CN1186671C - Production method and device of projection structural light - Google Patents
Production method and device of projection structural light Download PDFInfo
- Publication number
- CN1186671C CN1186671C CNB021310955A CN02131095A CN1186671C CN 1186671 C CN1186671 C CN 1186671C CN B021310955 A CNB021310955 A CN B021310955A CN 02131095 A CN02131095 A CN 02131095A CN 1186671 C CN1186671 C CN 1186671C
- Authority
- CN
- China
- Prior art keywords
- frequency
- acousto
- light
- optic modulators
- phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The present invention discloses a production method and a device of projection structural light. The beam of a coherent light source is projected on a scene through the processes of beam splitting, diffraction, fine tuning of the direction, spatial filtering, light beam spacing transformation, and focusing and amplification, and static stripe structure light with interference fringe intensity in sine distribution is obtained. The present invention is characterized in that two parallel beams after split respectively enter the two input ends of double acoustic-optic modulators in a Bragg angle; simultaneously, double acoustic-optic modulators with the same frequency and radio frequency signals of which the phase difference can be regulated from 0 to 2 pi are adopted, and the frequencies of radio frequency signals are changed in real time. The present invention is composed of a coherent light source, a beam splitter, double acoustic-optic modulators, a radio frequency drive circuit, a directional fine tuning device, a filter, a spacing transducer, a focusing lens and a microscope objective. The present invention has the advantages that the device does not have any mechanical movement components and generate projection structure light with space variable frequency and phase movement in real time, the external interference resisting capability is strong, and the stability, the controllability and the universality are good.
Description
Technical field
The present invention relates to a kind of production method and device of projecting structural optical, relate to the technology of the projecting structural optical of a kind of real-time generation spatial variable frequency and phase shifts or rather.
Background technology
Have the feature that the whole audience, noncontact, snap information obtain based on the three-dimensional sensing detection technique of striated structure optical projection and phase measurement, this method need not any machinery or optical scanning mechanism and measuring accuracy height, thereby by extensive studies and development.The method and apparatus that generation striated structure light and known space phase move is striated structure optical projection and phase measurement key link.Main two class methods that produce the striated structure optical projection at present are laser interference projection and white light optical grating projection; The main method that produces phase shifts is to adjust light path or projection grating position by the mechanically deform of control piezoelectric crystal.The main difficulty that said method exists in actual applications is: the stability based on the method and apparatus (as the Mach-Zehnder structure) of laser interference projection is all relatively poor, very responsive to mechanical vibration and other various disturbances, and be difficult to produce in real time the projecting structural optical and the phase shifts of spatial variable frequency, thereby be difficult to be applied to site environment and dynamic environment; Though, generally adopt the Ronchi grating to be difficult to produce sinusoidal light, and the same spatial frequency that is difficult to dynamically and in real time change structured light based on white light optical grating projection Stability Analysis of Structures.More than two class methods and device owing to all have mechanical motion, the speed and the reliability that produce phase shifts are very limited.The technical literature that can contrast has four pieces:
[1]K.Creath，Y.Y.Cheng，and?J.Wyant，“Contouring?aspheric?surface?using?two?wavelengthphase-shifting?interferometry，”Opt.Acta?32(12)，1455-1464(1985).
[2]Y.B.Choi?and?S.W.Kim，“Phase-shifting?grating?projection?Moire?topography，”Opt.Eng.37(3)，1005-1010(1998).
[3]M.S.Mermelstein，D.L.Feldkhun?and?L.G.Shirley，“Video-rate?surface?profiling?withacousto-optic?accordion?fringe?interferometry，”Opt.Eng.39(1)：106-113(2000).
[4] projection obtains fringe intensity and is sinusoidal branch patent on the invention scape: application number 98111691.
Summary of the invention
The object of the present invention is to provide a kind of production method and device of projecting structural optical.There is not any mechanical moving element in described device, and described method can produce the projecting structural optical that stability is high, universality is strong fast.
For achieving the above object, the present invention realizes by following technical proposals.The production method of projecting structural optical, its feature may further comprise the steps, to the light beam of coherent source through the beam splitter beam splitting, after the beam splitting two bundle directional light enters two input ends of two acousto-optic modulators respectively with Bragg angle, adopt frequency identical and have radio frequency signals drive two acousto-optic modulators of 0～2 π adjustable phase difference and a frequency of real time altering radiofrequency signal simultaneously, thereby two output terminals at two acousto-optic modulators, the two bundle first-order diffraction light that output deflection angle and relative phase are controlled, this two-beam is finely tuned through direction again, spatial filtering, the beam separation conversion, focus on amplification process, penetrate at the scene upslide and obtain the static striated structure light that fringe intensity is a Sine distribution.
