CN118392304A - Spectrum measuring device and method and spectrometer - Google Patents
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Abstract
The application provides a spectrum measuring device, a method thereof and a spectrometer. The collimating lens component is arranged on the reflecting light path of the object to be detected, so that the collimating lens component can convert the reflecting light reflected by the object to be detected in multiple directions into parallel light which is emitted in parallel; the digital micro-mirror assembly is arranged on an emergent light path of the collimating lens assembly, and a plurality of modulation patterns loaded on the digital micro-mirror assembly are utilized to form a plurality of modulation light spots with different center wavelengths; the photoelectric detection assembly is arranged on the reflection light path of the digital micro-mirror assembly, so that the photoelectric detection assembly can sequentially collect and process data of the modulation light spots output by reflection of the digital micro-mirror assembly, and spectrum data and spectrum curves of reflection light reflected by an object to be detected are obtained. The application can reduce the equipment cost and the equipment volume of spectrum measurement and improve the spectrum measurement speed and the measurement precision.
Description
Technical Field
The application relates to the technical field of spectrometers, in particular to a spectrum measuring device and method and a spectrometer.
Background
Existing methods for obtaining spectra by spectrometers mainly include two types, namely, a grating type and a fourier transform type. The grating type is to decompose the incident light into spectra with different wavelengths by using a grating (one-dimensional), and then obtain a spectrum signal by using an array sensor, or obtain a spectrum signal by using a single-point detector and adopting a method of mechanically rotating the grating. The Fourier transform spectrometer adopts an interferometry method, uses a Michelson interferometer to generate interference signals of light waves with different wavelengths, and then uses a Fourier transform method to obtain light wave intensities with different frequencies, so as to obtain a spectrum.
However, in the prior art, since the grating spectrometer needs to adopt array detectors such as a CCD (charge coupled device), a CMOS (complementary metal oxide semiconductor) and the like, the measured wavelength is limited to a visible light wave band, and if a single-point detector is adopted, a mechanical mechanism is required to rotate the grating, so that the manufacturing cost is increased, the wave band width and the incident light intensity of the grating for light splitting are limited, and the reliability and the signal to noise ratio of the grating spectrometer are reduced. The Fourier transform spectrometer is suitable for detecting the mid-infrared band, a single-point detector with a large receiving area can be used without a slit for incidence, so that a high signal-to-noise ratio spectrum is obtained, but the interferometer serving as a core of the Fourier transform spectrometer is provided with a precise mechanical moving part, so that the Fourier transform spectrometer has the defects of high equipment cost, large volume and weight, long spectrum acquisition time and the like, and the application range of the Fourier transform spectrometer is limited.
Therefore, how to provide a spectrum measuring device, a method thereof and a spectrometer, which can reduce the equipment cost and the equipment volume of the spectrum measurement, improve the measuring speed and the measuring precision, and are technical problems to be solved by the person skilled in the art.
Disclosure of Invention
The present application aims to solve at least one of the technical problems in the related art to some extent.
Therefore, a first object of the present application is to provide a spectrum measuring apparatus, a method thereof and a spectrometer, which can reduce the equipment cost and the equipment volume of spectrum measurement and improve the measurement speed and the measurement accuracy of the spectrum data and the spectrum curve of the reflected light reflected by the object to be measured.
To achieve the above object, an embodiment of a first aspect of the present application provides a spectrum measuring apparatus, including: the device comprises a light source, a collimating lens component, a digital micro-mirror component and a photoelectric detection component; wherein,
The light source is arranged on one side of the object to be detected and is used for irradiating the object to be detected and forming reflected light;
The collimating lens component is arranged on a reflecting light path of the object to be detected and is used for converting multidirectional reflected light reflected by the object to be detected into parallel light along a first direction;
The digital micro-mirror assembly is arranged on an emergent light path of the collimating lens assembly, can sequentially perform gating modulation on parallel light incident along a first direction based on different loaded modulation patterns, and converges at a preset position to form a modulation light spot corresponding to a central wavelength;
The photoelectric detection assembly is arranged on a reflection light path of the digital micro-mirror assembly and is used for receiving the modulation light spots and outputting spectrum data and spectrum curves of reflection light reflected by the object to be detected based on the modulation light spots.
