CN1218979A - High frequency energy supply device and high frequency electrode-free discharging lamp device - Google Patents
High frequency energy supply device and high frequency electrode-free discharging lamp device Download PDFInfo
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- CN1218979A CN1218979A CN98123029A CN98123029A CN1218979A CN 1218979 A CN1218979 A CN 1218979A CN 98123029 A CN98123029 A CN 98123029A CN 98123029 A CN98123029 A CN 98123029A CN 1218979 A CN1218979 A CN 1218979A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/044—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by a separate microwave unit
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/62—Lamps with gaseous cathode, e.g. plasma cathode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J63/00—Cathode-ray or electron-stream lamps
- H01J63/08—Lamps with gas plasma excited by the ray or stream
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
- H05B41/14—Circuit arrangements
- H05B41/24—Circuit arrangements in which the lamp is fed by high frequency ac, or with separate oscillator frequency
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
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Abstract
A high-frequency energy supply device has a group of side resonators which are electrically connected in a practically annular form, and supply high-frequency energy using resonant high-frequency electromagnetic fields generated in the center portion; and a plurality of high-frequency coupling part for coupling a plurality of high frequency energies propagated from a plurality of high-frequency propagation paths to said group of side resonators; wherein a plurality of high frequencies coupled to said group of side resonators from said plurality of high-frequency coupling means have phases and/or frequencies different from each other.
Description
The present invention relates to high frequency energy supply device and high frequency electrode-free discharging lamp device.
High frequency electrodeless discharge lamp is than the advantage of the arc discharge lamp that electrode is arranged, and easily electromagnetic energy is coupled to charges, can remove mercury from the charges of the emission that is used for discharging, and can expect to obtain higher luminous efficiency owing to there is not export license.Owing in discharge space, do not have electrode, so can not cause the bulb inner wall blackening because of the evaporation of electrode.This has prolonged the life-span of lamp greatly.Since these characteristics, in recent years, always at the high frequency electrodeless discharge lamp of studying energetically as high-intensity discharge lamp of new generation.
In common discharging lamp device, owing to can approach the luminous intensity distribution design that point-source of light is realized ideal by dimension of light source is narrowed down to, so the size as the plasma-arc of light source is dwindled in strong request.For example, when considering to be applied to standard liquid crystal video frequency projector, in order to increase the optical design of light emission utilance, required plasma-arc is of a size of about 3mm or littler.On the other hand, in electrodeless discharge lamp, determine the size of plasma-arc by the internal diameter of bulb.Yet, owing to use the size of the conventional high frequency electrode-free discharging lamp device of resonator to dwindle the restriction that is subjected to wavelength, so these conventional devices needing to be not suitable for the application of high brightness point-source of light.Therefore, in recent years, having developed, the high-frequency resonant electromagnetic field that concentrates in the littler space, the space that provides than resonator can be provided.
From Figure 10, below will prior art be described according to " high frequency energy supply device and the high frequency electrode-free discharging lamp device " that disclosed in the 10-189270 Japanese unexamined publication.
The high frequency energy supply device that is disclosed in the 10-189270 Japanese unexamined publication comprises a plurality of sides (side) resonator of the capacitive function part that has the function of electromagnetic induction part that produces from annular electric conducting material and be made of the space, thereby and inwardly has the described capacitive function part of structure that high-frequency resonant electromagnetic field with the described side resonator group center that constitutes around a plurality of side resonators of arranging provides the required high-frequency energy of discharge.Therefore, an object of the present invention is to provide a kind of high frequency energy supply device and a kind of high frequency electrode-free discharging lamp device that uses this high frequency energy supply device that the high-frequency resonant electromagnetic field in the littler space, the space that provides than resonator is provided that provide.
As an example of side resonator group, Figure 10 illustrates 8 blade type resonators 102, and it comprises the blade 105 of eight sheets that same conductive that the cylinder 104 made from a kind of electric conducting material stretches out to the center is made.The inner wall surface of two adjacent blades 105 and cylinder 104 and play the effect of function of electromagnetic induction part by the space that they produced, the effect of capacitive function part is played in two extensions of adjacent blades and the space between them.Electrodeless discharge lamp 101 is positioned at the core of 8 blade type resonators 102.The high-frequency energy of higher-order of oscillation apparatus being propagated by the field coupled type high-frequency coupling device 103 that is connected electrically to a blade 105 by calking or welding is coupled to 8 blade type resonators 102.Like this design 8 blade type resonators 102, thus under the frequency of high-frequency energy to be coupled resonance.Like this, the high-frequency resonant electric field E that can be produced by the central part office of 8 blade type resonators 102 supplies with electrodeless discharge lamp 101 to the required energy of high-frequency discharge.
