CN101170056A - Etching device of organic EL display panel and its method - Google Patents
Etching device of organic EL display panel and its method Download PDFInfo
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- CN101170056A CN101170056A CNA2007101711068A CN200710171106A CN101170056A CN 101170056 A CN101170056 A CN 101170056A CN A2007101711068 A CNA2007101711068 A CN A2007101711068A CN 200710171106 A CN200710171106 A CN 200710171106A CN 101170056 A CN101170056 A CN 101170056A
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Abstract
The invention discloses organic electroluminescent display panel etching equipment and a method thereof and relates to display panel etching equipment technical field. The problem to be solved is structure simplification and cost reduction of the panel etching equipment. The display panel etching equipment includes a tape-out opening, a transition unit with an air knife arranged therein, a etching unit used to etch the base plate, a liquid cutting unit arranged on the air knife and used to blow down etching liquid, a rinse unit used to rinse the base plate and an air knife drying unit for cleaning the base plate from an input end to an output end of a base plate in turn. All units are connected by a roller delivery unit used to deliver the base plate. The invention is characterized in that: the etching unit is a cycle etching slot and the rinse unit is a cycle rinse slot. The invention has the advantages of simple structure, easy repair, low manufacture cost, reduced etching time and improved etching effect.
Description
Technical field
The present invention relates to electronic semi-conductor components and parts manufacturing technology field, a kind of specifically technology that is applicable to the etching machines and the correlation technique of organic electroluminescence panel.
Background technology
Organic elctroluminescent device (OLED) has plate thickness thin (less than 2mm), self-luminous as a big branch of flat-panel monitor, low operating voltage (3-10V), high brightness, high contrast, characteristics such as wide visual angle become a nuchal plane Display Technique that has potentiality.Organic elctroluminescent device has carried out the coml batch process in part producer, but because organic elctroluminescent device (OLED) is a newer demonstration field after all, still faces many difficulties and wait to overcome.The experiment line equipment of organic electroluminescence device research and development is still the necessary equipment that volume production producer and research institution are equipped with, and is mainly used in to develop new product and the improvement of properties of product.This experiment line equipment should have the control of certain identical flow process with volume production equipment, also will save fund input as much as possible.
Organic electroluminescence device generally is by last, and following two electrodes are formed with the organic material film with semiconductor property that is clipped in its centre, and anode wherein is the oxidation Indium tin (ITO) of electrically conducting transparent.In addition in order better to increase the switching performance of organic luminescent device and drive IC module, tend on the glass substrate that is coated with transparent conductive film (ITO) the better metal level of sputter last layer electric conductivity so that formation is coated with the electrode outlet line of metal.The formation of transparent ito anode and pixel region and metal electrode lead-out wire all are (photoresistances develop form optionally carry out etching again behind the figure finish) of realizing respectively by traditional wet method photoetching process in this manufacturing process.
At present, the etching machines that uses on the known experiment line often has two kinds of situations.Different etching baths of a kind of simple use and rinsing bowl carry out etching to ITO layer or surface metal-layer, must utilize staff to take out therebetween or the transmission substrate, and dry up, prolonged etching process greatly, and can't accurately control etching period, because human factor can't strict be controlled, in transport process, damage easily and stain in addition, can't ensure the quality of etching substrates.Another kind of situation is the size of volume production photoetching line to be dwindled the back use (substrate of volume production line is generally all very big) as the experiment line, the etching machines of volume production is in order to raise the efficiency, it must be continuous transmission base plate, and because the restriction of transmission speed, etching period must have 2-3 etched cavity (even more a plurality of) under certain situation, input substantially can be very big in this case, entire equipment is too complicated, be difficult for repairing, do not meet the simple high efficiency of experiment line, less investment is repaired easily, the requirement that flow process is short as far as possible.
Summary of the invention
At the defective that exists in the above-mentioned prior art, technical problem to be solved by this invention provides a kind of simple in structure, maintenance is easy, and low cost of manufacture can shorten etching period and the etching device of organic EL display panel and the method thereof that improve etch effect greatly.
In order to solve the problems of the technologies described above, a kind of etching device of organic EL display panel provided by the present invention, comprise input to output by substrate be followed successively by throw the sheet mouth, in be provided with air knife be used for isolated outside air and stop the excessive transition element of acid gas, be used for etching substrates the etching unit, be provided with liquid cut unit, the washing unit that is used to wash substrate that air knife is used to blow down etching solution, be used to dry up, the air knife drying unit of clean substrate, described each unit is connected by the roller delivery unit that is used to transport substrate; It is characterized in that described etching unit is a circulation etching bath, described washing unit is a circulation flushing groove.
Further, PLC control and encoder control are adopted in the control of the system of described roller delivery unit, and transmitting motor is the miniature gear reducing motor.