Optionally, the collimating lens assembly includes a first focusing lens and a second focusing lens disposed opposite to each other, and an aperture stop disposed between the first focusing lens and the second focusing lens; the first focusing lens is arranged on one side close to the object to be detected, and the focal positions between the second focusing lens and the first focusing lens are located in the light hole of the aperture diaphragm and coincide with each other.
Optionally, the digital micromirror assembly comprises a micromirror array and a modulation input unit, wherein the micromirror array is arranged on an emergent light path of the collimating lens assembly and comprises a plurality of micromirror units arranged in an array; the modulation input unit is used for outputting a corresponding control signal to each micro mirror unit so as to adjust the deflection direction of each micro mirror unit and form the modulation pattern on the micro mirror array.
Optionally, the modulation patterns are in one-to-one correspondence with the central wavelengths of the modulation spots.
Optionally, the modulation pattern includes an exclusive-or superposition pattern of the two-dimensional grating and the fresnel zone plate, and after the parallel light incident along the first direction is dispersed and focused by the micromirror array, the modulation light spot is formed at a preset position of the micromirror array in principle.
Optionally, the photoelectric detection assembly comprises a photoelectric detection unit and a data processing unit; wherein,
The photoelectric detection unit is arranged on a focus where the modulated light spots converge, and the data processing unit is connected with a signal output end of the photoelectric detection unit and is in communication connection with external display equipment;
The photoelectric detection unit converts the received spectrum intensity signal of the modulated light spot into a digital electric signal and outputs the digital electric signal to the data processing unit, and the data processing unit analyzes and processes the received digital electric signal and sends an analysis result to the external display device for display.
Optionally, the data processing unit decodes and analyzes the electrical signal by adopting a neural network learning method to obtain spectral data of the reflected light reflected by the object to be detected.
Optionally, the photoelectric detection unit is disposed at a focus center where the modulated light spots converge, and the photoelectric detection unit includes one of a linear array photoelectric sensor or a single-point photoelectric sensor.
To achieve the above object, an embodiment of a second aspect of the present application provides a spectrum measuring method, including the steps of:
s1, providing a light source, and irradiating the light source to an object to be detected to form reflected light;
S2, arranging a collimating lens assembly on one side of the object to be detected so as to receive reflected light reflected by the object to be detected and convert the multi-directional reflected light reflected by the object to be detected into parallel light which is emitted in parallel along a first direction;
S3, arranging a micro-mirror array on an emergent light path of the collimating lens assembly, and sequentially forming a plurality of different modulation patterns on the micro-mirror array by utilizing a modulation input unit so that the micro-mirror array can sequentially modulate parallel light which is parallel to incidence along a first direction and correspondingly form modulation light spots with different center wavelengths;
S4, spectrum acquisition and data processing are sequentially carried out on the modulated light spots with different center wavelengths through the photoelectric detection assembly, so that spectrum data and spectrum curves of reflected light reflected by the object to be detected are obtained.
To achieve the above object, an embodiment of a third aspect of the present application provides a spectrometer, which includes a spectrum measuring apparatus according to any one of the above.
The spectrum measuring device and the spectrum measuring method and the spectrum instrument provided by the application at least have the following beneficial effects:
According to the spectrum measuring device, the method and the spectrometer, the collimating lens component and the digital micro-mirror component are used for modulating the reflected light reflected by the object to be measured together, so that the modulating light spots with higher signal-to-noise ratio can be obtained, and a moving part is not needed, so that the measuring result of the spectrum measuring device provided by the application has better reliability. Meanwhile, the photoelectric detection component directly receives and data-collects the modulated light spots converged after dispersion, so that the optical path of the spectrum measuring device is shortened, the optical path structure is simplified, and the miniaturization of the spectrum measuring device is realized.
According to the spectrum measuring device, the method and the spectrometer, provided by the application, the collimating lens component is utilized to convert the reflected light of the object to be measured reflected in multiple directions into the light which is emitted in parallel in the fixed direction, so that the luminous flux which is incident to the digital micro-mirror component is improved, the spectrum intensity of the modulated light spot which is reflected and output can be improved when the subsequent digital micro-mirror component modulates the incident parallel light, the signal-to-noise ratio of the photoelectric detection component for data acquisition of the modulated light spot is further improved, and the accuracy of the spectrum data and the spectrum curve of the output reflected light is calculated.
According to the spectrum measuring device, the method and the spectrometer, different modulation patterns are formed by sequentially loading the digital micro-mirror assembly, so that the digital micro-mirror assembly can correspondingly output a plurality of modulation light spots with different center wavelengths under the condition that parallel incidence parallel light conditions are kept unchanged, further, the photoelectric detection assembly can correspondingly obtain a plurality of intensity parameters of different spectrums based on the different modulation light spots, and the plurality of intensity parameters of different spectrums are more beneficial to improving the accuracy and reliability of calculating the spectrum data and the spectrum curve of the output reflected light.
Additional aspects and advantages of the application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the application.
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The foregoing and/or additional aspects and advantages of the application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, in which:
fig. 1 is a schematic structural view of a spectrum measuring apparatus according to an embodiment of the present application.
Fig. 2 is a flow chart of a spectrum measuring method according to an embodiment of the application.
10 An object to be detected; 100 light sources; 200 a collimating lens assembly; 210 a first focusing lens; 220 aperture stop; 230 a second focusing lens; 300 digital micromirror assembly; 310 micromirror array; 320 modulating an input unit; 400 photoelectric detection components; 410 a photo detection unit; 420 a data processing unit; 500 external display device.
Detailed Description
Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present application and should not be construed as limiting the application.
According to one aspect of the present application, there is provided a spectrum measuring apparatus, as shown in fig. 1, which includes a light source 100, a collimator lens assembly 200, a digital micromirror assembly 300, and a photo detection assembly 400. Wherein the light source 100 is disposed at one side of the object 10 to be measured, for irradiating the object 10 to be measured and forming reflected light. The collimating lens assembly 200 is disposed on a reflection light path of the object to be measured 10 different from the light source 100, the digital micromirror assembly 300 is disposed on an exit light path of the collimating lens assembly 200, and the photoelectric detection assembly 400 is disposed on a reflection light path of the digital micromirror assembly 300.
The working principle of the present application is that, firstly, the collimating lens assembly 200 is disposed on the reflecting light path of the object to be measured 10 on the side different from the light source 100, so that the collimating lens assembly can receive part of the reflected light reflected by the object to be measured 10 outwards and convert the reflected light reflected in multiple directions into parallel light which is emitted in parallel along the first direction. Then, the digital micromirror assembly 300 is disposed on the outgoing light path of the collimating lens assembly 200 to receive parallel light incident in parallel, and the parallel light incident in parallel is selectively reflected (gated) and converged by using the modulation pattern loaded on the digital micromirror assembly 300 to form a modulated light spot with a specific center wavelength, and by sequentially loading different modulation patterns on the digital micromirror assembly 300, the parallel light incident in parallel can be modulated multiple times, and a plurality of modulated light spots with different center wavelengths can be sequentially formed. Finally, the photoelectric detection assembly 400 is disposed on the reflection optical path of the digital micro-mirror assembly 300, so that the photoelectric detection assembly 400 can sequentially receive, collect and convert the modulated light spots reflected and converged by the digital micro-mirror assembly 300, convert the optical signals of the modulated light spots into digital electric signals, and obtain the spectrum data and the spectrum curve of the reflected light reflected by the object to be detected 10 according to the digital electric signals, thereby realizing the spectrum analysis of the reflected light reflected by the object to be detected 10.
Therefore, the present application converts the reflected light reflected by the object to be measured 10 along multiple directions into parallel light emitted along a fixed direction by using the collimating lens assembly 200, so as to improve the luminous flux of the parallel light to the digital micro-mirror assembly 300, so that when the subsequent digital micro-mirror assembly 300 modulates the incident parallel light, the spectral intensity of the modulated light spot output by reflection can be improved, and further the signal-to-noise ratio of the data collection of the modulated light spot by the photoelectric detection assembly 400 is improved, and the accuracy of the spectral data and the spectral curve of the output reflected light is calculated.
Further, according to the application, different modulation patterns are sequentially formed by loading the digital micro-mirror assembly 300, so that the digital micro-mirror assembly 300 can correspondingly output a plurality of modulation light spots with different center wavelengths under the condition that parallel incidence parallel light conditions are kept unchanged, and further the photoelectric detection assembly 400 can correspondingly obtain a plurality of intensity parameters of different spectrums based on the different modulation light spots, and the plurality of intensity parameters of different spectrums are more beneficial to improving the accuracy and reliability of calculating the spectrum data and the spectrum curve of the output reflected light.
Further, the present application, through the common modulation of the reflected light reflected by the object to be measured 10 by the collimating lens assembly 200 and the digital micromirror assembly 300, can obtain a modulated light spot with a higher signal-to-noise ratio without using moving parts, so that the spectrum measuring device provided by the present application has better reliability.
It should be noted that, the light source 100 in the present application may be a spectrum corresponding to all bands of light such as ultraviolet light, visible light, near infrared light, mid infrared light, etc., so that the spectrum measuring device provided by the present application has a wider application range and lower use cost.
In some embodiments, the collimating lens assembly 200 includes a first focusing lens 210, a second focusing lens 230, and an aperture stop 220. Wherein the first focusing lens 210 and the second focusing lens 230 are disposed opposite to each other, and the aperture stop 220 is disposed between the first focusing lens 210 and the second focusing lens 230.
By disposing the first focusing lens 210 at a side close to the object 10 different from the light source 100 and opposite to the light source 100, the first focusing lens 210 can collect part of the reflected light reflected by the object 10 and collect the reflected light at the focal position of the first focusing lens 210, and disposing the second focusing lens 230 at a side of the first focusing lens 210 far away from the object 10, and the focal positions of the second focusing lens 230 and the first focusing lens 210 coincide, so that the second focusing lens 230 can reconvert the reflected light collected at the focal position by the first focusing lens 210 into parallel light that exits in parallel along the first direction, thereby improving the luminous flux and the spectral intensity of the parallel light incident on the digital micromirror assembly 300.
By disposing the aperture stop 220 between the first focusing lens 210 and the second focusing lens 230, and the focal point between the second focusing lens 230 and the first focusing lens 210 is disposed in the pupil of the aperture stop 220, the aperture stop 220 can function to filter the direction of incident reflected light. That is, the aperture stop 220 can transmit the reflected light condensed from the first focusing lens 210 and passing through the focus direction, while blocking the reflected light in other directions. The focal positions of the second focusing lens 230 and the first focusing lens 210 coincide, so that the reflected light incident to the second focusing lens 230 is deflected again by the second focusing lens 230 and is emitted in parallel along the first direction, thereby ensuring the uniformity of the incident direction and the uniformity of the spectrum intensity of the parallel light incident to the digital micromirror assembly 300.
In some embodiments, the digital micromirror assembly 300 includes a micromirror array 310 and a modulation input unit 320, the micromirror array 310 is disposed on the outgoing light path of the second focusing lens 230, and includes a substrate and a plurality of micromirror units arrayed on the substrate.
The micromirror array 310 may be a digital micromirror device (Digital Micromirror Device, DMD), which is used as an optical switch, and can be switched by deflection between two directions with a fixed angle by using each micromirror unit, so as to switch the optical switch on or off. The modulation input unit 320 is electrically connected to the substrate to output a corresponding control signal to each micromirror unit, and controls the deflection direction of each micromirror unit, thereby loading the modulation pattern onto the micromirror array 310.
The modulation input unit 320 may be a computing device, and is electrically connected to the substrate, so as to control the deflection direction of each micromirror unit, and the micromirror array 310 selectively reflects (gate-modulates) parallel light incident in parallel based on a modulation pattern formed by different micromirror unit arrangements and combinations, and converges at a preset position to form a spot-like or stripe-like modulated light spot. The micromirror units are arranged and combined to form different modulation patterns, and the central wavelengths of the modulation light spots are also different. That is, each modulation pattern satisfies a one-to-one correspondence with the center wavelength of the corresponding formed modulation spot, and the modulation pattern on the micromirror array 310 modulates parallel light incident in parallel, that is, modulates the center wavelength of the modulation spot of the reflected output.
As an example, when the reflected light reflected by the object to be measured 10 is visible light having a center wavelength range between 390nm to 760nm (also the center wavelength range of the light source 100), the modulation input unit 320 may form 38 modulation spots with 390nm as a start center wavelength and 10nm as an interval center wavelength, 760nm as an end center wavelength, based on the center wavelength range of the reflected light, that is, the center wavelengths corresponding to the modulation spots are 390nm, 400nm, 410nm, …, 740 nm, 750 nm, 760nm in this order. The 38 modulated spots correspond to 38 modulation patterns simultaneously. Therefore, the photodetection assembly 400 can obtain the intensity parameters corresponding to the 38 modulated light spots with different center wavelengths based on the 38 modulated light spots with different center wavelengths, and perform fitting and correction calculation through the spectrum curve of the photodetection assembly 400 under the standard center wavelength, thereby improving the accuracy and reliability of the spectrum data and the spectrum curve of the reflected light outputted by calculation.
As an example, the modulation patterns corresponding to different center wavelengths are the exclusive or superposition pattern of the two-dimensional grating and the fresnel zone plate, so as to realize dispersion and focusing of parallel light which is parallel to incidence, and form modulation light spots corresponding to the center wavelengths.
It should be noted that, the preset position is a focal position of the micromirror array 310 for reflecting and converging the parallel light gating modulation of the parallel light incident in parallel, that is, a setting position of the photoelectric detection assembly 400, and the micromirror array 310 sequentially focuses the modulated light spots with different center wavelengths at the preset position, so that the photoelectric detection assembly 400 calculates and outputs the spectrum data and the spectrum curve of the reflected light reflected by the object to be detected 10 based on sequentially receiving the modulated light spots.
In some embodiments, the photodetection assembly 400 includes a photodetection unit 410 and a data processing unit 420. The photodetection unit 410 is disposed at a focal point where the modulated light spots converge, and the data processing unit 420 is electrically connected to a signal output terminal of the photodetection unit 410 and is communicatively connected to the external display device 500.
The spectral intensity of the modulated light spot is collected in real time by arranging the photo-detection unit 410 at the focus where the modulated light spot converges, for example, by placing the collection surface of the photo-detection unit 410 at the center of the strip of the modulated light spot in the shape of a strip. The photodetection unit 410 includes, but is not limited to, one of a linear array photoelectric sensor or a single-point photoelectric sensor, so as to output digital electric signals with different degrees of conversion of different modulated light spots, which are sequentially received.
By connecting the data processing unit 420 with the signal output terminal of the photodetection unit 410 and connecting the external display device 500 with the communication of the data processing unit 420, the digital electric signal output by the photodetection unit 410 can be analyzed and processed by the data processing unit 420, and the output data processing result is sent to the external display device 500 for display.
The data processing unit 420, but not limited to, adopts a neural network learning method to decode and analyze the received digital electrical signal, so as to obtain the characteristic parameters of the object to be measured 10. The method of neural network learning is stored in a neural Network Processor (NPU), which processes, decodes and classifies spectral data based on received digital electrical signals. The method can learn and identify specific modes, features or wave bands in the spectrum signals, and realize automatic processing and analysis of the spectrum. For example, the neural network processor may apply a deep learning model, learn spectral features by training a large amount of spectral data, and be used for classification, quantitative analysis, spectral reconstruction, and the like.
The data processing unit 420 is in near field communication with the external display device 500 for transmitting the spectral data to the external display device 500 to instruct the external display device 500 to present the spectral data and the spectral curve. The communication of the data processing unit 420 with the external display device 500 includes communication of a wireless or wired communication protocol, including, but not limited to, bluetooth communication and WiFi communication. For example, the data processing unit 420 will be communicatively coupled to a portable display device to facilitate the carrying of the spectroscopic measuring device and the real-time measurement.
It should be noted that, the wavelength setting parameter of the photodetection unit 410, i.e. the wavelength range of the spectrum acquisition should correspond to the central wavelength of the modulated light spot, i.e. the central wavelength range of the modulated light spot should be within the range of the wavelength setting parameter of the photodetection unit 410.
In some embodiments, the spectroscopic measurement device further comprises a beam termination unit. The modulation pattern loaded on the micromirror array 310 not only performs gating modulation on parallel light incident in parallel and forms a modulated light spot to be incident to the photoelectric detection unit 410, but also reflects to the other direction to form useless non-modulated light, and by setting the beam termination unit on the outgoing path of the non-modulated light, interference of the non-modulated light of the photoelectric detection unit 410 in the data acquisition process of the modulated light spot can be reduced or avoided, so that the signal to noise ratio of the data acquisition process of the modulated light spot by the photoelectric detection unit 410 is improved.
According to a second aspect of the present application, there is provided a spectroscopic measurement method comprising employing a spectroscopic measurement device as described in any of the embodiments above. As shown in fig. 1 and 2, the spectrum measurement method specifically includes the following steps:
s1, providing a light source 100, and irradiating the light source 100 to an object 10 to be detected to form reflected light;
S2, arranging the collimating lens assembly 200 on one side of the object to be measured 10 to receive the reflected light reflected by the object to be measured 10 and convert the multi-directional reflected light reflected by the object to be measured 10 into parallel light which is emitted in parallel along a first direction;
s3, arranging the micro-mirror array 310 on an emergent light path of the collimating lens assembly 200, and sequentially forming a plurality of different modulation patterns on the micro-mirror array 310 by utilizing the modulation input unit 320, so that the micro-mirror array 310 can sequentially modulate parallel light which is parallel to enter along a first direction and correspondingly form modulation light spots with different center wavelengths;
s4, spectrum acquisition and data processing are sequentially carried out on the modulated light spots with different center wavelengths through the photoelectric detection assembly 400 so as to obtain spectrum data and spectrum curves of reflected light reflected by the object to be detected 10.
It can be understood that by disposing the collimator lens assembly 200 between the object to be measured 10 and the micromirror array 310, the incident spectrum of the micromirror array 310 is parallel light parallel to the first direction, thereby ensuring the uniformity of the direction of the reflected light incident to the micromirror array 310. Meanwhile, the parallel incident reflected light expands the collection range of the incident spectrum by the micromirror array 310, thereby improving the spectrum intensity of the modulated light spot of the reflected output. The spectrum intensity of the modulated light spots is improved, and the conversion efficiency and accuracy of the photoelectric conversion process of the modulated light spots collected by the photoelectric detection assembly 400 can be further improved.
By using the modulation input unit 320 to form a plurality of different modulation patterns on the micromirror array 310, the modulated light spots modulated and output by the micromirror array 310 can have different center wavelengths, so that the more the spectral intensity characteristic values under different center wavelength conditions are correspondingly output, the higher the signal-to-noise ratio of the spectral intensity data or the spectral curve calculated and output by the photoelectric detection assembly 400 is in the process of sequentially collecting and photoelectrically converting the modulated light spots by the photoelectric detection assembly 400. That is, by sequentially forming a plurality of different modulation patterns on the micromirror array 310, the measurement accuracy and reliability of the characteristic parameters of the object to be measured 10 can be improved.
In some embodiments, before the spectrum measurement method of the present application is used to measure the reflected light of the object to be measured 10, a calibration light path is further set up to obtain the response relationship between the reflected light formed by the reflection of the object to be measured 10 under the irradiation of different standard center wavelengths of the photoelectric detection assembly 400 and the modulated light spots of different center wavelengths, so as to calibrate the calculated and output spectrum intensity of the photoelectric detection assembly 400 with the standard spectrum, or obtain the correction parameter between the calculated and output spectrum intensity of the photoelectric detection assembly 400 and the corresponding standard spectrum, so that when the spectrum measurement method of the present application is used to perform spectrum measurement on the reflected light reflected by the object to be measured 10, the accuracy and reliability of the calculated and output spectrum intensity or spectrum curve are further improved.
According to a third aspect of the present application, there is provided a spectrometer, which includes a spectrum measuring apparatus according to any one of the above embodiments, and the content of the above embodiments of the spectrum detecting apparatus is applicable to the spectrometer of the present embodiment, where the function of the spectrometer of the present embodiment is the same as that of the above embodiments of the spectrum measuring apparatus, and the beneficial effects achieved by the spectrometer of the present embodiment are the same as those achieved by the above embodiments of the spectrum measuring apparatus.
In summary, the present application provides a spectrum measuring apparatus, a method thereof and a spectrometer, wherein the spectrum measuring apparatus includes a collimating lens assembly 200, a digital micromirror assembly 300 and a photo-detection assembly 400. The collimating lens assembly 200 is arranged on the reflecting light path of the object to be measured 10 on the side different from the light source 100, so that the collimating lens assembly can convert the reflecting light reflected in multiple directions by the object to be measured 10 into parallel light which is emitted in parallel along the first direction; by disposing the digital micromirror assembly 300 on the outgoing light path of the collimating lens assembly 200, a plurality of modulating patterns loaded on the digital micromirror assembly 300 are utilized to form a plurality of modulating light spots with different center wavelengths; by arranging the photoelectric detection assembly 400 on the reflection light path of the digital micro-mirror assembly 300, the photoelectric detection assembly 400 can sequentially collect and process data of the modulation light spots reflected and output by the digital micro-mirror assembly 300, and obtain the spectrum data and the spectrum curve of the reflection light reflected by the object to be detected 10, so that the spectrum analysis of the reflection light reflected by the object to be detected 10 is realized.
The spectrum measuring device provided by the embodiment of the application can obtain the modulation light spot with higher signal-to-noise ratio by commonly modulating the reflected light reflected by the object to be measured 10 through the collimating lens assembly 200 and the digital micro-mirror assembly 300 without using a moving part, so that the measuring result of the spectrum measuring device provided by the application has better reliability. Meanwhile, the photoelectric detection assembly 400 directly receives and data-collects the modulated light spots converged after dispersion, shortens the optical path of the spectrum measuring device, simplifies the optical path structure, and realizes the miniaturization of the spectrum measuring device.
By using the collimating lens assembly 200, the reflected light reflected by the object to be measured 10 along multiple directions is converted into parallel emergent light along a fixed direction, so that the luminous flux entering the digital micro-mirror assembly 300 is improved, the spectrum intensity of the modulated light spot output by reflection can be improved when the subsequent digital micro-mirror assembly 300 modulates the incident parallel light, and further the signal-to-noise ratio of the data acquisition of the modulated light spot by the photoelectric detection assembly 400 is improved, and the accuracy of the spectrum data and the spectrum curve of the output reflected light is calculated.
Through loading in proper order at digital micro mirror assembly 300 and forming different modulation patterns, can make digital micro mirror assembly 300 under the condition that parallel incidence's parallel light condition remains unchanged, can correspond and export a plurality of modulated faculae that have different center wavelength, and then make photoelectric detection assembly 400 can be based on different modulated faculae, correspond the intensity parameter that obtains a plurality of different spectrums, the intensity parameter of a plurality of different spectrums is favorable to improving the accuracy and the reliability of calculating the spectral data and the spectral curve of the reflected light of output more.
In the foregoing description of embodiments, reference has been made to the terms "one embodiment," "some embodiments," "example," "a particular example," or "some examples," etc., meaning that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
Claims (10)
1. The spectrum measuring device is characterized by comprising a light source, a collimating lens component, a digital micro-mirror component and a photoelectric detection component; wherein,
The light source is arranged on one side of the object to be detected and is used for irradiating the object to be detected and forming reflected light;
The collimating lens component is arranged on a reflecting light path of the object to be detected and is used for converting multidirectional reflected light reflected by the object to be detected into parallel light along a first direction;
The digital micro-mirror assembly is arranged on an emergent light path of the collimating lens assembly, can sequentially perform gating modulation on parallel light incident along a first direction based on different loaded modulation patterns, and converges at a preset position to form a modulation light spot corresponding to a central wavelength;
The photoelectric detection assembly is arranged on a reflection light path of the digital micro-mirror assembly and is used for receiving the modulation light spots and outputting spectrum data and spectrum curves of reflection light reflected by the object to be detected based on the modulation light spots.
2. The spectroscopic measurement device of claim 1, wherein the collimating lens assembly comprises oppositely disposed first and second focusing lenses, and an aperture stop disposed between the first and second focusing lenses; the first focusing lens is arranged on one side close to the object to be detected, and the focal positions between the second focusing lens and the first focusing lens are located in the light hole of the aperture diaphragm and coincide with each other.
3. The spectral measurement device of claim 2, wherein the digital micromirror assembly comprises a micromirror array and a modulation input unit, the micromirror array being disposed on an exit light path of the collimating lens assembly, comprising a plurality of micromirror units disposed in an array; the modulation input unit is used for outputting a corresponding control signal to each micro mirror unit so as to adjust the deflection direction of each micro mirror unit and form the modulation pattern on the micro mirror array.
4. A spectral measurement device according to claim 3, wherein the modulation pattern corresponds one-to-one to the center wavelength of the modulated light spot.
5. A spectral measurement device according to claim 3, wherein the modulation pattern comprises an exclusive-or superposition pattern of a two-dimensional grating and a fresnel zone plate, and wherein the modulation spots are formed at predetermined positions of the micromirror array after the parallel light incident in the first direction is dispersed and focused by the micromirror array.
6. A spectroscopic measurement device as claimed in claim 3 wherein the photo detection assembly comprises a photo detection unit and a data processing unit; wherein,
The photoelectric detection unit is arranged on a focus where the modulated light spots converge, and the data processing unit is connected with a signal output end of the photoelectric detection unit and is in communication connection with external display equipment;
The photoelectric detection unit converts the received spectrum intensity signal of the modulated light spot into a digital electric signal and outputs the digital electric signal to the data processing unit, and the data processing unit analyzes and processes the received digital electric signal and sends an analysis result to the external display device for display.
7. The spectral measurement device of claim 6, wherein the data processing unit decodes and analyzes the electrical signal to obtain spectral data of the reflected light reflected by the object under test using a neural network learning method.
8. The spectroscopic measurement device of claim 6, wherein the photodetection unit is disposed in a center of focus of the modulated light spot convergence, the photodetection unit comprising one of a linear array photosensor or a single-point photosensor.
9. A method of spectral measurement comprising the steps of:
s1, providing a light source, and irradiating the light source to an object to be detected to form reflected light;
S2, arranging a collimating lens assembly on one side of the object to be detected so as to receive reflected light reflected by the object to be detected and convert the multi-directional reflected light reflected by the object to be detected into parallel light which is emitted in parallel along a first direction;
S3, arranging a micro-mirror array on an emergent light path of the collimating lens assembly, and sequentially forming a plurality of different modulation patterns on the micro-mirror array by utilizing a modulation input unit so that the micro-mirror array can sequentially modulate parallel light which is parallel to incidence along a first direction and correspondingly form modulation light spots with different center wavelengths;
S4, spectrum acquisition and data processing are sequentially carried out on the modulated light spots with different center wavelengths through the photoelectric detection assembly, so that spectrum data and spectrum curves of reflected light reflected by the object to be detected are obtained.
10. A spectrometer, characterized in that it comprises a spectroscopic measuring device according to any one of claims 1-8.
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