CN1233886C - Single crystal growing furnace three-dimensional thermal field distributing automatic testing system and method thereof - Google Patents
Single crystal growing furnace three-dimensional thermal field distributing automatic testing system and method thereof Download PDFInfo
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- CN1233886C CN1233886C CN 02157935 CN02157935A CN1233886C CN 1233886 C CN1233886 C CN 1233886C CN 02157935 CN02157935 CN 02157935 CN 02157935 A CN02157935 A CN 02157935A CN 1233886 C CN1233886 C CN 1233886C
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Abstract
The present invention discloses an automatic testing system for a single crystal furnace three-dimensional thermal field distribution and a method thereof. The system is composed of a data acquisition unit, a signal collecting and forwarding unit, an A/D converting unit, a data analyzing and processing unit, and a data displaying and outputting unit. The units are connected by signal lines. The testing system and the testing method provided by the present invention can conveniently and accurately measure the three-dimensional distribution condition of a single crystal furnace thermal field, obtain millions of data points which are uniformly distributed in the thermal field, automatically record the test results into a data bank, draw an accurate thermal field three dimensional temperature distributing chart and draw a two-dimensional profile chart at any angle so as to obtain a real temperature distribution profile chart which brings convenience for a single crystal furnace thermal field research.
Description
Technical field
The present invention relates to a kind of test macro and testing method, refer to a kind of single crystal growing furnace three-dimensional thermal field distribution full-automatic test system and testing method thereof especially.This test macro and testing method are mainly used in Czochralski method mono-crystal furnace and (comprise conventional Czoncharlski method (Cz method), liquid encapsulate Czochralski technique (LEC method) and vapour pressure control vertical pulling method (VCZ method), the gradient freeze method single crystal growing furnace (comprises VGF (VGF method), horizontal gradient freezing method (HGF method), the bridgman method single crystal growing furnace (comprises the three-dimensional thermal field distribution tests of horizontal bridgman method (HB method), vertical bridgman method (VB method), can also be used for the automatic test of other thermal field with cylindrical distribution.
Background technology
At present, the test of the thermal field of single crystal growing furnace is general adopt measure in the thermal field several to dozens of very the method for dispersive temperature spot come the coarse evaluation thermal field to distribute, these temperature spots generally have only the simple geometric regularity of distribution (as along some specific line, face), even there is not a tangible regularity of distribution, rely on tester's experience to determine test point fully, the temperature variations of all the other points is fully by means of obtaining to the analysis of limit test point or by experience estimation in the thermal field.Because sampling spot is few, discreteness is big, and tester's role of subjective intentions is more obvious, and the measured result error is bigger, the changing conditions of reflection thermal field that can not be objective and accurate, and particularly partial temperature variations is unfavorable for the R and D of crystal technique.
Summary of the invention
In order to overcome the shortcoming and defect of prior art, the invention provides full-automatic test system and testing method thereof that a kind of thermal field of single crystal furnace distributes, use test macro provided by the invention and testing method to make things convenient for, measure the distributed in three dimensions situation of thermal field of single crystal furnace exactly, this system has good spatial resolution, can obtain the material point more than millions of relatively uniformly that in thermal field, distributes fast, and test result is recorded into database automatically, draw out the three-dimensional temperature profile of more accurate thermal field, and can make two-dimensional cross section at any angle, obtain more real temperature profile, for thermal field of single crystal furnace research provides a kind of test macro easily and testing method.
For achieving the above object, the present invention is by the following technical solutions: a kind of single crystal growing furnace three-dimensional thermal field distribution full-automatic test system, mainly compile retransmission unit, A/D converter, data analysis processing unit and data presentation output unit and form, connect by signal wire according to above-mentioned putting in order between each unit by data acquisition unit, signal;
Described data acquisition unit is made up of thermocouple arrays, altitude signal transmitter and deflection angle signal pick-off; Described signal compile retransmission unit by signal compile the ring and signal repeater form; Described data analysis processing unit is made up of computer data process software, data storage system and thermal field analytical system.
Described thermocouple arrays is made up of temperature element, support and hollow crucible pole.
Described support comprises two crossbeams up and down, and is porose in the middle of the crossbeam, is used for fixing temperature element.
Described hollow crucible pole is connected by screw thread, welding or riveted joint mode with support.
Described hollow crucible pole compiles ring with signal and is connected by screw thread, welding or riveted joint mode.
Described deflection angle signal pick-off can adopt velocity gauge coupled system internal clocking or encoder or angular transducer.
Described signal wire passes the hollow crucible pole from temperature element and contacts by the brush mode with described signal repeater.
Described A/D converter is high-speed, multi-path mould/number conversion plate.
