CN1222255A - Monolithic multilayer piezo actuator and process for its prodn. - Google Patents
Monolithic multilayer piezo actuator and process for its prodn. Download PDFInfo
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- CN1222255A CN1222255A CN97195626.XA CN97195626A CN1222255A CN 1222255 A CN1222255 A CN 1222255A CN 97195626 A CN97195626 A CN 97195626A CN 1222255 A CN1222255 A CN 1222255A
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- 230000008569 process Effects 0.000 title description 11
- 238000005245 sintering Methods 0.000 claims abstract description 22
- 239000007772 electrode material Substances 0.000 claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 claims abstract description 13
- 238000003475 lamination Methods 0.000 claims description 48
- 239000000919 ceramic Substances 0.000 claims description 19
- 239000000203 mixture Substances 0.000 claims description 15
- 238000003825 pressing Methods 0.000 claims description 14
- 239000000853 adhesive Substances 0.000 claims description 10
- 230000001070 adhesive effect Effects 0.000 claims description 10
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 6
- 238000004080 punching Methods 0.000 claims description 6
- 238000005520 cutting process Methods 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 239000002131 composite material Substances 0.000 abstract 2
- 239000011230 binding agent Substances 0.000 abstract 1
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- 238000012545 processing Methods 0.000 description 6
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- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 150000001768 cations Chemical class 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 3
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- 239000000463 material Substances 0.000 description 3
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- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 1
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- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
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Abstract
A method for manufacturing a monolithic piezoelectric actuator of multilayer design and having a high aspect ratio of more than two built up from a plurality of smaller stacks in a multilayer design, includes alternately layering green piezoceramic films and electrode material, compressing the layers while elevating the temperature to remove the binder and thereby form a composite, stacking several of the composites on one another, and sintering the stack so as to form the monolithic piezoelectric actuator which exhibits an improved mechanical strength with good piezoelectric properties.
Description
Piezoelectric-actuator generally is to be made by a plurality of piezoelectric elements of configuration in a lamination (Stapel).Each such element is again to be made by a slice piezoceramics layer that metal electrode is housed in both sides.When on such electrode, applying voltage, on piezoelectric ceramic, just produce along of the distortion of lattice of a main shaft to a useful longitudinal extension.Because this length of extending along major axes orientation wants to obtain a desirable absolute development length again less than 2/1000ths of bed thickness, just must prepare the active piezoelectric ceramic of the sizable bed thickness of thickness.Along with the increase of piezoelectric ceramic bed thickness, the required voltage of the piezoelectric ceramic of single piezoelectric element action increases.For this phenomenon is remained in the useful scope, the thickness of piezoelectric ceramic is generally between 20 to 200 μ m.Want to make the piezoelectric-actuator of sandwich construction to produce a desirable longitudinal extension, just need have the discrete component or the individual layer layer spare of the corresponding number of plies.
Habitual sandwich construction piezoelectric-actuator is to be made of total individual layer layer spare that has multilayer.Its manufacture method is that the piezoelectric ceramic partial veil is built up a lamination according to the alternately laminated mode of electrode material, passes through lamination and sintering then, makes monolithic multilayer spare.At Ferroelectrics, 1983,90 volumes, 181 ~ 190 pages of articles of delivering people such as S.Takahashi institute with this method example in pass.Maximum piezoelectric-actuator with maximum absolute development length is to adopt a plurality of such lamination bondings are made.In US-A5438232, delivered the example of such method.Yet being stacked in, such bonding finds in the multiple use that rigidity is too little, all the more so in the time must transmitting brute force.Have only the monolithic multilayer structure of monoblock to possess high like this rigidity just now.Structure only in this way demonstrates enough fastness that the multilayer part in lamination has just now.
When making the sinkgle-vane actuator of monolithic multilayer structure, also to produce other problem along with the progressively increase of height.Be pressed into the laminated sheet of a lamination by a plurality of single executive components, before sintering, must cut apart.Be divided into fritter lamination with desirable amount executive component area so as to the partial veil that area is bigger.Low lamination can use the punching press on automatic punching machine of simple method as multi-layer capacitor; High lamination then must adopt many saw blade saws to cut apart along cut-off rule.
Low lamination can be finished the lamination operation with the short activity duration in automatic machine tool.When higher lamination carries out lamination, then must double to carry out modestly; When carrying out lamination, to keep vertical structure precision constant especially.At this moment, because the used lateral flow process of pressure in partial veil often has the danger that causes the interlayer displacement.Particularly there is the position of pending contact processing therefore to be damaged afterwards.
