CN1237284A - Optical position-measurement device - Google Patents
Optical position-measurement device Download PDFInfo
- Publication number
- CN1237284A CN1237284A CN97199653A CN97199653A CN1237284A CN 1237284 A CN1237284 A CN 1237284A CN 97199653 A CN97199653 A CN 97199653A CN 97199653 A CN97199653 A CN 97199653A CN 1237284 A CN1237284 A CN 1237284A
- Authority
- CN
- China
- Prior art keywords
- scale
- driver element
- measuring device
- optical position
- drive unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
- Linear Motors (AREA)
- Control Of Linear Motors (AREA)
Abstract
An optical position measuring device, in particular for a drive for precise positioning, is disclosed, which comprises two drive units which are movable in respect to each other, wherein one of the two drive units has a graduation as an integral component. The latter can be scanned by a scanning unit connected with the other drive unit for generating position-dependent output signals. The graduation is directly or indirectly disposed on a level surface of the drive unit, from which a distance between the two drive units is created in such a way that by the cooperation of the two drive units the generation of a defined relative movement between the two drive units is possible.
Description
The present invention relates to a kind of optical position measuring device, this device especially combines with drive unit and can be used for accurate localization.
In semiconductor was made, the linear electric motors that often adopt various different structure type were as drive unit, to realize the accurate relative positioning of different parts.The possible herein scope of application for example has processing of wafers or so-called wafer inspection.If the parts of a motion not only will be on the one dimension direction, and will in one plane locate, for used measuring system certain requirement is just arranged so, can measure on the different coordinate directions each with this measuring system and move.Except detecting the displacement movement on two coordinate directions, the parts that usually also will detect the requirement location are around rotatablely moving that certain axis is done.
As known, all stipulate an independent interferometer for each mobile axis by US4654571.The problem that exists except the measuring range limitation, measure light path and exist the shading etc., especially because the cost of every interferometer is higher at present, thereby expense is just higher relatively.
In these external linear electric motors that adopt, the periodicity that begins to utilize stator unit to exist is usually constructed, and except going to produce the actuation movement, also goes to reach the measurement purpose.According to the structural shape of the linear electric motors that adopted, for these structures, just relate to the electromagnetism structure of the profile of tooth of two-dimensional arrangement, perhaps just relate to the opposed polarity of periodic arrangement or the permanent magnet of identical polar.Roughly know, by means of element, perhaps scan these structures, so that produce the sweep signal of the modulation relevant with displacement with corresponding coil arrangement to the magnetic field sensitivity.These periodicity structures that are used to produce actuation movement have minimum scale cycle, and its order of magnitude is several mm.Thereby can reach the highest resolution drawing one aspect the sweep signal that is produced, but this is not enough for the precision applications occasion sometimes.
In order to improve certainty of measurement or resolution, therefore a known glass scale supporting base to be set between the driver element of two motions, be provided with the measurement scale in the above, for example the orthogonal grating measuring system with a commercialization is encased in such drive unit.On the driver element of measuring the scale motion with respect to orthogonal grating, be provided with the scanning element that one or more is fit to, just can carry out optical scanner to measuring scale in the known manner by these unit, and the position that comprises the interested anglec of rotation is carried out determining accordingly.From the principle, can reach when position finding and also can satisfy a kind of like this resolution that precision applications requires, this is because a kind of like this orthogonal grating can be with making less than the scale cycle of mm scope significantly.If adopt the stepping motor with periodic electromagnetism structure, so accessible propulsive force delicately and the driver element of stator and motion or the distance dependent between the rotor.If between two driver elements that move relative to each other, exceeded certain certain distance, so just no longer may produce an actuation movement.If the glass scale supporting base of this described commercial orthogonal grating measuring system is arranged within the thickness of the several mm between two moving cells of stepping motor, is exactly above-mentioned this situation so.
