CN1208693C - Organic electroluminescent display panel developing apparatus and method thereof - Google Patents
Organic electroluminescent display panel developing apparatus and method thereof Download PDFInfo
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- CN1208693C CN1208693C CN 02123218 CN02123218A CN1208693C CN 1208693 C CN1208693 C CN 1208693C CN 02123218 CN02123218 CN 02123218 CN 02123218 A CN02123218 A CN 02123218A CN 1208693 C CN1208693 C CN 1208693C
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Abstract
The present invention relates to a developing device for an organic electro photoluminescent display panel, which comprises a developing unit, a water cleaning unit, a drying unit and a conveying unit, wherein the developing unit is provided with a developing groove, provides a developing solution and uniformly distributes the developing solution on the surface of the organic electro photoluminescent display panel. The organic electro photoluminescent display panel is soaked in the developing solution, or the developing solution is sprayed on the organic electro photoluminescent display panel. The water washing unit is provided with a water washing groove connected with a developing unit at the most, and is used for spraying a circulated washing solution or a fresh washing solution to the organic electro photoluminescent display panel to remove the residual developing solution on the surface of the organic electro photoluminescent display panel. The drying unit is provided with at least one air blowing device to dry the organic electro photoluminescent display panel processed by the water washing unit, and the conveying unt conveys the organic electro photoluminescent display panel to the developing unit, the water washing unit and the drying unit in a continuous conveying mode and conveys the organic electro photoluminescent display panel in a fixed rate.
Description
Technical field
The invention relates to a kind of display panel developing apparatus and method, particularly a kind of organic electroluminescent display panel developing apparatus and method of being applicable to.
Background technology
Organic electro-luminescent display is owing to have self-lighting, high brightness, and high contrast, wide visual angle, driving voltage is low, and the fast and advantage of simple structure of answer speed enjoys attracting attention of display industry in recent years.Though yet good achievement is obtained in the making of organic electro-luminescent display in the laboratory, produces in a large number for coml, still faces many difficulties and waits to overcome.
The primary structure of organic electric-excitation luminescent displaying panel includes a plurality of indium tin oxide parallel to each other (ITO) anode electrodes, a plurality of parallel to each other but vertical with anode electrode photoresistances intercept wall, one organic electric-excitation luminescent material layer is that evaporation intercepts within the walls in adjacent photoresistance, and a plurality of cathode electrodes parallel to each other, be that evaporation is on the organic electric-excitation luminescent material layer.The formation in the formation of anode and picture element zone is to utilize the development of photoresistance to form pattern optionally to carry out etching again and finish.
In the manufacturing process that the organic electric-excitation luminescent display surface is pulled, known developing technique is silicon substrate to be placed on the sucker rotate in traditional integrated circuit, photoelectric process, then by nozzle difference spray developing liquid and water lotion, is spin-dried at a high speed more at last.But along with display sizes strengthens toward new the propelling from generation to generation, influence than the heavy a lot of double effect of silicon substrate with display glass substrate, make the design of traditional rotating disk can't load so big weight and the centrifugal force under the high speed rotating, make that development is inhomogeneous or totally do not cause photoresistance residual, and reduce the yield of display element greatly.Therefore or change and adopt the mode that display base plate is immersed in different developing troughs and rinsing bowl and carry out and, but can't each step of continued operation, must display panel be taken out and be loaded in another board by the artificial mode that transmits, therefore the time-histories of whole developing manufacture process can prolong many, be unfavorable for the volume production operation, also be unfavorable for large-area display panel manufacturing.In addition, because human factor is wayward, regular meeting produces in transport process and incurs loss through delay or damage, and therefore general developing apparatus can't accurately be controlled development time at all, can not guarantee the quality of developing manufacture process.
And the machinery and equipment that photoresistance develops, if not with the method for rotary coating, need expensive and complicated sensor, control system, reciprocating mechanism and the complicated control formula of design, and inconvenient maintenance, and have the idle facts of individual elements.Therefore and need a kind of simple high-level efficiency, maintenance easily, with low cost, the development operation is organic electroluminescent display panel developing apparatus fast, dealing with mass-produced needs, and solves the industry large tracts of land panel coating difficulty of developing.
The inventor is in line with the positive spirit of invention, experiment is eventually to the invention of finishing this Jiahui common people after deliberation, a kind of can addressing the above problem, organic electroluminescent display panel developing apparatus and method.