Further, the air knife of described air knife drying unit is by optoelectronic induction probe control opening and closing.
Further, the travelling gear and the major trough of described washing unit are separated by, and put its material selection high molecular polymer separately.
In order to solve the problems of the technologies described above the engraving method of a kind of organic EL display panel provided by the present invention:
1) substrate is sent into and is thrown the sheet mouth, and the glass substrate that to be about to one piece of surface of having developed be ITO is sent into the throwing sheet mouth of etching machine along direction of transfer;
2) substrate is sent into transition element (in have air knife can completely cut off outside air and stop the acid gas excessive);
3) substrate is sent into the etching unit, and the special-purpose etching solution (nitric acid and hydrochloric acid mixed solution) of nozzle ejection ITO carries out thoroughly comprehensively spray to the ITO surface, and the etching solution in treatment trough has been heated to suitable temperature;
4) next substrate has air knife to blow the etching solution on ITO surface off through the liquid cut unit, avoids the contaminant water washing trough;
5) substrate is sent into the washing unit, uses pure water that the ITO surface is washed herein, by adjusting the pressure of pure water spray, can better rinse out the acid solution on ITO surface;
6) clean the ito substrate finish at last by the air knife drying unit, the dried and clean air is blown to the upper and lower surface of glass substrate, dry up glass substrate, so far one piece of dry OLED that complete etched figure is arranged of cleaning flows out from piece mouth with ito substrate;
It is characterized in that, in described step 3), the transmission speed of regulating delivery unit is 1 meter/minute (can set up certain transmission speed on their own), according to the length of etching cell processing groove with the etching period of determining reciprocating number of times in the delivery unit circulation etching bath herein is set accurately, makes glass substrate reciprocating motion in the circular treatment groove of etching unit thoroughly finish etching; In described step 5), regulate delivery unit in this washing unit equally and make it be with substrate in the circulation flushing groove, to move reciprocatingly, can better wash the residual acid solution on ITO surface by the several circulation flushing.
Further, in described step 6), described air knife drying unit starts the air supply system of described air knife when photodetector is sensed the glass substrate process.
Utilize etching device of organic EL display panel provided by the invention and method thereof, owing in etching unit and washing unit, all adopt single circular treatment groove, reduced the quantity of treatment trough, improved the utilance of treatment trough, make the etching machines of display floater simple in structure, maintenance is easy, low cost of manufacture, and can shorten etching period greatly and improve etch effect.
Description of drawings
Fig. 1 is the experiment line Etaching device ideograph of the OLED display floater of embodiments of the invention.
Embodiment
Below in conjunction with description of drawings embodiments of the invention are described in further detail, but present embodiment is not limited to the present invention, every employing analog structure of the present invention and similar variation thereof all should be listed protection scope of the present invention in.
As shown in Figure 1, a kind of etching device of organic EL display panel that the embodiment of the invention provided, input to output by substrate is followed successively by throwing sheet mouth 1, in be provided with air knife and be used for isolated outside air and stop the excessive transition element 2 of acid gas, the etching unit 4 that is used for etching substrates, be provided with the liquid cut unit 5 that air knife is used to blow down etching solution, be used to wash the washing unit 6 of substrate, be used to dry up, the air knife drying unit 7 of clean substrate, described each unit is by roller delivery unit 3 connections that are used to transport substrate, PLC control and encoder control are adopted in system's control of roller delivery unit 3, and transmitting motor is the miniature gear reducing motor; It is characterized in that, described etching unit 4 is a circulation etching bath, described washing unit 6 is a circulation flushing groove, the air knife of described air knife drying unit 7 is by optoelectronic induction probe control opening and closing, the travelling gear and the major trough of described washing unit are separated by, put the material selection high molecular polymer of travelling gear separately.
In operating process, the OLED glass substrate input of needs being carried out etching has the experiment line of certain transmission speed with in the etching machines, substrate by short changeover portion after the unique etching bath of access arrangement, along continuous straight runs moves reciprocatingly in etching bath, finishes through the several cycles after etching, continue to be sent to rinsing bowl downwards, be that substrate cleans up, and continues to be sent to the air knife unit through after several reciprocating motions equally, bone dry glass surface under the air knife effect flows out at last.Its feature one: delivery unit is reciprocating motion in etching and pure water cleaning unit, is continuous transmission between unit and the unit.The transfer rate of delivery unit is stepless speed regulation, and can realize the commute motion at each processing unit, and can be provided with on control panel two-way time.Under the situation of determining transfer rate, the number of times that circulation is set can be controlled the time of etched time and pure water cleaning comparatively accurately.Its feature two: the optoelectronic induction probe is installed in the air knife unit, only the plenum system 8 that is sent to air knife under the situation of this unit at glass substrate just can start to begin to supply gas and dries up glass, can avoid glass substrate in etching bath and rinsing bowl delay, just to start air knife like this, save dry air.Its feature three: the travelling gear and the major trough of pure water cleaning unit are separated by, and put the material selection high molecular polymer separately.This is because the OLED device is very responsive to metallic, in case there is metallic to stain the short circuit that the ITO pixel portion just causes anode and cathode easily.
