CN1192207C - Method and device for non-destructive inspection of objects by means of optical holographic interferometry measurement technology - Google Patents

Method and device for non-destructive inspection of objects by means of optical holographic interferometry measurement technology Download PDF

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Publication number
CN1192207C
CN1192207C CN 00818014 CN00818014A CN1192207C CN 1192207 C CN1192207 C CN 1192207C CN 00818014 CN00818014 CN 00818014 CN 00818014 A CN00818014 A CN 00818014A CN 1192207 C CN1192207 C CN 1192207C
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inspection area
holoscope
recording medium
light source
light
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CN 00818014
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CN1415067A (en
Inventor
J·P·菲耶尔斯塔
I·E·菲耶尔斯塔
L·M·罗巴洛夫
V·A·皮夫托拉克
N·G·库夫辛斯基
N·A·达维登科
V·P·库斯尼鲁克
P·D·克罗藤科
V·A·帕夫洛夫
G·I·特卡楚克
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FLAUS HOLOTECH AS
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FLAUS HOLOTECH AS
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Priority claimed from NO995311A external-priority patent/NO995311D0/en
Application filed by FLAUS HOLOTECH AS filed Critical FLAUS HOLOTECH AS
Publication of CN1415067A publication Critical patent/CN1415067A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/16Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
    • G01B11/164Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by holographic interferometry

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Holo Graphy (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

This invention relates to a method and device for non-destructive inspection by means of holographic interferometry of details, machine units, mechanisms, and various materials, which eliminates the problem of relative displacement of the object with regard to the holographic equipment, especially due to vibratory motion of the object. This is achieved by transporting the reference and object beams between the investigated object, light source, and interferometer in flexible wave guidance cables and that the endpoints of the flexible wave guidance cables are securely attached in a fixed distance from the investigated object, recording medium of the interferometer and light source, respectively. This will also give the benefit of dividing the holographic interferometer into an object part and a registering part which forms the interferograms. Thus it becomes possible to perform measurements on objects in situ under any weather condition while the sensitive recording equipment of the holographic interferometer can be operated in a distant protected location.

Description

Adopt the non-destructive inspection of objects method and the device of means of optical holographic interferometry measurement technology
Technical field
The present invention relates to adopt the holographic photography interferometry to thin portion, element part, mechanical hook-up and various material harmless inspecting method and device, it can reduce during the measurement the requirement of vibration proof protection greatly and can implement at the scene to measure in the real-time ratio of different objects under any weather condition.
Background technology
Means of optical holographic interferometry measurement technology makes implements nondestructive inspection (NDI) judging finally existing of inherent vice to the integral body of machine and device and parts (unit), and even the stress of object and the measurement of the unrelieved stress that causes because of industrial processes such as welding, forging, solders become possibility during the object operating load.These are measured for such as fields such as offshore oil industry, shipbuilding industry, process industry, airplane industries, and to causing all types of structures of losing efficacy all useful because of loading stress and unrelieved stress.
The principle that adopts means of optical holographic interferometry measurement technology that nondestructive inspection (NDI) is carried out in a certain zone of object can be explained like this: at first, when object is in the initial stress state that does not load, with want the hologram image of inspection area under record (register) medium recording on this object and develop (about the description with holographic photography interferometer recording holographic image can be seen in, the applicant's Norwegian patent applications 20002948 for example, it is for referencial use in these receipts).Then, the inspection area of this object of slight modification can be realized by applying certain type carriers; For example, stretch, compression, crooked, reverse, heat and these one or more combinations etc. on.Loading should make stress concentrate on the position at final defective place.Subsequently, be loaded with the recording medium of holographic developed image and the irradiation that this object is accepted coherent light simultaneously.As a result, load preceding two kinds of light waves and will side by side be presented on the recording medium back with loading back inspection area scattering.These light waves will interfere with each other, and form the interferogram that comprises one group of striped.When adding display through recording medium observation interferogram with for example (f.eks) naked eyes or with object lens, it presents one group of striped on the inspection area that covers loading duration.In addition, has the existence in zone of unusual striped characteristic then corresponding to the existence of defective in this object.So, rely on this technology, just might disclose various types of defects, as crackle, agglomerate, lack of penetration, hole, cavity, eyelet etc.
