CN1223700C - Method and device for producing optically effective system of layers - Google Patents

Method and device for producing optically effective system of layers Download PDF

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Publication number
CN1223700C
CN1223700C CNB028049136A CN02804913A CN1223700C CN 1223700 C CN1223700 C CN 1223700C CN B028049136 A CNB028049136 A CN B028049136A CN 02804913 A CN02804913 A CN 02804913A CN 1223700 C CN1223700 C CN 1223700C
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layer
protective layer
substrate
described method
layer system
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CN1491296A (en
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F·布雷梅
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Satisloh AG
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Satis Vacuum Industries Vertriebs AG
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings

Abstract

The invention relates to a method and a device for producing an optically effective system (3) of layers on a substrate (1) comprising a first side (1a) and a second side (1b), by the plasma-supported atomisation of a solid body target (sputtering). To reduce the damage to the rear side, prior to the deposition of the system (3) of layers on the front side (1a) of the substrate, a protective layer (2) is applied to the rear side (1b) of said substrate, or a substrate with a protective layer (2) that has already been applied is used.

Description

A kind of manufacture method of optics effectiveness layer system
Technical field
The present invention relates to a kind of method that is used to make a kind of optics effectiveness layer system.
Background technology
In order to make an optical element with definite optical property, known way is: a substrate, make it possess a kind of layer system by predetermined way, this system by a plurality of have different optical character particularly different refractivity the layer form.Structure on layer system is decided, and for example can suppress luminous reflectance or transmission in certain wavelength region to a great extent.This class layer system for example is applied in spectacle glass sheet field as antireflective coating, perhaps is used for optical filter or optical filtering.Coated material commonly used is specific dielectric material, as silicon oxide or silicon nitride.The example that is used for the antireflective coating structure of spectacle glass sheet just has introduction-" Optical Coatings on Glass " as show " optical coating on glass " book at H.Pulker, and the 2nd edition, Elsevier, Amsterdam 1999.In order to produce high-quality optical element, each layer of the layer system on whole substrate surface all must have preset thickness.On the other hand, substrate also must have predetermined surface tissue.
In order to produce thin layer, for example can adopt spraying method.A kind of solid target body and function ionic fluid or in plasma body, bombarded with ion, thus make each atom from target body, be released and be deposited on the substrate.In order to produce optical coating, often to the spraying gas for example argon gas add a kind of reactant gases such as oxygen or nitrogen, the atom of deposit can react with this reactant gases.People's such as M.Ruske works " Properties of SiO for example 2And Si 3N 4Layersdeposited by MF twin Magentron sputtering using differenttarget materials, Thin solid Films 351 " 1999 editions; the 158-163 page or leaf, introduce: use single target body material for example to add oxygen or nitrogen produces heterogeneity such as SiO as reactant gases 2And Si 3N 4Optical coating.When spraying, only obtain coating towards one side of target body.For a kind of substrate that needs coated on both sides spectacle glass sheet for example, therefore substrate must turn to face-coating after, so that to its back side enforcement coating.
The spraying method that using plasma is supported is being made on a kind of substrate under the situation of optical layers system, and debatable is so-called reverse side load, the infringement that causes owing to for example material removal, decomposition, pollution etc. in other words.When coating is carried out on one side of substrate, the another side of substrate since around plasma body so undesirable variation is arranged.Particularly oxygen containing plasma is known from experience the infringement substrate surface.Oxygen containing plasma body is used for various general reactive spraying methodes, to be used for for example SiO of at least a coated material of deposit 2The reverse side load is critical for such optical element, is exactly the optical element that those front-backs all must be furnished with very definite layer system.That is to say that surperficial variation can cause following consequence: coated layer can not good bond.
