CN1222672A - Laser-scanning microscope - Google Patents
Laser-scanning microscope Download PDFInfo
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- CN1222672A CN1222672A CN 98122886 CN98122886A CN1222672A CN 1222672 A CN1222672 A CN 1222672A CN 98122886 CN98122886 CN 98122886 CN 98122886 A CN98122886 A CN 98122886A CN 1222672 A CN1222672 A CN 1222672A
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- microprobe
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Abstract
The mechanical microscope consists of light source, collimating beam expander, semi-reflector, micro-objective, focusing objective, preamplifier with photodiode, phase-lock amplifier, piezoelectric pile, microprobe, piezoelectric scaning bench and computer with ADC and DAC. The light source is one diode laser, and the incident parallel laser beam is convrged by the micro-objective on the cantilever of the microprobe to form co-path interference of the reflected light and diffracted light. Compared with available technology, the scheme has the advantages of simple and compact structure, stable and reliable performance and being favorable to miniaturization. The present invention has longitudinal resoluition of 0.01 nm and traverse resolution of 5nm.
Description
The present invention relates to a kind of metering outfit that adopts the microtexture of nanometer measuring technology gage surface, particularly a kind of laser-scanning microscope.
Scanning force microscopy, comprise the atomic force flying-spot microscope, the electrostatic force flying-spot microscope, magnetic force flying-spot microscope and heating power flying-spot microscope, be to obtain sample surfaces microtexture information by the acting force between microprobe and the sample, also can be used for the study sample surface magnetics and electrical properties.The mode of operation of scanning force microscopy can be divided into two kinds of contact mode and noncontact modes, contact mode is the variation of determining sample and microprobe interaction force by the displacement of measuring microprobe, and then the micromechanism of definite sample surfaces, it has the lateral resolution of atom magnitude, and its defective is can damage sample surfaces when measuring thin soft sample.Adopt optical method for measuring microprobe displacement or amplitude variations, method commonly used is optical lever method and various optical interferometry, as commercial atomic force microscope, the pattern on measuring samples surface is longitudinal force and the coefficient result of tangential force between microprobe and the sample, though very high longitudinal frame and lateral resolution are arranged, and measuring accuracy is lower.And the microprobe displacement sensitivity that optical interferometry only produces longitudinal force, and it is insensitive to the effect of tangential force, thereby measuring accuracy is higher, various interference of light sonde methods adopt road or the accurate design of road altogether altogether usually, as utilize the interference light probe that the Nomarski principle makes and utilize the binary channels interference light probe of diffraction grating beam split, the two-beam that forms interference signal reflects from the head and the afterbody of microprobe respectively, also have bifocal common path interference light probe and fiber optic interferometric light probe etc. in addition, the advantage of interference of light sonde method is to have higher measuring accuracy and stability, its defective is higher to the quality requirements of optical element, and its optical system structure is comparatively complicated.
The object of the present invention is to provide a kind of laser-scanning microscope of novel structure, advantage such as it has compact conformation, volume is little, antijamming capability is strong, stable and reliable for performance, its longitudinal frame is 0.01nm, lateral resolution is 5nm.The technical measures that realize the object of the invention and adopt: (1) takes the lead in finding and has utilized the point-diffraction interference phenomenon of light on microprobe, Fig. 1 is common microprobe structural drawing, substrate 91 is (111) type silicon single crystal substrate, micro-cantilever 92 thickness are 0.4 μ m, length is 200 μ m or 100 μ m, resonance frequency is 13KHz or 40KHz, elasticity coefficient is 0.02N/m or 0.09N/m, be coated with the Au/Cr reflection horizon on its surface, (111) type silicon microprobe 93 is fixed on the micro-cantilever 92, its tip diameter is less than nanometer scale, when the incident collimated laser beam is focused at micro-cantilever end upper surface by microcobjective, its optical axis and micro-cantilever Surface Vertical, focused light spot is the disc of confusion of several microns of diameters, assemble the disc of confusion some and covered hollow needle point place, so the some of convergent beam is returned from former road by the micro-cantilever surface reflection, form the reflection corrugated, another is partly returned to diffraction behind the hollow needle point of the micro-cantilever place, form point diffraction wave surface, solid line is the reflection corrugated among the figure, dotted line is a point diffraction wave surface, and these two corrugateds form common path interference; The interval of interference fringe and how much reflection spot S
1With point diffraction S
