CN1223522C - Method for treating wastewater form mechanic grinding copper, and its appts - Google Patents
Method for treating wastewater form mechanic grinding copper, and its appts Download PDFInfo
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- CN1223522C CN1223522C CN02132007.1A CN02132007A CN1223522C CN 1223522 C CN1223522 C CN 1223522C CN 02132007 A CN02132007 A CN 02132007A CN 1223522 C CN1223522 C CN 1223522C
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- waste water
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Abstract
The present invention provides a method for treating copper chemically mechanic grinding waste water and a device thereof. The method for treating copper chemically mechanic grinding waste water comprises the following steps: a coagulant is diluted by the quantitative copper chemically mechanic grinding waste water, the diluted coagulant and a great amount of copper chemically mechanic grinding waste water are respectively led into a reactive groove, and the waste water and the coagulant can generate an agglutination reaction; agglutination liquid obtained by the former step is led into a slowly mixing settling groove and is mixed with a coagulant aid to generate sewage sludge; the sewage sludge is removed, and treated water is discharged. The present invention can also led the sewage sludge into the slowly mixing settling groove, and the present invention settles particles hardly settled by the common settlement of the sewage sludge and promotes the agglutination of the particles in the waste water. The present invention can successfully treat the copper CMP waste water and can cause the turbidity of the treated water to reach lower than 10 mg/L.
Description
Technical field
The present invention relates to a kind of method and apparatus of handling waste water, particularly a kind of method and apparatus of handling wastewater form mechanic grinding copper.
Background technology
Traditionally, usually with the intraconnections of aluminium as semiconductor device.For the planarization of intraconnections, often use chemical and mechanical grinding fluid (CMP slurry), polish aluminum steel in the CMP mode.Owing to contain the abrasive grains of many high rigidity in the CMP slurries,, remake discharging after being necessary to handle for aluminium CMP waste water in order to protect environment.After finishing CMP,, generally be to use polynary gasification aluminium (polyaluminum chloride for the processing of aluminium CMP waste water; PAC) do coagulant precipitation for coagulating agent, form little glue plumage (floc).Then, re-using polymkeric substance (polymer) is coagulant aids, for example uses the anionic powdery polymer, makes formed glue plumage bigger heavier, in order to sedimentation.This PAC treatment process can successfully be removed the particle (particles) in the aluminium CMP waste water.
At present, use the copper wiring of copper as semiconductor interconnect, very general.Yet, the stage that the processing of copper CMP waste water is also starting to walk.The present inventor finds, uses the PAC treatment process that is commonly used for processing aluminium CMP waste water traditionally to handle copper CMP waste water, and the glue plumage does not form, and can't successfully handle copper CMP waste water.
Summary of the invention
In view of this, the technical problem to be solved in the present invention provides a kind of method and apparatus of handling wastewater form mechanic grinding copper, and successfully to handle copper CMP waste water, the water quality of treated water can reach turbidity less than 10mg/L.
For reaching purpose of the present invention, the method that the present invention handles wastewater form mechanic grinding copper may further comprise the steps: dilute a coagulating agent with both quantitative wastewater form mechanic grinding coppers; The coagulating agent of dilution and a large amount of wastewater form mechanic grinding coppers are imported respectively in the reactive tank, make waste water and coagulating agent produce agglutination reaction; Then, in the mixed slowly settling bath of the aggegation liquid importing one of above-mentioned steps gained, mix with a coagulant aids, and produce mud; At last, remove mud, and discharge treated water.
Except above-mentioned steps, in order to reach better treatment effect, the present invention handles the method for wastewater form mechanic grinding copper, after mixing the importing of aggegation liquid in the settling bath slowly, further comprising the steps of: that part mud is led back in the mixed slowly settling bath, to help particulate aggegation in the waste water.
The device that the present invention handles wastewater form mechanic grinding copper comprises;
One mixed cell in order to hold a coagulating agent and both quantitative wastewater form mechanic grinding copper, makes coagulating agent diluted;
One reactive tank is positioned at the downstream of this mixed cell, in order to hold diluted coagulating agent and a large amount of wastewater form mechanic grinding coppers, both are mixed and produces agglutination reaction;
One mixes settling bath slowly, is positioned at the downstream of this reactive tank, in order to the waste water that holds a coagulant aids and come by reactive tank, both are mixed and produces mud; And
One outflow tube is positioned at the downstream that this mixes settling bath slowly, in order to discharge by mixing settling bath and next treated water slowly.
In order to reach better treatment effect, the device that the present invention handles copper CMP waste water can also comprise:
One mud is led return pipe, mixes slowly in the settling bath in order to mud is led back this, to help particulate aggegation in the waste water.
Perhaps, the present invention's device of handling copper CMP waste water can also comprise:
One mud part flow arrangement, be positioned at the downstream that this mixes settling bath slowly, in order to being divided into two portions by the mud that mixes the settling bath discharge slowly, lead a return pipe and a mud collection tube and import a mud respectively, wherein this mud is led return pipe and can be mixed slowly in settling bath in order to the mud of a part is led back this, to help particulate aggegation in the waste water, this mud collection tube can import in order to the mud with another part in the sludge thickener.
