CN1232846C - Mach-Zehnder interference type sensing device based on micro curved transmission waveguide - Google Patents
Mach-Zehnder interference type sensing device based on micro curved transmission waveguide Download PDFInfo
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- CN1232846C CN1232846C CN 200310108575 CN200310108575A CN1232846C CN 1232846 C CN1232846 C CN 1232846C CN 200310108575 CN200310108575 CN 200310108575 CN 200310108575 A CN200310108575 A CN 200310108575A CN 1232846 C CN1232846 C CN 1232846C
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Abstract
The present invention discloses a Mach-Zehnder interference sensing device based on microbending transmission waveguide. One end of input light waveguide is connected with a laser source, the other end is respectively connected with the ends of a bent sensing light waveguide arm and a bent reference light waveguide arm after the end is connected with one end of a first coupler, and the end is connected with output light waveguide through a second coupler. A sensing sample pool is arranged outside the sensing light waveguide arm, and a standard sample pool is arranged outside the reference light waveguide arm. Because the bent transmission waveguide is used, more light energy enters substances to be detected in a detection region so as to be transmitted, and the light energy is sensitive to the refractivity variation in the detection region; software is used for the optimal design of important parameters of a microbending structure, amplitude values and periods, and the sensitivity and the signal-to-noise ratio of the sensing device to environmental parametric variation are greatly improved. A standard sample is arranged on one side of the reference arm, light transmitting between the sensing arm and the reference arm has approximate loss and phase variation, and detectivity can be further improved.
Description
Affiliated technical field
The present invention relates to sensing device, relate in particular to a kind of Mach-Zehnder interference type sensing device based on micro curved transmission waveguide.
Background technology
Mach-Zehnder (M-Z) interferometer is made up of two three-dB couplers and two waveguide arms, and its basic structure is the pair of parallel optical waveguide, and the waveguide two ends connect the Y shape beam splitter of a 3dB respectively.By changing refractive index, make the light path respective change, form and relevantly strengthen or disappear mutually.Utilize Mach-Zehnder (M-Z) interference device to carry out sensing, wherein an arm is exposed in the environment exactly, variation along with extraneous parameter, variation as temperature, concentration, distortion, stress etc., changed the effective refractive index of this arm transmission light, make output interference of light result change, thereby reach the purpose of surveying the external environment parameter.The Mach-Zehnder of integrated optics type (M-Z) interference device is having increasing application aspect chemistry and the bio-sensing, has to manufacture and design advantages such as simple, that the production error requirements is low.
There is the not high problem of sensitivity in existing Mach-Zehnder (M-Z) interference sensor.The change that extraneous parameter changes the effective refractive index that causes is generally very little, though the method that adopts MZ to interfere can detect this variation, its precision and sensitivity are all not high enough.
Summary of the invention
In order to improve sensitivity to the environment variations in refractive index, the purpose of this invention is to provide a kind of Mach-Zehnder interference type sensing device based on micro curved transmission waveguide, the transmission waveguide of traditional straight wave guide structure with bending replaced, make the effective refractive index of transmission light more responsive environmental change.
In order to achieve the above object, the technical solution used in the present invention is: an end of its input waveguide is connected with LASER Light Source, the other end of input waveguide is connected with an end of first coupling mechanism, the other end of first coupling mechanism connects an end of the reference light waveguide arm of the sense light waveguide arm of bending and bending respectively, one end of another termination second coupling mechanism of the sense light waveguide arm of bending and the reference light waveguide arm of bending, another termination output optical waveguide of second coupling mechanism, the sensing sample cell is equipped with in the outside of the sense light waveguide arm of bending, the standard model pond is equipped with in the outside of the reference light waveguide arm of bending, and whole device is on substrate.
The useful effect that the present invention has is:
Owing to used the transmission waveguide of bending, more luminous energy is entered in the detecting area propagate in the material to be detected, make the refractive index of surrounding material improve to the contribution weight of the effective refractive index of transmission light, therefore more responsive to the detecting area change of refractive; And, adopt the design software of specialty, to the important parameter of little kinking structure: amplitude and cycle are optimized design, can increase substantially the sensitivity that sensing device changes environment parameter, improve the signal to noise ratio (S/N ratio) of measurement result.Be sidelong at reference arm one simultaneously and put standard model, make the light that in pickup arm and reference arm, transmits have close loss and phase change, can further improve the sensitivity of detection.