Thereby task of the present invention creates a kind of optical position measuring device exactly, especially combines with the drive unit that is used for accurately locating various different elements by this device and just can determine these relative positions exactly.The influence of the position-measurement device that the work of all kinds of drive units should not be added with mode.Require a kind of like this structure of position-measurement device simple as far as possible in addition.
This task will be finished by the optical position measuring device with Patent right requirement 1 described feature.
Favourable form of implementation according to optical position measuring device of the present invention is drawn by the measure in the relevant claim.
Owing to measure the indispensable part that scale has constituted one of two driver elements that move relative to each other, thereby guaranteed to select two distances between the driver element like this, thereby make when two driver element actings in conjunction, may produce one and definite have a high efficiency relative motion.Therefore also guaranteed the work that adjusting the distance of stepping motor worked delicately.The stepping motor that for example has a soft iron stator also can be equipped this by optical position measuring device of the present invention, and can not damage its work.If used optical measurement scale, when position finding, just guaranteed desirable high-resolution so simultaneously with mu m range scale cycle.
Then have various scheme about the formation that disposes the driver element of measuring scale by the present invention.For example can directly be arranged on a drive unit stator unit or the some of them plane surface partly measuring scale.Another kind of scheme can be placed on the scale supporting base measuring scale, and this supporting base is arranged on the plane surface of a drive unit stator unit then.A series of various enforcement organization plans have been described in the dependent claims.
Can be used to measure the moving movement of one dimension by optical position measuring device of the present invention, measure moving movement in the time of also being used in a plane, will locating and/or rotatablely move.Especially in the end under the cited situation, be provided with empty lock with moving relative to each other and hold between two driver elements of arranging, so that realize the friction free location, this is proved to be favourable measure.
If a plurality of drive unit stator unit direct neighbors by the present invention structure are arranged be arranged opposite to each other, and scan via two independent scanning elements that are arranged on the common slide block, so just draw by the described a kind of favourable form of implementation of claim 12.A kind of like this structure of implementing of position-measurement device of the present invention proves favourable, because also can measure bigger moving movement like this, and is the drive unit stator unit that requires to make relative compact simultaneously.For a kind of like this drive unit stator unit of modular construction,, also can only be furnished with a unique scanning element so basically if satisfied the requirement of stipulating for the drive unit stator unit that limits joint each other.
By other advantage of optical position measuring device of the present invention and details by following by drawing in the explanation of accompanying drawing to embodiment.
Following figure has represented:
Fig. 1 a: the top view in cross-section of first kind of form of implementation of the schematic representation of optical position measuring device of the present invention.
Fig. 1 b: the side sectional view of optical position measuring device of the present invention shown in Figure 1
Fig. 2: the side sectional view of second kind of form of implementation that briefly shows of drive unit one stator unit of optical position measuring device of the present invention.
Fig. 3 a and Fig. 3 b: two views of the third form of implementation of the drive unit-stator unit of optical position measuring device of the present invention.
Fig. 4: another kind of scheme with position-measurement device of the present invention of two static drive unit unit close to each other.
In the vertical view of a schematic representation of Fig. 1 a partly by the first kind of form of implementation that has gone out by optical position measuring device of the present invention.Fig. 1 b has represented along the side sectional view of this first kind of form of implementation of cutting line shown in Fig. 1 a.
The embodiment of shown optical position measuring device of the present invention is represented as with a drive unit and is connected, and this drive unit for example can be used for the element that moves in a plane is relative to one another carried out accurate localization in the semiconductor manufacturing.This moment, drive unit was designed to stepping motor, and it comprises a static driver element, i.e. drive unit-stator unit 1, and the driver element 2 with respect to this motion.Making the driver element 2 of motion hold not have by suitable sky lock in a kind of favourable form of implementation frictionally is bearing on drive unit-stator unit 1.Make drive unit-stator unit make to become the soft iron stator in this embodiment again, this stator has D structure part and the space between this 9 that is arranged on the matrix 5 and has three-dimensional shape projection 6.For producing actuation movement, the driver element 2 of this motion has comprised a plurality of (not expressing among the figure) controlled in known manner magnet exciting coil, that is to say by magnet exciting coil being carried out the time and go up the excitation of determining, the just location that may carry out progressively the driving device component 2 that moves on the xy plane.The driver element 2 of this motion is connected with processing unit 3 with the control of a suitable construction through a connecting line 4 for this reason.