2Relative position relevant, when reflection spot had out of focus with respect to the micro-cantilever surface, striped was bending or annulus, and the contrast of interference fringe is relevant with respect to the beam intensity ratio of diffraction light with reflected light, can regulate beam intensity ratio by focusing and translation micro-cantilever, to obtain best fringe contrast.As seen hollow triangle micro-cantilever plays the common path interference beam splitter because architectural feature is actually and is equivalent to a kind of natural reflection-type point diffractive plate.(2) utilize point-diffraction interference as the displacement of accurately measuring micro-cantilever, field point P phase differential changes when being the microprobe displacement, as shown in Figure 2, represent position before the microprobe displacement with solid line, dotted line is represented the position after the displacement, if addendum modification is h, Fig. 2 demonstrates the pupil window relation of reflection-type point-diffraction interference, at the lip-deep reflection spot S of micro-cantilever
1With point diffraction S
2In fact can be considered two emergent pupils of interference system, the film viewing screen that produces interference fringe is exactly an exit window, and P is the arbitrfary point on the exit window B, when the micro-cantilever probe is motionless, and S
1And S
2The phase differential that point is ordered with respect to P is fixed; When the micro-cantilever probe produces displacement, how much convergent point S
1The position keep motionless, but its image point is at S
1', and point diffraction S
2The position will displacement with the variation of micro-cantilever, by S
2Move to S
2'.This moment the P phase differential of ordering variation delta φ=4 π h/ λ, visible interference fringes will the displacement with the displacement of micro-cantilever.By just can accurately measure the variation of phase differential to the phase-detection of interference fringe, thereby accurately measure the displacement size of micro-cantilever, and the microprobe displacement is because the variation of the near field acting force (atomic force or Van der Waals force) between microprobe and the sample causes, this near field power variation is because the micromechanism on sample surface when two-dimensional scan causes, therefore accurately measure the displacement size of micro-cantilever, just can measure the three-dimensional microcosmic structure of sample surfaces.
Be described in detail particular content of the present invention below in conjunction with accompanying drawing 3.
A kind of laser-scanning microscope, comprise light source, the collimator and extender device, microcobjective, microprobe, the piezoelectric scanning platform, sample places on the piezoelectric scanning platform, lock-in amplifier, the computing machine that has A/D and D/A converter, it is characterized in that: this laser scanning microscope is by light source 1, collimator and extender device 2, half-reflecting half mirror 3, microcobjective 4, focusing objective len 5, the prime amplifier 6 that has photodiode, lock-in amplifier 7, piezoelectric stack 8, microprobe 9, piezoelectric scanning platform 10, the computing machine 11 that has A/D and D/A converter constitutes, wherein light source 1 adopts semiconductor laser, laser is through collimator and extender device 2, half-reflecting half mirror 3, focus on behind the microcobjective 4 on microprobe 9 surfaces, its reflected light forms to diffraction light with the back interferes, interfering beam is multiple through microcobjective 4, half-reflecting half mirror 3 backs are focused on the photodiode by condenser lens 5, output terminal with the prime amplifier 6 of this photodiode is connected with the input end of lock-in amplifier 7, an output termination piezoelectric stack 8 of lock-in amplifier 7, the silicon chip of microprobe 9 is fixed on the piezoelectric stack 8, piezoelectric scanning platform 10 is positioned at the below of microprobe 9, another output terminal of lock-in amplifier 7 is connected with computing machine 11 by A/D converter, and computing machine 11 is controlled voltage U by D/A converter to 10 outputs of piezoelectric scanning platform
X, U
Y, U
ZDescribed microcobjective 4 is 10 times or 20 and shows the speck mirror.
With prior art relatively, the present invention has following outstanding advantage: the microprobe diameter that (1) is positioned at the sample top is a nanometer scale, the displacement of microprobe is again to be caused by the atom of sample surfaces and the variation of the most advanced and sophisticated interaction between atoms power of microprobe during scanning, so this measurement has the lateral resolution of super diffraction limit, under noncontact mode, lateral resolution with several nanometers, under contact mode, can reach the lateral resolution of inferior nanometer scale, this is that traditional pure optical means is beyond one's reach; (2) this instrument is a kind of interference light probe on road fully altogether, has completely cut off the influence of atmosphere drift and extraneous vibration, and abnormal signal is stable, and this laser-scanning microscope has the longitudinal frame of 0.01nm and the lateral resolution about 5nm; (3) not high to light source requirements, can adopt semiconductor laser; (4) compare with existing various interference light sonde methods, this laser-scanning microscope structure is the simplest, compact, and performance is more reliable and stable, helps system and realizes miniaturization.
Fig. 1 is the some diffraction principle figure of converging light on microprobe.
