CN1219296C - Equipment and method for preparing fibre-optical microprobe by siphon lifting method corrosion - Google Patents
Equipment and method for preparing fibre-optical microprobe by siphon lifting method corrosion Download PDFInfo
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- CN1219296C CN1219296C CN 03131830 CN03131830A CN1219296C CN 1219296 C CN1219296 C CN 1219296C CN 03131830 CN03131830 CN 03131830 CN 03131830 A CN03131830 A CN 03131830A CN 1219296 C CN1219296 C CN 1219296C
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Abstract
The present invention relates to a device and a method for preparing optical-fiber microprobe by corrosion in a siphon lifting method. The method of the present invention is used for the preparation of an optical fiber probe for a near field optic microscope, a probe of a near field detector and a microprobe for a micro sensor. In the method, one end of an optical fiber is firstly fixed above a corrosion liquid container, and the other end is positioned in corrosion liquid in the corrosion liquid container. The corrosion liquor container is suspended on a liquid level in a siphon primary container. Liquid in the siphon primary container is sucked in a siphon accessory container by adopting a siphon method, a siphon speed adjustment valve in a siphon is adjusted so that the liquid level in the siphon primary container is reduced according to a preset speed, and accordingly, the corrosion liquor container on a suspension objective table is driven to descend so that the liquid level of the corrosion liquor in the corrosion liquor container gradually leaves the optical fiber which is fixed on a screw micrometer, and desired probes are formed in the mode of corrosion according to the preset falling speed. The method has the advantages of low cost, good repeat performance, simple and easily controlled process, cleanness, environmental protection, super sharp needle tip, controllable cone shape of the needle tip, uniformly thinned needle tip, smooth surface and good cone angle.
Description
One, technical field
The present invention is a kind of Near-field Optical Microscope with optical fiber probe, near-field probe with probe, the microsensor preparation method with microprobe, especially a kind of device and method that promotes etch corrosion preparation optical fiber microprobe with siphon.
Two, background technology
The optical fiber probe preparation method who is used near field optic has multiple, such as adding hot-stretch, chemical corrosion and electrolytic process or the like, mature methods is to add hot-drawing method and chemical corrosion method in theory, the optical fiber probe preparation method that these two kinds of methods also are present practical applications.Adding hot-drawing method is that a position in the middle of the single-mode fiber is utilized laser or Infrared Heating, simultaneously two ends is imposed external force and outwards slowly stretches, and as time passes, optical fiber is stretched and is tapered, and disconnects at last, forms gradually thin needle point; It is very simple to add the hot-drawing method principle, but, it but is pretty troublesome that actual technology realizes, need very accurate tensile means, present used stretching device such as commercially available microtubule drawing machine (as the drawing machine of sutter instrument P-87 type), be optical fiber limit heating edge to be stretched, make fibercuts becomes a flat end perpendicular to fiber axis needle point with carbon dioxide laser.This drawing process can obtain the logical higher parabolic shape needle point of optical efficiency by control stretching speed, but but is difficult to the prepared optical fiber probe needle point window shape of control, also be difficult to obtain the probe of very little window size.And the microtubule drawing machine requires draw speed slowly level and smooth, and heating laser instrument heating position is accurate, thereby so the cost of the exact instrument of high request is just very high, and then, make to add hot-drawing method to prepare the cost of optical fiber probe higher.Also need should be mentioned that, add the mechanical hook-up such as the microtubule drawing machine of hot-stretch, be difficult to obtain mild and variable at any time speed, that is to say the probe that can not make the different cone shapes that satisfy the multiple use requirement.Chemical corrosion method has two types, promptly leave standstill corrosion and promote etch, leaving standstill etch is to have the single-mode fiber of acrylate shell to insert in the HF acid, to keep leaving standstill, because capillary principle, HF acid will form the upwards corrosion of finedraw crack along optical fiber edge and shell, finally can erode away the cone needle point, though this etch equipment requirements is simple, but be difficult to control, especially can not control corrosion speed, the point that the needle point of gained can be very, promptly window size is very little.But,, cause because of angulus pyramidis is too for a short time also that logical light rate is extremely low does not have actual use value even such optical fiber probe is super sharp because the needle point angulus pyramidis is often especially little.Promote etch than settled process, control easily, it slowly puts into bare fibre or proposes the HF acid solution by the jacking gear realization of machinery or class machinery, realization is to the difference of optical fiber each several part etching time, and then obtain needle point, can prepare the very little super sharp probe of window size in this way.But this method needs the extraordinary device that can realize mild lifting of a kind of performance, might as well be example with the lifting gear, because corrosion needs to surpass 30 minutes time, and the most at the uniform velocity range of lift of easy realization also has only about 500um, that is to say 