CN205981138U - Phase shift formula optical projection three -dimensional measurement system - Google Patents
Phase shift formula optical projection three -dimensional measurement system Download PDFInfo
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- CN205981138U CN205981138U CN201620867251.4U CN201620867251U CN205981138U CN 205981138 U CN205981138 U CN 205981138U CN 201620867251 U CN201620867251 U CN 201620867251U CN 205981138 U CN205981138 U CN 205981138U
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Abstract
The utility model relates to a phase shift formula optical projection three -dimensional measurement system, expand the system of restrainting by the single -mode laser lasing through optics and spread into the light beam, the light beam forms two bundles of light behind one -dimensional beam splitting grating, the two bundles of light projects to close through angle of adjustment respectively again after producing bragg diffraction behind the acoustic optic modem and restraints the vessel shape and become to interfere the light path, it is amplified by projection objective behind focusing lens to interfere the light path, generate the interference fringe projection to the testee, the projection is acquireed the back to the surperficial interference fringe of testee by the CCD camera and is handled the final three -dimensional appearance of a testee that resumes through the computer. This system combines together acousto -optic modulation technique with phase shift stripe variable frequency technology, can be at the three -dimensional appearance on the multiple not isostructure object of quick -witted rapid survey surface, and the anti -vibration ability is stronger, also can realize measuring at the machine in the course of working, especially has stronger robustness to the object surface that the structure is complicated.
Description
Technical field
This utility model is related to three-dimensional measurement field and in particular to a kind of phase-shift type optical projection three-dimension measuring system.
Background technology
The actual production process such as modern industry, manufacturing industry need carry out substantial amounts of measurement work, therefore three-dimensional appearance
Measurement is just playing more and more important effect in modern industry and real life.And optical 3-dimensional topography measurement is non-due to it
Contact, in high precision, high speed the advantages of, oneself becomes one of focus of research at present.Optical 3-dimensional topography measurement is to adopt optics
Means obtain the methods and techniques of object dimensional spatial information, it is in machine vision, profiling in kind, industrial detection, biological doctor
The fields such as, ideo display stunt, virtual reality, are respectively provided with very important meaning and wide application prospect.
Three traditional coordinate contact probe formula method for three-dimensional measurement have intrinsic defect：Exist certain when the 1st, measuring
Contact pressure, measurement error will necessarily be produced for the article of some soft textures；2nd, due to gauge head radius no matter such as
Why not may be zero, so the fine feature of some complex surfaces cannot be measured；3rd, because wanting pointwise contact type measurement, thus depositing
Slow in measuring speed, be not suitable for large parts is measured.And the laser scanning method charge-coupled image sensor of current popular
(CCD) or position sensitive detector (PSD) carries out digital point laser image collection, due to wanting pointwise or by-line scanning, thus
It is restricted in speed.Meanwhile, the material of the tested test specimen of scanning accuracy and surface properties affect are larger, for this reason, this practicality is new
Type using laser interferencefringes shadow casting technique and combines phase shift measurement, and quick, efficient, the high accuracy of trying hard to realize workpiece are surveyed
Amount, compared with prior art, this utility model has significant advantage：(1) structure light projecting is true interference fringe, has
High brightness and high-contrast, have unlimited depth of focus, it is possible to decrease software processes difficulty；(2) effectively measured area is big and space reappears
Power is good, and the bar graph gap that projection obtains is very little, makes the three-dimensional data precision of acquisition higher.(3) measurement process is not subject to quilt
Survey the impact of the color, shape and kinestate of object；(4) realize phase shift speed fast, precision is higher, time phase can be utilized simultaneously
Shifting method measures, and measurement process is not affected by unfavorable factors such as the discontinuous, transition of measured surface, and measurement robustness is more preferable.