Optical position measuring device in this example is used for the driver part 2 that moves in the xy plane is carried out desirable high-resolution location, has just produced the sweep signal related with displacement by a vertical irradiation device during with this position-measurement device.This moment is just by one or more that constitute in a known way and be arranged in the measurement scale that 10 pairs of scanning elements on the side of driver element 2 of motion belong to drive unit-stator unit 1 and scan.In Fig. 1 a and 1b, can only see a unique scanning element 10 on the side of the driver element 2 that moves, in order to detect the motion in the xy plane fully, comprise that the scanning element 2 of measuring motion around the angle that vertical axis can rotate, will have three such scanning elements.
Each scanning element 10 all includes a light source 11 and at least one for this reason and is used to measure from measuring the photoelectron detecting element 12 of the light that scale 8 reflects.Structure about scanning element 10 has diversified known solutions, additional suitable transmitting optics device for example is set, the detecting element of raster and a plurality of suitable connections etc.
When the driver element 2 of motion was made two dimensional motion in the illustrated case, the scale 8 that is scanned during with reflection or vertical irradiation was designed to the cross grating, in a known manner it was scanned to obtain the locating information of increment type.If use optical scanner, the scale cycle of measuring scale 8 so just significantly can be to the periodicity of its cube projection 6 that scans less than the scanning theory of the acquisition locating information of for example passing through other as previously mentioned.The reasonable scale cycle of cross grating measuring scale 8 is in the 1-100 mu m range.If the sweep signal of gained is adopted 100 times interpolation method, the resolution that may reach when position finding is 0.01～1 μ m so.
Certainly, below the structure about optical position measuring device of the present invention of Xiang Ximiaoshuing is not limited to illustrated situation of moving on two-dimensional directional, that is to say that the linear stepping motor that only can locate also can be equipped this device similarly on the one dimension direction.Independent guider is equipped with so in the case, for example also can abandon using the sky lock bearing apparatus of being mentioned, and the driver part that can be motion.Just should use so in the case a kind of known, one dimension, the incremental scale of reflection is as measuring scale, it has the scale structure that one-period is provided with on direction of measurement.
In order to guarantee the function of stepping motor, even this function and desired position finding combine, in represented embodiment, to comprise that the measurement scale that is arranged on the supporting base is designed to the indispensable part of drive unit-stator unit 1 to scale supporting base 7 so according to the present invention.Make this space 9 between the projection 6 of drive unit-stator unit 1 load onto filler for this purpose, so that form the flat surfaces of drive unit-stator unit 1.Should consider to propose certain requirement about the filler that is applied to space 9 in an embodiment.At first, this material must be non magnetic, so that do not influence the working method of stepping motor as much as possible.Applied in addition material should guarantee to make the smooth as far as possible surface of a drive unit-stator unit 1, and is polished as well as possiblely, and must not expand.In addition should be as far as possible with place superincumbent aspect in case of necessity and keep good adhesion.If employed filler has the similar thermal coefficient of expansion of a kind of material around as drive unit-stator unit 1, that is favourable.Under these require for example hard solder to be proved to be suitable filler.Other scheme also can adopt a kind of other nonmagnetic metal or a kind of plastics to carry out filling.
After filling being carried out in space 9, can the surface of this driver element be polished according to requirement in the flat the inside of back to back manufacturing procedure property with suitable filler.In an illustrated embodiment, on the smooth as far as possible surface of drive unit-stator unit 1, placed a lamina plane that is used as scale supporting base 7.For the material of scale supporting base, this may just relate to for example so-called spin glass or molten gel rubber material, and these materials are capped in known manner.In addition, a kind of thin metal level, for example chromium (Cr) also can be used as the scale supporting base.The thickness that is used as the aspect of scale supporting base 7 reaches several nm.