Especially, when the number of side resonator is N, if the pattern of the phase deviation 2 π/N of the phase place of shaped design Cheng Yiyi side resonator of the frequency of high frequency or side resonator and sides adjacent resonator is come the driving side resonator group, then the polarity of the electric charge of extension is opposite with the polarity of the electric charge of facing extension.High-frequency resonant electric field E that this electric charge produced be orientated side resonator core radially, and this electric field has the distribution of passing through electrodeless discharge lamp 101.With 2 π/when the N pattern is operated resonator, obtain the strongest electric field in electrodeless discharge lamp 101 residing central part offices.
The high-frequency coupling device can also be a magnetic field coupling type shown in Figure 11.In Figure 11, the end portion electrical couplings of loop antenna 113 is to the barrel portion of 8 blade type resonators 112.The high frequency of oscillation magnetic field of origin self loop antenna 113 produces high-frequency resonant electric field E in the central part office of 8 blade type resonators 112.High-frequency resonant electric field E offers electrodeless discharge lamp 111 to the high-frequency discharge energy thus.
By the high-frequency discharge power supply that is disclosed in the 8-291420 Japanese patent application, even the high frequency by 2.45GHz also can produce and keep 10mm or littler relative little plasma-arc.
Yet, utilize above structure because the direction of an electric field when obtaining the strongest electric field and operate under 2 π/N pattern is constant, so plasma during because of the thermal convection displacement this pattern be interfered, and discharge plasma often becomes unstable.In addition, because electric field is along a certain direction deflection, so electrodeless discharge lamp deflects the direction of electric field to the heat load of discharge vessel wall and increases.
High frequency energy supply device of the present invention comprises: in fact one group of side resonator, these side resonators are electrically connected and use the high-frequency resonant electromagnetic field that produces in core that high-frequency energy is provided with the form of ring-type; And a plurality of high-frequency coupling devices, be used for a plurality of high-frequency energies of being propagated from a plurality of high-frequency propagations path are coupled to described side resonator group; It is different wherein to be coupled to the phase place and/or the frequency of a plurality of high frequencies of described side resonator group from described a plurality of high-frequency coupling devices.
High frequency energy supply device of the present invention comprises: in fact one group of side resonator, these side resonators are electrically connected and use the high-frequency resonant electromagnetic field that produces in core that high-frequency energy is provided with the form of ring-type; The high-frequency resonant apparatus; The high-frequency propagation device; The high frequency segmenting device, the described high-frequency energy that is used for being produced by described higher-order of oscillation apparatus and propagated by described high-frequency propagation device is divided into a plurality of propagation paths; The high frequency phase changer is used for the phase deviation of a plurality of high frequencies on described a plurality of propagation paths is become different phase places; And a plurality of high-frequency coupling devices, be used for the different described a plurality of high-frequency energies of phase place are coupled to described side resonator group; Wherein, when the number of described high-frequency coupling device was M, the less angle that is produced by the adjacent described high-frequency coupling device relative with the formed ring of described side resonator group center was π/M; Mutual offset pi/the M of phase place of the high-frequency energy that described high frequency phase changer is coupled adjacent described high-frequency coupling device.
High frequency energy supply device of the present invention comprises: in fact one group of side resonator, these side resonators are electrically connected and use the high-frequency resonant electromagnetic field that produces in core that high-frequency energy is provided with the form of ring-type; The high-frequency resonant apparatus; The high-frequency propagation device; The high frequency segmenting device, the described high-frequency energy that is used for being produced by described higher-order of oscillation apparatus and propagated by described high-frequency propagation device is divided into a plurality of propagation paths; The high frequency phase changer is used for the phase deviation of a plurality of high frequencies on described a plurality of propagation paths is become different phase places; And a plurality of high-frequency coupling devices, be used for the different described a plurality of high-frequency energies of phase place are coupled to described side resonator group; Wherein, when the number of described high-frequency coupling device was M, M was at least 3; The less angle that is produced by the relative adjacent described high-frequency coupling device in the ring center that forms with described side resonator group is 2 π/M; Described high frequency phase changer is offset 2 π/M mutually to the phase place of the high-frequency energy that adjacent described high-frequency coupling device is coupled.