Summary of the invention
Fundamental purpose of the present invention is that a kind of organic electroluminescent display panel developing apparatus simple in structure is being provided, so that the large-area organic electric-excitation luminescent displaying panel of energy development treatment, and maintenance easily, and reduce production costs.
Another object of the present invention is that a kind of organic electroluminescent display panel developing apparatus is being provided, so that can be continuously, and high-level efficiency, and development treatment organic electric-excitation luminescent displaying panel apace.
For reaching above-mentioned purpose, organic electroluminescent display panel developing apparatus of the present invention, comprise: a developing cell, has at least one developing trough, be used to provide a developer solution, so that this developer solution is evenly distributed on the surface of an organic electric-excitation luminescent displaying panel, it is organic electric-excitation luminescent displaying panel to be soaked place developer solution or spray developing liquid in this organic electric-excitation luminescent displaying panel; One washing unit, has at least one rinsing bowl, be to be connected, be used for spraying a circulating cleaning fluid or fresh cleaning solution in this organic electric-excitation luminescent displaying panel with the developing cell of this rearmost end, with remove on this organic electric-excitation luminescent displaying panel surface residual developer solution; One drying unit has at least one air blow drying device, the organic electric-excitation luminescent displaying panel of crossing through this washing cell processing with drying; And a delivery unit, this organic electric-excitation luminescent displaying panel is transmitted in this developing cell, washing unit and this drying unit in the mode of continuous transmission; Wherein, this delivery unit is to transmit this organic electric-excitation luminescent displaying panel with the constant speed rate in this developing apparatus; And a control module, with control or adjust the speed that transmits this organic electric-excitation luminescent displaying panel in this delivery unit.
Organic electric-excitation luminescent displaying panel developing method of the present invention, be to comprise following step: develop prior in the developing trough developer solution evenly being sprayed on this organic electric-excitation luminescent displaying panel surface, and in this developing trough, this organic electric-excitation luminescent displaying panel is sent to the other end of this developing trough from an end of this developing trough with the constant speed rate; Clean the organic electric-excitation luminescent displaying panel that this has been developed for the first time with water afterwards; Clean the organic electric-excitation luminescent displaying panel that this has been cleaned for the first time for the second time with water thereupon; And at last with air scavenging or dry up this organic electric-excitation luminescent displaying panel; Wherein cleaning the water that uses this first time is for cleaning the recirculated water that collect the back for the second time.
The development time of developing cell of the present invention is controlled, and need not utilize the programmable time controller of complex and expensive, and the control of its time is to do control to carry out accurate development time control with the length of the setting of roller rotating speed and developing cell.Because with the length of developing cell divided by the speed of carrying organic electric-excitation luminescent displaying panel in the developing cell, just equal the time that organic electric-excitation luminescent displaying panel develops and spent, and the speed of the transmission of organic electric-excitation luminescent displaying panel is controlled by delivery roller.So organic electroluminescent display panel developing apparatus of the present invention can utilize simple rate controlled, just can do accurate development time control, the opertaing device that need not be complicated and the formula of control.Developing cell of the present invention need not utilize the group Pu, and fluid level controller, or liquid level detector only need to wave the device of spray developing liquid, can keep identical development quality.Moreover the present invention utilizes the spin coating developer solution in organic electric-excitation luminescent displaying panel, thereby need not to consider that panel is overweight, is difficult to the problem of rotating or evenly being coated with.And the present invention is because be to transmit with roller, and developed and cleans in the mode of sequential processes, therefore can be continuously in large quantities high-level efficiency develop a large amount of manufacturings of suitable production line.
Because structure of the present invention and method novelty can provide on the industry and utilize, and truly have the enhancement effect, so apply for patent of invention in accordance with the law.
Description of drawings
Fig. 1 is the synoptic diagram of a preferred embodiment of organic electroluminescent display panel developing apparatus of the present invention;
Fig. 2 is the synoptic diagram of another preferred embodiment of organic electroluminescent display panel developing apparatus of the present invention.
The specific embodiment mode
Organic electroluminescent display panel developing apparatus of the present invention, optionally more include a download unit, be to be connected, finish this display panel of development treatment, or provide a buffer zone that this display panel base is pulled directly to enter follow-up processing procedure module with loading with this drying unit.Organic electroluminescent display panel developing apparatus of the present invention, also can optionally more comprise a control module with
Control or adjust the speed that transmits this organic electric-excitation luminescent displaying panel in this delivery unit.In addition, for controlling or keep the temperature of this developing trough, the developing cell of organic electroluminescent display panel developing apparatus of the present invention optionally more comprises at least one temperature control equipment to control or to keep the temperature of this developing trough.