A kind of single crystal growing furnace three-dimensional thermal field distribution full-automatic testing method, it may further comprise the steps:
1) circular frequency, support height, hollow crucible pole rising or falling speed and the thermopair arrangement pitch by computer input rack rotating speed;
2) thermocouple arrays is measured the temperature signal in the thermal field, the altitude signal of altitude signal sensor measurement thermocouple arrays in thermal field, the deflection angle signal pick-off is measured the deflection angle signal of thermocouple arrays in thermal field, and the signal that will test is transferred to signal by signal wire and compiles retransmission unit;
3) signal compiles retransmission unit and each thermocouple signal is coupled amplifies and be forwarded to A/D converter;
4) analog signal conversion that will test of A/D converter is the discernible numerary signal of computer, and numerary signal is sent to the data analysis processing unit;
5) the data analysis processing unit carries out interpolation processing to test data, deposit test result in database, temperature, height and deflection angle signal is corresponding one by one, draw out single crystal growing furnace three-dimensional thermal field distribution plan, the thermal field distribution plan is outputed to the data presentation output unit.
Because the present invention has adopted above technical scheme, so have the following advantages: 1, amount of test data is big, is evenly distributed, the temperature distribution situation of reflection thermal field that can be full and accurate.2, level of automation height, relating operation such as data gathering, interpolation processing is controlled processing by computer fully, and the researchist only need set the three-dimensional distribution map that several simple and direct parameters (as support rotating speed, support height, crucible pole rising or falling speed etc.) can obtain thermal field.3, can utilize software to obtain the thermal field data in any cross section and longitudinal section, and draw the temperature distribution X-Y scheme on this cross section, be very easy to the thermal field research work.4, can also utilize analogue crystals, under environment, carry out the thermal field simulation test,, make things convenient for the research work of crystal growth to obtain the thermal field data of more approaching actual growth near the real crystal growth.
Description of drawings
Fig. 1 is system module annexation figure of the present invention
Fig. 2 is a system architecture synoptic diagram of the present invention
Fig. 3 is signal processing flow figure of the present invention
Embodiment
As shown in Figure 1, the full-automatic test system that single crystal growing furnace three-dimensional thermal field of the present invention distributes compiles retransmission unit, A/D converter, data analysis processing unit and data presentation output unit by data acquisition unit, signal and forms, and connects by signal wire according to above-mentioned putting in order between each unit.
As Fig. 2, shown in Figure 3, data acquisition unit is made up of thermocouple arrays, altitude signal transmitter and deflection angle signal pick-off.
Thermocouple arrays is made up of temperature element 1, support 2 and hollow crucible pole 4.
Support 2 is made up of two crossbeams 21 and 22 up and down, the porose temperature element 1 that is used for fixing in the middle of the crossbeam, temperature element 1 passes from the hole, and according to the difference of the temperature range of testing, temperature element 1 can freely be selected electricity components such as various forms of thermopairs, thermistor for use.
Support 2 can be made by high temperature ceramic materials such as graphite, aluminum oxide, silicon carbide, boron nitride, aluminium nitride, silicon-dioxide, guarantees that it is at high temperature indeformable, if the temperature of test is lower, also can adopt metal or alloy materials such as iron and steel, copper, aluminium to make.
Hollow crucible pole 4 is connected by screw thread, welding or riveted joint mode with the bottom end rail 22 of support 2.The signal that temperature element 1 tests out transmits by signal wire 3, and signal wire 3 passes hollow crucible pole 4 from temperature element 1 and is pooled to signal and compiles retransmission unit.
It is other that the altitude signal transmitter is installed in hollow crucible pole 4, is used for measuring the height of thermocouple arrays in thermal field, can adopt the grating chi to realize.
The deflection angle signal pick-off is used for measuring the deflection angle of thermocouple arrays in thermal field, and the deflection angle transmitter can adopt velocity gauge coupled system internal clocking or encoder or angular transducer to realize.According to the difference of the equipment that is adopted, velocity gauge, encoder or angular transducer can select to adopt the form of software or hardware flexibly.
Signal compile retransmission unit by signal compile the ring 5 and signal repeater 6 form.
Hollow crucible pole 4 and signal compile ring 5 and are connected by screw thread, welding or riveted joint mode.Signal compiles ring 5 and signal repeater 6, and the two is used, and the signal that the temperature element 1 that constantly will rotate produces passes to actionless A/D converter 7.The signal repeater 6 that is fixed on the body of heater contacts by the signal wire 3 that brush and signal compile in the ring 5, the signal of obtaining under rotating state compiles the temperature signal by temperature element 1 generation that encircles on 5, signal repeater 6 will compile ring 5 signals that transmit from signal and amplify, be amplified to be suitable as mould/unitary input signal of number conversion plate after, again with this signal forwarding to A/D converter 7.
