CN1198954C

CN1198954C - Clamp of contactless fixture mode for cavity surface evaporating coating of semiconductor laser

Info

Publication number: CN1198954C
Application number: CN 02151295
Authority: CN
Inventors: 吴根柱; 齐鸣; 李爱珍; 张永刚
Original assignee: Shanghai Institute of Microsystem and Information Technology of CAS
Current assignee: Shanghai Institute of Microsystem and Information Technology of CAS
Priority date: 2002-12-13
Filing date: 2002-12-13
Publication date: 2005-04-27
Anticipated expiration: 2022-12-13
Also published as: CN1422978A

Abstract

The present invention relates to a non-contact fixed clamp used for the vapor deposition of the cavity surface of a semiconductor laser. The present invention is characterized in that the clamp adopts a non-contact fixed mode and avoids mechanical damage. The clamp is made of a stainless steel plate on which a plurality of slits are formed, the widths of the slits are from 0.15 to 0.25mm, and the intervals of the slits are from 2 to 3mm. When the clamp is used, a cleavage strip can be fixed only by putting the cleavage strip in the slit. Because the width of the slit is bigger than the thickness of the cleavage strip and is smaller than the width of the cleavage strip, and meanwhile the method that a grid is arranged under the stainless steel plate is adopted, the cleavage strip can be prevented from falling down from the slit. Therefore, the cleavage strip put in the slit is always in an upright state, and the end surface of the cleavage strip keeps horizontal and downward. Because the clamp is provided with a plurality of slits, a plurality of cleavage strips can be simultaneously assembled on the clamp, and the assembly process and the disassembly process of the cleavage strips are very easy. Additionally, vapor deposition for two cavity surfaces is also convenient to implement. The non-contact fixed clamp provided by the present invention has the advantages of simple structure, simple and convenient operation, high safety and reliability, low processing cost and long service life, and is suitable for mass production.

Description

A kind of anchor clamps that are used for the noncontact fixed form of films on cavity surfaces of semiconductor lasers evaporation

Technical field

The present invention relates to a kind of special fixtures that is used for plating films on cavity surfaces of semiconductor lasers, or rather, the invention provides a kind of coating clamp that is used for fixing the noncontact fixed form of semiconductor laser chip cleavage bar, belong to semiconductor laser Technology field.

Background technology

Since semiconductor laser in 1962 comes out, little with its volume, in light weight, the power height, the life-span is long, and is easy to use and gain great popularity.Semiconductor laser forms the resonator cavity of laser apparatus because of himself cleavage surface, the reflectivity of cleavage surface only about 30%, and projection ratio nearly 70%, thus the laser that device produces has 2/3rds to slattern from rear facet because of projection.For this reason, the normal laser cavity surface coating technique that adopts in device technology, i.e. rear facet evaporation highly reflecting films make the total reflection of trying one's best of light on the rear facet; Front facet evaporation antireflective coating makes the complete as far as possible projection of light on the front facet, thereby further improves laser output power, reduces threshold current, improves device performance.Owing to single semiconductor laser tube core small-sized (being generally 400 μ m * 300 μ m * 100 μ m), in the laser cavity surface coating process, generally take the form of cleavage bar.As shown in Figure 1, cleavage bar very thin thickness (being generally about 100 μ m), width (being that the chamber is long) very narrow again (being generally 200 μ m～800 μ m), (be generally 1cm～3cm) and length is long, so rigidity is very little, very easily fractureed, but the also necessary maintenance level of end face, and can not stain, in the face evaporate process of chamber, need to make accurately fixing cleavage bar of a special-purpose specimen holder for this reason.Yet, this special-purpose specimen holder that uses in the present laboratory at home and abroad, major part is design voluntarily all, though the form that specimen holder adopted has nothing in common with each other, but a common ground is all arranged, and that is exactly to fix it to the external force that the cleavage bar itself applies a certain size, as shown in Figure 2.And this dependence applies the fixing means of external force, finds by a large amount of experiments, has a lot of inevitably shortcomings.At first because cleavage bar hardness is very little,, must produce more or less stress and physical abuse to it no matter how to apply the power of appropriateness; Next is because this fixing means needs accurately to control the size that applies external force, so the structure of anchor clamps and operation are very complicated, and unreliable; In addition, if there is small thickness difference (being generally 1%～10%) between the cleavage bar, then can not fixes many cleavage bars simultaneously on anchor clamps, thereby be difficult to satisfy batch production requirements.

