CN104101737A - Manufacture method of optical fiber probe - Google Patents

Manufacture method of optical fiber probe Download PDF

Info

Publication number
CN104101737A
CN104101737A CN201410329497.1A CN201410329497A CN104101737A CN 104101737 A CN104101737 A CN 104101737A CN 201410329497 A CN201410329497 A CN 201410329497A CN 104101737 A CN104101737 A CN 104101737A
Authority
CN
China
Prior art keywords
solution
etching
speed
optical fiber
etching solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201410329497.1A
Other languages
Chinese (zh)
Inventor
汤自荣
朱桅
孙永明
周炜
龚渤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WUHAN JIAWEI LIGHTING CO Ltd
Huazhong University of Science and Technology
Original Assignee
WUHAN JIAWEI LIGHTING CO Ltd
Huazhong University of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WUHAN JIAWEI LIGHTING CO Ltd, Huazhong University of Science and Technology filed Critical WUHAN JIAWEI LIGHTING CO Ltd
Priority to CN201410329497.1A priority Critical patent/CN104101737A/en
Publication of CN104101737A publication Critical patent/CN104101737A/en
Pending legal-status Critical Current

Links

Landscapes

  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)

Abstract

The invention discloses a manufacture method of an optical fiber probe. The manufacture method includes mixing an HF solution with an NH4F solution to obtain an etch solution, covering an organic solvent layer which is insoluble in the etch solution and serves as a protection layer on the surface of the etch solution; keeping the temperature of the etch solution constant, inserting a bare optical fiber with an end surface smooth into the etch solution, and performing static etching; dropwise adding a correction liquor to the etch solution while stirring the etch solution, and performing dynamic etching, wherein the correction liquor is the HF solution or the NH4F solution; stopping adding the correction liquor, stopping stirring the etch solution, and performing static etching to obtain the optical fiber probe. The manufacture method of the optical fiber probe is capable of effectively manufacturing the nonlinear taper probe, the manufactured optical fiber probe is smooth in surface appearance, an in-depth study of the influence of taper changes on a light transmission rate of the probe is facilitated, and further, a near-field optical microscope probe with excellent properties are obtained. Besides, the manufacture method is low in cost, easy to implement, high in controllability, and capable of achieving volume production.

