CN1228820C - Plasma processing apparatus and plasma processing method - Google Patents
Plasma processing apparatus and plasma processing method Download PDFInfo
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- CN1228820C CN1228820C CN 02132282 CN02132282A CN1228820C CN 1228820 C CN1228820 C CN 1228820C CN 02132282 CN02132282 CN 02132282 CN 02132282 A CN02132282 A CN 02132282A CN 1228820 C CN1228820 C CN 1228820C
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Abstract
The present invention relates to a plasma processing apparatus and a plasma processing method. When the end point detector 17(EPD) detects the end point (t5), the RF power (bottom RF) from the high-frequency power supply 12 is turned off (t5), the supply of the He gas 14 to the back surface of the wafer W is stopped (t5), and the etching is not performed, and the high-voltage DC power supply 13(HV) is turned off in a state where the RF power (top RF) from the high-frequency power supply 11 is controlled (t5) within a range where the plasma can be maintained, whereby the amount of etching can be accurately controlled and the adsorption of particles can be suppressed.
Description
Technical field
The present invention relates to plasma processing apparatus and method of plasma processing, especially be adapted at applying on the upper/lower electrode situation of RF power.
Background technology
In existing plasma processing apparatus, owing to make wafer at the chamber internal fixation, so useful electrostatic chuck.In method with this electrostatic chuck, on electrostatic chuck, apply high-voltage dc voltage, carry out the fixing of wafer by effect Coulomb force on wafer.
In such plasma device, if do not having on electrostatic chuck, to apply high-voltage dc voltage under the state of plasma, Coulomb force then, adhesion of particles on wafer surface by on wafer, acting on.Therefore, when process begins, after connecting RF power, connect the high-voltage dc voltage of electrostatic chuck, when process stops, behind the high-voltage dc voltage of shutoff electrostatic chuck, by turn-offing RF power, do not having to prevent under the state of plasma that high-voltage dc voltage is applied on the electrostatic chuck, reducing the absorption of particulate to wafer surface.
Yet, in the method, behind the high-voltage dc voltage that turn-offs electrostatic chuck, because crystal also is exposed in the plasma, so carry out etching more than the desirable etch quantity, exist so-calledly to produce harmful effect, the problem of device performance degradation to applying worker's shape and size etc.
Summary of the invention
So, the objective of the invention is, provide and can correctly control etch quantity, can suppress the plasma processing apparatus and the method for plasma processing of adsorbent particles again.
The present invention comprises following operation, that is: by the operation of electrostatic chuck fixed wafer; By applying the 1st High frequency power with the 1st frequency and the 2nd High frequency power, carry out the operation of the plasma treatment of aforementioned wafer with the 2nd frequency below the 1st frequency; After aforementioned plasma treatment stops, in the scope of not carrying out aforementioned plasma treatment, keep the operation of plasma discharge; Stop to supply with the operation of refrigerating gas to chip back surface by aforementioned electrostatic chuck; Stop to apply the operation of direct voltage to aforementioned electrostatic chuck; And after stopping to apply aforementioned direct voltage, stop the operation of the discharge of aforementioned plasma.
Thus, after plasma treatment stops, even keeping under the situation of plasma discharge, plasma treatment is not carried out, therefore, keep plasma discharge, apply under the situation of direct voltage to electrostatic chuck even stop, after plasma treatment stops, can not carry out etching more yet, suppress the absorption of wafer, become possibility Yi Bian stop to apply direct voltage to particulate Yi Bian make.
According to the present invention, keep the operation of aforementioned plasma discharge, when aforementioned plasma treatment stops, when stopping to apply aforementioned the 2nd High frequency power, control aforementioned the 1st High frequency power, so that in the scope that aforementioned plasma treatment is not carried out, keep plasma discharge.
Thus, can keep plasma discharge, control is oversimplified by only controlling the 1st High frequency power.
According to the present invention, keep the operation of aforementioned plasma discharge, when aforementioned plasma treatment stops, when stopping to apply aforementioned the 1st High frequency power, control aforementioned the 2nd High frequency power, so that in the scope that aforementioned plasma treatment is not carried out, keep plasma discharge.