Description of drawings
Fig. 1 shows the schematic representation of apparatus according to the processing wastewater form mechanic grinding copper of preferred embodiment of the present invention.
Embodiment
Figure 1 shows that the schematic representation of apparatus of the processing wastewater form mechanic grinding copper of preferred embodiment of the present invention.
As shown in Figure 1, the present invention's device of handling wastewater form mechanic grinding copper comprises: a copper CMP waste water feeding mechanism 10, one wastewater diversion devices 20, one mixed cells 30, one reactive tanks 40, mix settling bath 50, one mud part flow arrangements 60 and an outflow tube 70 slowly.
At first, by copper CMP waste water feeding mechanism 10 supply copper CMP waste water.When waste water flow to wastewater diversion device 20, waste water was divided into two portions.A spot of waste water is via pipeline 22 and flow indicator 24, and in the inflow mixed cell 30, most waste water then flows in the reactive tank 40 via pipeline 26.
Coagulating agent 32 is via a first flow control unit 34 (FC1), and enters in the mixed cell 30, mixes with a small amount of copper CMP waste water that comes via pipeline 22.First flow control unit 34 can be in order to the flow of control coagulating agent 32 to mixed cell 30.So, in mixed cell 30, a small amount of copper CMP waste water can dilute coagulating agent.Make diluted coagulating agent with very fast speed, 36 flow in the reactive tank 40 by the road, simultaneously, most waste water then is to flow in the reactive tank 40 via pipeline 26.At this moment, waste water and coagulating agent can produce agglutination reaction, and produce glue plumage (floc).
The present invention dilutes coagulating agent with a little copper wastewater form mechanic grinding, can make coagulating agent more even diffusely.Because coagulating agent has passed through the dilution of part copper CMP waste water, coagulating agent is diluted into very little unit, therefore, and in reactive tank 40, the effective contact area of particulate increases in coagulating agent and the copper CMP waste water, coagulating agent can be very equably with waste water in particle produce agglutination reaction.Again since a small amount of waste water with after coagulating agent mixes, the speed that imports reactive tank is very fast, therefore, the unlikely coagulating agent that causes is in the situation generation that is entering reactive tank 40 back inefficacies.
Be suitable for coagulating agent of the present invention, can be a polymkeric substance, for example, can be poly-propionic acid amide.Moreover in order to a small amount of copper CMP waste water of dilution coagulating agent, its amount can be 5% to 10% volume ratio that imports a large amount of waste water in the reactive tank.
In reactive tank 40, to carry out preferable agglutination reaction in order making, can to utilize acid solution (as H
2SO
4) or alkali lye (as NaOH) adjust the pH value of waste water.For example, the pH value of waste water in the reactive tank can be transferred to alkalescence, between pH value 8-11, the preferably is between the pH value 9-10.
Then, the aggegation liquid with gained in the reactive tank 40 imports in the mixed slowly settling bath 50.Coagulant aids 52 (for example can be a polymkeric substance) mixes in the settling bath 50 and enter slowly via one second flow controlling unit 54 (FC2), mixes with aggegation liquid, and produces mud (Sludge).Second flow controlling unit 54 can be in order to control coagulant aids 52 to the flow that mixes settling bath 50 slowly.
Slowly mix the mud of being discharged in the settling bath 50 and can be divided into two portions by mud part flow arrangement 60, lead return pipe 62 via mud respectively and the mud of a part led back slowly and mix in the settling bath 50, the mud via mud collection tube 64 with another part imports in the sludge thickener 66.
Some particle in the waste water can't lean on medicaments such as coagulating agent or coagulant aids and settles down.Lead return pipe 62 and import the mud that mixes slowly in the settling bath 50 by mud, then can catch little glue plumage, coprecipitated and these difficult settled particles settlings are got off by mud, help particulate aggegation in the waste water.
Lead return pipe 62 and lead back the part mud that mixes slowly in the settling bath 50 via mud, can account for by 10% to 30% weight ratio of mixing whole mud of discharging in the settling bath slowly.For example, lead return pipe 62 and lead back slowly the mud that mix in the settling bath 50 and can account for 20% via mud, and the mud that imports in the sludge thickener 66 via mud collection tube 64 can account for 80%.
At last, discharge treated water via outflow tube 70, the turbidity of the treated water of the present invention (turbidity) can reach 10mg/L, and water quality is very good.Moreover, use PAC to handle aluminium CMP waste water traditionally, because PAC can dissociate in water, treated water has high conductance, need further deal with.As for the present invention, be to use polymkeric substance to handle copper CMP waste water, treated water does not have the problem of high conductance, does not need further to do the processing of reduction conductance.