As shown in Figure 1, a kind of organic EL display panel engraving method that the embodiment of the invention provided is as follows, one piece of surface of having developed glass substrate that is ITO is sent into the throwing sheet mouth 1 of etching machine along direction of transfer A, send into transition element 2 (in have air knife can completely cut off outside air and stop the acid gas excessive), then substrate is admitted to etching unit 4, comprehensively spray is carried out thoroughly on 9 pairs of ITO surfaces of special-purpose etching solution (nitric acid and hydrochloric acid mixed solution) of nozzle ejection ITO, etching solution has been heated to suitable temperature in the circular treatment groove, the transmission speed of regulating delivery unit is 1 meter/minute, according to the length of etching unit with the etching period of determining reciprocating number of times in the delivery unit circular treatment groove herein is set accurately, makes glass substrate in this etching unit, thoroughly finish etching.Next substrate has air knife to blow the etching solution on ITO surface off through liquid cut unit 5, avoids the contaminant water washing trough.Then flow of substrates goes into to wash unit 6, uses pure water that the ITO surface is washed herein, by adjusting the pressure of pure water 10 sprays, can better rinse out the acid solution on ITO surface.Regulate delivery unit in this unit equally and make it be with substrate in the circulation flushing groove, to move reciprocatingly, can better wash the residual of ITO surface by the several circulation flushing.Clean the ito substrate that finishes at last and pass through air knife drying unit 7, the air supply system of air knife starts when photodetector is sensed the glass substrate process, the dried and clean air is blown to the upper and lower surface of glass substrate, dry up glass substrate, so far one piece of dry OLED that complete etched figure is arranged of cleaning flows out from piece mouth with ito substrate.
Claims (6)
1. etching device of organic EL display panel, by input to the output of substrate comprise successively throw the sheet mouth, in be provided with air knife transition element, be used for etching substrates the etching unit, be provided with liquid cut unit, the washing unit that is used to wash substrate that air knife is used to blow down etching solution, be used to dry up, the air knife drying unit of clean substrate, described each unit is connected by the roller delivery unit that is used to transport substrate; It is characterized in that described etching unit is a circulation etching bath, described washing unit is a circulation flushing groove.
2. etching device of organic EL display panel according to claim 1 is characterized in that, PLC control and encoder control are adopted in system's control of described roller delivery unit, and transmitting motor is the gear reduction motor.
3. etching device of organic EL display panel according to claim 1 is characterized in that, the air knife of described air knife drying unit is by optoelectronic induction probe control opening and closing.
4. etching device of organic EL display panel according to claim 1 is characterized in that, the travelling gear and the major trough of described washing unit are separated by, and puts its material selection high molecular polymer separately.
5. the engraving method of the described etching device of organic EL display panel of claim 1, step comprises:
1) substrate is sent into and is thrown the sheet mouth;
2) substrate is sent into the transition element that is provided with air knife;
3) substrate is sent into the etching unit, and the etching solution of nozzle ejection ITO carries out thoroughly comprehensively spray to the ITO surface, and the etching solution in the heat treated groove;
4) substrate has air knife to blow the etching solution on ITO surface off through the liquid cut unit;
5) substrate is sent into the washing unit, uses pure water that the ITO surface is washed;
6) cleaning the ito substrate that finishes dries up by the air knife drying unit;
It is characterized in that, in described step 3), delivery unit is set makes glass substrate reciprocating motion in the circular treatment groove of etching unit also thoroughly finish etching;
In described step 5), regulate delivery unit it is moved reciprocatingly in the circulation flushing groove of washing unit with substrate, to wash the residual acid solution on ITO surface.