High frequency energy supply device of the present invention comprises: in fact one group of side resonator, these side resonators are electrically connected and use the high-frequency resonant electromagnetic field that produces in core that high-frequency energy is provided with the form of ring-type; The high-frequency resonant apparatus; The high-frequency propagation device; The high frequency segmenting device, the described high-frequency energy that is used for being produced by described higher-order of oscillation apparatus and propagated by described high-frequency propagation device is divided into a plurality of propagation paths; The high frequency phase changer is used for the phase deviation of a plurality of high frequencies on described a plurality of propagation paths is become different phase places; And a plurality of high-frequency coupling devices, be used for the different described a plurality of high-frequency energies of phase place are coupled to described side resonator group; Wherein, the number of described a plurality of higher-order of oscillation apparatuses is identical with the number of described a plurality of high-frequency propagation devices and described a plurality of high-frequency coupling devices; Described a plurality of high-frequency coupling device is connected to the different side resonator that constitutes described side resonator group; And the frequency of the high frequency that is produced by described a plurality of higher-order of oscillation apparatuses is different.
High frequency electrode-free discharging lamp device of the present invention comprises according to high frequency energy supply device of the present invention and electrodeless discharge lamp, wherein said electrodeless discharge lamp is positioned at the ring center of described high frequency energy supply device, forms discharge plasma by the high-frequency energy that described high frequency energy supply device provided in the discharge tube inside of described electrodeless discharge lamp.
By above structure, eliminated the deflection of electric field, thereby produced and kept the heat load of stable discharge plasma and electrodeless discharge lamp discharge vessel wall to a certain direction.
Here employed term " high frequency " means frequency electromagnetic wave in the scope between 1MHz and 100GHz.Especially, when frequency is in " microwave " scope between 300MHz and the 30GHz, can realize the present invention better.
Fig. 1 is the figure that illustrates according to the 8 blade type resonators with two field coupled type antennas of first embodiment of the invention;
Fig. 2 is the schematic diagram that a high frequency electrode-free discharging lamp device is shown, and this device has used the 8 blade type resonators with two field coupled type antennas according to first embodiment of the invention;
Fig. 3 illustrates that electric field in the first embodiment of the invention is passed in time and the figure that changes;
Fig. 4 is the figure that illustrates according to the 8 blade type resonators with two magnetic field coupling type antennas of first embodiment of the invention;
Fig. 5 is the schematic diagram that a high frequency electrode-free discharging lamp device is shown, and this device has used the 6 blade type resonators with three field coupled type antennas according to first embodiment of the invention;
Fig. 6 is the figure that illustrates according to the 6 blade type resonators with three field coupled type antennas of second embodiment of the invention;
Fig. 7 is the schematic diagram that a high frequency electrode-free discharging lamp device is shown, and this device uses the 6 blade type resonators with three field coupled type antennas according to second embodiment of the invention;
Fig. 8 is the schematic diagram that illustrates according to the high frequency electrode-free discharging lamp device of two high frequency electric sources of use of third embodiment of the invention;
Fig. 9 is the figure that the variation track that electric field is passed in time in the third embodiment of the invention is shown;
Figure 10 is the figure that illustrates according to the 8 blade type resonators with field coupled type antenna of prior art; And
Figure 11 is the figure that illustrates according to the 8 blade type resonators with magnetic field coupling type antenna of prior art.
(embodiment 1)
First embodiment of high frequency energy supply device of the present invention is described to Fig. 5 below with reference to Fig. 1.
In 8 blade type resonators 12 shown in Figure 1, so design the frequency and the shape of resonator, thereby the high-frequency resonant electric field obtains strong electric field by the electrodeless discharge lamp 11 that is positioned at the central part office.Promptly, come design frequency according to the frequency of high-frequency energy to be coupled in advance, thereby resonator is operated with the pattern of the phase place of a side resonator and phase deviation π/4 of sides adjacent resonator (2 π/8) when by single high-frequency coupling device high-frequency energy being coupled to resonator 12.Two field coupled type antennas 13 are that the high-frequency coupling device is linked 8 blade type resonators 12, thereby less angle is 90 ° (pi/2s) in the angle relative with the resonator core.By the high-frequency energy that is coupled by the first field coupled type antenna 13a, produce high-frequency resonant electric field E along the horizontal direction of Fig. 1 at the core of 8 blade type resonators 12
xEqually, by the high-frequency energy that is coupled by the second field coupled type antenna 13b, produce high-frequency resonant electric field E along the vertical direction of Fig. 1 at the core of 8 blade type resonators 12
y
Then, comprise that with being described with reference to Figure 2 higher-order of oscillation apparatus and high frequency are cut apart and the structure of phase changer.By the high-frequency propagation device that constitutes by coaxial line, waveguide and like from the high frequency of oscillation energy transmission of high frequency electric source to dispenser or phase-shifter.By described dispenser is that the high frequency segmenting device is divided into two parts to the high-frequency energy of being propagated.In addition, by phase-shifter is that the high frequency phase changer is set this two parts that are split to form, thereby is positioned at 90 ° of the phasic differences mutually (pi/2) of phase place and the joint 23b place high frequency that is positioned at the second field coupled type antenna 13b of the joint 23a place high frequency of the first field coupled type antenna 13a that is coupled to 8 blade type resonators 22.