Description

A kind of preparation method of optical fiber probe
Technical field
The invention belongs near field optic micrometering technical field, more specifically, relate to a kind of preparation method of optical fiber probe.
Background technology
The development of nanometer technology makes the optical measurement of submicrometer structure become and become more and more important, and due to the diffraction limit of traditional optical imaging method existence 1/2nd wavelength, the resolution of optical microscope is restricted.The birth of Near-field Optical Microscope has broken through this limitation, it is by the control of feedback system, with the probe of a needle point band nanometer aperture, at the near-field region of sample, scan, to obtain the evanescent wave signal that can reflect fine structure information, thereby reach the resolution of submicron order.
The performance quality of nano-probe is determining the image quality of Near-field Optical Microscope, especially the logical light rate of probe.Conventional is optical fiber probe at present, by drawing the method for cone or chemical etching to form the very little cone of needle point in optical fiber one end, by special coating process, finally at needle point, forms the aperture of Nano grade.The probe that draws taper to become is often bored long long, and the logical light rate of probe is sharply reduced, and causes signal strength detection to weaken, and resolution declines.On the other hand, although the method for conventional chemical etching can be prepared the probe of larger cone angle, the coarse injustice of its detecting probe surface, makes light signal generating scattering cause energy dissipation and signal distortion, affects image quality.Although many lithographic methods afterwards can improve the quality of probe, because its prepared probe is all linear taper, conical, be difficult to give full play to the effect that this factor of taper is improved logical light rate.
Summary of the invention
Above defect or Improvement requirement for prior art, the invention provides a kind of preparation method of optical fiber probe, can effectively prepare nonlinear conical probe, and the optical fiber probe surface topography making is smooth, be conducive to further further investigate taper and change the impact on the logical light rate of probe, thereby obtain the probe of near-field optical microscope of excellent performance.In addition, this method is with low cost, is easy to realize, and controllability is high, can manufacture.
For achieving the above object, the invention provides a kind of preparation method of optical fiber probe, it is characterized in that, comprise the steps:
(1) by HF solution and NH 4f solution is mixed to get etching solution, and the organic solvent that is insoluble to this etching solution at etching solution surface coverage one deck is as protective seam;
(2) make etching solution temperature constant, the bare fibre that end face is smooth inserts in etching solution, carries out static etching; Described static etching refers in etching reaction process does not do any adjustment to etching solution;
(3) in etching solution, dropwise add adjustment liquid, stir etching solution simultaneously, carry out dynamic etching, adjusting liquid is HF solution or NH 4f solution; Described dynamic etching refer in etching reaction process by add adjust liquid make etching solution in the ratio of each composition change;
(4) stop adding adjustment liquid, stop stirring etching solution, carry out static etching, make optical fiber probe.
Preferably, in described step (3), adjusting liquid is HF solution, and the speed of dripping of adjusting liquid comprises first speed and second speed, adjusts liquid and successively with first speed and second speed, splashes into etching solution respectively, and described first speed is greater than described second speed.
Preferably, in described step (3), adjustment liquid is NH 4f solution, the speed of dripping of adjusting liquid comprises first speed and second speed, adjusts liquid and successively with first speed and second speed, splashes into etching solution respectively, described first speed is less than described second speed.
Preferably, make the temperature constant of etching solution at 28~30 ℃.
In general, the above technical scheme of conceiving by the present invention compared with prior art, has following beneficial effect:
(1) adopt selective etch method, at bare fibre end face, become cone, because end face is immersed in etching solution, etching process is not subject to outside air disturbing influence, the optical fiber probe surface topography of preparation is smooth, under high magnification SEM image, can't see obvious coarse point, carrying out near field optic while measuring, excite and the signal collected can be because of the scattering dissipation excessive power at rough surface place.
(2) in etching process, add adjustment liquid, when dropwise adding HF solution, NH 4the concentration of F declines gradually, and it is large that probe cone angle becomes gradually; When dropwise adding NH 4during F solution, NH 4the concentration of F rises gradually, and probe cone angle diminishes gradually.Therefore the present invention can prepare the probe of various tapers, comprises the nonlinear conical probe that nonlinear conical probe that cone angle reduces from the top to the bottom gradually and cone angle increase from the top to the bottom gradually.
(3) this method does not need accurate equipment and instrument, only needs conventional laboratory room small-sized articles for use to realize, with low cost, and net result can be according to temperature, drip the factors such as speed and regulate, the controllability of technological process is high, can manufacture.
Accompanying drawing explanation
Fig. 1 is the device schematic diagram of preparing optical fiber probe of the embodiment of the present invention;
Fig. 2 is the SEM figure of the optical fiber probe that makes of the embodiment of the present invention 1;
Fig. 3 is the SEM figure of the optical fiber probe that makes of the embodiment of the present invention 2.
In institute's drawings attached, identical Reference numeral is used for representing identical element or structure, wherein: 1-bare fibre, 2-etching solution, 3-adjusts liquid, 4-flow controller, 5-magnetic stirring apparatus, 6-thermometer, 7-stirrer, 8-glass dish.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.In addition,, in each embodiment of described the present invention, involved technical characterictic just can not combine mutually as long as do not form each other conflict.