On scale supporting base 7, then place real measurement scale 8, perhaps make scale supporting base 7 have a kind of structure.Herein, for example a kind of have the reflecting part of being made by TiN and by TiO
2The periodicity structure of the non-reflective portion of making just is suitable for the situation of measurement scale 8 scanned under vertical irradiation.Another kind of scheme also can be a kind of structure, and be arranged into the reflecting part of being made by Cr this moment on the CrO of non-reflection aspect.A kind of measurement calibration 8 of this spline structure preferably just is disposed on the scale supporting base 7 that makes the Cr aspect.Structure real on the different piece for example can be realized by known photograph flat band method technology.
Also can make the scale supporting base be designed to thin metal foil at last selectively, this metal forming can form certain structure in known manner, the known technology that for example adopts steel tape to make that is to say.For example also can use laser in this case and finish structureization with other.Metal forming comprises that disposed thereon scale structure then can be adhered on the flat surfaces of drive unit-stator unit.
Commercial cross optical grating measuring system only is placed on a glass plate on the surface of drive unit-stator unit 1, in contrast, can guarantee to make not too large between the magnet exciting coil of the driver part 2 of the periodicity structure of a driver part 1 and another one motion by measure of the present invention, and actuation movement is not produced apart from d.The aspect on the flat surfaces of drive unit-stator unit 1 of being arranged in is with scale supporting base 7 and measure the order of magnitude that scale 9 total thickness reach 1 μ m.Thereby guaranteed in described embodiment, drive unit-stator unit 1 with vis-a-vis it and the driver element 2 that moves can continue acting in conjunction, and between these two driver elements 1,2, can produce a kind of so definite relative motion.
Described scheme its periodically to construct be on the side of Stationary side driver element, and another kind of scheme can certainly be in the same way, but adopted the driver element with periodical configuration then as the driver element of motion.In this case, the scale supporting base comprises that measuring scale is configured in the driver element of motion in the same way as mentioned above.
Can use second kind of structural shape of the drive unit-stator unit 21 in optical position measuring device of the present invention, shown in Fig. 2 is simple and clear.Compare its difference at first kind of described embodiment and just be, to can using the drive unit-stator unit 21 in permanent magnet-linear electric motors, a kind of other periodicity structure is arranged in its side arrangement.Therefore on a matrix 25 of drive unit-stator unit 21, be similar to first kind of embodiment put rectangular parallelepiped shape at the design lining of one-period permanent magnet 26.Another kind of scheme can make these permanent magnets all be arranged on the identical separately direction.By correspondingly being controlled at other magnet exciting coil in driver element separately, then make one (not expression) to produce actuation movement in known manner with respect to the driver element of this motion.
As first kind of embodiment, this scheme has been stipulated again and will have been carried out filling to the 29 usefulness fillers of the space between the permanent magnet 26, so that make driver element 21 form a smooth surface.On such flat surfaces, just and then place an aspect that is used as scale supporting base 27, on this aspect, arranged measurement scale 28 again.About the possible structure of scale supporting base, measure scale 28 and then should consult above-mentioned enforcement structure the requirement of filler.
See two partial views among sketch 3a and the 3b by another form of implementation of optical position measuring device of the present invention.Measure scale 58 and be arranged on 51 li of static driver elements again, be similar to first embodiment, unit 51 has projection 56 and is positioned at a kind of like this periodicity structure in its middle space 59 on matrix 55, that is to say to be designed to the electromagnetic type stator.What do not express is the driver element that is positioned at the motion with magnet exciting coil of arranging drive unit-stator unit 51 tops, and one or more scanning element that is used for the measurement scale 58 of scanning on drive unit-stator unit 51 of vertical irradiation.Different with the two kinds of described structural shapes in front is, the indispensable part of the measurement scale 58 of cross grating as static driver element 51 will be designed to, directly be arranged on the smooth same surface, that is to say the scale supporting base that neither one is independent.The leveling of respective surfaces is carried out as previously mentioned, and just by adopting the filler that is fit to, for example hard solder carries out filling to space 56.Before real foundation structure, also should measure scale 58 to form then with surface finish.This moment, this measurement scale 58 can be made up of the part with non-reflection periodic arrangement, reflection again, for example by TiN/TiO
2Or the like.