Also can adopt this kind technology to determine the loading stress and the unrelieved stress of this object inspection area.For example, determining under the situation of unrelieved stress, writing down and the hologram image of this zone original state of developing, implementing the release of unrelieved stress then in a sub-district of inspection area.The release of this unrelieved stress causes discharging near the distortion under the unrelieved stress effect stressed zone, measures the normal component value of the surface displacement of this area edge then, because its direct ratio is in residual-stress value.Then, the recording medium that is loaded with the hologram image that develops of inspection area original state is side by side accepted the coherent light irradiation with the inspection area that has the district that discharges unrelieved stress.This irradiation forms a kind of interferogram, is at first determined the surface displacement normal component of the marginarium that has discharged stress by this figure.At last, calculate the size of unrelieved stress with this measured value.This program is to have done thorough illustrating by the applicant in Norway application 19995312 (for referencial use in these receipts).
There are some shortcomings in the method for hitherto known holographic photography interferometry, hampers the popularization that this technology is used always:
1) influence that the process that record that must the strict protection hologram image and interferogram form is not vibrated.In other words, guarantee a kind of inspection area, laser instrument, interferometer components and recording medium state of any relative motion each other of getting rid of.Interrelating therewith, for example may be following situation; Space carrier frequency is generally between the order of magnitude of 1000~2000mm-1, so, one of each ingredient above-mentioned just will cause the conoscope image of hologram image to be difficult to identification (crab), thereby it is impossible that record is become if little relative displacement to 0.5~1 μ m occurs.
2) be under the situation of amorphous molecular semiconductor film (AMS-film) at recording medium, the record of hologram image and development should be carried out under such as indoor comfort conditions, to satisfy the requirement of recording medium to humidity and temperature sensitivity.The AMS-film will be accepted the Electrostatic Treatment of filling of corona discharge before carrying out the hologram image record.This is lower than under 0 ℃ of condition in high humidity environment or temperature is impossible.Moreover why the hologram image high quality record is unable to handle with being developed under high humility and the low temperature, also because surface relaxation can take place the variable part of electrostatic latent image.Also have, under this kind condition, it is also impossible to reach during the development the best rate of heat addition of AMS-film.
3) the holographic photography interferometry once obtained partly overcoming by the structure to device to the unusual responsive of relative displacement between each element of device, that is, all elements above-mentioned and inspected object are rigidly fixed on the same pedestal.As if yet this kind device is not suitable for the object of vibration easily.This part ground is because the number of the assembly that need fix rigidly each other is bigger, simultaneously partly because due to the restriction of the shape and size of object.Some object only is because excessive and overweight, just can't put on common base.In addition, such device does not allow object is carried out site inspection.
Goal of the invention
Fundamental purpose of the present invention provides a kind of apparatus and method that adopt means of optical holographic interferometry measurement technology that object is carried out nondestructive inspection (NDI) in real-time ratio, and they have overcome various shortcoming above-mentioned.
Another object of the present invention provides a kind of apparatus and method that adopt real-time optical holographic photography interferometry object to be carried out nondestructive inspection (NDI), it makes to the loading and be radiated at field conduct with coherent light and become possibility of object inspection area, and carry out in another place that is formed on of the record of hologram image and development and interferogram.
Another object of the present invention provides a kind of apparatus and method that adopt real-time optical holographic photography interferometry that object is carried out nondestructive inspection (NDI), during it reduces hologram image record and development and interferogram greatly and forms to the requirement of vibration protection.
The present invention also aims to provide a kind of apparatus and method that adopt real-time optical holographic photography interferometry at the scene object to be implemented nondestructive inspection (NDI).
The accompanying drawing summary
Fig. 1 shows the preferred embodiment of holographic photography interferometer of the present invention and checks clamping that the joint of two welding semicanals through loading is by bending used and the example of charger.
Fig. 2 shows the zoomed-in view of object element shown in Figure 1.
Fig. 3 shows the zoomed-in view of holoscope shown in Figure 1.
Fig. 4 is from the interferogram photo that is subjected to diastrophic 12mm diameter titanium pipe welded seam area.