Electric field in the 8 blade type resonator cores more than being given at this moment by formula 1.
[formula 1]
Here ω represents to import the angular frequency of high frequency, t express time, E
0The maximum of the resonance electric field that expression is coupled by each high-frequency coupling device.The electric field that formula 1 illustrates 8 blade type resonator cores rotates under the angular frequency of input high frequency.
8 blade type resonators 12 and the variation of passing in time of 22 central part office high-frequency electric field in the electrodeless discharge lamp 11 that Fig. 1 and Fig. 2 are provided and 21 shown in Figure 3.
Higher-order of oscillation apparatus illustrates by the high-frequency resonant electric field E along the x direction of first electric field coupled antennas 13a coupling on the top on left hurdle with the sine-wave oscillation of 2.45GHz
xThe variation of Tui Yiing in time illustrates by the high-frequency resonant electric field E along the y direction of second electric field coupled antennas 13b coupling in the bottom on left hurdle
yThe variation of Tui Yiing in time.At high-frequency resonant electric field E along the x direction
xPhase place with along the high-frequency resonant electric field E of y direction
y90 ° of phase deviations the time, will be synchronized with the frequency of high frequency and rotate shown in right hurdle at the overlapping electric field of core.
The high-frequency coupling device is not limited to field coupled type antenna shown in Figure 1, also can use Fig. 4 magnetic field coupling type antenna.In Fig. 4, the end portion of two loop antenna 43a and 43b is connected electrically to the cylindrical inwall of 8 blade type resonators 42 respectively.Two vibration phase shift high frequency magnetic fields by loop antenna 43 produce the high-frequency resonant rotating electric field in the central part office of 8 blade type resonators 42, and high-frequency energy is offered electrodeless discharge lamp 41.
Provide the structure of above effect to be not limited to 8 blade type resonators and two high-frequency coupling devices.For example, as shown in Figure 5, can use 6 blade type resonators and three high-frequency coupling devices.
Here, 6 blade type resonators 52 shown in Figure 5 are designed to satisfy the frequency of high-frequency energy to be coupled, thereby when being coupled high-frequency energy by single high-frequency coupling device, this resonator is operated with 2 π/3 patterns that the high-frequency resonant electric field crosses the electrodeless discharge lamp 51 that is positioned at core.
Three joints of high-frequency coupling device 52 are linked the 6 blade type resonators that provided by six blades, thereby the core of 6 blade type resonators 52 are formed the angle of 60 ° (π/3).By the high-frequency propagation device that comprises coaxial line and waveguide the high-frequency energy that high frequency electric source produced is propagated into dispenser and phase-shifter.By above dispenser is that the high frequency segmenting device is divided into three parts to high-frequency energy.In addition, be that the high frequency phase changer is set three parts that are split to form by phase-shifter, thereby be positioned at 60 ° of the phase phasic differences (π/3) of three each high frequencies of joint that are coupled to 6 blade type resonators 52.As the structure that comprises aforesaid 8 blade type resonators and two high-frequency coupling devices, by such structure, the high-frequency resonant electric field of 6 blade type resonators, 52 cores can be synchronized with the frequency of high frequency to be coupled and rotate, and can obtain identical effect.
In the structure of aforesaid present embodiment, when the number of high-frequency coupling device is M and will equals E with the maximum of the resonator electric field of each high-frequency coupling device coupling
0The time, provide the electric field of side resonator group core by formula 2.
[formula 2]
As formula 1, ω represents to import the angular frequency of high frequency here, the t express time.Yet when the number of the side resonator that provides the side resonator group was N, M was 2 or bigger and N/2 or littler integer.The electric field that formula 2 illustrates side resonator group central part office rotates under the angular frequency identical with the frequency of input high frequency.