The another kind of scheme different with represented scheme then can be according to Testing requirement, make to measure scale and also only be arranged in the part scope on drive unit stator unit surface, for example only on the flat surfaces of projection or the like.
Fig. 4 schematic representation a kind of optical position measuring device of the present invention of special favourable structural shape.Two independent drive unit-stator units 31.1,31.2 are arranged herein, and they are disposed adjacent one another.These two drive unit-stator units 31.1,31.2 structure corresponding to the structure of first embodiment that narrates among Fig. 1 a and Fig. 1 b, that is to say at drive unit-stator unit 31.1,31.2 top separately as inseparable part, arranged that same cross grating is as measuring scale 38.1,38.2.Regulation has the driver element 32 of motion on these two drive unit-stator units 31.1,31.2, holds through empty lock this driver element 32 is located in the xy plane.In an illustrated embodiment, the driver element 32 of motion is comprising two scanning elements 40.1,40.2, and they are arranged on two athwartship planes of driver element 32, and with these two unit cross grating measuring scale are carried out optical scanner.Except determining the amount of movement in the xy plane, with shown in device also can detected activity driver element 32 around the rotation of a vertical axis on directions X.
Relevant this embodiment should be noted that on basis of the present invention if adopt this drive unit, so Huo Dong driver element also can be realized bigger moving range, and may realize high-resolution optical position mensuration simultaneously.A plurality of for this reason less drive unit-stator units of all constructing in the mode of being narrated just can be contacted mutually.Therefore just do not need to process a unique large-area drive unit stator unit, comprise large-area measurement scale; And the stator dimensions that can adopt certain to determine on the contrary, this stator dimensions correspondingly often is connected with each other according to desired moving range.
In the embodiment shown in fig. 4, the scanning element 40.1,40.2 that two spaces are arranged in the side arrangement of the driver element 32 of activity, that is to say, with two scanning elements 40.1,40.2 in a joint that must not surmount the drive unit stator unit 31.1,31.2 of mutual restriction site.Scheme in another form of implementation is to make movable driver element, even when drive unit-stator unit is module structure, also includes only a unique scanning element.In this case for having gone out certain requirement again, even on this position, also can accurately locate so that guarantee by the joint that scanning element surmounted.In first kind of scheme, by enough accurately making this measurement scale, especially, just can guarantee directly mutually in the joint scope of the drive unit-stator unit of restriction site, on this position, can not obtain the measurement of mistake.Another kind of selection has only a unique scanning element exactly in second kind of scheme.This just can be between the drive unit stator unit of mutual restriction site a certain size spacing of one of regulation.The spacing of this regulation can be for example when the individual module assembling being constituted whole drive unit stator unit, set up by a kind of suitable optical adjustment device.So also just can guarantee, when surmounting joint, can not cause mistake in the position finding with this scanning element.
Therefore on by the basis of consideration of the present invention a series of enforcement organization plan is just arranged, combining with various stepping motor scheme, they have all guaranteed reliable, high-resolution optical position mensuration.
Claims (15)
- Drive unit be used for pinpoint optical position measuring device, this device comprises two driver elements that move relative to each other (1,2; 21; 31.1; 31.2,32; 51), two driver elements (1; 21; 31.1; 31.2; 51) one of have one and measure scale (8; 28; 38.1; 38.2; 58) as indispensable part, this measure scale can by one with other driver element (2; 32) scanning element (10 that is connected; 40.1,40.2) scan with the generation output signal relevant with the position, and make this measure scale (8; 28; 38.1; 38.2; 58) directly or indirectly be arranged in driver element (1 at least; 21; 31.1; 31.2; On the subrange of a flat surfaces 51), thus at two driver elements (1,2; 21; 31.1; 31.2,32; 51) form a problem (d) between, thereby make these two driver elements (1; 2; 21; 31.1; 31.2; 32; 51) when acting in conjunction, can produce one at two driver elements (1; 2; 21; 31.1; 31.2; 32; 51) relative motion of determining between.