Thus, make and reduce the frequency keep during the plasma discharge and become possibility, simultaneously, control the ion energy of incident wafer on one side, Yi Bian can keep plasma discharge, the reduction charge-up damage.
According to the present invention, keep the operation of aforementioned plasma discharge, when aforementioned plasma treatment stops, control aforementioned the 1st High frequency power and aforementioned the 2nd High frequency power, so that in the scope that aforementioned plasma treatment is not carried out, keep plasma discharge, stop the operation of aforementioned plasma discharge, after stopping to apply aforementioned the 1st High frequency power, stop to apply aforementioned the 2nd High frequency power.
Thus,,, adhere to and cross when etching takes place can further improving particulate, reduce charge-up damage Yi Bian the scope of not carrying out in plasma treatment is kept plasma discharge on one side can control the both sides of plasma density and ion energy.
According to the present invention, keep the operation of aforementioned plasma discharge, when aforementioned plasma treatment stops, when keeping aforementioned the 2nd High frequency power, control aforementioned the 1st High frequency power, so that in the scope that aforementioned plasma treatment is not carried out, keep plasma discharge, stop the operation of aforementioned plasma discharge, after stopping to apply aforementioned the 1st High frequency power, stop to apply aforementioned the 2nd High frequency power.
Thus, under the state that does not carry out ion energy control, plasma discharge can be prevented to keep, charge-up damage can be reduced.
According to the present invention, by applying the 1st High frequency power with the 1st frequency and the 2nd High frequency power with the 2nd frequency below the 1st frequency, in the processing method of carrying out plasma treatment, after applying aforementioned the 2nd High frequency power, apply aforementioned the 1st High frequency power, after stopping to apply aforementioned the 1st High frequency power, stop to apply aforementioned the 2nd High frequency power
Thus,, plasma discharge can be prevented to carry out, charge-up damage can be reduced even also do not control under the state of ion energy beginning to apply under the situation of High frequency power.
And, not only when beginning to apply High frequency power,, under the state of not controlling ion energy, also can prevent to carry out plasma discharge even stopping to apply under the situation of High frequency power, can further reduce charge-up damage.
After the present invention also is included in and stops to apply aforementioned the 1st High frequency power, stop to apply the operation of aforementioned the 2nd High frequency power.
Thus, not only when beginning to apply High frequency power,, under the state of not controlling ion energy, also can prevent to carry out also can further reduce charge-up damage by plasma discharge even stopping to apply under the situation of High frequency power.
According to the present invention, apply aforementioned the 1st High frequency power at upper electrode, apply aforementioned the 2nd High frequency power at lower electrode.
According to the present invention, apply aforementioned the 1st High frequency power and aforementioned the 2nd High frequency power at lower electrode.
The present invention comprises: the electrostatic chuck of fixed wafer on pedestal; On aforementioned electrostatic chuck, apply the direct voltage source of direct voltage; The plasma generating mechanism of plasma takes place in chamber, after plasma treatment stops, in the scope that aforementioned plasma treatment is not carried out, keep the plasma discharge controlling organization of plasma discharge, and during keeping aforementioned plasma discharge, stop to apply the direct voltage shut-down mechanism of direct voltage to aforementioned electrostatic chuck.
Thus,,,, keeping plasma discharge, stopping electrostatic chuck being applied under the situation of direct voltage, also can control overetched carrying out in order to suppress the absorption of wafer to particulate Yi Bian keep plasma discharge on one side can control the carrying out of plasma treatment.
According to the present invention, aforementioned plasma generating mechanism, comprise upper electrode, lower electrode, on aforementioned upper electrode, apply the top electric power applying mechanism of High frequency power, on aforementioned lower electrode, apply the bottom electric power applying mechanism of High frequency power, aforementioned plasma discharge controlling organization is kept plasma discharge in the scope that aforementioned plasma treatment is not carried out, stopping after aforementioned upper electrode applies High frequency power, stopping to apply High frequency power to aforementioned lower electrode.