By above structure because the direction of electric field rotation rather than to a direction deflection, so that the heat distribution of the discharge plasma of electrodeless discharge lamp and tube wall becomes even.Like this, be difficult to produce the interference of the article on plasma bulk-mode that causes by thermal convection, and improved the heat resist power of electrodeless discharge lamp.
(embodiment 2)
Second embodiment of high frequency energy supply device of the present invention is described below with reference to Fig. 6 and 7.
So design 6 blade type resonators 62 shown in Figure 6 satisfy the frequency of high-frequency energy to be coupled, thereby resonator is operated with 2 π/3 patterns that the high-frequency resonant electric field crosses the electrodeless discharge lamp 61 that is positioned at core when being coupled high-frequency energy by single high-frequency coupling device.Three field coupled type antennas 63 are that the high-frequency coupling device is linked 6 blade type resonators 62, thereby form the angle of relative with the resonator core 120 ° (2 π/3).
Then, comprise that with being described with reference to Figure 7 higher-order of oscillation apparatus and high frequency are cut apart and the structure of phase changer.By the high-frequency propagation device that constitutes by coaxial line, waveguide and like from the high frequency of oscillation energy transmission of high frequency electric source to dispenser or phase-shifter.By described dispenser is that the high frequency segmenting device is divided into three parts to the high-frequency energy of being propagated.In addition, by phase-shifter is that the high frequency phase changer is set this three parts that are split to form, thereby is positioned at the phase place and the phase place of the joint 73b place high frequency that is positioned at the second field coupled type antenna 63b and 120 ° of the phasic differences mutually (2 π/3) that are positioned at the joint 73c place high frequency of the 3rd field coupled type antenna 63e of the joint 73a place high frequency of the first field coupled type antenna 63a that is coupled to 6 blade type resonators 72.
Electric field in the 6 blade type resonator cores more than being given at this moment by formula 3.
[formula 3]
Here ω represents to import the angular frequency of high frequency, t express time, E
0The maximum of the resonance electric field that expression is coupled by each high-frequency coupling device.The electric field that formula 3 illustrates the core of 6 blade type resonators 72 rotates under the angular frequency identical with the frequency of input high frequency.
Providing as above, the structure of effect is not limited to 6 blade type resonators and 3 high-frequency coupling devices.
In the structure of aforesaid present embodiment, when the number of high-frequency coupling device is M and will equals E with the maximum of the resonator electric field of each high-frequency coupling device coupling
0The time, provide the electric field of side resonator group core by formula 4.
[formula 4]
As formula 3, ω represents to import the angular frequency of high frequency here, the t express time.Yet when the number of the side resonator that provides the side resonator group was N, M was 3 or bigger and N or littler integer.The electric field that formula 4 illustrates side resonator group central part office rotates under the angular frequency identical with the frequency of input high frequency.
Identical with first embodiment, by above structure because the direction of electric field rotation rather than to a direction deflection, so that the heat distribution of the discharge plasma of electrodeless discharge lamp and tube wall becomes even.Like this, be difficult to produce the interference of the article on plasma bulk-mode that causes by thermal convection, and improved the heat resist power of electrodeless discharge lamp.In addition, compare with first embodiment, electric field is also from overlapping with respect to the side of side resonator, and the side resonator group is easier operates with 2 π/N pattern so can make.
(embodiment 3)
The 3rd embodiment of high frequency energy supply device of the present invention is described below with reference to Fig. 8 and 9.
To be described with reference to Figure 8 the structure of high frequency electrode-free discharging lamp device, this device comprises two higher-order of oscillation apparatuses, two high-frequency propagation devices and two high-frequency coupling devices.8 blade type resonators 82 are that the high-frequency coupling device is identical with those devices of Fig. 1 or foundation shown in Figure 4 first embodiment with two antenna 83a and 83b.
Constitute and the first high-frequency propagation device that is coupled to the part 83a of 8 blade type resonators 82 by the first high-frequency coupling device is propagated high frequency of oscillation energy from high frequency electric source 1 by coaxial line, radio frequency channel and like.Constitute and the second high-frequency propagation device that is coupled to the part 83b of 8 blade type resonators 82 by the second high-frequency coupling device is propagated high frequency of oscillation energy from high frequency electric source 2 by coaxial line, radio frequency channel and like.High-frequency energy by the first high-frequency coupling device 83a is coupled produces along high-frequency resonant electric field E horizontal among Fig. 8 in the central part office of 8 blade type resonators 82
xSimilarly, by the high-frequency energy of second high-frequency coupling device 83b coupling, produce high-frequency resonant electric field E along vertical direction among Fig. 8
y
At this moment, when using ω
1Represent angular frequency, and use ω from the high frequency of oscillation of high frequency electric source 1
2When representing the angular frequency from the high frequency of oscillation of high frequency electric source 2, be given in the x component and the y component of the electric field that the central part office of 8 blade type resonators 82 produces by formula 5.