Formerly one of technology is (referring to " color combinations strip encoding grating technology of profiling ", Liu Weiyi, Wang Zhaoqi, home country's light, side
Will is good, Acta Optica, 20 (9), 1218-1234,2000) have studied a kind of coding grating projection three-dimensional technology of profiling, wherein project
Grating utilizes the separate characteristic of color space red, green, blue three primary colours, with color fringe, grating is encoded, with white
Striped is start bit, and the striped being followed by red, green, blue (R, G, B) three kinds of colors forms one group.The grating of encoded process is being protected
On the premise of card certainty of measurement is constant, increase the scope of elevation carrection.The precision of measurement depends primarily on the resolution of image.
This method carries out fringe projection using projector, and its Phase shift precision depends on the extraction phase accuracy to coloured image, colored
Strip encoding grating adopts 4 stripeds to be one group, and minimum will have 3 stripeds just to can determine that its position, if testee
Space width do not accommodate 3 stripeds, then cannot be carried out measure.The requirement to measuring condition for this method is higher, measurement essence
The repeatability of degree is relatively low.
Formerly the two of technology are (referring to " Novel 3-D free-form surface profilometry for
Reverse engineering is used for the new 3D Free-Form Surface Profile art of reverse-engineering ", Liang-Chia Chen, Zhi-
Xue Huang, 7th International Symposium on Measurement Technology and
Intelligent Instruments, Journal ofPhysics:Conference Series 13,174 177,2005)
Using sensor integration theory, the key issue during free-float space robot, tool are solved by exploitation automatic reconstruction method
Body is scanned using laser scanning methodses, then passes through integrated edge probe algorithm and image processing method real-time processing, enters
Row three-dimensional reconstruction, but the light-shielding problem due to itself, the method cannot detect spill object, and therefore application is subject to the very day of one's doom
System.
Formerly technology three (referring to " Profilometry by fringe projection fringe projection technology of profiling ",
Luis Salas, Esteban Luna, Javier Salinas, Victor Garcia, Manuel Servin, Opt.Eng.42
(11) 3,307 3314,2003) adopt high-intensity light source that Ronchi grating is passed through projection lens projects on testee, pass through
High density bar graph carries out solving phase place, obtains related three-dimensionalreconstruction parameter using method of least square, obtains 1/80 effective wavelength
Certainty of measurement.The method needs to make accurate Ronchi grating, and cannot realize phase-shift measurement, being limited in scope of measurement,
Relatively costly, motility is not high to be measured it is impossible to realize universality.
Formerly the four of technology are (referring to " the frequency conversion 3 D digital imaging based on alliteration light deflector ", Zhang Peng, Peng Xiang, Qiu Wen
Outstanding person etc., photon journal, 34 (10), 1550-1553,2005) propose to carry out sequential frequency conversion 3-dimensional digital using alliteration light deflector
Imaging, carries out interfering forming space structure striations, measurement process and phase place can be led to using the order of diffraction of two acousto-optic modulators
Cross computer programming to control, preferably, universality is high for measurement motility, but it needs two acousto-optic modulators, and will ensure two
Individual acousto-optic modulator is synchronous, and relatively costly, difficulty is larger.
Formerly technology five (referring to " the frequency conversion striped projection system based on acoustic grating ", Zhao Huijie, Zeng Junyu, Lei Yanzhang,
Acta Optica, 28 (2), 2008) a kind of frequency conversion striped projection system based on acoustic grating is proposed, this system utilizes beat signal to drive
Dynamic acousto-optic deflection device forms two overlapping gratings in acousto-optic crsytal, and the laser that light source sends is incident with Bragg angle, is formed
Two bundle first-order diffraction light, form, through lens focuss, the structural light stripes that light intensity presses sinusoidal rule distribution, propose a kind of new simultaneously
Phase place solidification technology, make fringe spatial frequency and the Changing Pattern of phase place obtain good explanation.This system is to plaster statue
Pattern measures, and obtains the phase diagram for three-dimensional imaging.This projection system is for solution complex geometric shapes object
Three-dimensional measurement problem has certain engineering application value, and the method realizes striped using frequency mixing technique with reference to phase place clotting method
Projection, the upper difficulty of technology realization is very big, and the error control of simultaneous phase shifting is not easy to, and its certainty of measurement does not refer to.