According to the present invention, aforementioned plasma generating mechanism comprises upper electrode, lower electrode, applies the 1st electric power applying mechanism of the 1st High frequency power with the 1st frequency on aforementioned lower electrode, and apply the 2nd of the 2nd High frequency power with the 2nd following frequency of aforementioned the 1st frequency and apply electric power mechanism, aforementioned plasma discharge controlling organization is kept plasma discharge in the scope that aforementioned plasma treatment is not carried out, after stopping to apply aforementioned the 1st High frequency power, stop to apply aforementioned the 2nd High frequency power.
Thus, on one side can control ion energy,,, can suppress the absorption of wafer to particulate without charge-up damage Yi Bian in the scope that plasma treatment is not carried out, keep plasma discharge.
The present invention comprises: by aforementioned electrostatic chuck, supply with the refrigerating gas feed mechanism of refrigerating gas to chip back surface, and after aforementioned plasma treatment stops, stopping before aforementioned electrostatic chuck applies direct voltage, stop the refrigerating gas shut-down mechanism of the supply of aforementioned refrigerating gas.
Thus, before stopping chip etching, the pressure that is applied to chip back surface can be reduced, the error of wafer sticking can be prevented.
Description of drawings
Fig. 1 is that the summary of the plasma processing apparatus of an embodiment of the present invention constitutes profile.
Fig. 2 is the order and conventional example figure relatively of the plasma treatment of the present invention's the 1st execution mode.
Fig. 3 is the figure of the plasma treatment experimental example in proper order of an embodiment of the present invention.
Fig. 4 is the figure of the plasma treatment order of the present invention the 2nd～the 4th execution mode.
Fig. 5 is the plasma treatment order and conventional example figure relatively of the present invention's the 5th execution mode.
Embodiment
Following one side illustrates the plasma treatment appts of embodiment of the present invention on one side with reference to accompanying drawing.
Fig. 1 is that the summary that the plasma treatment appts of an embodiment of the present invention is shown constitutes profile.In Fig. 1, in process chamber 1, upper electrode 2 and pedestal 3 are set, these pedestal 3 double as lower electrodes.On upper electrode 2, be provided with the gas squit hole 2a in the etching gas importing process chamber 1.Pedestal 3 is supported platform 4 to support by pedestal, and pedestal supports that platform 4 keeps in process chamber 1 through insulation board 5.In addition, on upper electrode 2 and pedestal 3, connect high frequency electric source 11,12 respectively, make the etching gas plasmaization that imports in the process chamber 1.The High frequency power of upper electrode 2 by being applied by high frequency electric source 11 makes the gas molecule ionization that imports in the process chamber 1, mainly has the plasma of generation function.On the one hand, the lower electrode of double as pedestal 3 is by by having frequency with high frequency electric source 11 High frequency power identical or lower than it, that apply less than the high frequency electric source 12 of 13.56MHz frequency, do not change plasma density or atomic group and form, mainly have the function that control is incident to the ion energy of wafer W.The frequency of high frequency electric source 11,12 can be used 100MHz and 13.56MHz, 100MHz and 3.2MHz, 60MHz and 13.56MHz, 60MHz and 2MHz, 27.12MHz and 800KHz, the combination of 13.56MHz and 13.56MHz etc.At present embodiment, use the combination of 60MHz and 13.56MHz.
Pedestal is supported on the platform 4 cold dielectric chamber 10 to be set, and cold medium such as liquid nitrogen circulates in cold dielectric chamber 10 through cold medium supply pipe 10a and cold medium discharge pipe 10b.And the cold and hot of generation supports platform 4 and pedestal 3 to transfer heat to wafer W through pedestal from here, can cool off wafer W.
Electrostatic chuck 6 is set on pedestal 3.Electrostatic chuck 6 for example has by polyamide film 8a, the structure of 8b clamping conductive layer.On conductive layer 7, connect DC high-voltage power supply 13,, on wafer W, act on Coulomb force, wafer W is fixed on the pedestal 3 by on conductive layer 7, giving dc high voltage.