Used organic bond is to need especially in the manufacturing of partial veil in the multilayer manufacturing process, also coordinate in the lamination operation, but the unsticking mixture that must carry out the expense costliness before carrying out sintering in stove in controlled atmosphere is handled.Along with increasing of stack height, the required diffusion path of adhesive or catabolite will be multiplied in unsticking mixture process.In order to prevent high interior infringement of pressing for lamination, need the technological measure of high cost, in the process of making multi-layer capacitor, this is a main cost.
Since many problem to be solved arranged what the piezoelectric-actuator of making sandwich construction existed, up to now, known monolithic piezoelectric executive component, owing to adopt manufacturing cost cheap, for example, adopt the conventional techniques of making multi-layer capacitor, make its maximum height be limited at 2.5 to 5mm.In addition, for the reasons mentioned above, the depth-width ratio maximum of this known piezoelectric-actuator can only reach about 2.Up to now, the bigger executive component of higher executive component and depth-width ratio can only obtain by the way that a plurality of little laminations are bonded together, and adopts such way to make the rigidity of lamination and then makes its bearing capacity reduction.
Task of the present invention is: provide a kind of simple and reliable method for making monolithic multilayer structure piezoelectric-actuator, its depth-width ratio is used for making the monolithic body of stack height more than 5mm more than 2, has best piezoelectric property and powerful mechanical adhesion intensity.
This task can solve according to a kind of method of claim item 1 regulation.Other advantageous measure of the present invention are referring to other claim items.
Basic idea of the present invention is the laminar structure that utilizes the regulation stack height.Through laminate is divided into after the fritter, just fritter second lamination (the second multilayer part) that is divided into desirable executive component by large-area first lamination (the first multilayer part) will carry out the unsticking mixture afterwards.Then, a plurality of second such multilayer parts are stacked to certain height, are equivalent to many times of first achievement, and under slight pressure, sinter piezoelectric-actuator according to the invention into.Thereby make overall height greater than 5mm, depth-width ratio is greater than 2, piezoelectric-actuator according to the invention.Thereby, obtain the vertical high accuracy of internal electrode structure by there being the first less lamination of the less stack height of consumption to carry out lamination.This point particular importance, because electrode is pressed knot on partial veil through processing and forming, the result makes in its preformed hole that is retained in electrode layer, its accurate position in place in lamination processes particular importance for correct contact.By many such multilayer parts are stacked up and down, then then with simple mode co-sintered, can be constant in the high so vertical precision of the inside of multilayer part maintenance.In the dislocation that the multilayer part may be produced when stacked up and down and unimportant.Utilize the cheap ways customary of cost to cut apart when cutting apart the first limited multilayer part of stack height by cutting, punching press or shearing.The unsticking mixture that single multilayer part will be done sometimes is very little in stack height, for example, is up to and carries out under the state of 2mm.So just can make the evolving path that adhesive or its catabolite need overcome greatly about about 1mm.Therefore, when the unsticking mixture, needn't make extra expenditure, adopt customary way to get final product because of this process is controlled.
Carry out because the processing of the electrode structure when making the first multilayer part in the multilayer part is unified, link together, just can enough simple methods make the different piezoelectric-actuator of layer part by a plurality of multilayer parts with different electrode structure.Layer part divided according to the bed thickness or the contact processing mode of concrete electrode structure, each layering.So can adopt simple mode in piezoelectric-actuator, progressively to realize the mechanical bond of executive component and transducer and the function of electronic unhook.The manufacture method of the extremity piece of piezoelectric-actuator (just part and tail spare) is also very simple.These elements are to be made by the large-area passive ceramic layer that is with or without electrode structure.
Be not subjected to the restriction of material therefor fully according to piezoelectric-actuator of the present invention and compound formulation thereof.Can make executive component with any PZT (lead zirconate titanate)-pottery.Can make electrode layer with the slip that contains different metal.For example a kind of slip that contains platinum grain just can be sintered into the required ceramic structure of good piezoelectric property under optimal temperature conditions.The slip that contains palladium/silver also is adapted at using under the lower sintering temperature.
Embodiment of following reference and accompanying drawing thereof are elaborated for this method.
Shown in Figure 1 is the vertical view of pressing the partial veil of knot with electrode material.
Shown in Figure 2 is the lamination profile of pressing the partial veil formation of tying electrode material.