Summary of the invention
Purpose of the present invention can be by disclosed dress in claims and the explanation given below Put with method and realize.
The invention still further relates to and adopt means of optical holographic interferometry measurement technology in real-time ratio object to be examined Look into the zone and carry out the method for nondestructive inspection (NDI), it is characterized in that, the record of holographic picture and develop with And the formation of the conoscope image of object inspection area is in a kind of suitable amorphous molecular semiconductor note Carry out in the shielded place of the environment of recording medium.
The invention still further relates to and adopt means of optical holographic interferometry measurement technology in real-time ratio object to be examined Look into the zone and carry out the method for nondestructive inspection (NDI), it is characterized in that, object, light source and holoscope Relative displacement be little motion and/or vibration.
The invention still further relates to and adopt means of optical holographic interferometry measurement technology to connect real-time ratio object is advanced The device that the row real non-destructive checks, wherein this device comprise coherent source, holography interferometer, Recording medium, object to be checked load with device and now examine and wash formed conoscope image Servicing unit, it is characterized in that, holoscope (12) and light source (1) be placed on be fit to amorphous The shielded place of environment of semiconductor recording medium (13).
The invention still further relates to and adopt means of optical holographic interferometry measurement technology object to be carried out the device that real non-destructive is checked in real-time ratio, it is characterized in that the distance between object module (20) and holoscope (12) and the light source (1) can be adjusted to random length by corresponding length of regulating the first single-mode optics leaded light cable (4) and the 3rd single-mode optics leaded light cable (5) simply respectively.
Reduce greatly the requirement of vibration protection and can the site inspection object; the formation of the record of hologram image and development and interferogram is then carried out in another place---such purpose can realize like this: the holographic photography interferometer " is divided into " object module (object module) and holoscope, and guarantee coherent light from the light source to the object and and then the optical path length and the object of passing by to recording medium irrelevant with respect to the motion of holoscope and/or light source.This can guarantee that any phase transformation of object and/or reference beams all is because the variation at body surface place, rather than because between object and holoscope or the light source due to the change of distance.
The optimization approach of accomplishing this point be the partially coherent light that in single-mode optics leaded light cable (light guidance cable), will constitute object beam from light source be sent to body surface and from the surface again to holoscope, and the partially coherent light that will constitute reference beams is sent to holoscope from light source, and wherein said optical cable is connected to and itself is rigidly fixed on the light source, lays respectively on the optical conenctor (connector) of object inspection area and holoscope top.The optical conenctor and the fixing means thereof of body surface top can be considered the formation object module.Why preferably using single-mode optics leaded light cable, is because in this kind optical cable, the bending of optical path length and optical cable and reverse in fact irrelevant.Like this, we have just eliminated object with the needs fixing with respect to holoscope and/or the vibrationless mode of light source, because the displacement of optical cable or crookedly do not cause the change of optical path length or the accumulation of phase transformation.So, the arbitrarily relative motion of holoscope, light source and object module, and can not cause the distortion of interference fringe on the interferogram (interference fringe).Unique requirement is that optical conenctor must firmly fix with respect to object, recording medium or light source respectively.This comprises object obviously than with all constituents, and the requirement of prior art all fixed to one another is much easier.
Another advantage of this kind preferred embodiment is that the formation of the record of hologram image and development and interferogram can " separate " with object to be carried out.In other words, need no longer to guarantee that holograph equipment does not move with respect to object, in fact the latter means and is fixed on holograph equipment on the object or with all constituents, comprises object, all is placed on the thing of vibration protection plate and so on.Therefore, holoscope and light source can be placed on, for example, the nookery of anti-weather protection is implemented site inspection by regulating the photoconduction cable length of object beam being delivered to and spread out of object module simply to distant place object simultaneously.
Detailed Description Of The Invention
To describe the present invention in conjunction with the accompanying drawings in more detail now, wherein Fig. 1 shows the charger of non-destructive inspection of objects with holographic photography interferometer and a kind of preferred embodiment of the present invention.Fig. 2 shows the zoomed-in view of load-on module, demonstrates the optics system of load-on module among the figure, and Fig. 3 is the zoomed-in view of display holography camera then, and it has optical conenctor and optics system that camera is used.Certainly, a kind of prominent example that this inspected object (welds joint of two semicanals) and the device that applies bending load only are used as the inspection of holographic photography interferometer here provides, and never should be interpreted as limitation of the present invention.