The gas passage 9 that imports He gas is set on pedestal 3 and electrostatic chuck 6.Gas passage 9 is connected with vacuum pump 16 through flow rate regulating valve 15 when open and close valve 14a and flow rate regulating valve 14b are connected on the He gas supply source 14.
And, through this gas passage 9, offer the back side of wafer W by the He gas that for example makes hundreds of Pa, can cooling base 3 on the wafer W of mounting.During removing the sticking of wafer W, carry out vacuum attraction by the wafer W back side, remove the pressure differential in the wafer W back side and the process chamber 1, can prevent to blow and fly wafer W.
Fig. 2 figure that to be plasma treatment order that the present invention's the 1st execution mode is shown compare with conventional example.' EPD ' expression is by the end point determination of endpoint detector 17, ' the RF power that RF ' expression in top applies to upper electrode 2, ' ' He ' expression in the back side is gone into to the He at wafer W back side conductance for the RF power that RF ' expression in bottom applies to pedestal 3, the break-make of ' HV ' expression electrostatic chuck 6.
At Fig. 2 (a), when carrying out plasma treatment, wafer W is positioned on the pedestal 3.And to carrying out exhaust in the process chamber 1, Yi Bian adjust pressure in the process chamber 1, importing etching gas in process chamber 1 on one side.
Then, by after applying from the RF power of high frequency electric source 11 on the upper electrode 2 (t2), apply the RF power (t3) from high frequency electric source 12 on pedestal 3, when making the etching gas plasmaization, control is incident to the ion energy of wafer W.Meanwhile, connect high-voltage DC power supply 13 (HV), in the time of by electrostatic chuck 6 fixed wafer W, open open and close valve 14, to chip back surface ejection He gas 14 (back side He), the temperature of control wafer W.
Like this, after applying RF power on the upper electrode 2, on pedestal 3, apply in the RF power, by connecting high-voltage DC power supply 13, can prevent is not having to apply high-voltage dc voltage under the state of plasma on electrostatic chuck 6, can suppress the absorption of wafer surface to particulate.
Then,, disconnect in the RF power (bottom RF) of high frequency electric source 12 (t5), stop to supply with He gas 14 (t5) to chip back surface in case endpoint detector 17 (EPD) detects etched terminal point (t5).Etching is not carried out, and in the scope that may keep plasma discharge, and for example below 200W, control from the RF power (top RF) of high frequency electric source 11 (t5).
The detection method of terminal point is except with the method for endpoint detector 17, also can be according to the instrumentation of etching period endpoint detection as a result.
Thus, because before wafer may break away from from electrostatic chuck 6, stop to supply with He gas 14, so prevented to fly wafer W because the pressure of He gas 14 blows to the wafer W back side.
Then, disconnect high-voltage DC power supply 13, make wafer W break away from (t6) from electrostatic chuck 6.And, disconnect RF power from high frequency electric source 11, stop plasma discharge (t7).
Thus, because keep plasma discharge during disconnecting high-voltage DC power supply 13, institute is so that the inhibition wafer becomes possibility to the absorption of particulate.Because at this moment plasma discharge is not carried out etched power and is controlled, so,, can control etched carrying out even keeping under the situation of plasma discharge by after endpoint detector 17 endpoint detection yet.
Stopping when chip back surface is supplied with He gas 14, opening open and close valve 15, also can carry out vacuum attraction to the back side of wafer W.Can make the pressure in pressure and the process chamber 1 at the back side of wafer W consistent thus, can more fully prevent the mistake of wafer sticking.One direction, shown in Fig. 2 (b), if after high-voltage DC power supply 13 is connected, the RF power-on is not then having to apply Coulomb force under the state of plasma on wafer W, and wafer increased the absorption of particulate when etching was begun.If at endpoint detector 17 (EPD) when detecting terminal point (t5), when turn-offing the RF power from high frequency electric source 12, turn-off RF power from high frequency electric source 11, then do not having to apply Coulomb force to wafer W under the state of plasma.Therefore, even when etch-stop, wafer also increases the absorption of particulate.