Shown in Figure 3 is that this lamination is through the perspective view (the first multilayer part) after the lamination.
It shown in Fig. 4 to 6 multilayer part with the corresponding different structure of piezoelectric-actuator that in different field, uses later.It shown in the figure profile along the AB line.
Shown in Figure 7 is the arrangement mode of different multilayer parts in a pressing mold.
Shown in Figure 8 is the electrical wiring that has in the finished product piezoelectric-actuator.
1. the manufacturing of piezoelectric-actuator
Mix the most uniform raw material and can adopt known method manufacturing, for example, according to the mixed oxidization method; Perhaps adopt the chemical route method, for example adopt Sol-Gel method, citrate method, oxalate method; Perhaps pass through other the organic transitional compound manufacturing of metal.In the mixed oxidization method, all cations that can use for pottery are to mix each other with the form of its oxide, transform into PZT then; Desirable cation in other manufacture method then is the mixed solution from metal oxide.By the precipitation from solution, perhaps mix cation very uniformly in the solid matter that just can obtain afterwards by progressively concentrating in being called the Sol-Gel method.For example, obtain the ceramic powder of following nominal composition:
Pb
0.97Nd
0.02(Zr
0.54Ti
0.46)O
3。
After calcining, grind again again and homogenizing.Then be in harmonious proportion with organic bond and water again, make a kind of pug.Be used for pushing or pouring into partial veil, after super-dry, form for example thickness of 20 to 200 μ m.
Partial veil applies electrode material in the above after super-dry, for example, press knot with a kind of slip.This slip is silver/palladium particle (70/30 mass mixing ratio) to be modulated to reach compressible sliminess generally in a kind of adhesive.Can also adopt other other light metals, for example the slurry made of platinum grain.
Can in the one procedure of electrode moulding processing, press a plurality of piezoelectric elements of knot on the basic plane of partial veil.So at least, can in molding process, save the contact processing of in the future each piezoelectric element being done.
Shown in Figure 1 is the vertical view of pressing the partial veil of knot with electrode material.Press knot to carry out according to a kind of pattern.Reserve porose area 2 comprising pressing interface 1 and non-pressure knot.After cut-off rule SL is used for representing large-area partial veil is divided into the line of cut of small-sized multilayer part with ideal operation surface.Draw a partial veil of 3x3 small-sized multilayer part grid among the figure.Desirable cellar area according to the usefulness that is provided with the back piezoelectric-actuator can also imagine that other any grid and/or other electrode mode are arranged.The length of side of the square lattice of representing by cut-off rule in Fig. 1 for example is 14mm.
Coating will make it form the thick electrode layer of corresponding 2 to 3 μ m after oversintering for the amount of the electrode material of the usefulness of electrode layer on a side.
Fig. 2: press the piezoelectric ceramic partial veil S1 that ties electrode material, S2, S3 ... sometimes will through super-dry and then carry out stacked, thereby form the order of alternately arranging according to piezoceramics layer 3 and electrode layer 5.Electrode layer adopts same over-over mode stacked like this, and that is exactly to be placed on the plane 1 of the pressure junction electrode material in the next electrode layer in the ground floor electrode layer with on above-mentioned each preformed hole 4 that is equivalent to non-pressure interface 2 among Fig. 1.Electrode mode Rotate 180 that so just can be by will be as shown in Figure 1 ° makes on its axis that arrives the partial veil place.Fig. 2 is illustrated in the schematic diagram of arranging according to the alternating sequence of electrode material 5 and partial veil 3 in the lamination.By the mode of alternately arranging, making every one deck all has same electrode mode.Preformed hole 4 among this is two-layer in the layer of same pattern but be stagger each other stacked.
The lamination overall height that is made of a plurality of individual layers that stack up and down by this way must not surpass 2 to 3mm.When the thickness of partial veil, for example, when being 100 μ m, the number of plies of individual layer then is equivalent to 30 layers.To adopt the loose stacked lamination of this way to be placed on the stamping machine, lamination is carried out accurate isobaric densification with the uniaxial tension of about 100Mpa.Mobile adhesive just can be increased to 60% from 48% with theoretical ceramic density under room temperature (preferably in high slightly temperature) and normal pressure.Under this state, carry out pressure inside balance and volume balance, thereby just can enough ceramic materials fully boxing out of electrode mode 4 be filled up.When carrying out lamination process, adopt and also can make the density gradient and the barometric gradient of lamination or multilayer part finished product inside also be able to balance in such a way.