Hollow crucible pole 4 can drive support 2 and rotate, but on hollow crucible pole 4 the socket belt pulley, rotate by belt, electric motor driving hollow crucible pole 4.
The numerary signal that temperature signal, altitude signal and the deflection angle conversion of signals that A/D converter 7 is responsible for that temperature element 1 is measured becomes computer to discern.In order to satisfy the requirement of measuring real-time, A/D converter 7 must adopt high-speed, multi-path mould/number conversion plate, as grind magnificent PCL-818#L type, this change-over panel can once be finished the conversion of all temperature signals in a short period of time, can effectively eliminate the error that the continuous variation (rotation that the thermometric assembly is not stopping) because of the temperature element position is brought.
Data analysis processing unit 8 is made up of computer data process software, data storage system and thermal field analytical system.The computer data process software is changed position and temperature correlation electrical signal that A/D converter 7 produces, parameter according to operator's input, as support rotating speed, support height, crucible pole rising or falling speed, thermopair arrangement pitch, utilize velocity gauge coupled system internal clocking or encoder or angular transducer all can obtain the deflection angle parameter θ of thermopair support in thermal field.Difference according to the equipment that is adopted, velocity gauge, encoder or angular transducer can select to adopt the form of software or hardware flexibly, as adopt velocity gauge to cooperate internal clocking, deflection angle theta=rotating speed * time-n * 2 π, if with angular transducer or encoder, its signal can directly provide the deflection angle size.Utilize the size of support itself and the arranged distribution of thermopair can determine radical length parameter ρ, the grating chi equal altitudes transmitter that utilization is installed on the crucible pole next door can obtain axial parameter z, thereby obtaining comparatively accurately, the locus (comprises ρ, θ, three coordinates of z) and in this locational temperature.
The position that the computer data process software will obtain after will handling and the data of temperature information are stored into data-storage system according to the form of predesignating with putting in order.Because the test point data volume is very big, for the ease of preservation and further processing, data-storage system needs test data is deposited in the system of suitable data storehouse, as SQL Server, and ACCESS, DB2, Oracle, the also Database Systems that can oneself develop.
The thermal field analytical system can be carried out signal and be gathered, with temperature, highly, the deflection angle signal is corresponding one by one, draw the corresponding relation of temperature signal and position signal, because the numerical value that tests out remains discrete data point, the thermal field analytical system can be utilized average interpolation, interpolation algorithms such as Lagrange's interpolation or B spline interpolation carry out interpolation processing to the discrete data of testing, data to the position that do not measure are filled up, draw out the distribution plan of single crystal growing furnace three-dimensional thermal field, can also analyze the temperature distribution of drawing out on any cross section and the longitudinal section, and output to the data presentation output unit.
The data presentation output unit can show the single crystal growing furnace three-dimensional thermal field distribution plan that tests out on computers, and can print output to test result as required.
Method to single crystal growing furnace three-dimensional thermal field distribution full-automatic testing of the present invention describes below:
When needs distribute when testing to the single crystal growing furnace three-dimensional thermal field, operator are according to the test needs, can manually pass through some basic parameters of computer settings, the angular velocity omega, support height z, crucible pole rising or falling speed and the thermopair arrangement pitch that comprise the support rotating speed, some certain height z in thermal field
1On, when support rotates, in a sampling period T of A/D converter 7, N props up thermopair will gather N road temperature signal, promptly obtain N temperature data points, will obtain (2N-1) individual temperature data points along the diametric(al) of each circular cross section along radial direction.Support will be measured (2 π/(ω T)) * (N-1)+1 data point with a moving week of angular velocity omega revolution, can draw out temperature distribution X-Y scheme on the cross section of some certain height in the thermal field according to these material points.The hollow crucible pole drops to another assigned altitute z
2, repeat above the measurement, can obtain the temperature distribution X-Y scheme on the new cross section.Data-storage system is gone into the data storage that tests out in the database in the computer, because these material points remain discrete, the thermal field analytical system is utilized average interpolation, Lagrange's interpolation, interpolation algorithms such as B spline interpolation, fill up the position that does not measure, can draw out the three-dimensional distribution map of temperature in the thermal field, and can intercept the thermal field data in any cross section and longitudinal section, draw the temperature distribution X-Y scheme on this cross section, for the thermal field research work provides full and accurate experiment test data and analysis more intuitively.All analytical resultss can send color printer output.Can also adjust the thermopair arrangement pitch in addition, so that carry out careful localized heat Field Distribution.