The present invention relates to the method for operating and the device of holographic photography interferometry, can be applicable to the object of all kinds mentioned in the background technology paragraph of front.The size and dimension of charger must change according to the size and dimension and the selected object load mode of examine object, certainly so that cause stress near the defective in object.Unique requirement is that charger should provide the necessary condition that reaches following purpose: use coherent light irradiating object inspection area by first optical conenctor, and collect the coherent light that the inspection area scatters out by second optical conenctor.The problem that relates to the shape and size of charger, the knowledge that then belongs to those skilled in the art and grasped is not so intend giving unnecessary details at this.So, be primarily focused on below on the holographic photography interferometer of this device that constitutes basis of the present invention.
Holographic photography interferometer (referring to Fig. 1~3) comprises that object module 20 on the element that directly is seated in charger 8, holoscope 12 are together with recording medium 13, coherent source---laser instrument 1 is together with first optical conenctor 2 and optical splitter 3, and first, the 3rd and second single mode fiber cable 4,5,10.Object module 20 and holoscope 12 comprise paired optical conenctor, are respectively 6,9 and 11,14.In addition, the device of implementing the nondestructive inspection (NDI) of object also comprises hologram image is recorded in the device 15 on the AMS-film, TV-video camera 16, computer 17 and the display 18 thereof of band object lens, and printer 19.
From Fig. 1~3 as can be seen, in preferred embodiments, first optical conenctor, 2 one ends are connected on the laser instrument 1, the other end connects optical splitter 3, the first single-mode optics leaded light cables 4 one ends and connects optical splitter 3, and the other end connects second optical conenctor 6, the 3rd single-mode optics leaded light cable 5 one ends connect optical splitter 3, the other end connects the 5th optical conenctor 14, the second single-mode optics leaded light cables 10 1 ends and connects the 3rd optical conenctor 9, and the other end connects the 4th optical conenctor 11.Object module 20 is together with the second and the 3rd optical conenctor 6,9, be seated on the element of charger 8, make that second optical conenctor 6 can be with the inspection area (referring to Fig. 2) of object coherent light irradiating object, and the 3rd optical conenctor 9 can be collected the object coherent light that scatters out from the inspection area.The 4th optical conenctor 11 is seated on the photographic camera 12, make it object beam is directed on the recording medium 13, and the 5th optical conenctor 14 is seated on the photographic camera 12, makes it to be directed to (referring to Fig. 3) on the recording medium 13 with reference to light beam.For such arrangement, importantly, first optical conenctor 2 and optical splitter 3 should be rigidly fixed on the laser instrument 1, the second and the 3rd optical conenctor 6,9 is rigidly fixed on the object module 20 that itself must be rigidly fixed on the charger 8, be positioned at the one section fixed range in top, object inspection area, and the 4th and the 5th optical conenctor 11,14 is rigidly fixed on the photographic camera, keeps one section fixed range with recording medium 13.
So, we just accomplish, the holographic photography interferometer can be envisioned for by two parts to constitute; Holoscope is together with light source, and object module, and the two can be placed on different places, and this guarantees that they can be arbitrarily mobile each other in the limit of photoconduction cable length regulation, and can not cause the change of the optical path length of object and/or reference beams.Thereby, holographic photography interferometer (camera and light source) might be placed on the place that comfortable and/or anti-weather is protected, and at the scene to various objects, no matter its size and dimension how, is implemented to check.