Shown in Figure 3 is the perspective view of the multilayer part made like this.Preformed hole originally fills up with ceramic material fully.Because each layering still has enough plasticity through the secure bond after the lamination, so the square of delimiting according to original cut-off rule can be divided into the fritter multilayer part of desirable area this moment.This operation can be by supermatic process utilization cutting or punching press are carried out together.By means of the cut mark that stamps in addition, can observe and monitor the situation of cutting apart of multilayer part by video method by the calculating parts.
In next procedure, from the laminated stack (multilayer part) that so is divided into, remove adhesive.This be by one heat treatment step slowly be warming up to about 500 ℃, the partial pressure of oxygen that raises simultaneously, can outwards spread certainly so as to making adhesive, and can ceramic structure not wrecked because of producing swift and violent decomposition.Also can select condition like this, promptly in advance this method next step before make the adhesive oxidation, perhaps make it become chip by thermal cracking.With the limitation in height of lamination is being exactly to make the catabolite of adhesive and/or oxidation product that short the evolving path be arranged in order to guarantee less than 3mm.The process of unsticking mixture in an embodiment progressively was warming up in 24 hours about 500 ℃ and carries out in contained oxygen element accounts for the closed atmosphere of 8% volume.In the process of unsticking mixture, change in volume must not be occurred, also the lamination torsional deformation must not be therefore made.So just can make the multilayer part keep the vertical structure precision constant.
Can adopt various multilayer part to constitute according to piezoelectric-actuator of the present invention.(referring to Fig. 4-6) piezoelectric-actuator is to be made of a middleware MT with aforesaid conventional alternating electrode structure under simple scenario.Be provided with a stature spare KT in the upper end of lamination.With a slice passive, just an electrical cable sheet 6 that be disconnected or that at all do not have electrical cable encases.A sheet 6 that constitutes with ceramic foil can be used for making piezoelectric-actuator to have power transmission capacity preferably separately.A corresponding structure also has a tail spare FT, and the cauda 7 of tail spare can be identical with the structure of the sheet 6 of a part KT.
For the consumption with raw material is reduced to bottom line, can change the pattern of pressing the junction electrode layer, only with comprising that a stature spare and tail spare and a middleware that is made of the single laminated stack of respective numbers make a complete piezoelectric-actuator.With the number of packages of the middleware of spline structure or different structure will be according to the desirable manipulation height of finished product piezoelectric-actuator, then determine according to the height of piezoelectric-actuator.
Fig. 7 represent through the part, middleware and the tail spare that removing adhesive how with the pressing mold 9 of its precision-fit in stacked to desirable height, and push down with a drift 10.In an oxidizing atmosphere, carrying out sintering under 10 to 100kPa the slight pressure then.The diameter of the round in the example is equivalent to the punching press size of stacked multilayer part.Pressing mold and drift preferably can be reused.Any reaction must not take place with pottery in used manufactured materials when sintering.Pressing mold is well suited for use, for example, and aluminium oxide or magnesium oxide manufacturing.Pressure can adopt simple way to apply an additional counterweight on drift and produce.Everyly in oxidizing atmosphere, in stable and the atmosphere itself is not had the material of adverse effect, use such additional bob-weight all effective at sintering at 1130 ℃.
Can use a kind of temperature program(me) that can reach maximum sintering temperature when carrying out sintering.A continuous oven that has temperature controlled single stove or one that corresponding different temperatures district is arranged can be made the usefulness of this operation.Sintering is to carry out in 24 hours 1130 ℃ of sealings in an embodiment.
The result obtains a monolithic piezoelectric executive component with best mold pressing ceramic structure, because the sintering temperature height, so piezoelectric property is superior, the adhesion strength height between pottery and electrode.The rigidity of monolithic piezoelectric executive component is also high, thereby can transmit brute force.
Shown in Figure 8 is a finished product piezoelectric-actuator, makes the contact chip of two strips on two relative seamed edges, does contact with electrode material and is connected.Because is the alternating electrode structure between each layer, such contact 13 can only connect an electrode layer every one deck, and a fixed contact therefor on the diagonal angle 14 same respectively be clipped in both among electrode layer contact.So just (two electrode layer between) piezoelectric layer can be carried out parallel connection, thereby can make piezoelectric-actuator can do best running.