Comprehensively above-mentioned, the present invention dilutes coagulating agent with a small amount of copper CMP waste water, can make coagulating agent more even diffusely, makes coagulating agent more effectively carry out agglutination reaction with waste water.Moreover the present invention leads back mud slowly and mixes in the settling bath, can be coprecipitated and the settled particles settling of difficulty is got off by mud, help particulate aggegation in the waste water.Therefore, the present invention can successfully handle copper CMP waste water, and the turbidity of treated water is reached below the 10mg/L.
Though the present invention with preferred embodiment openly as above; right its is not in order to restriction the present invention, any those who familiarize themselves with the technology, without departing from the spirit and scope of the present invention; change and retouching when doing, so the content that scope of patent protection of the present invention is worked as with claims is as the criterion.
Claims (9)
1. method of handling wastewater form mechanic grinding copper, it comprises:
Dilute a coagulating agent with both quantitative wastewater form mechanic grinding coppers;
The coagulating agent of dilution and a large amount of wastewater form mechanic grinding coppers are imported respectively in the reactive tank, make waste water and coagulating agent produce agglutination reaction;
The aggegation liquid of above-mentioned steps gained is imported in the mixed slowly settling bath, mix with a coagulant aids, and produce mud; And
Remove mud, and discharge treated water.
2. the method for processing wastewater form mechanic grinding copper as claimed in claim 1 is characterized in that described coagulating agent is a polymkeric substance.
3. the method for processing wastewater form mechanic grinding copper as claimed in claim 2 is characterized in that described coagulating agent is poly-propionic acid amide.
4. the method for processing wastewater form mechanic grinding copper as claimed in claim 1 is characterized in that after mixing the importing of aggegation liquid in the settling bath slowly, and is further comprising the steps of: as part mud to be led back this mix slowly in settling bath, to help particulate aggegation in the waste water.
5. the method for processing wastewater form mechanic grinding copper as claimed in claim 1 is characterized in that after the coagulating agent with dilution imports in the reactive tank further comprising the steps of: the pH value of adjusting waste water in the reactive tank is between the 8-11.
6. device of handling wastewater form mechanic grinding copper, it comprises:
One mixed cell in order to hold a coagulating agent and both quantitative wastewater form mechanic grinding copper, makes coagulating agent diluted;
One reactive tank is positioned at the downstream of this mixed cell, in order to hold diluted coagulating agent and a large amount of wastewater form mechanic grinding coppers, both are mixed and produces agglutination reaction;
One mixes settling bath slowly, is positioned at the downstream of this reactive tank, in order to the waste water that holds a coagulant aids and come by reactive tank, both are mixed and produces mud; And
One outflow tube is positioned at the downstream that this mixes settling bath slowly, in order to discharge by mixing settling bath and next treated water slowly.
7. the device of processing wastewater form mechanic grinding copper as claimed in claim 6 is characterized in that also comprising:
One wastewater diversion device is positioned at the upstream of this mixed cell and reactive tank, in order to wastewater form mechanic grinding copper being divided into both quantitative waste water flowing in the mixed cell, and is divided into a large amount of waste water to flow in the reactive tank.
8. the device of processing wastewater form mechanic grinding copper as claimed in claim 6 is characterized in that also comprising:
One mud is led return pipe, mixes slowly in the settling bath in order to mud is led back this, to help particulate aggegation in the waste water.
9. the device of processing wastewater form mechanic grinding copper as claimed in claim 6 is characterized in that, it also comprises:
One mud part flow arrangement is positioned at the downstream that this mixes settling bath slowly, in order to being divided into two portions by the mud that mixes the settling bath discharge slowly, leads a return pipe and a mud collection tube and import a mud respectively;
Wherein this mud is led return pipe and can be mixed slowly in settling bath in order to the mud of a part is led back this, and to help particulate aggegation in the waste water, this mud collection tube can import in order to the mud with another part in the sludge thickener.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN02132007.1A CN1223522C (en) | 2002-09-06 | 2002-09-06 | Method for treating wastewater form mechanic grinding copper, and its appts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN02132007.1A CN1223522C (en) | 2002-09-06 | 2002-09-06 | Method for treating wastewater form mechanic grinding copper, and its appts |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1480407A CN1480407A (en) | 2004-03-10 |
| CN1223522C true CN1223522C (en) | 2005-10-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN02132007.1A Expired - Lifetime CN1223522C (en) | 2002-09-06 | 2002-09-06 | Method for treating wastewater form mechanic grinding copper, and its appts |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1223522C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7238283B2 (en) * | 2003-12-04 | 2007-07-03 | Taiwan Semiconductor Manufacturing Co. Ltd. | System for wastewater treatment |
| CN102079597B (en) * | 2011-03-04 | 2013-06-05 | 安徽精诚铜业股份有限公司 | Method for removing copper ions in sewage |
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2002
- 2002-09-06 CN CN02132007.1A patent/CN1223522C/en not_active Expired - Lifetime
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| Publication number | Publication date |
|---|---|
| CN1480407A (en) | 2004-03-10 |
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Granted publication date: 20051019 |