- 2. by the described optical position measuring device of claim 1, in addition, measure scale (8; 28; 38.1; 38.2) be disposed in each driver element (1; 21; 31.1; 31.2) flat surfaces on the aspect that is used as scale supporting base (7.27) on, and selecting to be used as scale supporting base (7; 27) aspect comprises measures scale (8; 28; 38.1; 38.2) when interior whole thickness, should make this driver element (1; 21; 31.1; 31.2) can with the other driver element (10 with respect to this motion; 40.1,40.2) and acting in conjunction mutually.
- 3. by the described optical position measuring device of claim 1,, measure in the subrange on the flat surfaces that scale (58) is set at the driver element (51) that is located immediately at each at least herein.
- 4. press the described optical position measuring device of claim 2, scale supporting base (7,27) and measurement scale (8; 28; 38.1; 38.2) all belonging to drive unit-stator unit, this unit has comprised having projection (6; 26) and be positioned at space (9 in the middle of it; The part of D structure 29), these structure parts are all periodically arranged on one dimension or two-dimensional directional.
- 5. by the described optical position measuring device of claim 2, herein, scale supporting base (27) and measure scale (29) and attach troops to a unit, this unit in the drive unit stator unit comprised have definite, the part (26) of the magnetization sample of periodic arrangement on one dimension or two-dimensional directional.
- 6. by the described optical position measuring device of claim 4, at this moment, the space in drive unit-stator unit (9,29) are equipped with filler.
- 7. by the described optics of claim 6 position device measurement mechanism, herein, filler has the similar thermal coefficient of expansion of material around as drive unit one stator unit.
- 8. by the described optical position measuring device of claim 2, select the spin glass material herein as scale supporting base (7; 27) material.
- 9. by the described optical position measuring device of claim 2, select molten gel rubber material herein as scale supporting base (7; 27) material.
- 10. press the described optical position measuring device of claim 2, herein, scale supporting base (7; 27) be designed to the metal forming that approaches.
- 11.,, comprised reflecting part and non-reflective portion herein as the metal film of measuring scale by the described optical position measuring device of claim 10.
- 12. be used for accurately locating the device of parts that in a plane, move, comprised by measuring scale (38.1 having of the described two or more adjacent layouts of claim 1; 38.2) driver element (31.1,31.2), and have one with respect to this motion, have the driver element (32) of a scanning element (40.1,40.2) at least, this scanning element is to be designed for being arranged in other driver element (31.1; 31.2) on measurement scale (38.1; 38.2) carry out optical scanner.
- 13. by the described device of claim 12, herein, the driver element of this motion (32) has the scanning element (40.1,40.2) of two standoff distances.
- 14. by the described device of claim 12, herein, the driver element of this motion comprises a unique scanning element, and these driver elements are arranged with the directly mutual restriction site ground of position measurement scale thereon, and managed scale accurately mutually and then in the survey of the mutual restriction site of joint.