Description of drawings
Fig. 1 is a structure principle chart of the present invention;
Fig. 2 is the normalization light intensity output of the little kinking structure of difformity;
Fig. 3 is fixing little kinking structure cycle when constant, and amplitude changes the influence to susceptibility;
Fig. 4 is that fixing little kinking structure amplitude is 2.5um, and its cycle changes the influence to susceptibility;
Fig. 5 is the contrast of typical straight wave guide structure and structure of the present invention.
Among the figure: 1, input waveguide, 2,5.3dB coupling mechanism, 3. sense light waveguide arm, 4. sensing sample cell, 6. output optical waveguide, 7. reference light waveguide arm, 8. standard model pond, 9. substrate.
Embodiment
As shown in Figure 1, one end of input waveguide 1 of the present invention is connected with LASER Light Source, the other end of input waveguide 1 is connected with an end of first coupling mechanism 2, the other end of first coupling mechanism 2 connects the sense light waveguide arm 3 of bending and an end of the reference light waveguide arm 7 of bending respectively, one end of another termination second coupling mechanism 5 of the sense light waveguide arm 3 of bending and the reference light waveguide arm 7 of bending, another termination output optical waveguide 6 of second coupling mechanism 5, sensing sample cell 4 is equipped with in the outside of the sense light waveguide arm 3 of bending, standard model pond 8 is equipped with in the outside of the reference light waveguide arm 7 of bending, and whole device is on substrate 9.
The sense light waveguide arm 3 of said bending and the reference light waveguide arm 7 of bending, its bending curve is sinusoidal curve or trigonometric curve or conic section.
The light that light source sends is divided into the two-beam that phase place is identical, amplitude equates by input waveguide 1 through a three-dB coupler 2, and one tunnel sense light waveguide arm 3, a tunnel that enters bending enters the reference light waveguide arm 7 of bending.The light of transmission in sense light waveguide arm 3, its effective refractive index produces obvious variation along with material change of refractive to be analyzed in the sensing sample cell 4, thereby changed light intensity and the phase place in this road, transmitted, make light after by sense light waveguide arm 3 with on the information of material to be analyzed.And the light of transmission remains on intensity and the phase place that designs in advance in reference light waveguide arm 7.Two-beam is by second three-dB coupler 5, be coupled into a branch of light, form result of interference, then by output optical waveguide 6 outputs, can receive by Electro-Optical Sensor Set at last, so will change along with material change of refractive to be analyzed in the sensing sample cell 4 by the light intensity of output optical waveguide 6 outputs.In order further to improve the sensitivity of surveying, also place a standard model pond 8 identical in reference light waveguide arm 7 one sides with sensing sample cell 4 structures, place standard model through demarcating, can make light produce the suitable intensity and the variation of phase place with the light that in sense light waveguide arm 3, transmits in 7 transmission of reference light waveguide arm, feasible light from the output of two arms is more approaching, to improve relevant sensitivity.
Make the mask plate of photoetching according to the parameter of optimal design, utilize on the glass substrate photoetching with figure transfer to metal mask, by make the waveguide of the ad hoc structure of design as ion-exchange process.Etch the cavity and the reference sample pond of detecting area, place material to be analyzed (liquid or gas) and standard model respectively through demarcating.
Through the simulation of Three dimensional finite difference beam Propagation method (3D-FDBPM), can confirm that the MZ interferometer that the bending waveguide constitutes has higher sensitivity than the MZ interferometer of straight wave guide formation when the refractive index of sample within the specific limits the time.What use in the simulation is the glass ion exchange waveguide of ridged, optical waveguide substrates refractive index n b=1.51 51, and Δ n=0.008, sample refractive index span is 1.3-1.46.
Be illustrated in figure 2 as the normalization light intensity output of the little kinking structure of difformity, as seen from Figure 2, when little kinking structure partly adopts sinusoidal shape, compare with other buckling curve, during corresponding to identical variations in refractive index, the variable quantity maximum (shown in solid line) of its output intensity.