This developing cell can comprise more optionally that also at least one developer solution flusher is with the organic electric-excitation luminescent displaying panel of this developer solution of even sprinkling in this transmission; Be preferably this developer solution flusher and become cross-distribution, and can when developer solution sprays, swing back and forth to spray evenly.Moreover this developing cell can optionally more comprise at least one developer solution accumulator tank storing or to reclaim this developer solution, and this developer solution accumulator tank also links with this developer solution flusher; Or this developing cell comprises more that optionally at least one solution level monitoring device is to control or to monitor the concentration of this developer solution.What is more, and this developing cell optionally more comprises a developer solution auto-feeding device, to replenish needed soup at any time.
The washing unit of organic electroluminescent display panel developing apparatus of the present invention comprises at least one rinsing bowl, is preferably to comprise one first rinsing bowl and one second rinsing bowl; Wherein this first rinsing bowl is collection and uses the recirculated water after second rinsing bowl cleans to clean this organic electric-excitation luminescent displaying panel, and this organic electric-excitation luminescent displaying panel is after cleaning via first rinsing bowl earlier, to clean through second rinsing bowl again.It is unrestricted wherein should to wash the water that uses the unit, and being preferably second rinsing bowl is with this organic electric-excitation luminescent displaying panel of washed with de-ionized water.The rinse water that this first rinsing bowl uses is unrestricted, is preferably deionized water or through collecting the used circulation deionized water of second rinsing bowl.The delivery unit of organic electroluminescent display panel developing apparatus of the present invention is unrestricted, is preferably live roller;
Best for the inner edge diameter less than external profile diameter to accept the live roller group of organic electric-excitation luminescent displaying panel.The developer solution kind that organic electroluminescent display panel developing apparatus of the present invention is suitable for is unrestricted, decides on the layer that the needs on the organic electric-excitation luminescent displaying panel develop, and is preferably TMAH or NaOH.The organic electric-excitation luminescent displaying panel that organic electroluminescent display panel developing apparatus of the present invention is suitable for is unrestricted, is preferably the surface and has a photoresist layer or a pi (Polyimide) layer organic electric-excitation luminescent displaying panel.The air blow drying device of the drying unit of organic electroluminescent display panel developing apparatus of the present invention is unrestricted, and the air blow drying device is preferably air knife.
For more understanding technology contents of the present invention, be described as follows especially exemplified by the organic electroluminescent display panel developing apparatus preferred embodiment.
Please refer to Fig. 1 of the present invention, Fig. 1 is the synoptic diagram of organic electroluminescent display panel developing apparatus 100 preferable examples of the present invention.This organic electroluminescent display panel developing apparatus 100 has a developing cell 14, and links one first washing unit, 20, one second washing unit 22 and drying units 18 in regular turn.Each unit and run through with a roller supply unit 16 and to link all unit transporting organic electric-excitation luminescent displaying panel between each unit wherein, and a control module 510 is with the wheel speeds of constant speed rate control roller supply unit 16.This developing cell 14 has a developing trough 148, and provides one group of nozzle array 146 in the top of developing trough 148, this group nozzle array 146 jolting back and forth, with by the even spray developing liquid of nozzle in panel or developing trough 148.This developing cell 14 and is provided with one or a plurality of developer solution accumulator tank 142 outside developing trough 148, put identical or different developer solution (for example TMAH or NaOH), with the needs that develop in response to different panels, and the mutual pollution between soup of can avoiding developing.Perhaps as mutually auxiliary additional usefulness,, need not shut down to replenish with when displacement or the additional developer solution.Each developer solution accumulator tank, and can optionally link an automatic developer solution replenishment system, with when developer solution is not enough, automatically from extraneous additional developer solution.The nozzle array 146 of this developer solution accumulator tank and this developing cell, link with developer solution pipeline 149, wherein 149 of this developer solution pipelines also can optionally be provided with developer solution filtrator 146 or group Pu 147, with impurity that filters developer solution or the pressure of controlling the developer solution ejection.See through the pressure of adjusting the developer solution ejection, can thereby control the quality of developing.The nozzle array 146 of developer solution is a cross-distribution spray developing liquid of making the fan type in the mode of jolting, to promote the development effect of uniform.This developing trough 148 also has a temperature controller 144, with the temperature of control when panel develops or maintenance developing trough 148.