Accordingly, it is desirable to provide a kind of cost is relatively low, accuracy is high, and measuring speed is fast, strong robustness for body surface
The three-dimension measuring system of measurement.
Utility model content
In sum, in order to solve existing technical problem, technical problem to be solved in the utility model is offer one
Plant phase-shift type optical projection three-dimension measuring system.
The technical scheme that this utility model solves above-mentioned technical problem is as follows：A kind of phase-shift type optical projection three-dimensional measurement system
System, including single-mode laser CCD camera and computer, computer is connected with CCD camera, produces laser along single-mode laser
Direction of advance sets gradually the optical beam-expanding system of condenser lenses composition, one-dimensional beam-splitting optical grating, acousto-optic modulator, bundling device, gathers
Focus lens and projection objective；
The laser that described single-mode laser produces diffuses into through described optical beam-expanding system after light beam again by described one-dimensional point
Bundle grating resolves into two bundle laser, is additionally provided with the first wedge and second between described one-dimensional beam-splitting optical grating and described acousto-optic modulator
The deflection angle that wedge, described first wedge and described second wedge adjust the two bundle laser that one-dimensional beam-splitting optical grating decomposes respectively is equal to
Enter the angle of incidence of acousto-optic modulator, make two bundle laser produce Bragg diffraction after described acousto-optic modulator；
It is provided with the first spatial filter and second space wave filter between described acousto-optic modulator and described bundling device, described
Two bundle laser after acousto-optic modulator are formed one-level and spread out by the first spatial filter and described second space wave filter respectively
Penetrate light；It is provided with the 3rd wedge, described second space wave filter and described between described first spatial filter and described bundling device
It is provided with the 4th wedge, first-order diffraction light adjustment angle is projected by described 3rd wedge and described 4th wedge respectively between bundling device
To on described bundling device, and form optical interference circuit after described bundling device；Described optical interference circuit passes through described condenser lenses again
Form interference fringe after being amplified by described projection objective and project on testee, after described CCD camera obtains this interference fringe
Carry out processing the final three-dimensional appearance recovering testee by computer.
The beneficial effects of the utility model are：With monophone photomodulator as phase shift with frequency conversion device, with aplanatism light path knot
Structure is main body, reduces the disturbance of the noises such as vibrations, produces actual interference fringe using interferometric method and is projected, clear-cut texture degree is not
Affected by out of focus etc., under relatively low cost, realize to improve workpiece calibration speed while accurate three-dimensional measurement.
On the basis of such scheme, this utility model can also do improvement further below：
Further, described acousto-optic modulator passes through radio-frequency power amplifier and Direct Digital Frequency Synthesizers and computer phase
Even, frequency control word is changed by computer and change the angle of emergence by acousto-optic modulator for the light, thus changing fringe period.
Beneficial effect using above-mentioned further scheme is：Change light by computer change frequency control word N to lead to
Cross the angle of emergence of acousto-optic modulatorThus changing fringe period, because the change of Direct Digital Frequency Synthesizers frequency only need to be several
The cycle of ten nanoseconds, therefore interference fringe and phse conversion just can complete within the extremely short time, can complete phase at short notice
Move the project structured light of striped, using more convenient.
Further, described one-dimensional beam-splitting optical grating is the one-dimensional diffraction grating of one-to-two, and separates the light intensity of two bundle laser
Identical.
Beneficial effect using above-mentioned further scheme is：Improve the definition of interference fringe projection.
Further, between described optical beam-expanding system and one-dimensional beam-splitting optical grating and/or between bundling device and condenser lenses
It is provided with the illuminator changing the space that direction of illumination is occupied with contract measurement system.
