CN118338217A - MEMS speaker of crystal structure - Google Patents
MEMS speaker of crystal structure Download PDFInfo
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- CN118338217A CN118338217A CN202410585652.XA CN202410585652A CN118338217A CN 118338217 A CN118338217 A CN 118338217A CN 202410585652 A CN202410585652 A CN 202410585652A CN 118338217 A CN118338217 A CN 118338217A
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- Prior art keywords
- crystal
- crystal body
- ring
- circuit board
- elastic
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- 239000013078 crystal Substances 0.000 title claims abstract description 100
- 239000000463 material Substances 0.000 claims description 5
- 239000013013 elastic material Substances 0.000 claims description 4
- 239000012634 fragment Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 230000009467 reduction Effects 0.000 abstract description 5
- 230000008901 benefit Effects 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 14
- 235000012239 silicon dioxide Nutrition 0.000 description 12
- 239000010453 quartz Substances 0.000 description 10
- 238000005520 cutting process Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Piezo-Electric Transducers For Audible Bands (AREA)
Abstract
The invention discloses an MEMS speaker with a crystal structure, and belongs to the technical field of speakers. The MEMS loudspeaker with the crystal structure comprises a shell, wherein the upper end of the shell is connected with a diaphragm structure, the lower end of the shell is provided with a circuit board, an elastic piece structure is arranged in the shell between the diaphragm structure and the circuit board, a crystal body is connected between the elastic piece structure and the diaphragm structure, and the crystal body is electrically connected with the circuit board. The invention solves the problem that the vibration amplitude of the traditional MEMS loudspeaker is smaller, the circuit board, the diaphragm structure and the spring plate structure are fixed through the shell, the crystal body is arranged on the spring plate structure, the crystal body is controlled to deform up and down by utilizing the piezoelectric resonance phenomenon, the crystal body drives the diaphragm structure connected with the crystal body to vibrate up and down to produce sound, the advantage of manufacturing the MEMS loudspeaker is more obvious, and the loudspeaker with the crystal structure can also be applied to the field of noise reduction earphones.
Description
Technical Field
The invention relates to the technical field of speakers, in particular to a MEMS speaker with a crystal structure.
Background
The low frequency characteristic of the loudspeaker is related to the amplitude of the diaphragm, depending on the characteristics of the loudspeaker. The larger the amplitude of the diaphragm vibration, the better the low frequency effect of the loudspeaker. The vibration amplitude of the existing MEMS loudspeaker is smaller and basically smaller than 0.5mm, so that the low-frequency effect is poor. On the other hand, the amplitude is large, the output sensitivity is relatively higher when the loudspeaker is made into a small volume, and the output sensitivity of the existing small-volume loudspeaker is not high.
The crystal inside the crystal resonator is quartz crystal, and the chemical formula is silicon dioxide SiO2. The quartz is characterized in that: the chemical property is very stable, the thermal expansion coefficient is very small, and the oscillation frequency is also very stable. The working principle of the crystal oscillator is as follows: a quartz crystal oscillator is a resonant device made by using the piezoelectric effect of quartz crystal, and its basic constitution is roughly: a quartz crystal resonator, called quartz crystal or crystal oscillator for short, is formed by cutting a slice from a quartz crystal according to a certain azimuth angle, coating silver layers on two corresponding surfaces of the quartz crystal as electrodes, welding a lead wire on each electrode to a pin, and adding a packaging shell.
The quartz crystal is used for the MEMS loudspeaker, so that the size of the loudspeaker can be reduced, and the sensitivity of the MEMS loudspeaker can be improved.
Disclosure of Invention
The invention aims to provide an MEMS loudspeaker with a crystal structure, which is characterized in that a circuit board, a diaphragm structure and a spring plate structure are fixed through a shell, a crystal body is arranged on the spring plate structure, the crystal body is controlled to deform up and down by utilizing a piezoelectric resonance phenomenon, and the crystal body drives the diaphragm structure connected with the crystal body to vibrate up and down to produce sound, so that the problems in the background art are solved.