In order to protect the back side to exempt undesirable deposit, known way is: substrate is inserted in the base sheet rack with mating as far as possible, its back side is not contacted with plasma body or target body material.For this reason, the profile of base sheet rack will be complementary with the substrate surface shape, makes to have a relative spacing (dark space spacing) that is 2mm to the maximum, can not form plasma body in this zone.Because the curved transition of eyeglass lens sheet is very big, so need a large amount of various base sheet racks, these supports all got before each coating procedure and are checked, were changed in case of necessity.
Introduce among the US6 143 143: adopt its one side that is sprayed of an opticglass of some mechanical measure protections to exempt unwished-for deposit.Propose: stick a slice film or coat or spray one deck protection glue with the opposing side of the one side that is sprayed and hidden for this reason.As another solution, a kind of base sheet rack made from resilient material is proposed, for example with foam materials or chloroprene rubber, this material can be close on the substrate.The shortcoming of doing like this is: this material is coated with up and when subsequently another side being carried out coating again with it removing, this is very bothersome.In addition, spray booth also must ventilate in operating process.In addition, used material such as stick-on film also may disturb the reaction conditions in the spray booth, thereby cause producing unwished-for deposit, perhaps cause the variation on the coating structure.
Summary of the invention
Therefore, task of the present invention provides the spraying method that a kind of plasma body is supported, be used for producing on a planar substrate a kind of optics effectiveness layer system, method can be avoided the infringement on the substrate back or prevent that to a great extent the layer system of institute's deposit on substrate is undermined according to this.
Above-mentioned task is the method realization of making a kind of optics effectiveness layer system by the solid target atomization process that a kind of using plasma is supported on a substrate, this substrate has one first and one second, wherein spraying one protective layer on second of substrate perhaps uses the substrate that had been coated with matcoveredn already; Spray out layer system on first of substrate, this protective layer for good and all is retained on this substrate except the part when applying described layer system is removed.
The spraying method that a kind of plasma body is supported; be used on a substrate, producing a kind of optics effectiveness layer system; this substrate has a front and a reverse side; on the optical element that a kind of planar, transparent substrate are for example made of plastics or glass, produce a kind of optics effectiveness layer system especially; according to the present invention; before for example coating was carried out in the front, second face at it for example applied layer protective layer on the reverse side earlier, perhaps uses a kind of substrate that layer protective layer had been arranged already at first face to substrate.After on first of substrate, producing layer system, in case of necessity substrate is turned to, so that deposit goes out another layer system on second of substrate.The unwished-for variable effect that reaction atmosphere when protective layer is protecting substrate to make it to avoid because of first finishing coat causes.Protective layer can be formed by one layer, is perhaps formed by extra play system coated on second.Protective layer is keeping, and needs partly to remove during except the other nonvolatil coating of coating on substrate.Therefore, different with known protective film is that the protective layer that the present invention proposes is nonvolatil.Because the function of the layer system that protective layer is best and to be made combines, so just there is no need to have taked the step of for example the sort of removing protective film.
Advantageously, spraying protective layer on second.The special advantage of this method is: on first, carries out in the manufacturing device scope that layer system adopted, thus do not need spray booth is vacuumized again, and two faces can directly be handled successively.After having applied protective layer, substrate preferably automatically turns to realize positive spraying.
The processing condition of making protective layer its thickness and material in other words should so be selected; make the front of substrate can not suffer damage because of making protective layer; certainly also enough provide protections to be arranged, be protective layer according to this at the most when first face carries out coating but be not that substrate is removed.Preferably so satisfy first condition: protective layer carries out deposit in a kind of nitrogenous plasma body, and for example by silicon nitride Si XN YForm.Also can use oxygen plasma in case of necessity, this is because the load in the front of substrate can keep very short and/or controls by the raising of deposition pressure by deposition time.Maximum ga(u)ge is that about 40nm suits.Second condition for example can be so satisfied: the minimum thickness that protective layer had is about 10nm.