Beneficial effect using above-mentioned further scheme is：Reduce the volume of phase-shift type optical projection three-dimension measuring system, carry
Height uses flexibility ratio.
Further, described acousto-optic modulator is high bandwidth manipulator, the laser of modulated multi-wavelength, and its bandwidth is at least
40MHz, and the diffraction efficiency of described acousto-optic modulator is more than 60%.
Beneficial effect using above-mentioned further scheme is：Make the convertible multi-frequency of interference fringe, different to adapt to
Measuring Object；And there are enough light intensity to form clearly interference fringe.
Further, the frequency-tuning range of described Direct Digital Frequency Synthesizers is more than 40MHz.
Beneficial effect using above-mentioned further scheme is：The frequency band of digital frequency synthesizer compatibility acousto-optic modulator 8
Wide.
Further, described bundling device is optical flat.
Beneficial effect using above-mentioned further scheme is：Optical flat is easy to make, is readily available.
Further, described projection objective is the measuring projector object lens of replaceable multiplying power, object lens enlargement ratio error≤
0.08%.
Beneficial effect using above-mentioned further scheme is：Ensure that the interference fringe projecting on testee is clear enough
Clear.
Further, described CCD camera acquisition frame rate is no less than 30fps.
Beneficial effect using above-mentioned further scheme is；Ensure that CCD camera can clearly collect on testee
Interference fringe.
Brief description
Fig. 1 is the structural representation of system described in the utility model.In in figure：
1 single-mode laser, 2 laser beam expanding lens group, 3 reflecting mirrors,
4 beam-splitting optical gratings, 5 first wedges, 6 second wedges,
7 Direct Digital Frequency Synthesizers and radio frequency amplifier, 8 acousto-optic modulators,
9 first spatial filters, 10 second space wave filter, 11 the 3rd wedges,
12 the 4th wedges, 13 bundling device 14 computer, 15 condenser lenses,
16 projection objectives, 17 testees, 18 CCD camera.
Specific embodiment
Below in conjunction with accompanying drawing, principle of the present utility model and feature are described, example is served only for explaining this practicality
New, it is not intended to limit scope of the present utility model.
As shown in figure 1, a kind of phase-shift type optical projection three-dimension measuring system, including single-mode laser 1, produce along laser instrument 1
The direction of advance of laser sequentially arrange condenser lenses composition optical beam-expanding system 2, one-dimensional beam-splitting optical grating 4, acousto-optic modulator 8,
Bundling device 13, condenser lenses 15 and projection objective 16.
The laser that described single-mode laser 1 produces diffuses into after light beam again by described one-dimensional through described optical beam-expanding system 2
Beam-splitting optical grating 4 resolves into two bundle laser, and described one-dimensional beam-splitting optical grating 4 is the one-dimensional diffraction grating of one-to-two, and separates two bundles
The light intensity of laser is identical.It is additionally provided with the first wedge 11 and the second light between described one-dimensional beam-splitting optical grating 4 and described acousto-optic modulator 8
Wedge 12, described first wedge 11 and described second wedge 12 adjust the deflection of the two bundle laser that one-dimensional beam-splitting optical grating 4 decomposes respectively
Angle θiIt is equal to the angle of incidence entering acousto-optic modulator 8, make two bundle laser produce Prague after described acousto-optic modulator 8 and spread out
Penetrate.It is provided with the first spatial filter 9 and second space wave filter 10, institute between described acousto-optic modulator 8 and described bundling device 13
State the first spatial filter 9 and two bundle laser after acousto-optic modulator 8 are formed by described second space wave filter 10 respectively
First-order diffraction light, this first-order diffraction light is θB.
