CN1232801C - High precision ultra-slow speed testing turntable with double shafts for servo test - Google Patents

High precision ultra-slow speed testing turntable with double shafts for servo test Download PDF

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Publication number
CN1232801C
CN1232801C CN 200310115538 CN200310115538A CN1232801C CN 1232801 C CN1232801 C CN 1232801C CN 200310115538 CN200310115538 CN 200310115538 CN 200310115538 A CN200310115538 A CN 200310115538A CN 1232801 C CN1232801 C CN 1232801C
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China
Prior art keywords
angular position
axle
precision
coaxial rotation
reduction unit
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CN 200310115538
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CN1546951A (en
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李庆祥
郭阳宽
李玉和
巩娟
陈张玮
杨再华
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Tsinghua University
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Tsinghua University
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Abstract

The present invention relates to a high-precision ultra-slow speed testing turn table with double shafts for servo test, which belongs to the technical field of movement servo, and is characterized in that the testing turn table is mathched with a high-precision speed reducer via multiple sensors so as to realize the high-precision ultra-low speed control over a system, namely that complementary measurement components are formed by high-precision angular displacement sensors used in pairs so as to measure the high-precision real-time movement parameters and the deformation amount of the system. Conversion between micrometric displacement and small displacement, and conversion between large rotational inertia and small rotational inertia are realized via decelerators positioned between torque motors and inner and outer frames, so that the testing turn table can be flexibly driven by minor force. When the resolution of an angular position sensor is selected as 1', the tracing speed of the system is lower than 1 ('/ second of time), and the system has the angle tracing and measuring precision of (+/-) 1.5.

Description

The test table of the servo test usefulness of high precision Ultra-Low Speed twin shaft
Technical field
The invention belongs to the motion servo technical field, particularly inertial navigation series products high precision position is that measure makes the field with test table servo tracking.
Background technology
The servo especially Ultra-Low Speed of high-precision motion servo-drive system is the new and high technology problem, it relates to the advanced technology of different field such as electronics, machinery, material, optics, manufacturing, measurement, analog-and digital-control, because high precision Ultra-Low Speed motion servo is in each high-tech sector, especially the indispensable effect of navigation field enjoys attention.Done a lot of research work at present both at home and abroad in this respect, but inertia, ultralow speed, high-precision contradiction fail always to be solved well greatly.Characteristics at directly driving of all adopting of existing patent and actual inertial navigation test table, single detecting sensor, the present invention has adopted the new approaches of indirect driving, FUSION WITH MULTISENSOR DETECTION to solve big inertia, ultralow speed and high-precision contradiction, realizes the high precision Ultra-Low Speed control of system.
Summary of the invention
The test table that the purpose of this invention is to provide the servo test usefulness of a kind of high precision Ultra-Low Speed twin shaft.
The invention is characterized in: it contains:
The bearing wall and frame structure assembly, it comprises:
Inner frame 41,
Axle 5 Y1, 5 Y2, it is fixedlyed connected with inner frame 41 respectively along the y direction of inner frame 41,
Speed reduction unit 3 y, it and axle 5 Y1Coaxial rotation connects,
Torque motor 2 y, it and speed reduction unit 3 y, the axle 5 Y1Coaxial rotation connects,
Angular position measurement sensor 1 Y1, 1 Y2, wherein, described sensor 1 Y1With torque motor 2 y, speed reduction unit 3 y, the axle 5 Y1Coaxial rotation connects, described sensor 1 Y2With axle 5 Y2Coaxial rotation connects;
The outside framework construction package, it comprises:
Outside framework 42, it respectively with axle 5 Y1, 5 Y2Be rotationally connected along the y direction,
Axle 5 X1, 5 X2, fixedly connected with outside framework 42 along the x direction respectively,
Speed reduction unit 3 x, it and axle 5 X1Coaxial rotation connects,
Torque motor 2 x, it and speed reduction unit 3 x, the axle 5 X1Coaxial rotation connects,
Angular position measurement sensor 1 X1, 1 X2, wherein, described sensor 1 X1With torque motor 2 x, speed reduction unit 3 x, the axle 5 X1Coaxial rotation connects, described sensor 1 X2, it and axle 5 X2Coaxial rotation connects;
Bearing 6, its both sides be outside framework on the x direction 42 and angular position measurement sensor 1 respectively X2Between, on two positions between the outside framework 42 on the x direction and the speed reduction unit 3x with axle 5 X2, the axle 5 X1Coaxial rotation connects.
Experimental results show that: when angular position pick up resolution is 1 " time, its system keeps track speed is less than 1 ("/second of time), system angle is followed the tracks of and measured output accuracy is ± 1.5 ".
Description of drawings
Fig. 1. the vertical view of test table of the present invention
Fig. 2. it is the longitudinal section of Fig. 1.
Embodiment
The invention provides the servo test table of a kind of high precision Ultra-Low Speed twin shaft, shown in Fig. 1 .2, mainly form by bearing, internal and external frame, kinematic train, power system, position measuring system.It is characterized in that: high precision angle survey sensor system 1 Y1With 1 X1, torque motor 2 xWith 2 y, high-accuracy little modulus speed reduction unit 3 yWith 3 xRespectively by intermediate shaft 5 Y1With axle 5 X1Link to each other with inner frame 41 and outside framework 42; Angular position measurement sensing system 1 Y2With 1 X2Axle 5 in the middle of utilizing Y2With 5 X2Link to each other with outside framework 42 with inner frame 41 respectively, according to circumstances at axle 5 Y2On can add counterweight and carry out system balancing; Outside framework is through axle 5 X1With axle 5 X2And corresponding bearing links to each other with bearing 6.
Described detection angular position measurement sensor 1 Y1, 1 Y2, 1 X1With 1 X2Can link to each other with control system by automatically controlled interface, be used for that its feedback data information is carried out real-time analysis and handle, realize real time position control inner frame 41 and outside framework 42.
The control system of steering order through matching drives inner and outer ring motor 2 yWith 2 x, this motor passes motion to inner frame 41 and outside framework 42 through speed reduction unit.The movable information of inner frame 41 and outside framework 42 is respectively through respective corners position measurement sensor pair 1 Y1, 1 Y2, 1 X1With 1 X2Be sent to control system, thus the real-time closed-loop servocontrol of the system of realization.
Space structure compact in design of the present invention, reasonable, adopted the power transmission mode of accurate indirect driving, realized the conversion of conversion, large rotating inertia and the little moment of inertia of micrometric displacement and little displacement, big torque and little torque conversion, realized driving native system flexibly with less power; Utilize the high precision angular displacement sensor that uses in pairs to constitute complementary measuring system, realized the measurement of the high precision real time kinematics parameter and the system variant amount of system, for high precision closed loop speed and position feedback control and compensation control and mobile decoupling create conditions; Multisensor cooperates the high precision Ultra-Low Speed control of realization system with high-accuracy speed reduction unit.
Detect angular position measurement sensor 1 Y1With 1 X2, 1 Y2With 1 X1Pairing work realizes the accurate measurement to locations of structures and distortion, and the position is accurately controlled and position compensation provides the basis in order to carry out
In the described angular position measurement sensor detecting system, angular position measurement sensor 1 Y1Through axle 5 Y1, angular position measurement sensor 1 Y2Through axle 5 Y2Be attached to inner frame 41, angular position measurement sensor 1 X1Through axle 5 X1, angular position measurement sensor 1 X2Through axle 5 X2Be attached to outside framework 42, thereby detect inner frame 41 and the kinematic parameter of outside framework 42 and the distortion of bearing wall and frame structure assembly and outside framework construction package, and for realizing that inner frame 41 and outside framework 42 high precision closed loop speed and position feedback control lay the foundation.
Described motor 2 yAnd speed reduction unit 3 is housed between the inner frame 41 y, motor 2 xAnd speed reduction unit 3 is housed between the outside framework 42 x, realized with motor 2 yWith motor 2 xSmall driving moment drive the inner frame 41 and the outside framework 42 of large rotating inertia, realize that microbit moves on to the conversion of little displacement, control problem lays the foundation in order to solve under the Ultra-Low Speed situation accurately
Below be the structural parameters and the test figure of test table of the present invention:
1) physical construction
Axle set type: high precision ball bearing
Load weight: 15kg
Inside casing space: 250 * 250 * 250mm 3
Diaxon orthogonality:<5 "
Rotating accuracy: inside casing: 0.4 "
Housing: 1.12 "
Stage body physical dimension: φ 600mm * 600mm * 800mm
Stage body weight:<200kg
2) control tracking velocity and precision
When selecting angular position pick up resolution is 1 " time:
System keeps track speed can reach:<1 ("/second of time)
Output accuracy is followed the tracks of and measured to system angle: ± 1.5 "
Position control scope: inner frame: can arbitrarily angledly rotate
Outside framework:<± 270 °
Domestic certain its twin shaft servo turntable of turntable professional production producer:
Adopt angle position resolution 0.36 " during sensor, angle position servo precision ± 2 ", tracking velocity 3.6 ("/second of time)~360000 ("/second of time)
The angular position measurement sensor that test table of the present invention adopts is an inductosyn, also available light gate sensor or other high precision angle displacement measurement sensor.

Claims (1)

1, the test table of the servo test usefulness of high precision Ultra-Low Speed twin shaft contains inside and outside frame assembly, and it is characterized in that: it contains:
The bearing wall and frame structure assembly, it comprises:
Inner frame (41),
Y is to first (5 Y1), y is to second (5 Y2), it is fixedlyed connected with inner frame (41) respectively along the y direction of inner frame (41),
Y axle speed reduction unit (3 y), it and y are to first (5 Y1) the coaxial rotation connection,
Y axle torque motor (2 y), it and y axle speed reduction unit (3 y), y is to first (5 Y1) the coaxial rotation connection,
Y is to the first axis angular position survey sensor (1 Y1), y is to the second axis angular position survey sensor (1 Y2), wherein, described y is to the first axis angular position survey sensor (1 Y1) and y axle torque motor (2 y), y axle speed reduction unit (3 y), y is to first (5 Y1) the coaxial rotation connection, described y is to the second axis angular position survey sensor (1 Y2) with y to second (5 Y2) the coaxial rotation connection;
The outside framework construction package, it comprises:
Outside framework (42), it respectively with y to first (5 Y1), y is to second (5 Y2) be rotationally connected along the y direction,
X is to first (5 X1), x is to second (5 X2) fixedly connected with outside framework (42) along the x direction respectively,
X axle speed reduction unit (3 x), it and x are to first (5 X1) the coaxial rotation connection,
X axle torque motor (2 x), it and x axle speed reduction unit (3 x), x is to first (5 X1) the coaxial rotation connection,
X is to the first axis angular position survey sensor (1 X1), x is to the second axis angular position survey sensor (1 X2), wherein, described x is to the first axis angular position survey sensor (1 X1) and x axle torque motor (2 x), x axle speed reduction unit (3 x), x is to first (5 X1) the coaxial rotation connection, described x is to the second axis angular position survey sensor (1 X2), it and x are to second (5 X2) the coaxial rotation connection;
Bearing (6), its both sides respectively the outside framework on the x direction (42) and x to the second axis angular position survey sensor (1 X2) between, the outside framework (42) on the x direction and x axle speed reduction unit (3 x) between two positions on x to second (5 X2), x is to first (5 X1) the coaxial rotation connection.
CN 200310115538 2003-11-28 2003-11-28 High precision ultra-slow speed testing turntable with double shafts for servo test Expired - Fee Related CN1232801C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200310115538 CN1232801C (en) 2003-11-28 2003-11-28 High precision ultra-slow speed testing turntable with double shafts for servo test

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Application Number Priority Date Filing Date Title
CN 200310115538 CN1232801C (en) 2003-11-28 2003-11-28 High precision ultra-slow speed testing turntable with double shafts for servo test

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CN1232801C true CN1232801C (en) 2005-12-21

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1847970B (en) * 2005-04-15 2010-05-26 鸿富锦精密工业(深圳)有限公司 Camera possessing hand vibration preventor
CN101994893B (en) * 2009-08-18 2012-08-29 中国科学院西安光学精密机械研究所 Follow-up turntable device
CN102042834B (en) * 2010-10-09 2012-10-17 浙江讯领科技有限公司 Single-shaft superspeed rotary table
JP5887376B2 (en) 2014-04-09 2016-03-16 ファナック株式会社 Electric discharge machine with rotating shaft
CN104128883B (en) * 2014-07-29 2016-05-25 北京理工大学 A kind of abrasive power high precision measuring device
EP3306270B1 (en) * 2015-05-27 2020-01-29 Beijing Unistrong Science & Technology Co., Ltd. Two-degree-of-freedom rotation control device and application system therewith
CN105676885B (en) * 2016-04-20 2019-02-19 中国工程物理研究院总体工程研究所 Large torque tandem tilter and drive method of servo-controlling
CN108784863A (en) * 2018-08-09 2018-11-13 安徽工程大学 Artificial tooth gear blank abnormal curved surface processing unit (plant)

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