Let us adopts holographic photography interferometric measuring means of the present invention to implement the operation of the nondestructive inspection (NDI) of object with device.The program of the record of hologram image and the formation of interferogram thoroughly is described among the corresponding Norway of the inventor application 2000xxxx, and it is for referencial use in these receipts, does not therefore intend describing in detail at this.Yet, know, record and the development of hologram image on recording medium finished by control device 15, and recording medium is the AMS-film, the multipolymer that is contained glycidyl carbazole and 5wt% diglycidyl butyl ether by 91wt% is formed, wherein mix with 5wt%9-(4-dodecyl-oxygen phenyl-1,3-selenol (selenathiol)-2-fork base (ylidene))-2,5,7-trinitro-fluorenes-4-carboxylate methyl ester and 5wt% cetyl-2,7-dinitro-dicyano methylene fluorenes (methylenfluorene)-4-carboxylate.Why preferred the discussion of relevant AMS-film character and this film provide in Norway's application 19995273 of the applicant, and it is for referencial use in these receipts.
When object module 20 was fixed on the top, inspection area rightly, recording medium 13 just was ready for the recording holographic image.Then, open laser instrument, coherent light is sent in the optical splitter 3 through first optical conenctor 2, and the latter is divided into the object coherent light with laser beam and with reference to coherent light beam.The object coherent light beam passes the first single-mode optics leaded light cable 4 and enters into second optical conenctor 6 of object module 20.6 expansions of second optical conenctor also guide object beam, make it the inspection area of irradiating object 7.Collected by the 3rd optical conenctor 9 of object module 20 from this part object beam of inspection area surface reflection, it enters and passes the second single-mode optics leaded light cable 10 thus.Object beam will enter the 4th optical conenctor 11 of holoscope 12 subsequently.The 4th optical conenctor 11 guiding and Extended Object light beams make it to shine recording medium 13.Meanwhile, deliver to the 5th optical conenctor 14 of holoscope 12 by the 3rd single-mode optics leaded light cable 5 with reference to coherent light beam.Second optical conenctor 10 will guide and expand reference beams 15, make it to shine recording medium 13.So object and reference beams interfere on the surface of recording medium 13, and the hologram image of formation object inspection area.This hologram image is recorded and develops becomes latent image on the recording medium.
Then, load is accepted in the inspection area of object, is being a kind of slight bending distortion of adopting charger 8 to apply in such cases.Subsequently, be loaded with the inspection area of recording medium 13 with the object of the hologram image that has developed, simultaneously respectively with reference and object beam irradiation.As a result, two light waves will appear at recording medium 13 back simultaneously, an object light wave corresponding to object inspection area scattering before loading, and another is corresponding to the light wave that loads back object inspection area scattering.These light waves will interfere and form the interferogram of object inspection area, and this figure can see through recording medium and with the naked eye watch, and perhaps sees with television camera 16 and display 18.Defect area is corresponding to the zone of the interferogram with unusual interference fringe characteristic performance.
The conoscope image of---12mm diameter titanium pipe weld seam---is presented among Fig. 4 as an example, to take from the object inspection area.The dystropic zone of interference fringe characteristic corresponding to the zone that defective was positioned at, can be found out from this weld seam.
The apparatus and method that adopt holographic photography interferometry of the present invention that object be can't harm real-time inspection have overcome the shortcoming of the apparatus and method of the present known holographic photography interferometry non-destructive inspection of objects of puzzlement above-mentioned.
At the scene the object inspection area is implemented irradiation and collected the coherent light that is scattered out by the inspection area with coherent light; the formation of the formation of the hologram of inspection area, the record of hologram image and development and conoscope image is then carried out in comfortable, shielded place---and this possibility makes us be expanded the range of application of holographic photography interferometry on non-destructive inspection of objects greatly.So, can be under any weather condition the nondestructive inspection (NDI) of field conduct object, even if under water, in plasma and under the high radioactivity influence.
Single-mode optics leaded light cable (i) is used for the coherent light from laser instrument is sent to the object inspection area; (ii) be used for the coherent light of inspection area scattering is sent to the place that forms hologram image; (iii) be used for the coherent light from laser instrument is sent to the application of the aspects such as position that form hologram image; make at the scene the real realization with the light of coherent light illumination object and gleanings volume scattering become many easily, and the formation of formation of hologram image simultaneously and record thereof and development, interferogram can be carried out in another comfortable shielded place.Meanwhile, this technology also reduces the requirement of measuring the vibration proof protection greatly, because the vibration of object no longer influences recording medium, holoscope element and laser instrument.In addition, the element of holoscope and recording medium mechanically are not fixed on the laser instrument, so the relative motion of laser instrument and holoscope will can not influence each other.Also have, any mobile or bending of single-mode optics leaded light cable also can not cause the change of optical path length or the additional accumulation of phase.
