CN119522636A - 半导体装置及半导体装置的制造方法 - Google Patents

半导体装置及半导体装置的制造方法 Download PDF

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Publication number
CN119522636A
CN119522636A CN202380050510.7A CN202380050510A CN119522636A CN 119522636 A CN119522636 A CN 119522636A CN 202380050510 A CN202380050510 A CN 202380050510A CN 119522636 A CN119522636 A CN 119522636A
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CN
China
Prior art keywords
region
semiconductor layer
semiconductor device
semiconductor
type semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380050510.7A
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English (en)
Chinese (zh)
Inventor
松原佑典
冲川满
安藤裕之
四户孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Flosfia Inc
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Flosfia Inc
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Filing date
Publication date
Application filed by Flosfia Inc filed Critical Flosfia Inc
Publication of CN119522636A publication Critical patent/CN119522636A/zh
Pending legal-status Critical Current

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • H10D8/60Schottky-barrier diodes 
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/64Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66Vertical DMOS [VDMOS] FETs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/50Physical imperfections
    • H10D62/53Physical imperfections the imperfections being within the semiconductor body 
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/875Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being semiconductor metal oxide, e.g. InGaZnO
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • H10D8/01Manufacture or treatment
    • H10D8/051Manufacture or treatment of Schottky diodes

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
CN202380050510.7A 2022-06-29 2023-06-29 半导体装置及半导体装置的制造方法 Pending CN119522636A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022105187 2022-06-29
JP2022-105187 2022-06-29
PCT/JP2023/024229 WO2024005153A1 (ja) 2022-06-29 2023-06-29 半導体装置および半導体装置の製造方法

Publications (1)

Publication Number Publication Date
CN119522636A true CN119522636A (zh) 2025-02-25

Family

ID=89382458

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380050510.7A Pending CN119522636A (zh) 2022-06-29 2023-06-29 半导体装置及半导体装置的制造方法

Country Status (4)

Country Link
US (1) US20250133757A1 (https=)
JP (1) JPWO2024005153A1 (https=)
CN (1) CN119522636A (https=)
WO (1) WO2024005153A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025158572A1 (ja) * 2024-01-24 2025-07-31 三菱電機株式会社 半導体装置および半導体装置の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021144851A1 (ja) * 2020-01-14 2021-07-22 三菱電機株式会社 ショットキーバリアダイオード
JP2022030646A (ja) * 2020-08-07 2022-02-18 株式会社Flosfia 酸化物半導体及び酸化物半導体を含む半導体装置
JPWO2022030647A1 (https=) * 2020-08-07 2022-02-10
JP7634813B2 (ja) * 2020-10-23 2025-02-25 株式会社Flosfia 半導体装置

Also Published As

Publication number Publication date
JPWO2024005153A1 (https=) 2024-01-04
US20250133757A1 (en) 2025-04-24
WO2024005153A1 (ja) 2024-01-04

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