The optical fiber probe that existing preparation method obtains is linear taper, yet the logical light rate of linear taper probe is restricted, nonlinear conical structure (the vicissitudinous cone angle of tool) can change light-transfer characteristic, improve logical light rate, have broad application prospects.The present invention adds adjustment liquid in etching process, by change, is adjusted the type of liquid and is dripped speed, adjusts the taper of optical fiber probe, prepares the nonlinear conical probe of different shape, is conducive to further further investigate taper and changes the impact on the logical light rate of probe.
The preparation method of the optical fiber probe of the embodiment of the present invention comprises the steps:
(1) by HF solution and NH 4f solution is mixed to get etching solution, and the organic solvent that is insoluble to this etching solution at etching solution surface coverage one deck is as protective seam.
(2) make etching solution temperature constant, the bare fibre that end face is smooth inserts in etching solution, carries out static etching.Static etching refers in etching reaction process does not do any adjustment to etching solution.
(3) in etching solution, dropwise add adjustment liquid, stir etching solution simultaneously, carry out dynamic etching, adjusting liquid is HF solution or NH 4f solution.The dynamic relatively static etching of etching, refer in etching reaction process by add adjust liquid make etching solution in the ratio of each composition change.
When adjustment liquid is HF solution, that adjusts liquid drips speed first quick and back slow; When adjusting liquid, be NH 4during F solution, dripping of adjustment liquid is fast first slow rear fast.
(4) stop adding adjustment liquid, stop stirring etching solution, carry out static etching, make optical fiber probe.
Bare fibre comprises fibre cladding and fibre core, and the principal ingredient of covering is SiO 2, and fibre core is because being mixed with a certain amount of germanium, principal ingredient is SiO 2and GeO 2.When the adjustment liquid adding is NH 4during F solution, NH in etching solution 4the content of F increases gradually, makes the poor increase gradually of etch rate of covering and fibre core, thereby the cone angle of the probe of formation is diminished gradually; When the adjustment liquid adding is HF solution, NH in etching solution 4the content of F reduces gradually, makes that the etch rate of covering and fibre core is poor to be reduced gradually, thereby makes the cone angle of the probe that forms become gradually large.The composition of the adjustment liquid adding by adjustment and a speed, realize the adjustment to probe cone angle.
For making those skilled in the art understand better the present invention, below in conjunction with specific embodiment, the preparation method of optical fiber probe of the present invention is elaborated.
As shown in Figure 1, the device of preparing optical fiber probe of the embodiment of the present invention comprises flow controller 4, magnetic stirring apparatus 5, thermometer 6, stirrer 7 and glass dish 8, glass dish 8 is placed on magnetic stirring apparatus 5, flow controller 4 be positioned at glass dish 8 directly over, thermometer 6 inserts in glass dishes 8.The embodiment of the present invention adopts this device to prepare optical fiber probe.
Embodiment 1
The NH that the HF solution that is 50% by 10ml massfraction and 23ml massfraction are 22% 4the mixing of F solution is made into etching solution, and on etching solution, covers the isooctane that one deck 3cm is thick; Open magnetic stirring apparatus 5, with water-bath, etching solution temperature is controlled to 28 ℃; Optical fiber is inserted in etching solution, carry out the static etching of 60min; The NH that is 40% by massfraction 4f solution injects flow controller 4 as adjusting liquid, stirrer 7 is put into etching solution and start to stir, and opens flow controller valve and allows adjustment drop enter in etching solution, and dripping speed is 0.3ml/min, and the process that splashes into continues 15min; Regulate and drip speed to 1.5ml/min, the process that splashes into continues 15min; Stirrer stops stirring, and keeps existing concentration, carries out the static etching of 10min.
As shown in Figure 2, detecting probe surface is very smooth for the optical fiber probe making, and its cone angle reduces gradually from tips of probes to root, and it is parabola shaped that the shaft section of detecting probe surface is class.This is because added the NH that massfraction is 40% in etching process 4f solution, as adjusting liquid, makes NH 4the content of F in etching solution increases gradually, and the cone angle that forms probe is diminished gradually.In addition, dripping of adjustment liquid is fast first rear fast slowly, and accordingly, the speed that cone angle diminishes is first slow soon rear.
Embodiment 2
The HF solution that is 22% by 20ml massfraction and 19ml massfraction are 40%NH 4the mixing of F solution is made into etching solution, and on etching solution, covers the isooctane that one deck 3cm is thick; Open magnetic stirring apparatus 5, with water-bath, etching solution temperature is controlled to 30 ℃; Optical fiber is inserted in etching solution, carry out the static etching of 20min; The HF solution that is 22% using massfraction injects flow controller 4 as adjusting liquid, stirrer 7 is put into etching solution and start to stir, and opens flow controller valve and allows adjustment drop enter in etching solution, and dripping speed is 1ml/min, and the process that splashes into continues 15min; Regulate and drip speed to 0.3ml/min, the process that splashes into continues 5min; Stirrer stops stirring, and keeps existing concentration, carries out the static etching of 5min.
As shown in Figure 3, detecting probe surface is essentially smooth for the optical fiber probe making, and its cone angle increases gradually from tips of probes to root.This is because added HF solution that massfraction is 22% as adjusting liquid in etching process, makes NH 4the content of F in etching solution gradually, makes the cone angle forming become gradually large.In addition, that adjusts liquid drips speed first quick and back slow, and accordingly, cone angle becomes large speed first quick and back slow.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any modifications of doing within the spirit and principles in the present invention, be equal to and replace and improvement etc., within all should being included in protection scope of the present invention.