In order to achieve the above purpose, the present invention provides the following technical solutions: the MEMS loudspeaker with the crystal structure comprises a shell, wherein the upper end of the shell is connected with a diaphragm structure, the lower end of the shell is provided with a circuit board, an elastic piece structure is arranged in the shell between the diaphragm structure and the circuit board, a crystal body is connected between the elastic piece structure and the diaphragm structure, and the crystal body is electrically connected with the circuit board.
Preferably, the elastic sheet structure comprises an elastic ring and an elastic frame, wherein the inner ring of the elastic ring is fixedly connected with the elastic frame, and the elastic frame is provided with a conductive circuit.
Preferably, the elastic ring and the elastic frame are made of one of stainless steel and copper materials.
Preferably, the membrane structure comprises a folding ring, a ball top and a supporting ring, wherein the edge of the folding ring is connected with the upper end of the supporting ring, the supporting ring is connected with the elastic ring, and the inner ring of the folding ring is connected with the edge of the ball top.
Preferably, the folding ring is made of elastic material, and the dome is made of rigid material.
Preferably, the crystal body is connected with the upper surface of the elastic frame, the upper end of the crystal body is connected with the ball top, and the crystal body is electrically connected with the circuit board through the conductive circuit.
Preferably, the crystal body is at least one, and when more than two crystal bodies are arranged, the crystal bodies are connected in parallel or in series.
Preferably, one side of the circuit board, which is close to the crystal body, is connected with the conductive circuit, and the other side of the circuit board is provided with a bonding pad.
Compared with the prior art, the invention has the beneficial effects that:
According to the invention, the circuit board, the diaphragm structure and the elastic sheet structure are fixed through the shell, the crystal body is arranged on the elastic sheet structure, the crystal body is controlled to deform up and down by utilizing the piezoelectric resonance phenomenon, the crystal body drives the diaphragm structure connected with the crystal body to vibrate up and down to produce sound, and the maximum amplitude of the crystal body can reach 1mm, so that compared with piezoelectric ceramics and electrostatic diaphragms, the advantage of manufacturing the MEMS loudspeaker is more obvious, in addition, the loudspeaker amplitude is increased, the low-frequency noise reduction effect can be improved, and therefore, the loudspeaker with the crystal structure can also be applied to the field of noise reduction earphone.
Drawings
FIG. 1 is an overall block diagram of a MEMS speaker of the crystal structure of the present invention;
FIG. 2 is a cross-sectional view of a MEMS speaker of the present invention in a crystal configuration;
fig. 3 is an exploded view of a MEMS speaker of the crystal structure of the present invention.
In the figure: 1. a crystal body; 2. a spring plate structure; 21. an elastic ring; 22. an elastic frame; 221. a conductive line; 3. a diaphragm structure; 31. a folding ring; 32. a dome; 33. a support ring; 4. a circuit board; 41. a bonding pad; 5. a housing.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Embodiment one:
In order to solve the problem that the vibration amplitude of the existing MEMS speaker is smaller and is basically smaller than 0.5mm, so that the low-frequency effect is poor and the output sensitivity of the small-volume speaker is not high, referring to fig. 1-3, the present embodiment provides the following technical scheme:
In this embodiment, the MEMS speaker of crystal structure includes casing 5, and the upper end of casing 5 is connected with diaphragm structure 3, and diaphragm structure 3 top also can be added foraminiferous visor, prevents that diaphragm structure 3 from damaging, and the lower extreme of casing 5 is provided with circuit board 4, is provided with shell fragment structure 2 in the casing 5 between diaphragm structure 3 and the circuit board 4, is connected with crystal body 1 jointly between shell fragment structure 2 and the diaphragm structure 3, and crystal body 1 and circuit board 4 electric connection, and crystal body 1's shape can be arbitrary shape, does not influence implementation of this scheme.