Though with regard to a kind of fixing of preferred embodiment and object with load example and describe, know, also can create varied fixing and/or charger and be used for the object that varied the present invention is suitable for.These are conspicuous for those skilled in the art, therefore should be included in the main scope of the present invention.

Claims (9)

1. method that adopts means of optical holographic interferometry measurement technology the object inspection area to be carried out nondestructive inspection (NDI) in real-time ratio, wherein at first, the hologram image of record and this object inspection area of developing on recording medium, then, load is accepted in the inspection area of this object, at last, the two side by side shines the recording medium of object inspection area and the hologram image that develops that is loaded with this object init state check zone with coherent light, thereby owing to interfering the conoscope image that forms this object inspection area between two kinds of light waves corresponding to the light wave that scatters out by the object inspection area before and after loading
It is characterized in that, the object inspection area is shone with coherent light and is that the formation of the conoscope image of the record of hologram image and development and object inspection area then is to utilize the transmission of single-mode optics leaded light cable to finish in another place of the object certain distance of being separated by between light source, object inspection area and holoscope by coherent light at the field conduct of object by the collection of the coherent light of the same area scattering.
2. the method for claim 1,
It is characterized in that; the hologram image of inspection area and the formation of conoscope image is protected thereby be not subjected to the influence of relative displacement between object, holoscope and/or the light source; measure comprises that coherent light utilizes single-mode optics leaded light cable to transmit between object, light source and holoscope; and guarantee that single-mode optics leaded light cable-end point is fixing securely, the distance that is maintained fixed with object inspection area, holoscope recording medium and light source respectively.
3. claim 1 or 2 method,
It is characterized in that the formation of the conoscope image of the record of hologram image and development and object inspection area is to carry out in a kind of shielded place of environment that is fit to amorphous molecular semiconductor recording medium.
4. claim 1 or 2 method,
It is characterized in that the relative displacement of object, light source and holoscope is little motion and/or vibration.
5. one kind is adopted means of optical holographic interferometry measurement technology in real-time ratio object to be carried out the device that real non-destructive is checked, wherein this device comprises that holographic photography interferometer, recording medium, examine object load the servicing unit with device and observation and the formed conoscope image of flushing
It is characterized in that, the holographic photography interferometer is divided into object module (20), holoscope (12) and coherent source (1), and light source (1) utilizes the first single-mode optics leaded light cable (4) to be connected on the object module (20), object module (20) is connected with the second single-mode optics leaded light cable (10) with holoscope (12), and holoscope (12) utilizes the 3rd single-mode optics leaded light cable (5) to be connected with light source.
6. the device of claim 5,
It is characterized in that, holoscope (12) by guaranteeing the first single-mode optics leaded light cable (4) thus fixing securely inspection area and the light source (1) of end points with object (7) keep one section fixed range respectively, and be not subjected to the influence of the relative displacement of light source (1) and object module (20).
7. the device of claim 6,
It is characterized in that,
The end points of-the first single-mode optics leaded light cable (4) is connected on first optical conenctor (2) and second optical conenctor (6), the end points of the 3rd single-mode optics leaded light cable (5) connects first optical conenctor (2) and the 5th optical conenctor (14), and the end points of the second single-mode optics leaded light cable (10) connects the 3rd optical conenctor (9) and the 4th optical conenctor (11)
-the first optical conenctor (2) is connected on the light source (1) rigidly, and is equipped with optical splitter (3), and the latter is divided into object beam and reference beams with coherent light,
-the second optical conenctor (6) is connected on the object module (20) rigidly, is positioned at one section fixed range in top, inspection area of object (7), makes it that object beam is guided and expands on the inspection area of object (7),
-Di three optical conenctors (9) are connected on the object module (20) rigidly, be positioned at one section fixed range in top, inspection area of object (7), make the coherent light that it collects the inspection area reflection of object (7) also this light beam be focused in the second single-mode optics leaded light cable (10)
-Di four optical conenctors (11) are connected on the holoscope (12) rigidly, are positioned at the one section fixed range in recording medium (13) top, make it that object beam is guided and expands on the recording medium (13), and
-Di five optical conenctors (14) are connected on the holoscope (12) rigidly, are positioned at the one section fixed range in recording medium (13) top, make it guide and expand on the recording medium (13) with reference to light beam.