Described acousto-optic modulator 8 is high bandwidth manipulator, the laser of modulated multi-wavelength, and its bandwidth is at least 40MHz,
The laser of modulated multi-wavelength, to make the convertible multi-frequency of interference fringe, its diffraction efficiency is more than or equal to 60%, so
Enough light intensity are had to form interference fringe.As the emergent ray θ by wedge 5 and wedge 6oWith Bragg angle θBIncide acousto-optic inclined
When turning device 8, diffraction light energy concentrates in 0 grade and one-level (± 1 grade) diffraction light, using spatial filter 9 and spatial filter
10 filter 0 grade and one of one-level light, can get single light beam.After acousto-optic modulator, 0 order diffraction light I0And I1Level is spread out
Penetrate light intensity and light intensity of incident light I of lightiRelation is：
Wherein L is transducer length, and ν=2 π/λ Δ nL passes through Phase delay produced by ultrasonic field for light wave.Δ n is super
Sound crystal sound induced refractive index changes, and first-order diffraction efficiency is：
Wherein M2For the quality factor of acousto-material, PsFor ultrasonic power, H is the width of transducer.
It is provided with the 3rd wedge 11, described second space filtering between described first spatial filter 9 and described bundling device 13
It is provided with the 4th wedge 12, described 3rd wedge 11 and described 4th wedge 12 are respectively by one-level between device 10 and described bundling device 13
Diffraction light adjustment angle projects on described bundling device 13.
Described first wedge 5, the second wedge 6, the 3rd wedge 11 and the 4th wedge 12 are size and material is identical
Circular wedge, is repeatedly cut to a cylindrical glass during processing, consistent with scale error to ensure face shape；First wedge
5th, the second wedge 6 is symmetrically disposed in two light paths；In the same fashion wedge 11, wedge 12 are placed on two after acousto-optic modulator
In light path.First wedge 5, the effect of the second wedge 6 are the Bragg diffraction Angle Position adjusting light beam to acousto-optic deflection device 8.Light
The direction of propagation after wedge for the line is changed into and can be obtained according to following formula：
Wherein, θiFor the angle of incidence of incident wedge, n is wedge refractive index, θoFor the wedge angle of emergence, α is the wedge angle of wedge.
Described bundling device 13 is to make laser beam produce the optical element interfered, preferably：Described bundling device 13 is light
Learn flat board.After first-order diffraction light adjustment angle projects on described bundling device 13, by forming interference light after described bundling device 13
Road；Described optical interference circuit amplified by described projection objective 16 again by described condenser lenses 15 after formed interference fringe project to by
Survey on object 17, described projection objective 16 is the measuring projector object lens of replaceable multiplying power, object lens enlargement ratio error≤
0.08%.Described CCD camera 18 obtains this interference fringe (sinusoidal grating) and carries out processing final recovery quilt by computer 14 afterwards
Survey the three-dimensional appearance of object 17, described CCD camera 18 acquisition frame rate is no less than 30fps.
In addition, described acousto-optic modulator 8 passes through radio-frequency power amplifier and Direct Digital Frequency Synthesizers 7 and computer 14
It is connected, described computer 14 is changed by changing the frequency control word of radio-frequency power amplifier and Direct Digital Frequency Synthesizers 7
Become the angle of emergence that light passes through acousto-optic modulator 8, thus changing the cycle of interference fringe to reach the purpose realizing phase shift striped,
Specific as follows：
The frequency-tuning range of described radio-frequency power amplifier and Direct Digital Frequency Synthesizers 7 is more than 40MHz, with compatibility
The frequency bandwidth of acousto-optic modulator, frequency F of its output sinusoidal analog signal is F=N f/2t(N is frequency control word, and f is
Clock frequency, t is the digit of phase accumulator).Frequency of sound wave f in acousto-optic modulator 8sEqual to radio-frequency power amplifier with directly
Meet the output frequency F of digital frequency synthesizer 7, therefore light passes through the deflection angle of acousto-optic modulator 8 rear stage diffracted rayEqual to Bragg angle θB, it is：
Wherein n is the refractive index of acousto-optic medium, vsIt is the velocity of sound, fsIt is frequency of sound wave, λ is optical wavelength.