According to the method described above, produce the device of projecting structural optical.This device comprises that mainly coherent source, beam splitter, acousto-optic modulator, signal generator and radio-frequency (RF) driver circuit, wedge, spatial filter, parallel beam spacing transducer, condenser lens, microcobjective constitute.It is characterized in that when coherent source was visible laser, beam splitter constituted by being glued at two prisms of semi-transparent semi-reflecting film; Acousto-optic modulator is the lead molybdate crystal, and frequency of operation is 40～80MHz, driving power 0.8～1.2W, and dynamic response time is less than 1ms; The angle of wedge of each wedge is the 1-1.5 degree; Condenser lens is a planoconvex lens, and focal length value is 10mm.The enlargement factor of microcobjective is at 10-40x; Signal generator is a frequency synthesizer of phase locking, to the dynamic response time of frequency and phase change all less than 1ms.
The invention has the advantages that there is not any mechanical moving element in device, produces the projecting structural optical of spatial variable frequency and phase shifts in real time, anti-external interference ability is strong, good stability, and has good Modulatory character and universality.
Description of drawings
Fig. 1 is apparatus of the present invention structured flowchart.
Fig. 2 is the structural representation of the integrated beam splitter among Fig. 1.
101 is laser instrument among the figure, and 102 is integrated beam splitter, and 103 and 104 is acousto-optic modulator, 105 and 106 wedges, 107 is the diplopore spatial filter, and 108 is bundling device, and 109 is condenser lens, 110 is microcobjective, 111 is scene, and 112 and 113 is radio-frequency power amplifier, and 114 is the signal generator of radio-frequency power amplifier, 201 is semi-transparent semi-reflecting film, and 202 and 203 is prism.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated.
As shown in Figure 1, the continuous laser beam that is produced by laser instrument 101 is divided into that intensity equates or near two parallel beams that equate behind beam splitter 102.They enter acousto- optic modulator 103 and 104 respectively, the first-order diffraction light of generation.They will leave acousto-optic modulator with a low-angle, and this angle is proportional to the frequency of acousto-optic modulator drive signal.Wedge as the beam direction micro actuator is used to adjust two angle of beams.Behind wedge 105 and 106, obtain two bundle directional lights respectively, obtain two-beam after process spatial filter 107 enters bundling device 108.Bundling device 108 is identical with beam splitter 102 structures, but oppositely uses.They be focused lens 109 focus on two-beam that the back produces again by microcobjective 110 to the space projection, form two bundle extensible beams, they are overlapped and produce and interfere in the space.Acousto- optic modulator 103 and 104 is driven by radio frequency amplifier 112 and 113 signals that produce respectively. Amplifier 112 and 113 input signal are produced by signal generator 114.Two signals are the sine waves with same frequency, and the phase differential between them is predefined value.The frequency of two signals of change is the spacing of interference fringe that may command produces then, changes two space phases that phase difference between signals is an interference fringe that may command produces.The frequency of two signals and the phase differential between them can manually be controlled, and also can be controlled by computer programming.
Can be frequency synthesizer of phase locking by signal generator 114, to the dynamic response time of frequency and phase change all less than 1ms.
In the accompanying drawing 2, after incident beam incides and is divided into two isocandela light beams on the semi-transparent semi-reflecting film 201,, obtain two bundle directional lights again by prism glued together 202 and 203 total reflections.
Claims (2)
1, a kind of production method of projecting structural optical, this method feature may further comprise the steps, to the light beam of coherent source through the beam splitter beam splitting, after the beam splitting two bundle directional light enters two input ends of two acousto-optic modulators respectively with Bragg angle, adopt frequency identical and have radio frequency signals drive two acousto-optic modulators of 0～2 π adjustable phase difference and a frequency of real time altering radiofrequency signal simultaneously, thereby two output terminals at two acousto-optic modulators, the two bundle first-order diffraction light that output deflection angle and relative phase are controlled, this two-beam is finely tuned through direction again, spatial filtering, the beam separation conversion, focus on amplification process, penetrate at the scene upslide and obtain the static striated structure light that fringe intensity is a Sine distribution.