[formula 5]
Here t represents elapsed time, E
0The maximum of the resonance electric field that expression is coupled by each high-frequency coupling device.For example, as high frequency of oscillation ω from high frequency electric source 2
2Angular frequency recently from the high frequency of oscillation ω of high frequency electric source 1
1Angular frequency big 10% o'clock, come representation formula 5 by formula 6.
[formula 6]
Shown in Figure 9 changing to from the high frequency of oscillation of high frequency electric source 1 at time t carried out 5 circulation (0≤ω
2The record result of the x of the electric field that produces in the central part office of 8 blade type resonators 82 in the time of t≤10 π) and the track of y component.
At t is 0 o'clock, along the top-right E that tilts
xAnd E
ySynthetic component progressively be displaced to the lower left of inclination along with the skew of frequency, change to the upper left side of inclination at last from the lower right that tilts.
As mentioned above, by to being distinguished, will repeat rotation because of the difference of frequency by each synthetic component of the high-frequency electric field of 8 blade type resonators, 82 couplings from the frequency of the high frequency of oscillation of high frequency electric source 1 and frequency from the high frequency of oscillation of high frequency electric source 2.
Identical with first and second embodiment, by above structure because the direction of electric field rotation rather than to a direction deflection, so that the heat distribution of the discharge plasma of electrodeless discharge lamp 81 and tube wall becomes even.Like this, be difficult to produce the interference of the article on plasma bulk-mode that causes by thermal convection, and improved the heat resist power of electrodeless discharge lamp 81.In addition, compare, do not need the quite careful operation that phase difference is regulated with first and second embodiment.
Though the example that illustrates has here used 10% difference on the frequency, difference on the frequency also is not limited to 10%.Especially, because the in addition specific bandwidth of each ISM (industry, science and medical science) frequency band of the high frequency that uses in industrial permission, so difference on the frequency drops in this bandwidth range.For example, centre frequency is that the interior admissible bandwidth of ISM frequency band of 2.45GHz is ± 0.05GHz.Therefore, at this moment, difference on the frequency can change in the scope of 0.1GHz.In fact, owing to allow the frequency of oscillation in the bandwidth that error is always arranged such as high frequency oscillators such as magnetrons above, so do not change frequency if a plurality of high-frequency generators are provided, nature can obtain difference on the frequency.
Yet the hope frequency difference is not excessive, and this is because other mode of resonance that this difference on the frequency will exceed the resonance frequency of side resonator group or consider to produce.Therefore, difference on the frequency is preferably in the frequency range that same mode of resonance takes place.
The structure that produces above effect is not limited to the 8 blade type resonators that each all has two higher-order of oscillation apparatuses, two high-frequency propagation devices and two high-frequency coupling devices.
For example, can use 6 blade type resonators shown in Figure 5 and three high-frequency coupling devices to provide the structure that comprises three high frequency oscillating apparatus, three high-frequency propagation devices and three high-frequency coupling devices.
Though the example that handle uses the blade type resonator in first to the 3rd above embodiment also can use such as other side resonator group such as hole-slot-type resonators as the side resonator group.
In addition, in first to the 3rd above embodiment, can be applicable to the high frequency electrode-free discharging lamp device aspect though the high frequency energy supply device of use side resonator group of the present invention only is shown, the application of high frequency energy supply device of the present invention is not limited thereto.For example, utilize in the device of high-frequency discharge such as plasma CVD, plasma flare and gas discharge laser etc. in utilization, need be when forming the relatively little stable discharging plasma of diameter by concentrating and the high-frequency resonant electric field of not deflection provide energy, high frequency energy supply device at this moment of the present invention also is useful.
For use high-frequency energy to the workpiece that diameter is relatively little on the core that is positioned at high frequency energy supply device heat, light emission, fusing and evaporation, need provide discharge energy by the even high-frequency resonant electric field of concentrated and not deflection, high frequency energy supply device at this moment of the present invention also is useful.
In addition, in the present invention, the phase difference of a plurality of high frequencies that will be coupled by the high-frequency coupling device can be different.
As mentioned above, compare, according to the present invention, owing to eliminate electric field to the deflection of a direction and the direction rotation or the periodically variation of electric field, so uniform high-frequency energy can be provided with the conventional microwave energy feedway that uses the side resonator group.