30 minutes and at the uniform velocity promote about 0.5 mm distance, require gently such mechanical hook-up again, implement, technical passable, still, cost height very, the single-mode fiber microprobe that produces, cost are very high naturally.The more important thing is since the cone shape of the good microprobe of performance to require be parabolic shape, perhaps hyperbolic wire, but the evenly realization of the pulling speed of smooth variation again are that very accurate mechanical hook-up is just possible really, cost is also just very high naturally.In order to realize preparing " ideal " optical fiber probe that has cone shape and window size concurrently, so, someone will add hot-stretch and chemical corrosion combines, promptly use so-called " two steps " forming process, prepare the para-curve cone shape and the super sharp needle point that better resolution is arranged of logical optical efficiency preferably, practice shows, such needle point can be realized, but, cost height and the still not solution of defective that can not prepare the needle point of different cone shapes, and worse, owing to add hot-stretch and promote the combination of corrosion, make very poor of repeatability of this method for preparing optical fiber probe.Recently, the someone uses the leakage device again, and bare fibre is inserted a part in the HF acid solution, the position of fixed fiber then, allows HF acid slowly drain in another container, realize like this promoting corrosion relatively, and then obtain optical fiber probe, this method has reduced the cost of preparation probe, and had the most of advantage of mechanical lifting corrosion concurrently, but, because the HF acid corrosion is very strong and highly volatile, so, big to the human injury, not environmental protection.And the same with the mechanical lifting corrosion too, very difficult control obtains mild and variable at any time speed, thereby can not prepare the probe of different cone shapes.Exist the precision that processing unit (plant) requires comparison just because of existing microprobe preparation method, the height that the processing cost of optical fiber probe is suitable, defectives such as the repetition performance is also undesirable, thereby, explore improving one's methods of the high performance near field optic optical fiber probe of preparation, just very natural center that becomes current Near-field Optical Microscope research work and focus.
Three, summary of the invention
1, technical matters
It is low to the purpose of this invention is to provide a kind of cost, the repetition performance is good, technology is simple and easy to control, clean environment firendly, needle point super sharp, the needle point cone shape is controlled, needle point evenly attenuates smooth surface and the device and method of the siphon lift method corrosion preparation optical fiber microprobe of angulus pyramidis is preferably arranged.
2, technical scheme
The device of siphon lift method corrosion preparation optical fiber microprobe of the present invention is made up of magnetic force location suspension carrying apparatus, siphon grasshopper, three parts of optical fiber probe position control; Wherein, be communicated with by U trap between the siphon primary tank in the siphon grasshopper and the attached container of siphon, in the middle of U trap, be provided with siphon speed governing valve; Following positioning magnet in the magnetic force location suspension carrying apparatus is arranged in the bottom of siphon grasshopper siphon primary tank, in the siphon grasshopper, be marked with liquid, the suspension objective table is that hollow shape is suspended on the liquid level in the siphon primary tank, and the bottom in the suspension objective table is provided with positioning magnet; Be provided with the corrosive liquid container in the optical fiber probe position control on the suspension objective table on the plane, micrometer caliper is positioned at the top of corrosive liquid container, and an end of optical fiber is fixed on the micrometer caliper, and the other end is arranged in the corrosive liquid of corrosive liquid container.
The method that siphon lift method corrosion of the present invention prepares the optical fiber microprobe is: the top of earlier an end of optical fiber being fixed in the corrosive liquid container, the other end is arranged in the corrosive liquid of corrosive liquid container, the corrosive liquid container is suspended on the liquid level in the siphon primary tank, adopt the method for siphon that the liquid in the siphon primary tank is sucked in the attached container of siphon, adjust the middle siphon speed governing valve of U trap, liquid level in the siphon primary tank is descended by predetermined speed, thereby driving the corrosive liquid container that is positioned on the suspension objective table descends, make the liquid level of the corrosive liquid in the corrosive liquid container slowly leave the optical fiber that is fixed on the micrometer caliper, erode away required probe according to predetermined down speed.
3, beneficial effect
Method and apparatus in conjunction with siphonage corrosion preparation optical fiber microprobe, compatible mechanical lifting corrosion and leave standstill the advantage of corrosion and overcome the two deficiency, can be by selecting suitable main liquid level, attached liquid face height, the siphon valve size, the water pouring valve size, insert fiber lengths, and factor such as appropriate H F acid concentration and make the optical fiber probe that satisfies multiple requirement, and this device technique is simple, clean environment firendly, cost lower (only more than 100 yuan of money), repeatedly experiment shows, this method preparation condition is easy to control, the repetition performance is very good, and the performance of prepared optical fiber probe is very desirable.