For example, as experimental example, at the lamination silicon oxide film, polysilicon film and prevent to carry out patterned photoetching film as template (マ ス Network) with peristome on the sample of reflectance coating, after carrying out polysilicon film and preventing the etching of reflectance coating, the defective number on the wafer W is counted with the graphic defects testing fixture.
Fig. 3 is the plasma treatment precedence diagram that the experimental example of following Fig. 2 (a) is shown.At Fig. 3,, use Cl as the etching condition that prevents reflectance coating
2The mist of system, get 399Pa at the He at wafer W back side pressure, the RF power of upper electrode 2 is got 300W, after it is 0.5 second, when connecting high-voltage DC power supply 13, the RF power of pedestal 3 is got 30W, after carrying out etching, in the RF power that turn-offs pedestal 3, make the RF power of upper electrode 2 be reduced to 200W, after they 3 seconds, turn-off high-voltage DC power supply 13, then turn-off the RF power of upper electrode 2 after 1 second.
As the etching condition of the lip-deep natural oxide film of polysilicon film, use Cl
2Be gas.The RF power of upper electrode 2 is got 225W, after it is 0.5 second, when connecting high-voltage DC power supply 13, after the RF of pedestal 3 power is got 200W and carried out etching, turn-off the RF power of pedestal 3, after they 3 seconds, turn-off high-voltage DC power supply 13, then after it is 1 second, turn-off the RF power of upper electrode 2.
As the main etching condition of polysilicon film, use Cl
2It is mist.The RF power of upper electrode 2 is got 635W, after it is 0.5 second, when connecting high-voltage dc voltage 13, after the RF power of pedestal 3 is got the 150W etching, when turn-offing the RF power of pedestal 3, the RF power that reduces upper electrode 2 turn-offs high-voltage DC power supply 13 to 200W after its 3 second, then turn-offed the RF power of upper electrode 2 after 1 second.
As the etching condition of crossing of polysilicon film, use the HBr mist.The RF power of upper electrode 2 is got 375W, after it is 0.5 second, when connecting high-voltage DC power supply 13, after the RF power of pedestal 3 is got the 50W etching, when turn-offing the RF power of pedestal 3, the RF power that reduces upper electrode 2 turn-offs high-voltage DC power supply 13 to 200W after they 3 seconds, then turn-off the RF power of upper electrode 2 after it is 1 second.
Follow the plasma treatment order of Fig. 2 (a) and Fig. 2 (b), to 25 pieces of wafer W respectively result show; In handling the 2nd piece of wafer W, to compare with the order of Fig. 2 (b) according to the order of Fig. 2 (a), the defective number is reduced to 5.3%.In handling the 13rd piece of wafer W, according to the order of Fig. 2 (a) and the order comparison of Fig. 2 (b), the defective number drops to 8.6%.In handling the 24th piece of wafer W, according to the order of Fig. 2 (a) and the order comparison of Fig. 2 (b), the defective number drops to 4.5%.
At above-mentioned execution mode, applying the RIE device with upper/lower electrode is that example describes, yet the 2nd High frequency power that also goes for having the 1st High frequency power of high relatively frequency and have a frequency lower than the 1st High frequency power is applied to a side the Etaching device of arbitrary electrode of the lower electrode of mounting wafer W or upper electrode.Also go for beyond the Etaching device, for example plasma CVD equipment etc.Thus, make correct control thickness on one side, become possibility Yi Bian suppress the absorption of particulate.
Also applicable to the magnetic controlled plasma processing unit, ECR (electron cyclotron resonance) plasma processing apparatus, HEP (helicon excitation plasma) processing unit, ICP (inducing coupled plasma) processing unit, TCP (transmission coupled plasma) processing unit etc.