Summary of the invention

For the incompatibility batch production requirements that exists on the structure that overcomes existing anchor clamps and the shortcoming of complicated operation, it is more reasonable that the present invention has designed a kind of structure, operate easy again plating films on cavity surfaces of semiconductor lasers anchor clamps, further the existing laser cavity surface coating process of standard.Round do not apply external force as far as possible to sample, do not damage the purpose of end face again, we have designed a kind of coating clamp of noncontact fixed form.These anchor clamps are 0.15mm～0.25mm by width, and spacing is that many slits of 2mm～3mm constitute.Slit bar number is by the decision of stainless steel plate size, and slit length and stainless steel plate size are determined by needs fixed cleavage bar length.According to the difference that filming equipment requires, stainless steel plate can be taked different shapes, generally is circular or square.Because slit width is bigger than cleavage bar thickness, the endways cleavage bar of putting into is certain to fall down in the slit, has fixed several Stainless Steel Wires that diameter is very thin below slit for this reason, relies on its holding power to fix the cleavage bar.Obviously, a cleavage bar needs the support of two Stainless Steel Wires at least, between the used Stainless Steel Wire diameter 0.05-0.10mm.The fixing means of Stainless Steel Wire is also very simple, earlier on the slit edge of an end on the stainless steel plate, it is tightened, again the other end on the other end edge of slit, as long as assurance is close to below the slit it.Because the diameter of Stainless Steel Wire is little compared with the laser cavity surface width, the steel wire area occupied of making grid below is also few, thus during evaporation shield portions seldom, during use as long as the cleavage bar is thrown away in slit one by one according to vertical direction.Because slit width is littler than the width (being that the chamber is long) of cleavage bar, the cleavage bar always is positioned at upright state in slit, thereby has guaranteed that cleavage bar end face (being the chamber face) remains level state down.In anchor clamps, adorned after all samples, anchor clamps have been fixed on the evaporation source along horizontal direction, just can carry out evaporation a chamber face of laser apparatus.Steamed after the chamber face, the evaporation of another chamber face also carries out easily, and using the same method is fixed on several Stainless Steel Wires above the slit, and the anchor clamps that sample is housed are turned around installation, can finish the position transposing of two chamber faces.

As mentioned above, owing in whole assembling process, sample is not applied any external force, anchor clamps provided by the invention have the following advantages:

1. do not damage sample (being the cleavage bar) surface, do not stain the sample end face again.

2. shelve simply, structure is uncomplicated, handling ease.

3. the sample fitted capacity is big, and sample size is unrestricted, is fit to very much production application.

4. safe and reliable, be not easy to damage long service life.

5. can use chemical solution cleans, guarantee indeformablely, not corrode.

Description of drawings

Fig. 1 is a cleavage bar synoptic diagram.

Fig. 2 is the cavity surface film coating anchor clamps that use at present.

Fig. 3 is cavity surface film coating anchor clamps provided by the invention.

Among the figure:

1-wants two chamber faces of evaporation, two power-on and power-off pole-faces of 2-, and 3-cleavage bar, the 4-metal strip,

The 5-slit, the 6-stainless steel plate, the 7-Stainless Steel Wire, the 8-Stainless Steel Wire is around point.

Embodiment

Suppose four inches laser apparatus extension chips, and it separates a lot of cleavage strips that coelosis length is 250 μ m along the cleavage surface steering handle with scribing machine.For this reason,, designed a kind of cavity surface film coating anchor clamps, utilized these anchor clamps just can finish the cavity surface film coating of whole cleavage bars several times according to above-mentioned conception.As shown in Figure 3, these anchor clamps are that to leave width on the Φ 100mm stainless steel plectane of 2mm be 0.18mm by thickness, and spacing is that a lot of slits of 3mm are made.During use 4～5 Φ 0.08mm Stainless Steel Wires, according to cleavage bar length, adjust its spacing, be bundled in below the slit, put the cleavage bar in the slit one by one with tweezers, and a slit is filled up, prevent that effectively the cleavage bar from sliding and falling down along being parallel to slit direction, guarantees that simultaneously each cleavage bar is on two point of suppon. as far as possibleFill in the anchor clamps after the cleavage bar, use the same method, 4～5 Φ 0.08mm Stainless Steel Wires are bundled in above the slit, prevent that the cleavage bar from missing above slit.Plated after the one side, anchor clamps are turned around installation, the plated film of another chamber face can be carried out down in the other end that makes the cleavage bar.After all having plated untie Stainless Steel Wire on the two sides, just is easy to a cleavage bar in the anchor clamps and unloads down.

Claims

1, a kind of anchor clamps that are used for the noncontact fixed form of films on cavity surfaces of semiconductor lasers evaporation is characterized in that:

(1) anchor clamps are 0.15mm-0.25mm by width, and spacing is that many slits of 2mm-3mm constitute, and slit bar number is by the decision of stainless steel plate size, and slit length and stainless steel plate size are determined by needs fixed cleavage bar length;

(2) have at least two fixed Stainless Steel Wires to support below each slit, thereby form grid.

2,, it is characterized in that described stainless steel plate is circular or square by the described anchor clamps that are used for the noncontact fixed form of films on cavity surfaces of semiconductor lasers evaporation of claim 1.

3,, it is characterized in that fixing is 0.05-0.10mm with the Stainless Steel Wire diameter by the described anchor clamps that are used for the noncontact fixed form of films on cavity surfaces of semiconductor lasers evaporation of claim 1.

4, by claim 1 or the 3 described anchor clamps that are used for the noncontact fixed form of films on cavity surfaces of semiconductor lasers evaporation, what it is characterized in that Stainless Steel Wire fixedly is earlier tightening on the slit edge of an end on the stainless steel plate, again the other end on the other end edge of slit, be close to slit below.

5, by the described anchor clamps that are used for the noncontact fixed form of films on cavity surfaces of semiconductor lasers evaporation of claim 1, it is characterized in that slit width greater than cleavage bar thickness the width less than the cleavage bar.