The composition of protective layer for example is silicon oxide, silicon nitride, aluminum oxide and/or aluminium nitride.The advantage of these materials is: the high low-index layer of other of protective layer and layer system is all available single siliceous or contain the aluminium target body and make.If with different target body work, so for protective layer, the first layer of another coated layer system on the substrate reverse side in principle.Can consider high-index material titanium oxide TiO for example commonly used 2, zirconium white ZrO 2, tantalum pentoxide Ta 2O 5
Under two finishing coat situations, according to a preferred version of the present invention, the first layer of the layer system that protective layer used conduct is coated with on reverse side to substrate.Its processing condition are so to select, and make the optical property of protective layer must be complementary with the requirement of being satisfied by another layer system after satisfying defencive function.In this, the material unaccounted-for (MUF) in the face-coating process must be counted in case of necessity.Aspect antireflective coating, nethermost one deck is normally by high refractive layer such as silicon nitride Si on the optics especially 3N 4Form, and can bear the function of protective layer.
If protective layer is to use under the same target body situation producedly, promptly this target body also is to be used to make the preferably all layers of at least one individual layer of layer system, and then the enforcement of this method is simple especially.In the case, spray out whole coatings with regard to changing target body and comprise protective layer.The material of the different refractivity of each layer can be realized by the way of changing reactant gases.For example, a pure silicon target body or a silicon-aluminium target body are alternately containing O 2And N 2Plasma body in use.
The device that the present invention proposes is used to implement present method comprises spray booth and base sheet rack that has rotatable receiving element that is used for substrate of a vacuum-pumping, substrate utilizes these receiving elements both can rotate around a rotation that is substantially perpendicular to the substrate surface orientation again around an axis of rotation rotation that is arranged essentially parallel to the substrate surface orientation.Under a kind of recessed or protruding substrate situation of circle, rotation for example is the plane normal that extends by vertex, and axis of rotation then is a vertical with it vertical line.By the device that the present invention proposes, when adopting the target body of stationkeeping, the mode of available rotation substrate sprays the front or the reverse side of substrate selectively, and does not open spray booth.Rotatablely move and help to produce homogeneous and uniform layer thickness profile.Especially preferably, two kinds of motions can utilize same transmission mechanism to realize.
Except on a unique equipment, two faces of substrate being realized the complete coating that the inventive method is particularly suitable for the glasses shop optometry personnel and processes " half-finished " or " finished product " lens at last according to the coating of customer requirement.In the case, according to the present invention, a coating that had existed already on substrate plays a part protective layer.
With regard to so-called " half-finished " lens, its front just has definite shape and desirable optical property when factory comes out, its reverse side then so carries out mechanical workout by the glasses shop optometry personnel by grinding respectively, makes lens can satisfy requirement under the individual cases for example about the requirement of specific refractory power and/or minute surface.The coating of this class lens can be carried out by the optometry personnel equally.According to the present invention, to this class lens at first on its front coating go out the reflecting coating system that disappears completely, be that this layer system plays the protective layer effect on " second " face in the case.The reverse side that occurs in this layer system manufacturing processed load can be eliminated by the mechanical workout of this reverse side subsequently.Continue after spray out the reflecting coating system that disappears on " first " face at the reverse side of lens-refer in the case.In this, the front of lens just is subjected to the protection of the complete antireflective coating of spraying in advance.The layer system that has sprayed the protective layer effect on the front is desirable.From the manufacturing process aspect, face-coating can certainly carry out in a large equipment that separates, for example in a so-called box coating machine.According to this, layer system also can utilize the ebd method to make.
As to the substituting of above-mentioned technological process, can be coated with before at positive (" second " face) as the layer system that plays the protective layer effect, reverse side (" first " face) is carried out complete mechanical process.After coating protective layer, on the reverse side that is perhaps loaded, coat a kind of hard varnish to improve its anti scuffing intensity.This hard varnish does not have sticking problem on a surface that is perhaps loaded, and it is for the layer system that sprays up immediately, but is a new surface that is loaded.Utilize this method also can carry out coating to so-called " finished product " lens, the sort of exactly lens with the not mechanical reprocessing processing of optics effectiveness predetermined on the technology, they are not coated with hard varnish on reverse side.
Self-evident; as the material of the layer system that plays the protective layer effect and the material and the thickness of the thickness or the layer system the superiors; as mentioned above; get and so selected; make the loading when optical property can not be subjected to carrying out original layer system spraying on another side damage, adjusted according to the mode of control in other words.
Description of drawings
Other embodiments of the invention are seen and are wherein represented with synoptic diagram purely shown in the accompanying drawing:
Each processing step of the pros and cons spraying of a substrate of Figure 1A-E;
The 3-D view of base sheet rack on working position (coating) that Fig. 2 the present invention proposes;
Fig. 3 base sheet rack shown in Figure 2 is in the steering position;
Fig. 4 base sheet rack shown in Figure 2 is in the vertical section in the working position;
Fig. 5 base sheet rack shown in Figure 2 is in the vertical section in the steering position.
Embodiment
A kind of example of coating process method is described with reference to Figure 1A-E below, and promptly plane and transparent substrate 1 coating of spectacle glass sheet particularly is coated with the reflecting layer 3,4 that disappears on its positive 1a (" first " face) and reverse side 1b (" second " face).Size shown in the figure is pure signal; The curvature that often has of substrate 1 does not show.
Typical reacting gas flow for example is in 2 to 50sccm (standard cubic centimeter) scope, looks the different of purposes and used pump, also can less than or greater than above-mentioned scope.The pressure that draws thus in the coating chamber is 510 -2To 810 -4Mbar (millibar).Plasma power for example is about 1.0-2.5KW.
As spraying method, adopt pulsed D C-spraying method (pulse direct current spraying method).In this, plasma body produces with an electronics direct current, and this electronics direct current is implemented to turn on and off by certain frequency.In one-period, plasma body turn-offs certain hour (pulse emission pause time PPT) at every turn.
Each layer of layer system 3,4 is respectively by the deposit in addition of following established practice: at first set up reaction gas flow.Wait for after the short period of time, for example waited for for 10 seconds, plasma ignition.A valve between target body and the substrate 1 stays open the predetermined coating time through another waiting time of being used for plasma stabilization for example after 10 seconds, is closed then.
At first the concave surface 1b with substrate is coated with the Si that proposes with the present invention XN YProtective layer 2.For example select following processing parameter for this reason:
10sccm Ar 2, 30sccm N 2, power: 1750W, frequency: 90kHz, pulse time to turn (PPT): 5 μ s.In the coating time is under the 22S condition, but deposit goes out a Si that 15nm is thick XN Y-layer 2 (Figure 1A).
Subsequently substrate 1 is turned (Figure 1B), the convex surface 1a to substrate is coated with the reflecting coating system 3 that disappears by known way, and here this layer system is formed (Fig. 1 C) by four layers.A typical layer system outwards comprises for example 35nm Si from the lining XN Y, 20nm SiO 2, 61nm Si XN Y, 92nm SiO 2
For Si XN Y-layer, processing parameter for example can select to be applied to mutually make the parameter of protective layer except coating the time.
For SiO 2-layer for example can be selected following parameter: 10sccm Ar 2, 25sccmO 21750W, 90kHz, 5 μ s PPT.
The coating time (valve is in " opening " position) for each layer from the lining outwards for example is: 1.41s, 2.25s, 3.72s, 4.115s.
Deposit goes out completely after the layer system on the convex surface of substrate, again substrate is turned (Fig. 1 D), and concave surface 1b is coated with the reflecting coating system 4 that disappears (Fig. 1 E) with remainder, and this reflecting coating system that disappears is consistent with the layer system 3 of convex surface 1a.Because the reverse side of plasma body loads, and has removed about 5nm from protective layer, therefore also stay 10nm Si XN Y(thickness loss does not illustrate in the drawings).For this reason, as the first layer deposit 25nm Si XN Y, then be remaining three layer then as previously mentioned.This point has been done the generality explanation by the following fact: it is less that the layer adjacent with protective layer 2 among Fig. 1 and the corresponding internal layer of layer system 3 are compared the thickness that has.Because recessed lens face is bigger from the distance of target body, so coating speed will reduce about 10%.
The coating time for from inside to outside each layer for example is:
1.32s，2.27s，3.79s，4.126s。
Drawn the base sheet rack 5 of the core of the device that proposes as the present invention among Fig. 2-5.Except the coating process that the present invention proposes, this base sheet rack also can be used for all coating procedures, and a substrate both must rotate in a vacuum in these processes, again must upset.
Base sheet rack 5 comprises four annular receiving elements 6, and a substrate for example spectacle glass sheet can so be planted in this receiving element, make it major surfaces in other words its pro and con be convenient to contact.Receiving element 6 is made up of an interior ring 6a and an outer ring 6b, and these two rings can be rotated relative to one another.Interior ring 6a has projection 16, utilizes these projections interior ring just can insert in the rotation with respect to outer ring.Outer ring 6b has two steady brace 23a, 23b on its periphery, utilize the outer ring of these two steady braces to be supported in the backplate 21 of base sheet rack 5.Steady brace 23a, 23b limit axis of rotation.One of steady brace 23a is furnished with for example gear of a coupling element 22, and with slewing gear 9 mating reactions (seeing below).
Receiving element 6 when (Fig. 2 and 4), abuts in and holds on the dish 8 on the working position.These hold the dish be the part of epicyclic gearing 7, place by a drive unit 10 rotatablely move among.This rotatablely moves by the projection on the interior ring 6a 16 and holds the projection 15 that coils on 8 and is passed on the interior ring 6a of receiving element 6.When an axle 14 that holds together to coil 8 phase couplings connection was rotated by drive unit 10, epicyclic gearing 7 promptly was driven.Hold dish 8 can around they longitudinal center line rotations and be rotated, this be since when axle rotate, hold on the dish 8 ring gear 18 one in company with the exterior epicyclic gear 19 of rotation on due to the rolling.In the following cases, exterior epicyclic gear 19 is stopped: it links to each other with outstanding down trough of belt guide rod 13 at least indirectly, cooperate with these guide rods work be an antitorque commentaries on classics be placed in switch pin 11 on the bottom 5b of base sheet rack 5.By a lift cylinder 20, the top 5a of base sheet rack 5 can move with respect to its underpart 5b.
In the time of on the working position, distance is such: though switch pin 11 with guide rod 13 mating reactions, so epicyclic gearing puts into operation, switch pin 11 can not reach in the scope of exterior epicyclic gear 19.As previously mentioned just can be when like this, receiving element 6 is on the working position around a rotation rotation of extending by its mid point.
For the receiving element that overturns, the distance between top 5a and the bottom 5b is reduced.At this moment switch pin 11 is engaged among the 5a of top, and with its upwards pushing of the backplate that is supporting receiving element 6 therein 21.In this way, receiving element 6 is carried away from hold dish 8, no longer is rotated.On this position, the coupling element 22 of receiving element 6 is meshed with a upset transmission mechanism 9 respectively.This transmission mechanism links to each other with a switch-board 12 again.When switch pin 11 is in (distance of 5a, 5b reduces) on the upturned position, thereby make upset transmission mechanism 9 under the situation of the longitudinal center line rotation of axle in the axle rotation, touch switch-board 12 periodically when being arranged in projection on the switch-board in other words, the upset transmission mechanism just is placed in the rotatablely moving of the longitudinal center line of itself.This rotatablely moves and is converted into the flip-flop movement of receiving element 6 by coupling element 22.
Under service condition, have only top 5a and switch pin 11 to be in the spray booth basically.By common drive unit 10, need only realize mobile member opposite to one another refer to here axle 14 and around its cover from vacuum chamber, come out current, and sealed.
The base sheet rack of being introduced above utilizing 5 can be implemented the method that the present invention proposes apace, and not ventilate at that time.Owing to can realize coating and upset to a plurality of substrates simultaneously, so can obtain high output.

Claims (14)

1. the solid target atomization process of using plasma support is gone up the method for making a kind of optics effectiveness layer system (3) at a substrate (1), and this substrate has one first (1a) and one second (1b),
It is characterized in that: go up spraying one protective layer (2) at second (1b) of substrate (1), perhaps use the substrate (1) that had been coated with matcoveredn (2) already; Spray out layer system (3) on first (1a) of substrate, this protective layer (2) is except for good and all being retained on this substrate the part removing when applying described layer system.
2. press the described method of claim 1,
It is characterized in that: protective layer (2) is formed by an individual layer or the additional layer system that is coated on second.
3. press claim 1 or 2 described methods,
It is characterized in that: go up at first (1a) and make layer system (3) afterwards, on second (1b), spray out another layer system (4).
4. by the described method of claim 3, it is characterized in that: the spraying of described another layer system is to implement in making the used device of layer system (3).
5. press the described method of claim 3,
It is characterized in that: protective layer (2) be so select or so make, make its optical property and the requirement satisfied of another layer system (4) be complementary.
6. press each the described method in the above claim,
It is characterized in that: go up spraying protective layer (2) at second (1b).
7. by the described method of claim 6, it is characterized in that: in making the used device of layer system (3), implement spraying protective layer (2).
8. press the described method of claim 6,
It is characterized in that: protective layer (2) sprays under the condition of plasma that uses a kind of anaerobic.
9. by described method one of among the claim 6-8,
It is characterized in that: protective layer (2) is made under the same target body condition of use, and this target body also is used to make the one at least layer of layer system (3,4).
10. press the described method of claim 9,
It is characterized in that: for making each layer of protective layer (2) and layer system (3,4), use same target body, therefore, the operation gas that is used to produce plasma body then basis to be made layer and changed.
11. by each the described method in the above claim,
It is characterized in that: protective layer (2) is made up of silicon oxide, silicon nitride, aluminum oxide and/or aluminium nitride.
12. by each the described method in the above claim,
It is characterized in that: the thickness of spraying protective layer (2) is 10 to 40nm.
13. by each the described method in the above claim,
It is characterized in that: the material of protective layer (2) and its thickness will so be selected according to the processing parameter of going up sprayed coating system (3) at positive (1a), make the protective layer (2) that has to have pre-determined thickness after the spraying of this layer system (3).
14. by each the described method in the above claim,
It is characterized in that: go up the layer system that one of spraying plays protective layer (2) effect at second (1b); perhaps use a kind of substrate with such layer system; first (1a) at first gives machining processes for the optical property that obtains to be scheduled to, go up sprayed coating system (3) at first (1a) subsequently.
CNB028049136A 2001-07-13 2002-06-28 Method and device for producing optically effective system of layers Expired - Lifetime CN1223700C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP01810698.9 2001-07-13
EP01810698A EP1275751A1 (en) 2001-07-13 2001-07-13 Process and apparatus for producing an optically active coating system

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CN1491296A CN1491296A (en) 2004-04-21
CN1223700C true CN1223700C (en) 2005-10-19

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EP (2) EP1275751A1 (en)
JP (1) JP3952017B2 (en)
KR (1) KR100570851B1 (en)
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AT (1) ATE406468T1 (en)
DE (1) DE50212709D1 (en)
WO (1) WO2003006704A1 (en)

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WO2003006704A1 (en) 2003-01-23
ATE406468T1 (en) 2008-09-15
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DE50212709D1 (en) 2008-10-09
KR100570851B1 (en) 2006-04-12

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