Four, description of drawings
Fig. 1 is the structural representation of the device of siphon lift method corrosion preparation optical fiber microprobe of the present invention.Magnetic force location suspension carrying apparatus 1, siphon grasshopper 2, optical fiber probe position control 3, following positioning magnet 1.1, suspension objective table (1.2) are wherein arranged, go up plane (1.2.2) on positioning magnet 1.2.1, the suspension objective table; Siphon primary tank 2.1, U trap 2.2, siphon speed governing valve 2.3, the attached container 2.4 of siphon, weep pipe 2.5, water pouring speed governing valve 2.6, weather groove 2.7; Iron stand 3.1, support 3.2,3.3 micrometer calipers,, micrometer caliper knob 3.3.1, micrometer caliper reading 3.3.2, optical fiber fixed knob 3.3.3, optical fiber 3.4, corrosive liquid container 3.5, oil film 3.5.1, corrosive liquid 3.5.2
Fig. 2 is the structural representation with the conical fiber microprobe of apparatus and method preparation of the present invention.
Fig. 3 is the structural representation with the hyperbola optical fiber microprobe of apparatus and method preparation of the present invention.
Fig. 4 is the structural representation with the parabola shaped optical fiber microprobe of apparatus and method preparation of the present invention.
Five, embodiment
This device adopts magnetic force location suspension objective table, realizes mild variable lift corrosion by siphon, and then realizes a kind of novel method that has the optical fiber probe preparation of multiple advantage concurrently.This device is made up of three major parts and a slave part, i.e. magnetic force location suspension loading, siphon level control (LC) and three main portion of optical fiber probe position control and the optical lever slave part that initially tests the speed.Magnetic force location suspension carrier system is made up of positioning magnet and magnetic suspension objective table; The siphon fluid level control system is made up of primary tank (beaker), U trap, siphon flow speed control valve, attached container (beaker), weep pipe, water pouring by-pass valve control and weather groove; The optical fiber probe position control system then is made up of iron stand (belt supporting frame), micrometer caliper, optical fiber geometrical clamp and corrosive liquid container; Optical lever tests the speed slave part by iron stand (belt supporting frame), horizontal laser, vertically scale and plane of reflection mirror are formed.This is the very complete probe preparation facilities of a cover, and let us is analyzed from the process of operation.At first, the primary tank beaker of siphon level control (LC) part is packed into the pure water of about 800ml; With attached container beaker water pouring valve closing, the pure water of about 200ml that packs into is placed on primary tank the right; The U trap valve unclamped, packs into valve is tightened behind the pure water again, insert respectively in the main attached container at two ends, and fix; With weather groove be placed on weep pipe under.The siphon current velocity controller has just been put well like this.Second step, magnetic levitation loading phase magnet is put into siphon primary tank inner bottom part middle, with the suspension objective table, be put on the liquid level in the siphon primary tank then, make it swim in the liquid level centre position.Treat that objective table floats over centre on the liquid level and static, suspension loading part in magnetic force location has just been put up.The 3rd step, plane of reflection mirror platform is fixed on left hand edge on the siphon primary tank, then plane of reflection mirror support is put on this platform, minute surface is to left, the lever rear leg support of plane of reflection mirror is on the floating objective table of magnetic, iron stand is placed on 5 meters of siphon vessel lefts, and the position of same level height, again horizontal laser and vertical scale are fixed on the iron stand support, and the position of adjusting laser instrument, direction and height, make laser level irradiation plane of reflection mirror, and make and to return that light spot is on certain scale about the zero graduation on the vertical scale by the light level of flat mirror reflects.At this moment, just can initially test the speed, write down main attached liquid face position, again with the siphon valve open, by reading certain time interval, the shift length of luminous point on the scale just can calculate, the decline rate of magnetic levitation objective table.So, repeatedly change major-minor liquid level, change the discharge orifice size of siphon valve, and the size of water pouring valve, the speed parameter that just can controlled objective table descends.The 4th step, to assist speed measuring device partly to remove, then, the corrosive liquid container is injected an amount of HF acid and is covered with anti-its volatilization of oil film, after be placed on the objective table, the iron stand (belt supporting frame) of optic fibre fixing device part is placed on the left side of siphon primary tank, then bare fibre (perhaps bare fibre bundle) is fixed on the micrometer caliper, be fixed on micrometer caliper on the support and make optical fiber (fibre bundle) straight down and directly over the political affairs of corrosive liquid container, scalable micrometer caliper knob just can make optical fiber insert the height of corrosive liquid.At this time, whole device has just been put up, generally speaking, and in the experiment afterwards of the 3rd step, because objective table translational speed controlled variable with under the situation about having, has not just needed.Thereby the one, two and the 4th step was the main body of experiment.After device is put up, as preliminary experiment, earlier optical fiber is put into corrosive liquid, factors and the time relationship that corrodes optical fiber such as HF acid concentration are measured in experiment.To this moment, just can be real begin tested.According to the cone shape that will make, select suitable main liquid level, attached liquid face height, siphon valve size, water pouring valve size, insert fiber lengths, and appropriate H F acid concentration (corrosive liquid factors such as temperature and oil film thickness also will be considered)), optical fiber is inserted corrosion, the optical fiber probe that preparation meets the demands.