Therefore, frequency control word N is changed by computer and just can change emergent ray angle, thus change interference fringe
Frequency.And fringe frequency fr and the angle of emergenceBetween relation be represented by(the angle of emergenceDuring very little).
Acousto-optic modulator 8 is connected with radio-frequency power amplifier and Direct Digital Frequency Synthesizers 7, radio-frequency power amplifier pair
The signal of Direct Digital Frequency Synthesizers is amplified, and changes frequency control word N by computer 14 and changes light by sound
The angle of emergence of photomodulator 8Thus changing fringe period, because the change of Direct Digital Frequency Synthesizers frequency only needs tens to receive
Second, the therefore cycle of interference fringe and phse conversion just can complete within the extremely short time, can complete phase shift bar at short notice
The project structured light of stricture of vagina.
This three-dimension measuring system between described optical beam-expanding system 2 and one-dimensional beam-splitting optical grating 4 and/or bundling device 13 with poly-
It is provided with the illuminator 3 changing the space that direction of illumination is occupied with contract measurement system, to improve this three-dimensional between focus lens 15
Measuring system uses flexibility ratio.
The foregoing is only preferred embodiment of the present utility model, not in order to limit this utility model, all in this practicality
Within new spirit and principle, any modification, equivalent substitution and improvement made etc., should be included in guarantor of the present utility model
Within the scope of shield.
Claims (9)
1. a kind of phase-shift type optical projection three-dimension measuring system it is characterised in that include single-mode laser (1) CCD camera (18) and
Computer (14), computer (14) is connected with CCD camera (18), along single-mode laser (1) produce laser direction of advance according to
The optical beam-expanding system (2) of secondary setting condenser lenses composition, one-dimensional beam-splitting optical grating (4), acousto-optic modulator (8), bundling device (13),
Condenser lenses (15) and projection objective (16)；
The laser that described single-mode laser (1) produces diffuses into after light beam again by described one-dimensional through described optical beam-expanding system (2)
Beam-splitting optical grating (4) resolves into two bundle laser, is additionally provided between described one-dimensional beam-splitting optical grating (4) and described acousto-optic modulator (8)
One wedge (5) and the second wedge (6), described first wedge (5) and described second wedge (6) adjust one-dimensional beam-splitting optical grating respectively
(4) deflection angle of the two bundle laser decomposing is equal to the angle of incidence entering acousto-optic modulator (8), makes two bundle laser through described acousto-optic
Manipulator (8) produces Bragg diffraction afterwards；
It is provided with the first spatial filter (9) and second space filtering between described acousto-optic modulator (8) and described bundling device (13)
Device (10), described first spatial filter (9) and described second space wave filter (10) respectively will be after acousto-optic modulators (8)
Two bundle laser formed first-order diffraction light；It is provided with the 3rd light between described first spatial filter (9) and described bundling device (13)
Wedge (11), is provided with the 4th wedge (12), described 3rd light between described second space wave filter (10) and described bundling device (13)
Wedge (11) and described 4th wedge (12) project first-order diffraction light adjustment angle on described bundling device (13) respectively, and pass through
Described bundling device (13) forms optical interference circuit afterwards；Described optical interference circuit passes through described condenser lenses (15) again by described projection objective
(16) form interference fringe after amplifying and project on testee (17), described CCD camera (18) is led to after obtaining this interference fringe
Cross computer (14) to carry out processing the final three-dimensional appearance recovering testee (17).
2. phase-shift type optical projection three-dimension measuring system according to claim 1 is it is characterised in that described acousto-optic modulator
(8) it is connected with computer (14) with Direct Digital Frequency Synthesizers (7) by radio-frequency power amplifier, described computer (14) is led to
Cross the frequency of change radio-frequency power amplifier and Direct Digital Frequency Synthesizers (7) and pass through acousto-optic modulator (8) changing light
The angle of emergence, thus changing fringe period.