Fig. 4 is the figure of the plasma treatment order of the present invention's the 2nd～4 execution mode.Execution mode at aforesaid Fig. 2 (a), when endpoint detector 17 detects terminal point (t5), turn-offing in the RF power of high frequency waves power supply 12, etching is not carried out, and in the scope that may keep plasma discharge, control is from the RF power of high frequency electric source 11.In contrast, at the execution mode of Fig. 4 (a), when endpoint detector 17 detects terminal point (t5), turn-offing in the RF power of high frequency electric source 11, etching is not carried out, and, in the scope that may keep plasma discharge, control is from the RF power of high frequency electric source 12.
Thus, but limit control is incident to the ion energy of wafer W, and plasma discharge is kept on the limit so that etching do not carry out, make suppress particulate absorption become possible in, can reduce charge-up damage.
At the execution mode of Fig. 4 (b), when endpoint detector 17 detects terminal point (t5), be not related to broken height frequency power 11, the either party of 12 RF power, etching is not carried out, and in the scope that may keep plasma discharge, the RF power of control high frequency electric source 11,12.And, turn-off high-voltage DC power supply 13, make wafer W to break away from (t6) from electrostatic chuck 6., turn-off from the RF power of high frequency electric source 11 after (t7), turn-off RF power (t8) from high frequency electric source 12 thereafter.
Thus, on one side can control plasma density and ion energy,,, can reduce charge-up damage can more effectively improving adhering to or crossing when erosion takes place of particulate Yi Bian in the scope that plasma treatment is not carried out, keep plasma discharge.
At the execution mode of Fig. 4 (c), when endpoint detector 17 detects terminal point (t5), can not reduce the RF power of high frequency electric source 12, when keeping intact, etching is not carried out, and, in the scope that may keep plasma discharge, the RF power of control high frequency electric source 11.And, turn-off high-frequency DC source 13, make wafer W may break away from electrostatic chuck 6 (t6), turn-offing behind the RF power of high frequency electric source 11 (t7), turn-off RF power (t8) from high frequency electric source 12.
Even by doing like this, also can under the state that does not carry out ion energy control, prevent to keep plasma discharge, can reduce charge-up damage.
Fig. 5 illustrates the plasma treatment order and conventional example figure relatively of the 5th execution mode of the present invention.The 1st above-mentioned execution mode relates to apply the start method and the terminating method of RF power, and to relate to the terminating method that applies RF power opposite with the 2nd～the 4th execution mode, and the 5th execution mode relates to apply the start method of RF power.
At Fig. 5 (b), according to existing method, after wafer W being positioned on the base station 3, connect high-voltage DC power supply 13, in electrostatic chuck 6 fixed wafer W (t1), supply with He gas 14 (t1) to the wafer W back side.And, connecting behind the RF power of high frequency electric source 11 (t2), connect RF power (t3) from high frequency electric source 12.
On the one hand, in present embodiment, shown in Fig. 5 (a),, supply with He gas 14 (t1) to the wafer W back side by (t1) in the electrostatic chuck 6 fixed wafer W.And, connecting behind the RF power of high frequency electric source 12 (t2), connect RF power (t3) from high frequency electric source 11.
Thus, when beginning to apply RF power, under the state of not controlling ion energy, can prevent that plasma discharge from beginning, can reduce charge-up damage.
For example, as experimental example, the Cl of use traffic 50sccm
2Be gas, the RF power of upper electrode 2 is got 525W, and the RF power of pedestal 3 is got 70W, and pressure is got 0.665Pa, and the electrode interbody spacer is got 115mm, carries out the etching of the polysilicon film on the silicon oxide film.At this moment, opposite with the percent defective 8% of silicon oxide film dielectric voltage withstand according to the order of Fig. 5 (b), according to the order of Fig. 5 (a), the percent defective of silicon oxide film dielectric voltage withstand is 0.
Execution mode at Fig. 5 (a), from connecting high-voltage DC power supply 13, connection is from the RF power of high frequency electric source 12, then explanation is connected from the method for the RF power of high frequency electric source 11, yet, connection then by the RF power of connecting from high frequency electric source 11, also can be connected high-voltage DC power supply 13 from the RF power of high frequency electric source 12.Thus,, not only may reduce charge-up damage, also make the absorption that suppresses particulate become possibility even in the stage that begins to apply RF power.