Claims (4)

1. a preparation method for optical fiber probe, is characterized in that, comprises the steps:
(1) by HF solution and NH 4f solution is mixed to get etching solution, and the organic solvent that is insoluble to this etching solution at etching solution surface coverage one deck is as protective seam;
(2) make etching solution temperature constant, the bare fibre that end face is smooth inserts in etching solution, carries out static etching; Described static etching refers in etching reaction process does not do any adjustment to etching solution;
(3) in etching solution, dropwise add adjustment liquid, stir etching solution simultaneously, carry out dynamic etching, adjusting liquid is HF solution or NH 4f solution; Described dynamic etching refer in etching reaction process by add adjust liquid make etching solution in the ratio of each composition change;
(4) stop adding adjustment liquid, stop stirring etching solution, carry out static etching, make optical fiber probe.
2. the preparation method of optical fiber probe as claimed in claim 1, it is characterized in that, in described step (3), adjusting liquid is HF solution, the speed of dripping of adjusting liquid comprises first speed and second speed, adjust liquid and successively with first speed and second speed, splash into etching solution respectively, described first speed is greater than described second speed.
3. the preparation method of optical fiber probe as claimed in claim 1, is characterized in that, in described step (3), adjustment liquid is NH 4f solution, the speed of dripping of adjusting liquid comprises first speed and second speed, adjusts liquid and successively with first speed and second speed, splashes into etching solution respectively, described first speed is less than described second speed.
4. the preparation method of optical fiber probe as claimed any one in claims 1 to 3, is characterized in that, makes the temperature constant of etching solution at 28~30 ℃.
CN201410329497.1A 2014-07-11 2014-07-11 Manufacture method of optical fiber probe Pending CN104101737A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410329497.1A CN104101737A (en) 2014-07-11 2014-07-11 Manufacture method of optical fiber probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410329497.1A CN104101737A (en) 2014-07-11 2014-07-11 Manufacture method of optical fiber probe

Publications (1)

Publication Number Publication Date
CN104101737A true CN104101737A (en) 2014-10-15

Family

ID=51670055

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410329497.1A Pending CN104101737A (en) 2014-07-11 2014-07-11 Manufacture method of optical fiber probe

Country Status (1)

Country Link
CN (1) CN104101737A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105510640A (en) * 2015-11-27 2016-04-20 武汉大学 Metal nanowire surface plasmon nano light source-based optical microscope
CN106841688A (en) * 2017-01-19 2017-06-13 南开大学 The non-linear nano metal cone probe of e index type
CN108732388A (en) * 2018-03-30 2018-11-02 姜全博 A kind of production method of single-photon source active probe
CN110113980A (en) * 2016-12-22 2019-08-09 奇跃公司 For scanning the manufacturing method and system of the Formed Fiber element of optical fiber displays
CN111141221A (en) * 2019-12-16 2020-05-12 西安交通大学 Preparation method of optical fiber probe for micro-displacement sensor, micro-displacement sensor and application
WO2020233279A1 (en) * 2019-05-21 2020-11-26 南京同溧晶体材料研究院有限公司 Method for processing single crystal optical fiber with uniform diameter

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101030455A (en) * 2006-03-03 2007-09-05 北京大学 Field optical fibre probe and its production
CN101286372A (en) * 2008-04-18 2008-10-15 华南理工大学 Method for eliminating optical fibre detecting probe surface honeycomb rough appearance during static corrosion
CN103901233A (en) * 2014-04-11 2014-07-02 华中科技大学 Optical fiber probe with polarization maintaining characteristic and manufacturing method thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101030455A (en) * 2006-03-03 2007-09-05 北京大学 Field optical fibre probe and its production
CN101286372A (en) * 2008-04-18 2008-10-15 华南理工大学 Method for eliminating optical fibre detecting probe surface honeycomb rough appearance during static corrosion
CN103901233A (en) * 2014-04-11 2014-07-02 华中科技大学 Optical fiber probe with polarization maintaining characteristic and manufacturing method thereof

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
WEI ZHU 等: "Dynamic selective etching: a facile route to parabolic optical fiber nano-probe", 《OPTICS EXPRESS》 *
杨修文 等: "大锥角光纤探针的制备", 《光学与光电技术》 *
霍鑫 等: "近场纳米光纤探针腐蚀制备技术概述", 《电子显微学报》 *