Being linked to the end of this developing trough 148, is first rinsing bowl 201.The end that links first rinsing bowl 201 is second rinsing bowl 221.First rinsing bowl 201 and second rinsing bowl 221 are equipped with rinse water accumulator tank 202,222, group Pu 204,224, the pipeline 206,226 of connection and nozzle 208,228.When it passes through in organic electric-excitation luminescent displaying panel, to clean the water of usefulness by rinse water accumulator tank 202,222 through group Pu 204,224, the pipeline 206 that links, and be ejected to the organic electric-excitation luminescent displaying panel surface residues in the organic electric-excitation luminescent displaying panel surface with cleaning developer solution by nozzle 208,228.And second rinsing bowl 221 uses the deionized water of fresh cleaning so that organic electroluminescence panel is cleaned, water after the cleaning is linked to first rinsing bowl 201 with pipeline and cleans organic electroluminescence panel for first rinsing bowl 201 with this recirculated water after can collecting with feeder 202.Be linked to second rinsing bowl, 201 ends and then be one and have the air blow drying unit 18 of several air knives or air knife array.This air blow drying unit 18, be by nozzle 182 blow out air air-flows in the organic electroluminescence panel surface to remove residual moisture or contaminant particles.
The transmission of the organic electric-excitation luminescent displaying panel of this organic electroluminescent display panel developing apparatus 100 is to utilize live roller system 16 to transmit.The speed that transmits is that the length with developing trough gets divided by developing needed Time Calculation.During organic electric-excitation luminescent displaying panel process developing cell developing trough, the nozzle in the developing cell swings so that developer solution is sprayed on the organic electric-excitation luminescent displaying panel surface equably.And the time of developing is to be decided by the time that organic electric-excitation luminescent displaying panel stops in developing trough.And the time that organic electric-excitation luminescent displaying panel stops in developing trough can accurately be controlled by the speed of live roller 16 and the length of developing trough.After accurately controlling development time, this is sent to first rinsing bowl 201 by live roller 16 immediately through the organic electric-excitation luminescent displaying panel that develops.The nozzle 208 of first rinsing bowl 201 also is sprayed to the organic electric-excitation luminescent displaying panel surface with recirculated water, with the particle and the developer solution of eccysis organic electric-excitation luminescent displaying panel surface contamination.First rinsing bowl 201 cleans the ionized water of usefulness, is to come from the recirculated water that 221 eccysis of second rinsing bowl are collected later.After the cleaning through first rinsing bowl 201, organic electric-excitation luminescent displaying panel is sent to second rinsing bowl 221 by live roller 16 immediately and carries out the cleaning second time with fresh deionized water.This organic electric-excitation luminescent displaying panel again by the transmission of live roller, enters drying unit 18 after cleaning.This drying unit 18 is with a plurality of air knives 182, and fresh air is blowed to the surface of organic electric-excitation luminescent displaying panel, blows down the moisture of organic electric-excitation luminescent displaying panel, is beneficial to follow-up processing.
The developing apparatus of organic electric-excitation luminescent displaying panel of the present invention, it is provided with a buffer zone 12 and places this buffer zone 12 to input to developing cell 14 to wait to transmit with organic electric-excitation luminescent displaying panel that will be to be developed before developing trough.In addition, between the developing trough 148 and first rinsing bowl 201, an air knife 143 also is set optionally, blows down remaining soup that develops and the particle that is produced in advance with complementary ground.In addition another second buffer zone 19 is set will develop and the organic electric-excitation luminescent displaying panel of cleaning-drying places this second buffer zone 19 to input to follow-up unit or take out and use to wait to transmit in drying unit 18 back.