Before connecting high-voltage DC power supply 13, when connecting the RF power from high frequency electric source 11,12, etching is not carried out betwixt yet, and in the scope that may keep plasma discharge, control is from the RF power of high frequency electric source 11,12.Thus, Yi Bian control the absorption of particulate, Yi Bian when not reaching predetermined condition, can prevent etched carrying out.
At the execution mode of Fig. 5, when the RF power that turn-offs from high frequency electric source 11,12, the method that disconnects simultaneously from the RF power of high frequency electric source 11,12 is described, yet, from disconnecting RF power, also can disconnect RF power from high frequency electric source 12 from high frequency electric source 11.
As described above, according to the present invention, but etch quantity is correctly controlled on the limit, and the limit suppresses particulate absorption.
It is possible that plasma processing apparatus of the present invention and method of plasma processing use in the semi-conductor industry of carrying out the semiconductor manufacturing, therefore in industrial possibility with utilization.
Claims (14)
1. a method of plasma processing is characterized by, and comprises following operation:
By the operation of electrostatic chuck fixed wafer,
By applying the 1st High frequency power with the 1st frequency and the 2nd High frequency power with the 2nd frequency below the 1st frequency, carry out the operation of the plasma treatment of described wafer,
After described plasma treatment stops, in the scope that described plasma treatment is not carried out, keep the operation of plasma discharge,
Stop by the operation of described electrostatic chuck to chip back surface supply refrigerating gas,
Stop to apply the operation of direct voltage to described electrostatic chuck, and
After stopping to apply described direct voltage, stop the operation of described plasma discharge.
2. method of plasma processing according to claim 1, it is characterized by, keep the operation of described plasma discharge, when described plasma treatment stops, stop to apply described the 2nd High frequency power, control described the 1st High frequency power simultaneously, so that in the scope that described plasma treatment is not carried out, keep plasma discharge.
3. method of plasma processing according to claim 1, it is characterized by, keep the operation of described plasma discharge, when described plasma treatment stops, stop to apply described the 1st High frequency power, control described the 2nd High frequency power simultaneously, so that in the scope that described plasma treatment is not carried out, keep plasma discharge.
4. method of plasma processing according to claim 1, it is characterized by, keep the operation of described plasma discharge, control described the 1st High frequency power and described the 2nd High frequency power, so that when described plasma treatment stops, in the scope that described plasma treatment is not carried out, keep plasma discharge
Stop the operation of described plasma discharge, after stopping to apply described the 1st High frequency power, stop to apply described the 2nd High frequency power.
5. method of plasma processing according to claim 1, it is characterized by, keep the operation of described plasma discharge, control described the 1st High frequency power, so that when described plasma treatment stops, when keeping described the 2nd High frequency power, in the scope that described plasma treatment is not carried out, keep plasma discharge
Stop the operation of described plasma discharge, after stopping to apply described the 1st High frequency power, stop to apply described the 2nd High frequency power.
6. according to each described method of plasma processing of claim 1～5, it is characterized by, apply described the 1st High frequency power, on lower electrode, apply described the 2nd High frequency power at upper electrode.
7. according to each described method of plasma processing of claim 1～5, it is characterized by, on lower electrode, apply described the 1st High frequency power and described the 2nd High frequency power.
8. method of plasma processing according to claim 1 is characterized by,
After applying described the 2nd High frequency power, apply described the 1st High frequency power,
After stopping to apply described the 1st High frequency power, stop to apply described the 2nd High frequency power.
9. method of plasma processing according to claim 8 is characterized by, and applies described the 1st High frequency power at upper electrode, applies described the 2nd High frequency power at lower electrode.
10. method of plasma processing according to claim 8 is characterized by, and applies described the 1st High frequency power and described the 2nd High frequency power on lower electrode.