3. phase-shift type optical projection three-dimension measuring system according to claim 1 is it is characterised in that described one-dimensional beam splitting light
Grid (4) are the one-dimensional diffraction grating of one-to-two, and it is identical to separate the light intensity of two bundle laser.
4. phase-shift type optical projection three-dimension measuring system according to claim 1 is it is characterised in that in described optical beam-expanding system
It is provided with change direction of illumination between system (2) and one-dimensional beam-splitting optical grating (4) and/or between bundling device (13) and condenser lenses (15)
The illuminator (3) in the space being occupied with contract measurement system.
5. phase-shift type optical projection three-dimension measuring system according to claim 1 is it is characterised in that described acousto-optic modulator
(8) it is high bandwidth manipulator, the laser of modulated multi-wavelength, its bandwidth is at least 40MHz, described acousto-optic modulator (8)
Diffraction efficiency is more than 60%.
6. phase-shift type optical projection three-dimension measuring system according to claim 2 is it is characterised in that described Direct Digital frequency
The frequency-tuning range of synthesizer (7) is more than 40MHz.
7. phase-shift type optical projection three-dimension measuring system according to claim 1 is it is characterised in that described bundling device (13) is
Optical flat.
8. according to the arbitrary described phase-shift type optical projection three-dimension measuring system of claim 1 to 7 it is characterised in that described projection
Object lens (16) are the measuring projector object lens of replaceable multiplying power, object lens enlargement ratio error≤0.08%.
9. according to the arbitrary described phase-shift type optical projection three-dimension measuring system of claim 1 to 7 it is characterised in that described CCD phase
Machine (18) acquisition frame rate is no less than 30fps.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201620867251.4U CN205981138U (en) | 2016-08-11 | 2016-08-11 | Phase shift formula optical projection three -dimensional measurement system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201620867251.4U CN205981138U (en) | 2016-08-11 | 2016-08-11 | Phase shift formula optical projection three -dimensional measurement system |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106152972A (en) * | 2016-08-11 | 2016-11-23 | 广西师范大学 | A kind of phase-shift type optical projection three-dimension measuring system and method |
| CN110045508A (en) * | 2018-01-16 | 2019-07-23 | 伊鲁米那股份有限公司 | The illumination imaging of double grating slide construction |
| CN111630432A (en) * | 2018-01-15 | 2020-09-04 | 莱卡微系统Cms有限责任公司 | Acousto-optic device and method |
| CN112268520A (en) * | 2020-09-30 | 2021-01-26 | 西安理工大学 | Non-contact flexible measurement method for gear tooth surface shape error |
| CN114364948A (en) * | 2019-09-13 | 2022-04-15 | 应用材料公司 | Measurement system and grating pattern array |
-
2016
- 2016-08-11 CN CN201620867251.4U patent/CN205981138U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106152972A (en) * | 2016-08-11 | 2016-11-23 | 广西师范大学 | A kind of phase-shift type optical projection three-dimension measuring system and method |
| CN111630432A (en) * | 2018-01-15 | 2020-09-04 | 莱卡微系统Cms有限责任公司 | Acousto-optic device and method |
| CN111630432B (en) * | 2018-01-15 | 2023-11-28 | 莱卡微系统Cms有限责任公司 | Acousto-optic apparatus and method |
| CN110045508A (en) * | 2018-01-16 | 2019-07-23 | 伊鲁米那股份有限公司 | The illumination imaging of double grating slide construction |
| CN114364948A (en) * | 2019-09-13 | 2022-04-15 | 应用材料公司 | Measurement system and grating pattern array |
| CN112268520A (en) * | 2020-09-30 | 2021-01-26 | 西安理工大学 | Non-contact flexible measurement method for gear tooth surface shape error |
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