CN1194380A - Optical scanning rotary lens for compensating error - Google Patents

Optical scanning rotary lens for compensating error Download PDF

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Publication number
CN1194380A
CN1194380A CN97101473A CN97101473A CN1194380A CN 1194380 A CN1194380 A CN 1194380A CN 97101473 A CN97101473 A CN 97101473A CN 97101473 A CN97101473 A CN 97101473A CN 1194380 A CN1194380 A CN 1194380A
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CN
China
Prior art keywords
pentaprism
optical scanning
wedge
optical
double
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Granted
Application number
CN97101473A
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Chinese (zh)
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CN1054689C (en
Inventor
国春生
孙太东
杜温锡
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Priority to CN 97101473 priority Critical patent/CN1054689C/en
Publication of CN1194380A publication Critical patent/CN1194380A/en
Application granted granted Critical
Publication of CN1054689C publication Critical patent/CN1054689C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The optical scanning rotary lens is one optical scan assembly comprising optical wedge and double pentaprism. In the incident direction of the double pentaprism, is set one small angle optical wedge, which has area larger than clear aperture and can rotate minus or plus 360 deg. around the shaft of double pentaprism relatively to the double pentaprism. Regulating the optical wedge can eliminate position error of optical scanning lines caused by the miniature angle error existing in the double pentaprism, raise position precision of optical scanning lines. The said optical scanning rotary lens may be widely used in various precise optical scanning instruments.

Description

The optical scanning tilting mirror of compensating error
The invention belongs to the optical scanning tilting mirror of a kind of compensate for optical scanning errors in the optical scanning imaging device field, is a kind of optic scanning, can be used for various high-precision optical scanners.
Before the present invention, the optical scanning system of rotary mirror type laser photocomposing machine, its tilting mirror adopts optics pentaprism group more, the pentaprism group generally is made up of two pentaprisms, these two pentaprisms are rotation center with same turning axle all, and the plane of incidence of each pentaprism is vertical with turning axle, and should satisfy incident light and emergent light on same plane, simultaneously, emergent light is at the same side of two pentaprism groups scanning imagery.
The prior art the most approaching with the present invention is the utility model patent (title: laser rotary mirror type optical scanning system optics tilting mirror, application number: 91208483.9, the applying date: 910518) of Changchun Inst. of Optics and Fine Mechanics, Chinese Academy of Sciences's application in 1991, as shown in Figure 1, the major defect that it exists is: owing to have small differential seat angle between two pentaprisms in process, influence the positional precision of optical scanning line, thereby influence high-precision optical scanning effect.
In order to overcome above-mentioned shortcoming, the objective of the invention is to improve the positional precision of optical scanning line, to satisfy the requirement of high-precision optical scanning.
Detailed content of the present invention is as shown in Figure 2: the optical scanning tilting mirror of compensating error, form by two pentaprism groups 2 of wedge 1, two pentaprism combinations.Incident light direction in two pentaprism groups 2, place a low-angle wedge 1, the area of wedge 1 is greater than clear aperature, can do ± 360 ° rotation with respect to two pentaprism groups 2 around the turning axle of two pentaprism groups 2, regulate the rotation of wedge 1, after the influence of eliminating the optical scanning line positional precision, wedge 1 and two pentaprism group 2 are fixed as one, there is not relative motion between them.
The plane of incidence of wedge 1 is parallel with the plane of incidence of two pentaprism groups 2 and perpendicular to optical axis, the distance between them is not strict with, and determines according to the locus of optical scanning system in instrument.
Principle foundation of the present invention: because the influence of machining precision, make between two pentaprisms and exist small angular error, light makes emergent light separately after through the reflections propagate in two pentaprism groups, thereby influenced the positional precision of sweep trace, can not satisfy the requirement of high-precision optical scanning.For this reason, incident light direction in two pentaprism groups, place a low-angle wedge, the angle of wedge is α, make the angle of the emergent ray of two pentaprisms increase or reduce an identical angle δ respectively, by regulating the rotation of wedge, the angle interest that changes between the emergent ray that the δ angle reaches two pentaprism groups is bordering on zero, so just can further improve the positional precision of optical scanning line, can satisfy the requirement of high-precision optical scanning system.
Good effect of the present invention: can eliminate because the positional precision error of the optical scanning line that the minute angle error that exists between two pentaprism is caused, improved the positional precision of optical scanning line widely, the optical scanning tilting mirror of this compensating error can be widely used in the various high-precision optical scanners.
Description of drawings: Fig. 1 is the structural representation of prior art, and Fig. 2 is a structural representation of the present invention, and Figure of abstract adopts Fig. 2.
Most preferred embodiment: adopt structure shown in Figure 2, wedge 1 places incident ray one side of two pentaprism groups 2, and both are fixed into an integral body, as optic scanning, are used for various high-precision optical scanning systems.