Like this, the minimum interference of the article on plasma bulk-mode that is caused by thermal convection helps producing and keeping stable discharge plasma.In addition, the heat load to the discharge vessel wall of electrodeless discharge lamp is become evenly, also improve the heat resist power of electrodeless discharge lamp.
In addition, can make the energy that offers heating, light emission, fusing or evaporation become even.
Claims (11)
1. high frequency energy supply device, it is characterized in that comprising: in fact one group of side resonator, these side resonators are electrically connected and use the high-frequency resonant electromagnetic field that produces in core that high-frequency energy is provided with the form of ring-type; And a plurality of high-frequency coupling devices, be used for a plurality of high-frequency energies of being propagated from a plurality of high-frequency propagations path are coupled to described side resonator group; It is different wherein to be coupled to the phase place and/or the frequency of a plurality of high frequencies of described side resonator group from described a plurality of high-frequency coupling devices.
2. high frequency energy supply device as claimed in claim 1 is characterized in that having two described high-frequency coupling devices, and described high-frequency coupling device does not produce the Space Angle of 180 degree.
3. a high frequency energy supply device comprises: in fact one group of side resonator, these side resonators are electrically connected and use the high-frequency resonant electromagnetic field that produces in core that high-frequency energy is provided with the form of ring-type; Higher-order of oscillation apparatus; The high-frequency propagation device; The high frequency segmenting device, the described high-frequency energy that is used for being produced by described higher-order of oscillation apparatus and propagated by described high-frequency propagation device is divided into a plurality of propagation paths; The high frequency phase changer is used for the phase deviation of a plurality of high frequencies on described a plurality of propagation paths is become different phase places; And a plurality of high-frequency coupling devices, be used for the different described a plurality of high-frequency energies of phase place are coupled to described side resonator group; Wherein, when the number of described high-frequency coupling device was M, the less angle that is produced by the adjacent described high-frequency coupling device relative with the formed ring of described side resonator group center was π/M; Mutual offset pi/the M of phase place of the high-frequency energy that described high frequency phase changer is coupled adjacent described high-frequency coupling device.
4. a high frequency energy supply device comprises: in fact one group of side resonator, these side resonators are electrically connected and use the high-frequency resonant electromagnetic field that produces in core that high-frequency energy is provided with the form of ring-type; Higher-order of oscillation apparatus; The high-frequency propagation device; The high frequency segmenting device, the described high-frequency energy that is used for being produced by described higher-order of oscillation apparatus and propagated by described high-frequency propagation device is divided into a plurality of propagation paths; The high frequency phase changer is used for the phase deviation of a plurality of high frequencies on described a plurality of propagation paths is become different phase places; And a plurality of high-frequency coupling devices, be used for the different described a plurality of high-frequency energies of phase place are coupled to described side resonator group; Wherein, when the number of described high-frequency coupling device was M, M was at least 3; The less angle that is produced by the relative adjacent described high-frequency coupling device in the ring center that forms with described side resonator group is 2 π/M; Described high frequency phase changer is offset 2 π/M mutually to the phase place of the high-frequency energy that adjacent described high-frequency coupling device is coupled.
5. a high frequency energy supply device comprises: in fact one group of side resonator, these side resonators are electrically connected and use the high-frequency resonant electromagnetic field that produces in core that high-frequency energy is provided with the form of ring-type; A plurality of higher-order of oscillation apparatuses; A plurality of high-frequency propagation devices; And a plurality of high-frequency coupling devices, be used for that handle is produced by described a plurality of higher-order of oscillation apparatuses and propagated described a plurality of high-frequency energy being coupled to described side resonator group by described a plurality of high-frequency propagation devices; Wherein, the number of described a plurality of higher-order of oscillation apparatuses is identical with the number of described a plurality of high-frequency propagation devices and described a plurality of high-frequency coupling devices; Described a plurality of high-frequency coupling device is connected to the different side resonator that constitutes described side resonator group; And the frequency of the high frequency that is produced by described a plurality of higher-order of oscillation apparatuses is different.
6. high frequency energy supply device as claimed in claim 5 is characterized in that when the number of described high-frequency coupling device is M, and being produced less angle by the relative adjacent described high-frequency coupling device in the ring center that forms with described side resonator group is π/M.
7. as each described high frequency energy supply device in the claim 1 to 6, it is characterized in that when the number of described side resonator group is N that the angle that is produced by each relative described side resonator of the ring center that forms with described side resonator group is 2 π/N.