Please refer to Fig. 2 of the present invention, Fig. 2 is the synoptic diagram of another preferable example of organic electroluminescent display panel developing apparatus of the present invention.The organic electroluminescent display panel developing apparatus of Fig. 2 and the preferable example of the organic electroluminescent display panel developing apparatus of Fig. 1 are except that the washing unit, and all the other are all identical with the preferable example of the organic electroluminescent display panel developing apparatus of Fig. 1.The only use one washing unit 30 of this preferable example of the organic electroluminescent display panel developing apparatus of Fig. 2.This washing unit 30 is provided with rinse water accumulator tank 302, group Pu 304, the pipeline 306 of binding and nozzle 308.When it passes through in organic electric-excitation luminescent displaying panel, with the water that cleans usefulness by rinse water accumulator tank 302 through group Pu 304, the pipeline 306 that links, and be ejected to the organic electric-excitation luminescent displaying panel surface residues in the organic electric-excitation luminescent displaying panel surface with cleaning developer solution by nozzle 308.And rinsing bowl 301 uses the deionized water of fresh cleaning so that organic electroluminescence panel is cleaned.
The developing apparatus of organic electric-excitation luminescent displaying panel of the present invention, owing to use live roller to transmit organic electric-excitation luminescent displaying panel, and with the even spray developing liquid of mode of nozzle jolting, needn't be with rotation mode spin coating developer solution, so can overcome the shortcoming that spin coating method is not suitable for the large tracts of land organic electric-excitation luminescent displaying panel.In addition, organic electroluminescent display panel developing apparatus of the present invention is because the time of utilizing the rotating speed control of live roller to develop, computing method are simple, and it is simple in structure, the a large amount of minimizing utilizes expensive and complicated controller and cost, saves software and hardware design, the cost of modification and time, and keep in repair simple relatively, easy.And development time can be controlled by the rotating speed adjustment, and the control of the time of development is simple and accurate.
To sum up institute is old, and no matter the present invention is showing it be different from the feature of prior art, be a quantum jump of " organic electroluminescent display panel developing apparatus " with regard to purpose, means and effect.
It should be noted that above-mentioned many embodiment give an example for convenience of explanation, the interest field that the present invention advocated should be as the criterion so that claim is described certainly, but not only limits to the foregoing description.
Claims (20)
1. an organic electroluminescent display panel developing apparatus is characterized in that, comprises:
One developing cell, has at least one developing trough, be used to provide a developer solution, so that this developer solution is evenly distributed on the surface of an organic electric-excitation luminescent displaying panel, it is organic electric-excitation luminescent displaying panel to be soaked place developer solution or spray developing liquid in this organic electric-excitation luminescent displaying panel;
One washing unit, has at least one rinsing bowl, be to be connected, be used for spraying a circulating cleaning fluid or fresh cleaning solution in this organic electric-excitation luminescent displaying panel with the developing cell of this rearmost end, with remove on this organic electric-excitation luminescent displaying panel surface residual developer solution;
One drying unit has at least one air blow drying device, the organic electric-excitation luminescent displaying panel of crossing through this washing cell processing with drying:
One delivery unit is transmitted in this developing cell in the mode of continuous transmission with this organic electric-excitation luminescent displaying panel, washing unit and this drying unit;
Wherein, this delivery unit is to transmit this organic electric-excitation luminescent displaying panel with the constant speed rate in this developing apparatus, and
One control module is to control or to adjust the speed that transmits this organic electric-excitation luminescent displaying panel in this delivery unit.
2. as claim 1 a described developing apparatus, it is characterized in that wherein this developing apparatus more includes a download unit, is to be connected with this drying unit, with
Loading is finished this display panel of development treatment, or provides a buffer zone to make this panel substrate directly enter follow-up processing procedure module.
3. organic electroluminescent display panel developing apparatus as claimed in claim 1 is characterized in that, it more comprises a control module to control or to adjust the speed that transmits this organic electric-excitation luminescent displaying panel in this delivery unit.
4. organic electroluminescent display panel developing apparatus as claimed in claim 1 is characterized in that, wherein this developing cell comprises that more at least one temperature control equipment is to control or to keep the temperature of this developing trough.
5. organic electroluminescent display panel developing apparatus as claimed in claim 1 is characterized in that, wherein this developing cell comprises that more at least one developer solution flusher is with the organic electric-excitation luminescent displaying panel of this developer solution of even sprinkling in this transmission.
6. organic electroluminescent display panel developing apparatus as claimed in claim 5 is characterized in that, wherein this developing cell more comprises at least one developer solution accumulator tank storing or to reclaim this developer solution, and this developer solution accumulator tank also links with this developer solution flusher.
7. organic electroluminescent display panel developing apparatus as claimed in claim 1 is characterized in that, wherein this developing cell comprises that more at least one solution level monitoring device is to control or to monitor the concentration of this developer solution.