8. the device of claim 5,
It is characterized in that holoscope (12) and light source (1) are placed on the shielded place of environment that is fit to amorphous semiconductor recording medium (13).
9. the device of claim 5,
It is characterized in that the distance between object module (20) and holoscope (12) and the light source (1) can be adjusted to random length by corresponding length of regulating the first single-mode optics leaded light cable (4) and the 3rd single-mode optics leaded light cable (5) simply respectively.
CN 00818014 1999-10-29 2000-10-18 Method and device for non-destructive inspection of objects by means of optical holographic interferometry measurement technology Expired - Fee Related CN1192207C (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
NO19995311 1999-10-29
NO995311A NO995311D0 (en) 1999-10-29 1999-10-29 Method and Device for Non-Destructive Inspection of Objects Using Optical Holographic Interferometer
NO20002724 2000-05-26
NO20002724A NO20002724L (en) 1999-10-29 2000-05-26 Method and equipment for non-destructive inspection of objects based on halographic interferometry

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CN1415067A CN1415067A (en) 2003-04-30
CN1192207C true CN1192207C (en) 2005-03-09

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* Cited by examiner, † Cited by third party
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NO20005376L (en) 2000-10-25 2002-04-26 Holo Tech As Method and apparatus for non-destructive measurements of intrinsic stresses in plane and non-plane objects
US8599383B2 (en) 2009-05-06 2013-12-03 The Regents Of The University Of California Optical cytometry
EP3064895B1 (en) * 2010-09-07 2020-04-15 Dai Nippon Printing Co., Ltd. Linear illumination device
JP6144679B2 (en) 2011-08-02 2017-06-07 ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア Rapid massively parallel single-cell drug response measurement via live cell interferometry
RU2475725C1 (en) * 2011-09-14 2013-02-20 Общество С Ограниченной Ответственностью Инженерно-Технологический Центр "Сварка" Method for nondestructive rapid inspection of weld joints and apparatus for realising said method
CN102519976A (en) * 2011-12-26 2012-06-27 上海大学 Digital holographic detection device for subsurface defect of optical element
CN105229162B (en) 2013-05-24 2019-04-19 加利福尼亚大学董事会 Pass through T lymphocyte needed for mass-basis response variation identification
CN105607452B (en) * 2016-01-04 2019-01-15 中国海洋大学 Measure the Double-number holographic imaging apparatus of suspended particulate settling velocity
CN109374646A (en) * 2018-09-26 2019-02-22 上海海事大学 A kind of CRACKED BEAM detection method based on laser holography

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58106406A (en) * 1981-12-21 1983-06-24 Sumitomo Electric Ind Ltd Optical sensor
FR2543299B1 (en) * 1983-03-21 1985-11-15 Daeden Jean Pierre HOLOGRAPHIC NON-DESTRUCTIVE CONTROL SYSTEM
DE3516538A1 (en) * 1985-05-08 1986-11-13 Fa. Carl Zeiss, 7920 Heidenheim METHOD AND DEVICE FOR OPTICAL VOLTAGE MEASUREMENT
FR2593288B1 (en) 1986-01-20 1989-09-01 Aerospatiale DEVICE FOR NON-DESTRUCTIVE CHECKING OF A PART BY OPTICAL HOLOGRAPHY
JPH05157514A (en) * 1991-12-06 1993-06-22 Mitsubishi Electric Corp Measuring apparatus of minute deformation
JP2554996B2 (en) * 1993-01-19 1996-11-20 株式会社ヒューテック Non-destructive inspection of mechanical behavior of a loaded object, its determination method and its apparatus
US5680212A (en) * 1996-04-15 1997-10-21 National Research Council Of Canada Sensitive and fast response optical detection of transient motion from a scattering surface by two-wave mixing

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