Be illustrated in figure 3 as fixing little kinking structure cycle when constant, amplitude changes the influence to susceptibility, and as seen from Figure 3, little kinking structure is defined as sinusoidal shape, and its sinusoidal magnitude value is big more, and susceptibility is high more, but loss this moment also can be along with increase.
Being illustrated in figure 4 as fixing little kinking structure amplitude is 2.5um, its cycle changes the influence to susceptibility, as seen from Figure 4, little kinking structure is defined as sinusoidal shape, when the cycle of little bight portion changes, susceptibility is not linear with the variation in cycle, is not the simple relation of " cycle is short more, and susceptibility is high more ".
Be illustrated in figure 5 as the contrast of typical straight wave guide structure and structure of the present invention, as seen from Figure 5, when the environment refractive index changed in 1.30 to 1.46 scopes, the MZ interferometer that the bending waveguide constitutes had higher sensitivity than the MZ interferometer that straight wave guide constitutes.Through after the parameter optimization, the remolding sensitivity traditional structure of novel little kinking structure MZ interferometer has improved more than 1 times.So the superiority of structure of the present invention is clearly.
Claims (2)
1, a kind of Mach-Zehnder interference type sensing device based on micro curved transmission waveguide, it is characterized in that: an end of input waveguide (1) is connected with LASER Light Source, the other end of input waveguide (1) is connected with an end of first coupling mechanism (2), the other end of first coupling mechanism (2) connects the sense light waveguide arm (3) of bending and the end of reference light waveguide arm (7) of bending respectively, one end of another termination second coupling mechanism (5) of the reference light waveguide arm (7) of the sense light waveguide arm (3) of bending and bending, another termination output optical waveguide (6) of second coupling mechanism (5), sensing sample cell (4) is equipped with in the outside of the sense light waveguide arm (3) of bending, standard model pond (8) is equipped with in the outside of the reference light waveguide arm (7) of bending, and whole device is on substrate (9).
2, a kind of Mach-Zehnder interference type sensing device according to claim 1 based on micro curved transmission waveguide, it is characterized in that: the reference light waveguide arm (7) of the sense light waveguide arm (3) of said bending and bending, its bending curve is sinusoidal curve, trigonometric curve.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 200310108575 CN1232846C (en) | 2003-11-11 | 2003-11-11 | Mach-Zehnder interference type sensing device based on micro curved transmission waveguide |
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| CN 200310108575 CN1232846C (en) | 2003-11-11 | 2003-11-11 | Mach-Zehnder interference type sensing device based on micro curved transmission waveguide |
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| CN1232846C true CN1232846C (en) | 2005-12-21 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10935738B1 (en) | 2019-08-08 | 2021-03-02 | Stmicroelectronics S.R.L. | Architecture of an integrated optics device |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100432658C (en) * | 2005-08-11 | 2008-11-12 | 浙江大学 | A sensor based on asymmetric interference arm Mach-Zehnder interferometer |
| JP5156291B2 (en) * | 2007-07-31 | 2013-03-06 | 浜松ホトニクス株式会社 | Apparatus for measuring optical properties of samples flowing in a flow cell |
| CN101813622B (en) * | 2009-02-19 | 2012-10-17 | 中国科学院电子学研究所 | Optical-waveguide two-channel interferometer array |
| CN106873074B (en) * | 2017-04-25 | 2019-03-29 | 吉林大学 | Adjustable asymmetric M-Z optical waveguide sensor in a kind of section based on photobleaching and preparation method thereof |
| AU2018322883B2 (en) * | 2017-09-01 | 2024-03-21 | Meep Bv | Photonic interferometer based sensing |
| CN108645511A (en) * | 2018-05-14 | 2018-10-12 | 电子科技大学 | A kind of new ultra-violet light intensity detector of Mach-Zehnder interferometers structure |
| CN111394236B (en) * | 2020-02-25 | 2022-04-01 | 华中科技大学 | Sensor for glucose detection and preparation and detection methods and devices thereof |
| CN111609873A (en) * | 2020-04-24 | 2020-09-01 | 中国地质大学（武汉） | Waveguide interferometer sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10935738B1 (en) | 2019-08-08 | 2021-03-02 | Stmicroelectronics S.R.L. | Architecture of an integrated optics device |
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