8. organic electroluminescent display panel developing apparatus as claimed in claim 1 is characterized in that, wherein this developing cell more comprises a developer solution auto-feeding device.
9. organic electroluminescent display panel developing apparatus as claimed in claim 5 is characterized in that, wherein this developer solution flusher becomes cross-distribution, and can swing back and forth when developer solution sprays so that developer solution sprays evenly.
10. organic electroluminescent display panel developing apparatus as claimed in claim 1 is characterized in that, wherein this washing unit comprises one first rinsing bowl and one second rinsing bowl; Wherein this first rinsing bowl is collection and uses the recirculated water after second rinsing bowl cleans to clean this organic electric-excitation luminescent displaying panel, and this organic electric-excitation luminescent displaying panel is after cleaning via first rinsing bowl earlier, to clean through second rinsing bowl again.
11. organic electroluminescent display panel developing apparatus as claimed in claim 10 is characterized in that, wherein this second washing unit is with this organic electric-excitation luminescent displaying panel of washed with de-ionized water.
12. organic electroluminescent display panel developing apparatus as claimed in claim 1 is characterized in that, wherein this delivery unit is a live roller.
13. organic electroluminescent display panel developing apparatus as claimed in claim 1 is characterized in that, wherein this developer solution is TMAH or NaOH.
14. organic electroluminescent display panel developing apparatus as claimed in claim 1 is characterized in that, wherein this air blow drying device is an air knife.
15. organic electroluminescent display panel developing apparatus as claimed in claim 1 is characterized in that, wherein this organic electric-excitation luminescent displaying panel surface has a photoresist layer or a polyimide.
16. an organic electric-excitation luminescent displaying panel developing method is to comprise following step:
(1) in a developing trough, a developer solution evenly is sprayed on this organic electric-excitation luminescent displaying panel surface and develops, and in this developing trough, this organic electric-excitation luminescent displaying panel is sent to the other end of this developing trough from an end of this developing trough with the constant speed rate;
(2) clean the organic electric-excitation luminescent displaying panel that this has been developed for the first time with water;
(3) clean the organic electric-excitation luminescent displaying panel that this has been cleaned for the first time for the second time with water; And
(4) with air scavenging or dry up this organic electric-excitation luminescent displaying panel;
Wherein cleaning the water that uses this first time is for cleaning the recirculated water that collect the back for the second time.
17. organic electric-excitation luminescent displaying panel developing method as claimed in claim 16 is characterized in that, wherein this organic electric-excitation luminescent displaying panel develops in this developing trough under certain developer temperatur.
18. organic electric-excitation luminescent displaying panel developing method as claimed in claim 17 is characterized in that, wherein this developing trough comprises that at least one developer solution flusher is with the organic electric-excitation luminescent displaying panel of this developer solution of even sprinkling in this transmission.
19. organic electric-excitation luminescent displaying panel developing method as claimed in claim 16 is characterised in that, wherein this organic electric-excitation luminescent displaying panel is to carry out air blow drying with air knife.
20. organic electric-excitation luminescent displaying panel developing method as claimed in claim 16 is characterized in that, wherein this organic electric-excitation luminescent displaying panel surface has a photoresist layer or a polyimide.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 02123218 CN1208693C (en) | 2002-06-13 | 2002-06-13 | Organic electroluminescent display panel developing apparatus and method thereof |
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| CN 02123218 CN1208693C (en) | 2002-06-13 | 2002-06-13 | Organic electroluminescent display panel developing apparatus and method thereof |
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| CN1464344A CN1464344A (en) | 2003-12-31 |
| CN1208693C true CN1208693C (en) | 2005-06-29 |
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| CN102036485B (en) * | 2010-09-30 | 2014-07-09 | 北大方正集团有限公司 | Spraying device and liquid medicine tank |
| CN103913959B (en) * | 2014-03-27 | 2017-09-26 | 京东方科技集团股份有限公司 | The stripping off device and stripping means of a kind of photoresist |
| CN103995441B (en) * | 2014-06-11 | 2019-05-31 | 深圳市华星光电技术有限公司 | Photoresistive striping process and optical resistance-stripping device |
| CN105116695B (en) * | 2015-10-15 | 2019-09-17 | 京东方科技集团股份有限公司 | Developing apparatus and lithographic equipment |
| CN107552254A (en) * | 2017-08-08 | 2018-01-09 | 武汉华星光电半导体显示技术有限公司 | A kind of developing apparatus and developing method |
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