Claims (2)
1, a kind of device of siphon lift method corrosion preparation optical fiber microprobe is characterized in that this device is made up of magnetic force location suspension carrying apparatus (1), siphon grasshopper (2), (3) three parts of optical fiber probe position control; Wherein, be communicated with by U trap (2.2) between the siphon primary tank (2.1) in the siphon grasshopper (2) and the attached container of siphon (2.4), in the middle of U trap (2.2), be provided with siphon speed governing valve (2.3); Following positioning magnet (1.1) in the magnetic force location suspension carrying apparatus (1) is arranged in the bottom of siphon grasshopper (2) siphon primary tank (2.1), in siphon grasshopper (2), be marked with liquid, suspension objective table (1.2) is suspended on the liquid level in the siphon primary tank (2.1) for hollow shape, and the bottom in suspension objective table (1.2) is provided with positioning magnet (1.2.1); Be provided with the corrosive liquid container (3.5) in the optical fiber probe position control (3) on the plane on the suspension objective table (1.2.2), micrometer caliper (3.3) is positioned at the top of corrosive liquid container (3.5), one end of optical fiber (3.4) is fixed on the micrometer caliper (3.3), and the other end is arranged in the corrosive liquid (3.5.2) of corrosive liquid container (3.5).
2, a kind of siphon lift method corrosion prepares the method for optical fiber microprobe, it is characterized in that earlier an end of optical fiber (3.4) being fixed in the top of corrosive liquid container (3.5), the other end is arranged in the corrosive liquid of corrosive liquid container (3.5), corrosive liquid container (3.5) is suspended on the liquid level in the siphon primary tank (2.1), adopt the method for siphon that the liquid in the siphon primary tank (2.1) is sucked in the attached container of siphon (2.4), adjust the middle siphon speed governing valve (2.3) of U trap (2.2), liquid level in the siphon primary tank (2.1) is descended by predetermined speed, thereby driving the corrosive liquid container (3.5) that is positioned on the suspension objective table (1.2) descends, make the liquid level of the corrosive liquid in the corrosive liquid container (3.5) slowly leave the optical fiber (3.4) that is fixed on the micrometer caliper (3.3), erode away required probe according to predetermined down speed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03131830 CN1219296C (en) | 2003-06-10 | 2003-06-10 | Equipment and method for preparing fibre-optical microprobe by siphon lifting method corrosion |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03131830 CN1219296C (en) | 2003-06-10 | 2003-06-10 | Equipment and method for preparing fibre-optical microprobe by siphon lifting method corrosion |
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| Publication Number | Publication Date |
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| CN1482623A CN1482623A (en) | 2004-03-17 |
| CN1219296C true CN1219296C (en) | 2005-09-14 |
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| CN 03131830 Expired - Fee Related CN1219296C (en) | 2003-06-10 | 2003-06-10 | Equipment and method for preparing fibre-optical microprobe by siphon lifting method corrosion |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104864918B (en) * | 2015-06-19 | 2017-05-24 | 西安石油大学 | Device and method for testing fiber bragg grating corrosion and liquid refractive index |
| CN107561641B (en) * | 2017-09-25 | 2020-04-03 | 腾景科技股份有限公司 | Optical fiber cladding high-power stripping combination device and stripping method |
| CN108732388A (en) * | 2018-03-30 | 2018-11-02 | 姜全博 | A kind of production method of single-photon source active probe |
| CN109212667A (en) * | 2018-08-29 | 2019-01-15 | 武汉理工大学 | The optical fiber optical tweezers probe with secondary cone angle prepared with two step method |
| CN115387296B (en) * | 2021-05-16 | 2024-05-31 | 李飞 | Dam migration channel |
| CN113341179B (en) * | 2021-06-18 | 2023-03-21 | 中国科学院大连化学物理研究所 | Device and method for preparing scanning tunnel microscope needle tip based on liquid film electrochemical corrosion |
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