11. a plasma processing apparatus is characterized by, and comprises:
The electrostatic chuck of fixed wafer on pedestal,
On described electrostatic chuck, apply the direct voltage source of direct voltage,
The plasma generating mechanism of plasma takes place in chamber,
After plasma treatment stops, in the scope that described plasma treatment is not carried out, keep the plasma discharge controlling organization of plasma discharge, and
During keeping described plasma discharge, stop to apply the direct voltage shut-down mechanism of direct voltage to described electrostatic chuck.
12. plasma processing apparatus according to claim 11, it is characterized by, described plasma generating mechanism comprises upper electrode, lower electrode, is applying the top electric power applying mechanism of High frequency power on the described upper electrode, applies the bottom electric power applying mechanism of High frequency power on described lower electrode, the scope that described plasma discharge controlling organization does not carry out in described plasma treatment is kept plasma discharge, stopping after described high-frequency electrode applies High frequency power, stopping to apply High frequency power to described lower electrode.
13. plasma processing apparatus according to claim 11, it is characterized by, described plasma generating mechanism comprises upper electrode, lower electrode, applies the 1st electric power applying mechanism of the 1st High frequency power with the 1st frequency on described lower electrode, and the 2nd electric power applying mechanism that applies the 2nd High frequency power with the 2nd following frequency of described the 1st frequency
Described plasma discharge controlling organization is kept plasma discharge in the scope that plasma treatment is not carried out, after stopping to apply described the 1st High frequency power, stop to apply described the 2nd High frequency power.
14. plasma processing apparatus according to claim 11 is characterized by, and comprising:
By the refrigerating gas feed mechanism of described electrostatic chuck to chip back surface supply refrigerating gas,
After described plasma treatment stops, stopping before described electrostatic chuck applies direct voltage, stop to supply with the refrigerating gas shut-down mechanism of described refrigerating gas.
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| US7141505B2 (en) * | 2003-06-27 | 2006-11-28 | Lam Research Corporation | Method for bilayer resist plasma etch |
| US7431857B2 (en) * | 2003-08-15 | 2008-10-07 | Applied Materials, Inc. | Plasma generation and control using a dual frequency RF source |
| CN1973363B (en) * | 2004-06-21 | 2011-09-14 | 东京毅力科创株式会社 | Plasma processing apparatus and method |
| KR101247857B1 (en) * | 2004-06-21 | 2013-03-26 | 도쿄엘렉트론가부시키가이샤 | Plasma processing device |
| JP2006120822A (en) * | 2004-10-21 | 2006-05-11 | Tokyo Electron Ltd | Substrate treatment device and pressure control method thereof |
| US7511936B2 (en) * | 2005-07-20 | 2009-03-31 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and apparatus for dynamic plasma treatment of bipolar ESC system |
| JP4905934B2 (en) * | 2005-12-27 | 2012-03-28 | サムコ株式会社 | Plasma processing method and plasma apparatus |
| US7867403B2 (en) * | 2006-06-05 | 2011-01-11 | Jason Plumhoff | Temperature control method for photolithographic substrate |
| US7563719B2 (en) | 2007-03-15 | 2009-07-21 | Taiwan Semiconductor Manufacturing Co., Ltd. | Dual damascene process |
| JP2009231247A (en) * | 2008-03-25 | 2009-10-08 | Tokyo Electron Ltd | Plasma treatment device, and supplying method of high frequency power |
| WO2012071753A1 (en) * | 2010-11-30 | 2012-06-07 | 深圳市华星光电技术有限公司 | Method for etching metal, control method for etching metal and apparatus thereof |
| TWI514463B (en) * | 2012-11-30 | 2015-12-21 | Global Material Science Co Ltd | Method for manufacturing emboss surface of electric static chuck of dry etch apparatus |
| CN105529283B (en) * | 2014-09-29 | 2020-06-30 | 盛美半导体设备(上海)股份有限公司 | Double-sided vapor etching device for wafer |
| US10535505B2 (en) * | 2016-11-11 | 2020-01-14 | Lam Research Corporation | Plasma light up suppression |
| CN111916327B (en) * | 2019-05-10 | 2023-04-28 | 中微半导体设备(上海)股份有限公司 | Multi-frequency multi-stage plasma radio frequency output method and device thereof |
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