- 15. by the described device of claim 12, herein, the driver element of this motion includes a unique scanning element, and these driver elements are then arranged with a definite spacing mutually with the measurement scale that is arranged in above it.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19646771.3 | 1996-11-13 | ||
| DE19646771 | 1996-11-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1237284A true CN1237284A (en) | 1999-12-01 |
| CN1111936C CN1111936C (en) | 2003-06-18 |
Family
ID=7811460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN97199653A Expired - Fee Related CN1111936C (en) | 1996-11-13 | 1997-10-08 | Optical position-measurement device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP3429007B2 (en) |
| CN (1) | CN1111936C (en) |
| DE (1) | DE59704038D1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100419382C (en) * | 2000-10-12 | 2008-09-17 | 约翰尼斯海登海恩博士股份有限公司 | Position measuring device and a method for operating a position measuring device |
| CN103837177A (en) * | 2012-11-26 | 2014-06-04 | 约翰内斯·海德汉博士有限公司 | Optical position-measuring device |
| CN109769407A (en) * | 2016-08-16 | 2019-05-17 | 罗伯特·博世有限公司 | For estimating in motor the optical sensor of rotor-position and method and including the motor of optical sensor |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1519158B1 (en) * | 2003-09-23 | 2010-08-11 | Dr. Johannes Heidenhain GmbH | Position measuring device |
| JP4784905B2 (en) * | 2004-09-03 | 2011-10-05 | 株式会社安川電機 | XY positioning device |
-
1997
- 1997-10-08 JP JP52208098A patent/JP3429007B2/en not_active Expired - Fee Related
- 1997-10-08 CN CN97199653A patent/CN1111936C/en not_active Expired - Fee Related
- 1997-10-08 DE DE59704038T patent/DE59704038D1/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100419382C (en) * | 2000-10-12 | 2008-09-17 | 约翰尼斯海登海恩博士股份有限公司 | Position measuring device and a method for operating a position measuring device |
| CN103837177A (en) * | 2012-11-26 | 2014-06-04 | 约翰内斯·海德汉博士有限公司 | Optical position-measuring device |
| CN103837177B (en) * | 2012-11-26 | 2018-04-10 | 约翰内斯·海德汉博士有限公司 | Optical position measuring instrument |
| CN109769407A (en) * | 2016-08-16 | 2019-05-17 | 罗伯特·博世有限公司 | For estimating in motor the optical sensor of rotor-position and method and including the motor of optical sensor |
| CN109769407B (en) * | 2016-08-16 | 2022-04-15 | 罗伯特·博世有限公司 | Optical sensor and method for estimating rotor position in electric motor, and electric motor including optical sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3429007B2 (en) | 2003-07-22 |
| JP2001503598A (en) | 2001-03-13 |
| CN1111936C (en) | 2003-06-18 |
| DE59704038D1 (en) | 2001-08-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100818581B1 (en) | Stage device | |
| EP0784527B1 (en) | X-y-theta positioning mechanism | |
| CN100346569C (en) | Position detecting device of linear motor | |
| US6949845B2 (en) | Planar motor | |
| US5801462A (en) | Linear motor and image reading apparatus | |
| US5793128A (en) | Encoder and motor with an encoder | |
| CN101971471A (en) | Position measurement using magnetic fields | |
| US5896200A (en) | Optical design for laser encoder resolution extension and angular measurement | |
| CN102136300A (en) | Three-section combined type ultraprecise positioning table and positioning method thereof | |
| TWI248850B (en) | Determination of a movable gantry position | |
| CN1111936C (en) | Optical position-measurement device | |
| US4772835A (en) | Interactive multiaxis encoder positioning system | |
| US5963330A (en) | Optical position measuring device | |
| US20050122079A1 (en) | Multi-axes, sub-micron positioner | |
| CN111564953A (en) | Planar motor displacement device | |
| CN109660064B (en) | Displacement device based on hybrid displacement sensor and planar motor | |
| US7441445B2 (en) | Surface information measuring apparatus and surface information measuring method | |
| US6069416A (en) | Two-axis motor platen and method for making | |
| EP4053497A1 (en) | Stage device, lithography apparatus, and article manufacturing method | |
| JP2004286662A (en) | Absolute position detector using magnetic sensor | |
| CN211880280U (en) | Planar motor displacement device | |
| JPH06320367A (en) | Positioning table device | |
| CN101317140B (en) | Moving coil actuator with expandable range of motion | |
| JPH116708A (en) | Inductive position measuring unit | |
| CN1816962B (en) | Planar direct drive unit comprising a position measuring system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20030618 Termination date: 20091109 |