The depth-width ratio of calculating according to the ratio of the height h of piezoelectric-actuator of the present invention and seamed edge length b approximately reaches 5.Though can also make higher, more elongated piezoelectric-actuator in principle, percent defective increases when sintering.The internal diameter of pressing mold and drift size or and adaptive through the multilayer part of unsticking mixture.Yet owing to find all on all three-dimensional axis that when sintering 15% linear contraction is arranged, pressing mold can only support lamination when sintering just begins.Can therefore make Tai Gao or too elongated lamination produce kinking in the sintering process step afterwards.
Adopt piezoelectric-actuator of the present invention that a what is worth mentioning advantage is arranged, that is exactly the influence that vertical structure precision on the contact-segment of seamed edge can not be subjected to depth-width ratio.Because the relation of tolerance between drift and the lamination and very little error, although make two up and down the electrode structure of stacked middleware can produce very little but be distinctive dislocation for this method, but this reliability for contact is also unimportant.
Claims (9)
1. the manufacture method of the piezoelectric-actuator of a monolithic multilayer structure, wherein:
-containing layer part (3) adhesive, that thickness is made of electrode material at a side pressure of the piezoelectric ceramic partial veil (5) of 20 to 200 μ m knot,
-will press the piezoelectric ceramic partial veil of knot to be stacked to the lamination that maximum height reaches 3mm according to alternating sequence, in lamination, form by piezoelectric ceramic partial veil and the stacked order of electrode material alternatively up and down,
-first lamination is formed the first multilayer part by the single shaft lamination,
-the multilayer part is passed through high temperature unsticking mixture,
-the multilayer part (FT, MT, KT) of this unsticking mixture is stacked to the lamination of overall height more than 5mm, sintering under the uniaxial tension state then, thus form a piezoelectric-actuator that reaches the desirable individual layer number of plies.
2. as the method for claim 1 record, wherein:
-make n-that the area of piezoelectric ceramic partial veil equals desirable unit are doubly, press knot then,
The multilayer part of-process lamination was divided into n multilayer part of desirable area by cutting or punching press before the unsticking mixture.
3. as the method for claim 1 or 2 records, wherein: pressure sintering is carried out in stacked being stacked in the pressing mold (9).
4. as the method for one of claim 1 to 3, wherein:
Comprise PZT piezoelectric ceramic partial veil, and in a kind of oxidizing atmosphere, carry out sintering.
5. as the method for one of claim 1 to 4, wherein:
Sintering is to carry out under the pressure of 10 to 100 kPa.
6. as the method for one of claim 1 to 5, wherein:
The piezoelectric-actuator that is made of different multilayer parts is at least by a stature spare (KT), and a middleware (MT) and a tail spare (KT) constitute.
7. as the method for one of claim 1 to 6, wherein:
The piezoelectric-actuator that constitutes by a plurality of multilayer parts be unified by layer with layer between have different electrode structures to constitute.
8. as the method for one of claim 1 to 7, wherein:
-coating one deck contains the slip of silver and palladium on partial veil,
-sintering is to carry out in oxidizing atmosphere under maximum temperature is 1130 ℃ temperature.
9. the monolithic multilayer piezo executive component of making according to the method for one of claim 1 to 8, wherein:
-comprise by piezoceramics layer (5) and electrode material layer (3) replacing stacked sintering lamination,
-overall height (h) is greater than 5mm,
Height-the diameter of-lamination (or length of side) compares greater than 2,
The width of-stack height has nothing in common with each other, and piezoceramics layer in the lamination and electrode material layer all have same stacked structure, and each section to be a top one put upside down and put.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN97195626.XA CN1222255A (en) | 1996-04-19 | 1997-04-03 | Monolithic multilayer piezo actuator and process for its prodn. |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19615694.7 | 1996-04-19 | ||
| CN97195626.XA CN1222255A (en) | 1996-04-19 | 1997-04-03 | Monolithic multilayer piezo actuator and process for its prodn. |
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| Publication Number | Publication Date |
|---|---|
| CN1222255A true CN1222255A (en) | 1999-07-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN97195626.XA Pending CN1222255A (en) | 1996-04-19 | 1997-04-03 | Monolithic multilayer piezo actuator and process for its prodn. |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100431185C (en) * | 2002-07-31 | 2008-11-05 | 西门子公司 | Piezoactuator and method for production of the piezoactuator |
-
1997
- 1997-04-03 CN CN97195626.XA patent/CN1222255A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100431185C (en) * | 2002-07-31 | 2008-11-05 | 西门子公司 | Piezoactuator and method for production of the piezoactuator |
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