal titanium nitride coating of claim 1, the thickness that it is characterized in that said spraying titanium nitride coating is 1-600 μ m.
Priority Applications (1)
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|---|---|---|---|
| CNB2004100725515A CN1316062C (en) | 2004-10-28 | 2004-10-28 | Method for reaction plasma spraying nano crystal titanium nitride coating |
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|---|---|---|---|
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103345958A (en) * | 2013-06-07 | 2013-10-09 | 河北工业大学 | Composite electrode material containing reactive plasma spraying nanometer TiN middle layer and preparation method thereof |
| CN104694868A (en) * | 2015-03-17 | 2015-06-10 | 河北工业大学 | Preparation method of nitride-oxide composite porous ceramic coating |
| CN106413954A (en) * | 2014-04-23 | 2017-02-15 | 三菱综合材料株式会社 | Surface-coated cutting tool in which hard coating layer exhibits excellent chipping resistance |
| CN107022730A (en) * | 2017-03-31 | 2017-08-08 | 广东省新材料研究所 | A kind of method of low-voltage plasma spraying TiN coatings |
| CN110184558A (en) * | 2019-07-05 | 2019-08-30 | 河北工业大学 | A kind of method that reaction and plasma spraying prepares nanocrystalline TiVN coating |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101073676B (en) * | 2007-06-20 | 2010-12-08 | 中国科学院上海硅酸盐研究所 | Improved arc plasma spray coating and its production |
| SE532721C2 (en) * | 2007-10-01 | 2010-03-23 | Mircona Ab | Product with anti-vibration ceramic coating for chip removal during material processing and method of manufacture |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3812514C2 (en) * | 1988-04-15 | 1998-01-29 | Focke & Co | Packaging machine with a transport spigot arranged on a transport arm for new bobbins |
| CN1183581C (en) * | 2001-08-21 | 2005-01-05 | 旺宏电子股份有限公司 | Method for manufacturing titanium oxide layer |
| FR2851737B1 (en) * | 2003-02-28 | 2006-05-26 | Commissariat Energie Atomique | CATALYST STRUCTURE, IN PARTICULAR FOR THE PRODUCTION OF FIELD EMISSION DISPLAY SCREENS |
| KR20030028795A (en) * | 2003-03-14 | 2003-04-10 | 한전건 | Full-ranged acoustic speaker diaphragm |
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2004
- 2004-10-28 CN CNB2004100725515A patent/CN1316062C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103345958A (en) * | 2013-06-07 | 2013-10-09 | 河北工业大学 | Composite electrode material containing reactive plasma spraying nanometer TiN middle layer and preparation method thereof |
| CN106413954A (en) * | 2014-04-23 | 2017-02-15 | 三菱综合材料株式会社 | Surface-coated cutting tool in which hard coating layer exhibits excellent chipping resistance |
| US10307830B2 (en) | 2014-04-23 | 2019-06-04 | Mitsubishi Materials Corporation | Surface-coated cutting tool having hard coating layer that exhibits excellent chipping resistance |
| CN104694868A (en) * | 2015-03-17 | 2015-06-10 | 河北工业大学 | Preparation method of nitride-oxide composite porous ceramic coating |
| CN104694868B (en) * | 2015-03-17 | 2017-09-29 | 河北工业大学 | The preparation method of oxide nitride composite porous ceramic coating |
| CN107022730A (en) * | 2017-03-31 | 2017-08-08 | 广东省新材料研究所 | A kind of method of low-voltage plasma spraying TiN coatings |
| CN110184558A (en) * | 2019-07-05 | 2019-08-30 | 河北工业大学 | A kind of method that reaction and plasma spraying prepares nanocrystalline TiVN coating |
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|---|---|
| CN1316062C (en) | 2007-05-16 |
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