The present invention both can measure unloaded thermal field, also thermopair can be inserted in the analogue crystals, under environment, carry out the thermal field simulation test near the real crystal growth, to obtain the thermal field data of more approaching actual growth, can reduce expensive true experiment number and fund input effectively.
Claims (9)
1, a kind of single crystal growing furnace three-dimensional thermal field distribution full-automatic test system, it is characterized in that: it mainly compiles retransmission unit, A/D converter, data analysis processing unit and data presentation output unit by data acquisition unit, signal and forms, and connects by signal wire according to above-mentioned putting in order between each unit;
Described data acquisition unit is made up of thermocouple arrays, altitude signal transmitter and deflection angle signal pick-off; Described signal compile retransmission unit by signal compile the ring and signal repeater form; Described data analysis processing unit is made up of computer data process software, data storage system and thermal field analytical system.
2, single crystal growing furnace three-dimensional thermal field distribution full-automatic test system as claimed in claim 1, it is characterized in that: described thermocouple arrays is made up of temperature element, support and hollow crucible pole.
3, single crystal growing furnace three-dimensional thermal field distribution full-automatic test system as claimed in claim 2 is characterized in that: described support comprises two crossbeams up and down, and is porose in the middle of the crossbeam, is used for fixing temperature element.
4, single crystal growing furnace three-dimensional thermal field distribution full-automatic test system as claimed in claim 2, it is characterized in that: described hollow crucible pole is connected by screw thread, welding or riveted joint mode with support.
5, single crystal growing furnace three-dimensional thermal field distribution full-automatic test system as claimed in claim 2, it is characterized in that: described hollow crucible pole compiles ring with signal and is connected by screw thread, welding or riveted joint mode.
6, single crystal growing furnace three-dimensional thermal field distribution full-automatic test system as claimed in claim 1 is characterized in that described deflection angle signal pick-off can adopt velocity gauge coupled system internal clocking or encoder or angular transducer.
7, single crystal growing furnace three-dimensional thermal field distribution full-automatic test system as claimed in claim 1, it is characterized in that: described signal wire passes the hollow crucible pole from temperature element and contacts by the brush mode with signal repeater.
8, single crystal growing furnace three-dimensional thermal field distribution full-automatic test system as claimed in claim 1, it is characterized in that: described A/D converter is high-speed, multi-path mould/number conversion plate.
9, the full automatic testing method that distributes of the single crystal growing furnace three-dimensional thermal field in any one test macro in a kind of claim 1～8, it may further comprise the steps:
1) circular frequency, support height, hollow crucible pole rising or falling speed and the thermopair arrangement pitch of setting support rotating speed;
2) thermocouple arrays is measured the temperature signal in the thermal field, the altitude signal of altitude signal sensor measurement thermocouple arrays in thermal field, the deflection angle signal pick-off is measured the deflection angle signal of thermocouple arrays in thermal field, and the signal that will test is transferred to signal by signal wire and compiles retransmission unit;
3) signal compiles retransmission unit and each thermocouple signal is coupled amplifies and be forwarded to A/D converter;
4) analog signal conversion that will test of A/D converter is the discernible numerary signal of computer, and numerary signal is sent to the data analysis processing unit;
5) the data analysis processing unit carries out interpolation processing to test data, deposit test result in database, temperature, height and deflection angle signal is corresponding one by one, draw out single crystal growing furnace three-dimensional thermal field distribution plan, the thermal field distribution plan is outputed to the data presentation output unit.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 02157935 CN1233886C (en) | 2002-12-20 | 2002-12-20 | Single crystal growing furnace three-dimensional thermal field distributing automatic testing system and method thereof |
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| CN 02157935 CN1233886C (en) | 2002-12-20 | 2002-12-20 | Single crystal growing furnace three-dimensional thermal field distributing automatic testing system and method thereof |
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| CN1510176A CN1510176A (en) | 2004-07-07 |
| CN1233886C true CN1233886C (en) | 2005-12-28 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101824648B (en) * | 2010-04-27 | 2013-01-16 | 中山大学 | Error processing system of automatic photoelectric crystal furnace and method thereof |
| CN107815729A (en) * | 2016-09-12 | 2018-03-20 | 上海新昇半导体科技有限公司 | A kind of single crystal growing furnace |
| CN110595632A (en) * | 2019-08-26 | 2019-12-20 | 南京理工大学 | Three-dimensional temperature measuring device and method of integrated array type thermocouple bundle |
| CN113049022A (en) * | 2021-03-09 | 2021-06-29 | 西安奕斯伟设备技术有限公司 | Detection equipment and single crystal furnace |
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