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105510640A (en) * 2015-11-27 2016-04-20 武汉大学 Metal nanowire surface plasmon nano light source-based optical microscope
JP7036825B2 (en) 2016-12-22 2022-03-15 マジック リープ, インコーポレイテッド Methods and systems for the fabrication of molded fiber elements for scanning fiber displays
CN114620956B (en) * 2016-12-22 2023-10-27 奇跃公司 Method and system for manufacturing shaped optical fiber element for scanning optical fiber display
US11442227B2 (en) 2016-12-22 2022-09-13 Magic Leap, Inc. Methods and systems for fabrication of shaped fiber elements for scanning fiber displays
CN110113980A (en) * 2016-12-22 2019-08-09 奇跃公司 For scanning the manufacturing method and system of the Formed Fiber element of optical fiber displays
JP2020503548A (en) * 2016-12-22 2020-01-30 マジック リープ, インコーポレイテッドMagic Leap,Inc. Method and system for fabrication of shaped fiber elements for scanning fiber displays
CN114620956A (en) * 2016-12-22 2022-06-14 奇跃公司 Method and system for manufacturing shaped optical fiber element for scanning optical fiber display
CN110113980B (en) * 2016-12-22 2022-04-05 奇跃公司 Method and system for manufacturing shaped optical fiber elements for scanning fiber optic displays
CN106841688B (en) * 2017-01-19 2019-03-29 南开大学 The non-linear nano metal of e index type bores probe
CN106841688A (en) * 2017-01-19 2017-06-13 南开大学 The non-linear nano metal cone probe of e index type
CN108732388A (en) * 2018-03-30 2018-11-02 姜全博 A kind of production method of single-photon source active probe
WO2020233279A1 (en) * 2019-05-21 2020-11-26 南京同溧晶体材料研究院有限公司 Method for processing single crystal optical fiber with uniform diameter
CN111141221A (en) * 2019-12-16 2020-05-12 西安交通大学 Preparation method of optical fiber probe for micro-displacement sensor, micro-displacement sensor and application

Similar Documents

Publication Publication Date Title
CN104101737A (en) Manufacture method of optical fiber probe
CN107314960B (en) Blood cell concentration sensor, preparation method thereof and testing device
CN103389392B (en) A kind of nano-probe preparation method measuring AFM mechanics parameter
CN203479701U (en) Optical fiber sensor and measurement system
CN102061520B (en) Method for preparing unary or binary patterning colloidal photonic crystal
CN107121080A (en) A kind of method for measuring ordered porous nano film thickness
JP2020518867A (en) Method for manufacturing nanowire connected to optical fiber
CN1582261A (en) Process for manufacturing micro-structured optical fiber
CN110426781B (en) Liquid cladding micro-nano fiber long-period grating with adjustable broadband
WO2022246932A1 (en) Optical fiber nanoprobe having large length-to-diameter ratio and preparation method therefor and use thereof
CN106596609A (en) Method for making transmission electron microscope samples
CN103896484B (en) Optical taper district manufacture method and device
CN116735597A (en) Method for online detection and feedback of growth defects of sapphire optical fiber
CN112710631A (en) Temperature refractive index testing method based on femtosecond laser direct writing inclined fiber bragg grating
CN112098681A (en) Method for accurately regulating and controlling inclination angle of atomic force microscope needle tip
CN107084752B (en) Optical fiber microbubble concentration sensor based on nanogold film and sensing method thereof
Sun et al. Near-field probing the magnetic field vector of visible light with a silicon nanoparticle probe and nanopolarimetry
CN207051152U (en) A kind of hematocrite concentration sensor and test device
Tao et al. A method to control the fabrication of etched optical fiber probes with nanometric tips
Guo et al. Measurement of contact-line dissipation in a nanometer-thin soap film
CN104535302A (en) Device and method for measuring focusing constant g of self-focusing optical fiber
CN103900930A (en) Method for measuring density of VAD (Vapor Phase Axial Deposition) and OVD (Outside Chemical Vapor Deposition) irregular-shaped loose body
Srinivasan et al. Micromachined arrays of cantilevered glass probes
CN208672548U (en) A kind of measuring device being heat-shrinked for electronic glass
CN106835281A (en) A kind of preparation method of Yttrium Orthovanadate three-dimensional inverse opal photonic crystal

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20141015