8. as each described high frequency energy supply device in the claim 1 to 7, it is characterized in that when the number of the side resonator that provides described side resonator group is N that the phase difference between the adjacent described side resonator is 2 π/N.
9. as each described high frequency energy supply device in the claim 1 to 8, it is characterized in that described side resonator group comprises the blade type resonator.
10. as each described high frequency energy supply device in the claim 1 to 9, it is characterized in that described high-frequency coupling device is field coupled type or magnetic field coupling type.
11. high frequency electrode-free discharging lamp device, it is characterized in that comprising as each described high frequency energy supply device and electrodeless discharge lamp in the claim 1 to 10, wherein said electrodeless discharge lamp is positioned at the ring center of described high frequency energy supply device, forms discharge plasma by the high-frequency energy that described high frequency energy supply device provided in the discharge tube inside of described electrodeless discharge lamp.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP327,776/97 | 1997-11-28 | ||
| JP32777697 | 1997-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1218979A true CN1218979A (en) | 1999-06-09 |
Family
ID=18202861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN98123029A Pending CN1218979A (en) | 1997-11-28 | 1998-11-27 | High frequency energy supply device and high frequency electrode-free discharging lamp device |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP0920240B1 (en) |
| KR (1) | KR19990045674A (en) |
| CN (1) | CN1218979A (en) |
| DE (1) | DE69825546T2 (en) |
| TW (1) | TW430855B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6518703B1 (en) * | 1998-03-16 | 2003-02-11 | Matsushita Electrical Industrial Co., Ltd. | Electrodeless discharge energy supply apparatus and electrodeless discharge lamp device using surface wave transmission line |
| JP2002100493A (en) * | 2000-09-26 | 2002-04-05 | Toshiba Lighting & Technology Corp | Electrodeless discharge lamp device |
| TWI408723B (en) * | 2005-06-03 | 2013-09-11 | Ceravision Ltd | Lamp |
| TW201042872A (en) * | 2009-05-27 | 2010-12-01 | Arbl Co Ltd | Wireless power transmission system |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS581511B2 (en) * | 1977-12-15 | 1983-01-11 | 三菱電機株式会社 | electrodeless fluorescent lamp |
| US4954755A (en) * | 1982-05-24 | 1990-09-04 | Fusion Systems Corporation | Electrodeless lamp having hybrid cavity |
| US4749915A (en) * | 1982-05-24 | 1988-06-07 | Fusion Systems Corporation | Microwave powered electrodeless light source utilizing de-coupled modes |
| US4792732A (en) * | 1987-06-12 | 1988-12-20 | United States Of America As Represented By The Secretary Of The Air Force | Radio frequency plasma generator |
| US5144206A (en) * | 1991-09-10 | 1992-09-01 | Gte Products Corporation | Electrodeless HID lamp coupling structure with integral matching network |
| US5227698A (en) * | 1992-03-12 | 1993-07-13 | Fusion Systems Corporation | Microwave lamp with rotating field |
| US5498928A (en) * | 1994-05-24 | 1996-03-12 | Osram Sylvania Inc. | Electrodeless high intensity discharge lamp energized by a rotating electric field |
| DE19537477A1 (en) * | 1995-10-09 | 1997-04-10 | Bosch Gmbh Robert | Dielectric resonator and use |
| TW359847B (en) * | 1996-11-01 | 1999-06-01 | Matsushita Electric Ind Co Ltd | High frequency discharge energy supply means and high frequency electrodeless discharge lamp device |
| JP3209952B2 (en) * | 1996-11-01 | 2001-09-17 | 松下電器産業株式会社 | High frequency electrodeless discharge lamp device |
-
1998
- 1998-11-26 EP EP98122476A patent/EP0920240B1/en not_active Expired - Lifetime
- 1998-11-26 DE DE69825546T patent/DE69825546T2/en not_active Expired - Fee Related
- 1998-11-26 TW TW087119674A patent/TW430855B/en not_active IP Right Cessation
- 1998-11-27 CN CN98123029A patent/CN1218979A/en active Pending
- 1998-11-28 KR KR1019980051468A patent/KR19990045674A/en not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| KR19990045674A (en) | 1999-06-25 |
| EP0920240A3 (en) | 2000-01-05 |
| DE69825546D1 (en) | 2004-09-16 |
| DE69825546T2 (en) | 2004-12-30 |
| TW430855B (en) | 2001-04-21 |
| EP0920240B1 (en) | 2004-08-11 |
| EP0920240A2 (en) | 1999-06-02 |
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