The synoptic diagram that field point P phase differential changed when Fig. 2 was the microprobe displacement.
Fig. 3 is a laser-scanning microscope structural representation of the present invention.
Fig. 4 is the ultra-smooth glass surface three-dimensional microstructure figure (nm of unit) that records.
Fig. 5 is the liquid crystal film surface three-dimensional microstructure figure (nn of unit) that records.
Embodiment 1:
A kind of laser-scanning microscope, adopt structure as shown in Figure 3, use this laser-scanning microscope and measure the surface of ultra-smooth glass, light source 1 adopts the 10mw semiconductor laser, and wavelength is 650nm, and lock-in amplifier adopts SR830DSP, the resonance frequency of microprobe is 40KHz (noncontact mode), elasticity coefficient is 0.09N/m, and sweep limit is 80 * 80nm, and maximum fluctuating the in surface of measuring ultra-smooth glass is not more than 5nm.
Example 2:
Use this laser-scanning microscope and measure the surface of liquid crystal film, mode of operation is identical with embodiment 1, and sweep limit is 1500 * 1500nm, can see that the liquid crystal surfactant particle size is 95～105nm.
Claims (2)
1, a kind of laser-scanning microscope, comprise light source, the collimator and extender device, microcobjective, microprobe, the piezoelectric scanning platform, sample places on the piezoelectric scanning platform, lock-in amplifier, the computing machine that has A/D and D/A converter, it is characterized in that: this laser scanning microscope is by light source (1), collimator and extender device (2), half-reflecting half mirror (3), microcobjective (4), focusing objective len (5), the prime amplifier (6) that has photodiode, lock-in amplifier (7), piezoelectric stack (8), microprobe (9), piezoelectric scanning platform (10), the computing machine (11) that has A/D and D/A converter constitutes, wherein light source (1) adopts semiconductor laser, laser is through collimator and extender device (2), half-reflecting half mirror (3), focus on behind the microcobjective (4) on microprobe (9) surface, its reflected light forms to diffraction light with the back interferes, interfering beam is multiple through microcobjective (4), half-reflecting half mirror (3) back is focused on the photodiode by condenser lens (5), output terminal with the prime amplifier (6) of this photodiode is connected with the input end of lock-in amplifier (7), an output termination piezoelectric stack (8) of lock-in amplifier (7), the silicon chip of microprobe (9) is fixed on the piezoelectric stack (8), piezoelectric scanning platform (10) is positioned at the below of microprobe (9), another output terminal of lock-in amplifier (7) is connected with computing machine (11) by A/D converter, and computing machine (11) is controlled voltage (U by D/A converter to piezoelectric scanning platform (10) output
X, U
Y, U
Z).
2, according to the laser-scanning microscope of claim 1, it is characterized in that: described microcobjective (4) is 10 times or 20 and shows the speck mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 98122886 CN1222672A (en) | 1998-12-27 | 1998-12-27 | Laser-scanning microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 98122886 CN1222672A (en) | 1998-12-27 | 1998-12-27 | Laser-scanning microscope |
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| Publication Number | Publication Date |
|---|---|
| CN1222672A true CN1222672A (en) | 1999-07-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 98122886 Pending CN1222672A (en) | 1998-12-27 | 1998-12-27 | Laser-scanning microscope |
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| Country | Link |
|---|---|
| CN (1) | CN1222672A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100523778C (en) * | 2002-12-18 | 2009-08-05 | 额塞勒姆研究公司 | Fully digital controller for cantilever-based instruments |
| CN108489414A (en) * | 2018-05-07 | 2018-09-04 | 中国矿业大学 | A kind of micro/nano-scale memorial alloy round trip memory strain test device and test method |
| CN111413015A (en) * | 2020-04-07 | 2020-07-14 | 中国科学院合肥物质科学研究院 | Force measuring device |
-
1998
- 1998-12-27 CN CN 98122886 patent/CN1222672A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100523778C (en) * | 2002-12-18 | 2009-08-05 | 额塞勒姆研究公司 | Fully digital controller for cantilever-based instruments |
| CN108489414A (en) * | 2018-05-07 | 2018-09-04 | 中国矿业大学 | A kind of micro/nano-scale memorial alloy round trip memory strain test device and test method |
| CN111413015A (en) * | 2020-04-07 | 2020-07-14 | 中国科学院合肥物质科学研究院 | Force measuring device |
| CN111413015B (en) * | 2020-04-07 | 2021-10-08 | 中国科学院合肥物质科学研究院 | Force measuring device |
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