2, a kind of device that produces projecting structural optical, this device comprises that mainly coherent source, beam splitter, acousto-optic modulator, signal generator and radio-frequency (RF) driver circuit, wedge, spatial filter, parallel beam spacing transducer, condenser lens, microcobjective constitute, it is characterized in that: coherent source is a visible laser, and beam splitter constitutes by being glued at two prisms of semi-transparent semi-reflecting film; Acousto-optic modulator is the lead molybdate crystal, and frequency of operation is 40～80MHz, driving power 0.8～1.2W, and dynamic response time is less than 1ms; The angle of wedge of each wedge is the 1-1.5 degree; Condenser lens is a planoconvex lens, and focal length value is 10mm; The enlargement factor of microcobjective is at 10-40x; Signal generator is a frequency synthesizer of phase locking, to the dynamic response time of frequency and phase change all less than 1ms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021310955A CN1186671C (en) | 2002-10-09 | 2002-10-09 | Production method and device of projection structural light |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021310955A CN1186671C (en) | 2002-10-09 | 2002-10-09 | Production method and device of projection structural light |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1414412A CN1414412A (en) | 2003-04-30 |
| CN1186671C true CN1186671C (en) | 2005-01-26 |
Family
ID=4746565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021310955A Expired - Fee Related CN1186671C (en) | 2002-10-09 | 2002-10-09 | Production method and device of projection structural light |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1186671C (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140307055A1 (en) * | 2013-04-15 | 2014-10-16 | Microsoft Corporation | Intensity-modulated light pattern for active stereo |
| CN103489338A (en) * | 2013-09-29 | 2014-01-01 | 国家电网公司 | Three-dimensional scene projection player |
| CN106152972A (en) * | 2016-08-11 | 2016-11-23 | 广西师范大学 | A kind of phase-shift type optical projection three-dimension measuring system and method |
-
2002
- 2002-10-09 CN CNB021310955A patent/CN1186671C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1414412A (en) | 2003-04-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7233745B2 (en) | lidar sensing device | |
| CN103674926B (en) | Optical devices | |
| CN103245285B (en) | A kind of reflection type point diffraction carrier synchronization movable phase interfere pick-up unit and detection method | |
| US9297991B2 (en) | Lighting method and microscopic observation device | |
| CN101324421A (en) | Synchronous phase-shifting Fizeau interferometer | |
| CN102288103A (en) | Folding-fabry-perot-cavity-based absolute distance measurement method and device | |
| CN1186671C (en) | Production method and device of projection structural light | |
| JP6014449B2 (en) | Laser scanning microscope equipment | |
| US11327326B2 (en) | Real-time micro/nano optical field generation and manipulation system/method | |
| CN105511074B (en) | The micro-nano light field modulating system of real time-varying parameter and interference lithography system | |
| CN201251428Y (en) | Synchronous phase-shifting fizeau interferometer | |
| CN208595878U (en) | A kind of nano measurement instrument based on simultaneous phase-shifting interference technique | |
| CN201378236Y (en) | System producing cylindrical vector light beams by utilizing computed hologram | |
| Kwon et al. | Multichannel grating phase-shift interferometers | |
| JPH10232204A (en) | Device for measuring refractive index | |
| CN205942088U (en) | Become modulation of micro -nano light field of parameter and photolithography system in real time | |
| US20230062525A1 (en) | Heterodyne light source for use in metrology system | |
| CN1916574A (en) | Angular vibration laser interference measuring method and device | |
| KR101085061B1 (en) | Viration-insensitive interferometer using high-speed camera and continuous phase-scanning method | |
| JP5741709B2 (en) | Structured illumination device, method for adjusting the structured illumination device, computer-executable adjustment program, structured illumination microscope device, and surface shape measuring device | |
| CN207301512U (en) | A kind of micro-nano light field builds modulating system in real time | |
| RU2640963C1 (en) | Method of controlling phase shift in interference systems | |
| CN106052549B (en) | The big working distance autocollimation of combination zeroing high dynamic precision and method | |
| Liao et al. | A research on compact short-distance grating interferometer based on ridge prism | |
| EP1687588A2 (en) | Process and apparatus for measuring the three-dimensional shape of an object |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |