CN118392304A - Spectrum measurement device and method thereof and spectrometer - Google Patents

Abstract

The application provides a spectrum measuring device, a method thereof and a spectrometer. The collimating lens component is arranged on the reflecting light path of the object to be detected, so that the collimating lens component can convert the reflecting light reflected by the object to be detected in multiple directions into parallel light which is emitted in parallel; the digital micro-mirror assembly is arranged on an emergent light path of the collimating lens assembly, and a plurality of modulation patterns loaded on the digital micro-mirror assembly are utilized to form a plurality of modulation light spots with different center wavelengths; the photoelectric detection assembly is arranged on the reflection light path of the digital micro-mirror assembly, so that the photoelectric detection assembly can sequentially collect and process data of the modulation light spots output by reflection of the digital micro-mirror assembly, and spectrum data and spectrum curves of reflection light reflected by an object to be detected are obtained. The application can reduce the equipment cost and the equipment volume of spectrum measurement and improve the spectrum measurement speed and the measurement precision.

Description

Spectrum measurement device and method thereof and spectrometer

Technical Field

The present application relates to the technical field of spectrometers, and in particular to a spectrum measurement device and method thereof, and a spectrometer.

Background technique

There are two main methods for obtaining spectra in existing spectrometers, namely grating type and Fourier transform type. Among them, the grating type uses a grating (one-dimensional) to decompose the incident light into spectra of different wavelengths, and then uses an array sensor to obtain the spectral signal, or uses a single-point detector to obtain the spectral signal by mechanically rotating the grating. The Fourier transform spectrometer uses the interference method, using a Michelson interferometer to generate interference signals of light waves of different wavelengths, and then uses the Fourier transform method to obtain the intensity of light waves of different frequencies, and then obtain the spectrum.

However, in the prior art, the grating spectrometer needs to use array detectors such as CCD and CMOS, so the measured wavelength is limited to the visible light band. If a single-point detector is used, a mechanical mechanism is required to rotate the grating, which not only increases the manufacturing cost, but also limits the band width and incident light intensity of the grating for spectroscopy, and also reduces the reliability and signal-to-noise ratio of the grating spectrometer. The Fourier transform spectrometer is suitable for detecting the mid-infrared band, and does not require a slit for incidence and can use a single-point detector with a large receiving area, thereby obtaining a high signal-to-noise ratio spectrum. However, the interferometer as the core of the Fourier transform spectrometer has precision mechanical moving parts, which leads to the Fourier transform spectrometer having the disadvantages of high equipment cost, large volume and weight, and long spectrum acquisition time, which limits the application scope of the Fourier transform spectrometer.

Therefore, how to provide a spectrum measurement device and method thereof and a spectrometer that can reduce the equipment cost and equipment volume of spectrum measurement and improve the measurement speed and measurement accuracy has become a technical problem that people in this field urgently need to solve.

Summary of the invention

The present application aims to solve one of the technical problems in the related art at least to some extent.

To this end, the first purpose of the present application is to propose a spectral measurement device, a method thereof and a spectrometer, which can reduce the equipment cost and equipment volume of spectral measurement, and improve the measurement speed and measurement accuracy of the spectral data and spectral curve of the reflected light reflected by the object to be measured.

To achieve the above-mentioned purpose, the first embodiment of the present application proposes a spectrum measurement device, including: a light source, a collimating lens assembly, a digital micromirror assembly and a photoelectric detection assembly; wherein,

The light source is disposed on one side of the object to be measured, and is used to illuminate the object to be measured and form reflected light;

The collimating lens assembly is arranged on the reflected light path of the object to be measured, and is used to convert the multi-directional reflected light reflected by the object to be measured into parallel light along a first direction;

The digital micromirror assembly is arranged on the outgoing light path of the collimating lens assembly, and can sequentially gate and modulate the parallel light incident along the first direction based on different loaded modulation patterns, and converge at a preset position to form a modulated light spot corresponding to the central wavelength;

The photoelectric detection component is arranged on the reflection light path of the digital micromirror component, and is used to receive the modulated light spot, and output the spectrum data and spectrum curve of the reflected light reflected by the object to be tested based on the modulated light spot.

Optionally, the collimating lens assembly includes a first focusing lens and a second focusing lens arranged opposite to each other, and an aperture diaphragm arranged between the first focusing lens and the second focusing lens; wherein the first focusing lens is arranged on a side close to the object to be measured, and the focal position between the second focusing lens and the first focusing lens is located in the light hole of the aperture diaphragm and overlaps with each other.

Optionally, the digital micromirror assembly includes a micromirror array and a modulation input unit, the micromirror array is arranged on the output light path of the collimating lens assembly, and includes a plurality of micromirror units arranged in an array; the modulation input unit is used to output a corresponding control signal to each of the micromirror units to adjust the deflection direction of each of the micromirror units and form the modulation pattern on the micromirror array.

Optionally, there is a one-to-one correspondence between the modulation pattern and the central wavelength of the modulated light spot.

Optionally, the modulation pattern comprises an XOR superposition pattern of a two-dimensional grating and a Fresnel zone plate, and parallel light incident along a first direction is dispersed and focused by the micromirror array to form the modulated light spot at a preset position of the micromirror array.

Optionally, the photoelectric detection component includes a photoelectric detection unit and a data processing unit; wherein,

The photoelectric detection unit is arranged at the focus where the modulated light spot converges, and the data processing unit is connected to the signal output end of the photoelectric detection unit and is in communication connection with an external display device;

The photoelectric detection unit converts the received spectral intensity signal of the modulated light spot into a digital electrical signal and outputs it to the data processing unit. The data processing unit analyzes and processes the received digital electrical signal and sends the analysis result to the external display device for display.

Optionally, the data processing unit decodes and analyzes the electrical signal using a neural network learning method to obtain spectral data of reflected light reflected by the object to be tested.

Optionally, the photoelectric detection unit is arranged at the focal center of the modulated light spot, and the photoelectric detection unit includes one of a linear array photoelectric sensor or a single point photoelectric sensor.

To achieve the above-mentioned purpose, the second aspect of the present application provides a spectrum measurement method, comprising the following steps:

S1, providing a light source, and irradiating the light source toward the object to be measured to form reflected light;

S2, disposing a collimating lens assembly on one side of the object to be measured to receive reflected light reflected by the object to be measured, and converting the multi-directional reflected light reflected by the object to be measured into parallel light emitted in parallel along a first direction;

S3, arranging a micromirror array on the outgoing light path of the collimating lens assembly, and using a modulation input unit to sequentially form a plurality of different modulation patterns on the micromirror array, so that the micromirror array can sequentially modulate parallel light incident in parallel along a first direction, and correspondingly form modulated light spots with different central wavelengths;

S4, performing spectrum acquisition and data processing on the modulated light spots of different central wavelengths in sequence through a photoelectric detection component to obtain spectrum data and spectrum curve of the reflected light reflected by the object to be tested.

To achieve the above-mentioned purpose, a third aspect of the present application provides a spectrometer, which includes a spectrum measurement device according to any one of the above-mentioned items.

The spectrum measurement device and method thereof and the spectrometer provided by the present application have at least the following beneficial effects:

The spectrum measurement device and method and spectrometer provided by the present application can obtain a modulated light spot with a higher signal-to-noise ratio by jointly modulating the reflected light reflected by the object to be measured through a collimating lens assembly and a digital micromirror assembly, without using moving parts, so that the measurement results of the spectrum measurement device provided by the present application have better reliability. At the same time, the photoelectric detection assembly directly receives and collects data from the modulated light spot that converges after dispersion, shortens the optical path of the spectrum measurement device, simplifies the optical path structure, and realizes the miniaturization of the spectrum measurement device.

The spectral measurement device, method and spectrometer provided in the present application utilize a collimating lens assembly to convert the reflected light of the object to be measured along multiple directions into parallel light emitted along a fixed direction, so as to increase the light flux incident on the digital micromirror assembly, so that when the subsequent digital micromirror assembly modulates the incident parallel light, it can increase the spectral intensity of the modulated light spot output by the reflected output, thereby improving the signal-to-noise ratio of the photoelectric detection assembly for data collection of the modulated light spot, and the accuracy of the spectral data and spectral curve of the calculated output reflected light.

A spectral measurement device, method and spectrometer provided by the present application can form different modulation patterns by sequentially loading different modulation patterns on a digital micromirror component, so that the digital micromirror component can output a plurality of modulated light spots with different central wavelengths under the condition that the parallel light condition of the parallel incidence remains unchanged, thereby enabling the photoelectric detection component to obtain intensity parameters of a plurality of different spectra based on the different modulated light spots. The intensity parameters of a plurality of different spectra are more conducive to improving the accuracy and reliability of the spectral data and spectral curve of the calculated output reflected light.

Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and/or additional aspects and advantages of the present application will become apparent and easily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:

FIG1 is a schematic structural diagram of a spectrum measurement device according to an embodiment of the present application.

FIG. 2 is a schematic flow chart of a spectrum measurement method according to an embodiment of the present application.

10 object to be tested; 100 light source; 200 collimating lens assembly; 210 first focusing lens; 220 aperture stop; 230 second focusing lens; 300 digital micromirror assembly; 310 micromirror array; 320 modulation input unit; 400 photoelectric detection assembly; 410 photoelectric detection unit; 420 data processing unit; 500 external display device.

Detailed ways

The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present application, and should not be construed as limiting the present application.

According to one aspect of the present application, a spectrum measuring device is provided, as shown in FIG1 , the spectrum measuring device includes a light source 100, a collimating lens assembly 200, a digital micromirror assembly 300 and a photodetection assembly 400. The light source 100 is arranged on one side of the object to be measured 10, and is used to irradiate the object to be measured 10 and form reflected light. The collimating lens assembly 200 is arranged on the reflected light path of the object to be measured 10 which is different from the side of the light source 100, the digital micromirror assembly 300 is arranged on the outgoing light path of the collimating lens assembly 200, and the photodetection assembly 400 is arranged on the reflected light path of the digital micromirror assembly 300.

The working principle of the present application is that, first, by setting the collimating lens assembly 200 on the reflected light path of the object to be tested 10 on a side different from the light source 100, the collimating lens assembly can receive part of the reflected light reflected outward from the object to be tested 10, and convert the reflected light reflected in multiple directions into parallel light emitted in parallel along the first direction. Then, by setting the digital micromirror assembly 300 on the emission light path of the collimating lens assembly 200 to receive the parallel light incident in parallel, and using the modulation pattern loaded on the digital micromirror assembly 300, the parallel light incident in parallel is selectively reflected (selected) and converged to form a modulated light spot with a specific central wavelength, and by sequentially loading different modulation patterns on the digital micromirror assembly 300, the parallel light incident in parallel can be modulated multiple times, and multiple modulated light spots with different central wavelengths can be sequentially formed. Finally, by setting the photoelectric detection component 400 in the reflected light path of the digital micromirror component 300, the photoelectric detection component 400 can sequentially receive, collect and convert the modulated light spot reflected and converged by the digital micromirror component 300 into photoelectric signals, convert the light signal of the modulated light spot into a digital electrical signal, and obtain the spectral data and spectral curve of the reflected light reflected by the object to be tested 10 according to the digital electrical signal, thereby realizing the spectral analysis of the reflected light reflected by the object to be tested 10.

Therefore, the present application utilizes a collimating lens assembly 200 to convert the reflected light of the object to be tested 10 in multiple directions into parallel light emitted in a fixed direction, so as to increase the luminous flux of the parallel light to the digital micromirror assembly 300, so that when the subsequent digital micromirror assembly 300 modulates the incident parallel light, it can increase the spectral intensity of the modulated light spot of the reflected output, thereby improving the signal-to-noise ratio of the photoelectric detection assembly 400 for data collection of the modulated light spot, and the accuracy of the spectral data and spectral curve of the calculated output reflected light.

Furthermore, the present application can sequentially load different modulation patterns into the digital micromirror assembly 300, so that the digital micromirror assembly 300 can output a plurality of modulated light spots with different central wavelengths under the condition of parallel incident light remaining unchanged, thereby enabling the photoelectric detection assembly 400 to obtain intensity parameters of a plurality of different spectra based on the different modulated light spots. The intensity parameters of a plurality of different spectra are more conducive to improving the accuracy and reliability of the calculated output spectral data and spectral curve of the reflected light.

Furthermore, the present application can obtain a modulated light spot with a higher signal-to-noise ratio by jointly modulating the reflected light reflected by the object to be measured 10 through the collimating lens assembly 200 and the digital micromirror assembly 300 without using moving parts, so that the spectral measurement device provided by the present application has better reliability.

It should be noted that the light source 100 in the present application can correspond to a full-band spectrum including ultraviolet, visible light, near-infrared light, mid-infrared light, etc., so that the spectral measurement device provided by the present application has a wider application range and lower use cost.

In some embodiments, the collimating lens assembly 200 includes a first focusing lens 210, a second focusing lens 230 and an aperture stop 220. The first focusing lens 210 and the second focusing lens 230 are arranged opposite to each other, and the aperture stop 220 is arranged between the first focusing lens 210 and the second focusing lens 230.

By arranging the first focusing lens 210 on a side close to the object to be measured 10 different from the light source 100 and relative to the light source 100, the first focusing lens 210 can collect part of the reflected light reflected by the object to be measured 10 and converge it at the focal position of the first focusing lens 210, and the second focusing lens 230 is arranged on a side of the first focusing lens 210 away from the object to be measured 10, and the focal positions of the second focusing lens 230 and the first focusing lens 210 coincide, so that the second focusing lens 230 can convert the reflected light converged at the focal position by the first focusing lens 210 into parallel light emitted in parallel along the first direction, thereby improving the luminous flux and spectral intensity of the parallel light incident on the digital micromirror assembly 300.

By setting the aperture stop 220 between the first focusing lens 210 and the second focusing lens 230, and the focus between the second focusing lens 230 and the first focusing lens 210 is set in the light hole of the aperture stop 220, the aperture stop 220 can play a role in filtering the direction of the incident reflected light. In other words, the aperture stop 220 can pass the reflected light that converges from the first focusing lens 210 and passes through the focus direction, and block the reflected light in other directions. The focus position between the second focusing lens 230 and the first focusing lens 210 coincides, so that the incident reflected light to the second focusing lens 230 will be deflected by the second focusing lens 230 again and emitted in parallel along the first direction, ensuring the uniformity of the incident direction and the uniformity of the spectral intensity of the parallel light incident to the digital micromirror assembly 300.

In some embodiments, the digital micromirror assembly 300 includes a micromirror array 310 and a modulation input unit 320. The micromirror array 310 is arranged on the output light path of the second focusing lens 230, and includes a substrate and a plurality of micromirror units arranged in an array on the substrate.

The micromirror array 310 may be a digital micromirror device (DMD). As an optical switch, the digital micromirror device can utilize each micromirror unit to deflect and switch between two directions at a fixed angle to realize the opening and closing of the optical switch. The modulation input unit 320 is electrically connected to the substrate to output a corresponding control signal to each micromirror unit, control the deflection direction of each micromirror unit, and then load the modulation pattern onto the micromirror array 310.

The modulation input unit 320 can be a computing device, which can control the deflection direction of each micromirror unit by being electrically connected to the substrate. The micromirror array 310 selectively reflects (gated modulation) the parallel light incident in parallel based on the modulation pattern formed by the arrangement and combination of different micromirror units, and converges at a preset position to form a spot-shaped or strip-shaped modulated light spot. The modulation patterns formed by the arrangement and combination of micromirror units are different, and the central wavelength of the modulated light spot is also different. In other words, there is a one-to-one correspondence between each modulation pattern and the central wavelength of the corresponding modulated light spot. The modulation of the parallel light incident in parallel by the modulation pattern on the micromirror array 310 is the modulation of the central wavelength of the modulated light spot output by the reflection.

As an example, when the reflected light reflected by the object to be measured 10 is visible light with a central wavelength range between 390nm and 760nm (also the central wavelength range of the light source 100), the modulation input unit 320 can form 38 modulated light spots with 390nm as the starting central wavelength, 10nm interval central wavelength, and 760nm as the ending central wavelength based on the central wavelength range of the reflected light, that is, the central wavelengths corresponding to the modulated light spots are 390nm, 400nm, 410nm, ..., 740nm, 750nm, and 760nm, respectively. The 38 modulated light spots also correspond to 38 modulation patterns. Thus, the photoelectric detection component 400 can obtain the intensity parameters corresponding to the modulated light spots with 38 different central wavelengths based on the 38 modulated light spots with different central wavelengths, and perform fitting and correction calculation with the spectral curve of the photoelectric detection component 400 at the standard central wavelength, thereby improving the accuracy and reliability of the spectral data and spectral curve of the calculated output reflected light.

As an example, the modulation patterns corresponding to different central wavelengths are XOR superposition patterns of a two-dimensional grating and a Fresnel zone plate, so as to achieve dispersion and focusing of parallel incident parallel light and form a modulated light spot corresponding to the central wavelength.

It should be noted that the above-mentioned preset position is the focal position where the micromirror array 310 reflects and converges the parallel light incident thereon after modulation and selection, that is, the setting position of the photoelectric detection component 400. The micromirror array 310 focuses the modulated light spots of different central wavelengths at the preset positions in sequence, so that the photoelectric detection component 400 calculates and outputs the spectral data and spectral curve of the reflected light reflected by the object to be tested 10 based on the sequential reception of the modulated light spots.

In some embodiments, the photodetection assembly 400 includes a photodetection unit 410 and a data processing unit 420. The photodetection unit 410 is disposed at the focus of the modulated light spot, and the data processing unit 420 is electrically connected to the signal output end of the photodetection unit 410 and is connected to the external display device 500 for communication.

By placing the photoelectric detection unit 410 at the focus of the modulated light spot, for example, placing the collection surface of the photoelectric detection unit 410 at the center of the strip of the modulated light spot, the spectral intensity of the modulated light spot can be collected in real time. The photoelectric detection unit 410 includes but is not limited to using one of a linear array photoelectric sensor or a single point photoelectric sensor to convert different modulated light spots received in sequence into digital electrical signals of different degrees and output.

By connecting the data processing unit 420 to the signal output end of the photodetection unit 410, and connecting the external display device 500 to the data processing unit 420 for communication, the digital electrical signal output by the photodetection unit 410 can be analyzed and processed by the data processing unit 420, and the output data processing result can be sent to the external display device 500 for display.

The data processing unit 420 is not limited to using a neural network learning method to decode and analyze the received digital electrical signal to obtain the characteristic parameters of the object to be tested 10. The neural network learning method is stored in a neural network processor (NPU), which processes, decodes and classifies the spectral data based on the received digital electrical signal. It can learn and identify specific patterns, features or bands in the spectral signal to achieve automatic processing and analysis of the spectrum. For example, the neural network processor can apply a deep learning model to learn spectral features by training a large amount of spectral data, and use it for tasks such as classification, quantitative analysis, and spectral reconstruction.

The data processing unit 420 is connected to the external display device 500 by near field communication, and is used to send the spectrum data to the external display device 500 to instruct the external display device 500 to display the spectrum data and the spectrum curve. The communication between the data processing unit 420 and the external display device 500 includes communication via wireless or wired communication protocols, and the wireless communication protocol includes but is not limited to Bluetooth communication and WiFi communication. For example, the data processing unit 420 will be connected to a portable display device for carrying and real-time measurement of the spectrum measurement device.

It should be noted that the wavelength setting parameters of the photoelectric detection unit 410, that is, the wavelength range of spectrum collection should correspond to the central wavelength of the modulated light spot, that is, the central wavelength range of the modulated light spot should be within the range of the wavelength setting parameters of the photoelectric detection unit 410.

In some embodiments, the spectrum measurement device further includes a beam termination unit. The modulation pattern loaded on the micromirror array 310 not only performs gate modulation on the parallel incident parallel light and forms a modulated light spot incident on the photoelectric detection unit 410, but also reflects in another direction to form useless non-modulated light. By setting the beam termination unit on the exit path of the non-modulated tube light, the interference of the non-modulated light in the process of data collection of the modulated light spot by the photoelectric detection unit 410 can be reduced or avoided, thereby improving the signal-to-noise ratio of the process of data collection of the modulated light spot by the photoelectric detection unit 410.

According to a second aspect of the present application, a spectrum measurement method is provided, including using the spectrum measurement device described in any of the above embodiments. As shown in Figures 1 and 2, the spectrum measurement method specifically includes the following steps:

S1, providing a light source 100, and irradiating the light source 100 toward the object to be tested 10 to form reflected light;

S2, disposing the collimating lens assembly 200 on one side of the object to be tested 10 to receive the reflected light reflected by the object to be tested 10, and converting the multi-directional reflected light reflected by the object to be tested 10 into parallel light emitted in parallel along a first direction;

S3, placing the micromirror array 310 on the outgoing light path of the collimating lens assembly 200, and using the modulation input unit 320 to sequentially form a plurality of different modulation patterns on the micromirror array 310, so that the micromirror array 310 can sequentially modulate the parallel light incident in parallel along the first direction, and correspondingly form modulated light spots with different central wavelengths;

S4, using the photoelectric detection component 400 to sequentially perform spectrum acquisition and data processing on the modulated light spots of different central wavelengths, so as to obtain the spectrum data and spectrum curve of the reflected light reflected by the object to be tested 10.

It is understandable that, by arranging the collimating lens assembly 200 between the object to be measured 10 and the micromirror array 310, the incident spectrum of the micromirror array 310 is parallel light parallel to the first direction, thereby ensuring the directional uniformity of the reflected light incident to the micromirror array 310. At the same time, the parallel incident reflected light expands the acquisition range of the incident spectrum of the micromirror array 310, thereby improving the spectral intensity of the modulated light spot output by the reflection. Increasing the spectral intensity of the modulated light spot can further improve the conversion efficiency and accuracy of the photoelectric detection assembly 400 in the acquisition and photoelectric conversion process of the modulated light spot.

By using the modulation input unit 320 to form a plurality of different modulation patterns on the micromirror array 310, the modulated light spot modulated and output by the micromirror array 310 can have different central wavelengths, and then in the process of sequentially collecting and photoelectrically converting the modulated light spot by the photodetection component 400, the spectral intensity characteristic values under different central wavelength conditions can be output accordingly. The more spectral intensity characteristic values under different central wavelength conditions, the higher the signal-to-noise ratio of the spectral intensity data or spectral curve calculated and output by the photodetection component 400. In other words, by sequentially forming a plurality of different modulation patterns on the micromirror array 310, the measurement accuracy and reliability of the characteristic parameters of the object to be measured 10 can be improved.

In some embodiments, before using the spectral measurement method of the present application to measure the reflected light of the object to be tested 10, a calibration optical path is also included to obtain the response relationship between the reflected light formed by the object to be tested 10 reflected by the photoelectric detection component 400 under different standard central wavelengths and the modulated light spots of different central wavelengths, so as to calibrate the spectral intensity calculated and output by the photoelectric detection component 400 with the standard spectrum, or obtain the correction parameters between the spectral intensity calculated and output by the photoelectric detection component 400 and the corresponding standard spectrum, so as to further improve the accuracy and reliability of the calculated output spectral intensity or spectral curve when using the spectral measurement method of the present application to perform spectral measurement of the reflected light reflected by the object to be tested 10.

According to a third aspect of the present application, a spectrometer is provided, which includes a spectral measurement device according to any one of the above-mentioned embodiments, and the contents of the above-mentioned spectral detection device embodiments are applicable to the spectrometer in this embodiment. The functions specifically implemented by the spectrometer described in this embodiment are the same as those in the above-mentioned spectral measurement device embodiments, and the beneficial effects achieved are also the same as the beneficial effects achieved by the above-mentioned spectral measurement device embodiments.

In summary, the present application provides a spectrum measurement device and method thereof and a spectrometer, the spectrum measurement device comprising a collimating lens assembly 200, a digital micromirror assembly 300 and a photodetection assembly 400. By arranging the collimating lens assembly 200 on the reflected light path of the object to be measured 10 on a side different from the light source 100, the collimating lens assembly can convert the reflected light reflected by the object to be measured 10 in multiple directions into parallel light emitted in parallel along a first direction; by arranging the digital micromirror assembly 300 on the exit light path of the collimating lens assembly 200, a plurality of modulation patterns loaded on the digital micromirror assembly 300 are used to form a plurality of modulated light spots with different central wavelengths; by arranging the photodetection assembly 400 on the reflected light path of the digital micromirror assembly 300, the photodetection assembly 400 can sequentially collect and process the modulated light spots reflected and output by the digital micromirror assembly 300, and obtain the spectrum data and spectrum curve of the reflected light reflected by the object to be measured 10, so as to realize the spectrum analysis of the reflected light reflected by the object to be measured 10.

The spectrum measurement device provided in the embodiment of the present application modulates the reflected light reflected by the object to be measured 10 through the collimating lens assembly 200 and the digital micromirror assembly 300, so as to obtain a modulated light spot with a higher signal-to-noise ratio without using moving parts, so that the measurement result of the spectrum measurement device provided by the present application has better reliability. At the same time, the photoelectric detection assembly 400 directly receives and collects data from the modulated light spot converged after dispersion, shortens the optical path of the spectrum measurement device, simplifies the optical path structure, and realizes the miniaturization of the spectrum measurement device.

By utilizing the collimating lens assembly 200, the reflected light of the object to be tested 10 in multiple directions is converted into parallel light emitted in a fixed direction, so as to increase the light flux incident on the digital micromirror assembly 300, so that when the subsequent digital micromirror assembly 300 modulates the incident parallel light, the spectral intensity of the modulated light spot output by the reflection can be increased, thereby improving the signal-to-noise ratio of the photoelectric detection assembly 400 for data collection on the modulated light spot, and the accuracy of the spectral data and spectral curve of the calculated output reflected light.

By sequentially loading different modulation patterns on the digital micromirror assembly 300, the digital micromirror assembly 300 can output a plurality of modulated light spots with different central wavelengths while keeping the parallel light conditions of the parallel incident light unchanged, thereby enabling the photoelectric detection assembly 400 to obtain intensity parameters of a plurality of different spectra based on the different modulated light spots. The intensity parameters of a plurality of different spectra are more conducive to improving the accuracy and reliability of the spectral data and spectral curve of the calculated output reflected light.

In the description of the aforementioned embodiments, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

Claims (10)

1. A spectrum measuring device, characterized in that it comprises a light source, a collimating lens assembly, a digital micromirror assembly and a photoelectric detection assembly; wherein: The light source is disposed on one side of the object to be measured, and is used to illuminate the object to be measured and form reflected light; The collimating lens assembly is arranged on the reflected light path of the object to be measured, and is used to convert the multi-directional reflected light reflected by the object to be measured into parallel light along a first direction; The digital micromirror assembly is arranged on the outgoing light path of the collimating lens assembly, and can sequentially gate and modulate the parallel light incident along the first direction based on different loaded modulation patterns, and converge at a preset position to form a modulated light spot corresponding to the central wavelength; The photoelectric detection component is arranged on the reflection light path of the digital micromirror component, and is used to receive the modulated light spot, and output the spectrum data and spectrum curve of the reflected light reflected by the object to be tested based on the modulated light spot. 2. The spectral measurement device according to claim 1 is characterized in that the collimating lens assembly includes a first focusing lens and a second focusing lens arranged opposite to each other, and an aperture stop arranged between the first focusing lens and the second focusing lens; wherein the first focusing lens is arranged on a side close to the object to be measured, and the focal position between the second focusing lens and the first focusing lens is located in the light hole of the aperture stop and overlaps with each other. 3. The spectral measurement device according to claim 2 is characterized in that the digital micromirror assembly includes a micromirror array and a modulation input unit, the micromirror array is arranged on the output light path of the collimating lens assembly, and includes a plurality of micromirror units arranged in an array; the modulation input unit is used to output a corresponding control signal to each of the micromirror units to adjust the deflection direction of each of the micromirror units and form the modulation pattern on the micromirror array. 4 . The spectrum measuring device according to claim 3 , wherein the modulation pattern corresponds to the central wavelength of the modulated light spot in a one-to-one manner. 5. The spectral measurement device according to claim 3 is characterized in that the modulation pattern includes an XOR superposition pattern of a two-dimensional grating and a Fresnel zone plate, and after the parallel light incident along the first direction is dispersed and focused by the micromirror array, the modulated light spot is formed at a preset position of the micromirror array. 6. The spectrum measuring device according to claim 3, characterized in that the photoelectric detection component comprises a photoelectric detection unit and a data processing unit; wherein, The photoelectric detection unit is arranged at the focus where the modulated light spot converges, and the data processing unit is connected to the signal output end of the photoelectric detection unit and is in communication connection with an external display device; The photoelectric detection unit converts the received spectral intensity signal of the modulated light spot into a digital electrical signal and outputs it to the data processing unit. The data processing unit analyzes and processes the received digital electrical signal and sends the analysis result to the external display device for display. 7 . The spectrum measuring device according to claim 6 , wherein the data processing unit decodes and analyzes the electrical signal using a neural network learning method to obtain spectrum data of the reflected light reflected by the object to be measured. 8 . The spectrum measuring device according to claim 6 , wherein the photoelectric detection unit is arranged at the focal center of the modulated light spot, and the photoelectric detection unit comprises one of a linear array photoelectric sensor or a single point photoelectric sensor. 9. A spectrum measurement method, characterized in that it comprises the following steps: S1, providing a light source, and irradiating the light source toward the object to be measured to form reflected light; S2, disposing a collimating lens assembly on one side of the object to be measured to receive reflected light reflected by the object to be measured, and converting the multi-directional reflected light reflected by the object to be measured into parallel light emitted in parallel along a first direction; S3, arranging a micromirror array on the outgoing light path of the collimating lens assembly, and using a modulation input unit to sequentially form a plurality of different modulation patterns on the micromirror array, so that the micromirror array can sequentially modulate parallel light incident in parallel along a first direction, and correspondingly form modulated light spots with different central wavelengths; S4, performing spectrum acquisition and data processing on the modulated light spots of different central wavelengths in sequence through a photoelectric detection component to obtain spectrum data and spectrum curve of the reflected light reflected by the object to be tested. 10. A spectrometer, characterized in that the spectrometer comprises the spectrum measuring device according to any one of claims 1 to 8.