6. the engraving method of organic EL display panel according to claim 5 is characterized in that, in described step 6), described air knife drying unit starts the air supply system of described air knife when photodetector is sensed the glass substrate process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101711068A CN101170056A (en) | 2007-11-28 | 2007-11-28 | Etching device of organic EL display panel and its method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101711068A CN101170056A (en) | 2007-11-28 | 2007-11-28 | Etching device of organic EL display panel and its method |
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| CN101170056A true CN101170056A (en) | 2008-04-30 |
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| CNA2007101711068A Pending CN101170056A (en) | 2007-11-28 | 2007-11-28 | Etching device of organic EL display panel and its method |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102185118A (en) * | 2011-04-02 | 2011-09-14 | 东莞宏威数码机械有限公司 | Organic light emitting diode (OLED) glass substrate cleaning system and cleaning method thereof |
| CN102185119A (en) * | 2011-04-02 | 2011-09-14 | 东莞宏威数码机械有限公司 | Organic light emitting diode (OLED) glass substrate cleaning equipment and cleaning method |
| CN103021811A (en) * | 2012-12-03 | 2013-04-03 | 彩虹（佛山）平板显示有限公司 | Wet etching process |
| CN103731996A (en) * | 2013-12-30 | 2014-04-16 | 天津市德中技术发展有限公司 | Etching method and device for workpiece conducting reciprocating motion in etching region |
| CN104051311A (en) * | 2014-07-08 | 2014-09-17 | 深圳市华星光电技术有限公司 | Base plate conveying device and strong acid or strong base etching process suitable for wet process |
| CN106186712A (en) * | 2016-07-14 | 2016-12-07 | 成都工投电子设备有限公司 | Top-jet-type spray etching machine |
| CN106931759A (en) * | 2017-05-09 | 2017-07-07 | 南京中电熊猫液晶材料科技有限公司 | Cleaning machine exports glass substrate drying unit |
| WO2018113150A1 (en) * | 2016-12-20 | 2018-06-28 | 惠科股份有限公司 | Panel processing device |
| CN109659261A (en) * | 2018-12-19 | 2019-04-19 | 武汉华星光电半导体显示技术有限公司 | Substrate etch equipment and its processing system |
| CN111491457A (en) * | 2020-04-21 | 2020-08-04 | 景德镇市宏亿电子科技有限公司 | Etching device for PCB |
| CN114798648A (en) * | 2022-03-10 | 2022-07-29 | 深圳市卓尔航科技有限公司 | Etching demolding cleaning machine for cleaning LCD glass |
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2007
- 2007-11-28 CN CNA2007101711068A patent/CN101170056A/en active Pending
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102185118A (en) * | 2011-04-02 | 2011-09-14 | 东莞宏威数码机械有限公司 | Organic light emitting diode (OLED) glass substrate cleaning system and cleaning method thereof |
| CN102185119A (en) * | 2011-04-02 | 2011-09-14 | 东莞宏威数码机械有限公司 | Organic light emitting diode (OLED) glass substrate cleaning equipment and cleaning method |
| CN102185119B (en) * | 2011-04-02 | 2013-04-10 | 东莞宏威数码机械有限公司 | Organic light emitting diode (OLED) glass substrate cleaning equipment and cleaning method |
| CN102185118B (en) * | 2011-04-02 | 2013-05-22 | 东莞宏威数码机械有限公司 | Organic light emitting diode (OLED) glass substrate cleaning system and cleaning method thereof |
| CN103021811A (en) * | 2012-12-03 | 2013-04-03 | 彩虹（佛山）平板显示有限公司 | Wet etching process |
| CN103731996A (en) * | 2013-12-30 | 2014-04-16 | 天津市德中技术发展有限公司 | Etching method and device for workpiece conducting reciprocating motion in etching region |
| US9474165B2 (en) | 2014-07-08 | 2016-10-18 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Substrate delivery device and strong acid or strong base etching adequate for wet process |
| WO2016004666A1 (en) * | 2014-07-08 | 2016-01-14 | 深圳市华星光电技术有限公司 | Substrate conveying device and strong acid or base etching process applicable for wet process |
| CN104051311A (en) * | 2014-07-08 | 2014-09-17 | 深圳市华星光电技术有限公司 | Base plate conveying device and strong acid or strong base etching process suitable for wet process |
| CN104051311B (en) * | 2014-07-08 | 2017-06-09 | 深圳市华星光电技术有限公司 | Base plate transfer device and the strong acid suitable for wet process or highly basic etching technics |
| CN106186712A (en) * | 2016-07-14 | 2016-12-07 | 成都工投电子设备有限公司 | Top-jet-type spray etching machine |
| WO2018113150A1 (en) * | 2016-12-20 | 2018-06-28 | 惠科股份有限公司 | Panel processing device |
| CN106931759A (en) * | 2017-05-09 | 2017-07-07 | 南京中电熊猫液晶材料科技有限公司 | Cleaning machine exports glass substrate drying unit |
| CN109659261A (en) * | 2018-12-19 | 2019-04-19 | 武汉华星光电半导体显示技术有限公司 | Substrate etch equipment and its processing system |
| CN111491457A (en) * | 2020-04-21 | 2020-08-04 | 景德镇市宏亿电子科技有限公司 | Etching device for PCB |
| CN114798648A (en) * | 2022-03-10 | 2022-07-29 | 深圳市卓尔航科技有限公司 | Etching demolding cleaning machine for cleaning LCD glass |
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Open date: 20080430 |