Claims (2)

1, the optical scanning tilting mirror of compensating error, form by the pentaprism group, it is characterized in that incident light direction in two pentaprism groups 2, place a low-angle wedge 1, the area of wedge 1 can be done ± 360 ° rotation with respect to two pentaprism groups 2 around the turning axle of two pentaprism groups 2 greater than clear aperature, regulate the rotation of wedge 1, after the influence of eliminating the optical scanning line positional precision, wedge 1 and two pentaprism group 2 are fixed as one, there is not relative motion between them.
2, press the optical scanning tilting mirror of the described compensating error of claim 1, the plane of incidence that it is characterized in that wedge 1 is parallel with the plane of incidence of two pentaprism groups 2 and perpendicular to optical axis, distance between them is not strict with, and determines according to the locus of optical scanning tilting mirror in instrument.
CN 97101473 1997-03-25 1997-03-25 Optical scanning rotary lens for compensating error Expired - Fee Related CN1054689C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 97101473 CN1054689C (en) 1997-03-25 1997-03-25 Optical scanning rotary lens for compensating error

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 97101473 CN1054689C (en) 1997-03-25 1997-03-25 Optical scanning rotary lens for compensating error

Publications (2)

Publication Number Publication Date
CN1194380A true CN1194380A (en) 1998-09-30
CN1054689C CN1054689C (en) 2000-07-19

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Application Number Title Priority Date Filing Date
CN 97101473 Expired - Fee Related CN1054689C (en) 1997-03-25 1997-03-25 Optical scanning rotary lens for compensating error

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CN (1) CN1054689C (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102062942A (en) * 2010-12-15 2011-05-18 同济大学 Deflecting optical wedge scanning device
CN109683344A (en) * 2019-01-24 2019-04-26 中国科学院西安光学精密机械研究所 Light supply apparatus and its building method for the vertical assembling & adjusting system of X-ray focusing mirror
CN113031003A (en) * 2021-03-29 2021-06-25 哈尔滨工业大学 Panoramic optical system, panoramic scanning system and imaging system based on MEMS (micro-electromechanical systems) micro-mirror
CN115236868A (en) * 2022-09-22 2022-10-25 长春理工大学 High-resolution optical axis adjusting device and high-resolution optical axis adjusting method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102062942A (en) * 2010-12-15 2011-05-18 同济大学 Deflecting optical wedge scanning device
CN102062942B (en) * 2010-12-15 2012-02-29 同济大学 Deflecting optical wedge scanning device
CN109683344A (en) * 2019-01-24 2019-04-26 中国科学院西安光学精密机械研究所 Light supply apparatus and its building method for the vertical assembling & adjusting system of X-ray focusing mirror
CN109683344B (en) * 2019-01-24 2023-10-03 中国科学院西安光学精密机械研究所 Light source device for X-ray focusing mirror vertical adjustment system and construction method thereof
CN113031003A (en) * 2021-03-29 2021-06-25 哈尔滨工业大学 Panoramic optical system, panoramic scanning system and imaging system based on MEMS (micro-electromechanical systems) micro-mirror
CN115236868A (en) * 2022-09-22 2022-10-25 长春理工大学 High-resolution optical axis adjusting device and high-resolution optical axis adjusting method
CN115236868B (en) * 2022-09-22 2022-11-29 长春理工大学 High-resolution optical axis adjusting device and high-resolution optical axis adjusting method

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Publication number Publication date
CN1054689C (en) 2000-07-19

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