In this embodiment, if an alternating voltage is applied to two electrodes of the quartz crystal, the wafer will generate mechanical vibration, and in general, the amplitude of the mechanical vibration of the wafer and the amplitude of the alternating electric field are very small, but when the frequency of the applied alternating voltage is a certain value, the amplitude is significantly increased, which is much larger than the amplitude at other frequencies, and this phenomenon is called piezoelectric resonance, which is very similar to the resonance phenomenon of the LC circuit.
The resonant frequency is related to the cutting mode, geometry, size, etc. of the wafer, and the calculation formula is as follows:
AT cutting: t is the thickness in m;
BT cutting: t is the thickness in m;
therefore, according to different vibration frequency requirements, the corresponding wafer thickness can be cut, for example, the 20Mhz crystal oscillator is taken as an example, the AT cutting thickness is 0.083mm, and the BT cutting thickness is 0.128mm.
In this embodiment, the elastic sheet structure 2 includes an elastic ring 21 and an elastic frame 22, the inner ring of the elastic ring 21 is fixedly connected with the elastic frame 22, the elastic frame 22 is provided with a conductive circuit 221, the conductive circuit 221 is disposed at a position where the elastic frame 22 is connected with the crystal body 1, and the conductive circuit 221 is respectively connected with the left and right positive and negative electrodes of the crystal body 1.
In this embodiment, the elastic ring 21 and the elastic frame 22 are made of one of stainless steel and copper, and the elastic ring 21 and the elastic frame 22 are made of metal elastic material, so that the crystal body 1 can be supported, and meanwhile, certain elastic deformation is provided for the crystal body 1.
In this embodiment, the membrane structure 3 includes a folded ring 31, a dome 32 and a supporting ring 33, wherein an edge of the folded ring 31 is connected with an upper end of the supporting ring 33, a lower end of the supporting ring 33 is connected with the elastic ring 21, and an inner ring of the folded ring 31 is connected with an edge of the dome 32.
In this embodiment, the folded ring 31 is made of an elastic material, so as to facilitate vibration, and the dome 32 is made of a rigid material, so that the dome 32 can be driven to vibrate when the crystal body 1 vibrates.
In this embodiment, the crystal body 1 is connected to the upper surface of the elastic frame 22, the upper end of the crystal body 1 is connected to the dome 32, and the crystal body 1 is electrically connected to the circuit board 4 through the conductive trace 221. After the crystal body 1 is electrified with alternating current, the crystal body 1 can deform up and down, so that the diaphragm structure 3 is driven to vibrate up and down to produce sound.
In this embodiment, one side of the circuit board 4 close to the crystal body 1 is connected to the conductive line 221, and the other side of the circuit board 4 is provided with a pad 41, and the pad 41 is used for conducting signals.
The working process comprises the following steps: after the bonding pad 41 is connected with signals, the circuit board 4 controls the crystal body 1 to be electrified with alternating current left and right, the crystal body 1 deforms up and down after being electrified, the dome 32 attached to the crystal body 1 vibrates, and accordingly the diaphragm structure 3 is driven to vibrate up and down to produce sound.
Embodiment two:
in this embodiment, the crystal body 1 is three-piece, the three crystal bodies 1 are connected in series, and power is supplied simultaneously, so that the phase positions of all the crystal bodies 1 vibrating are guaranteed to be consistent, the three crystal bodies 1 are distributed in a ring shape, and the three crystal bodies 1 are arranged between the spring plate structure 2 and the diaphragm structure 3 as a whole structure. Other structures are the same as those of the first embodiment, the crystal bodies 1 are arranged in a dispersing mode to vibrate parts of the diaphragm structure 3, but three crystal bodies 1 are powered simultaneously, the vibration phases of all the crystal bodies 1 are consistent, and the whole diaphragm structure 3 is driven to vibrate in the same frequency.
To sum up: according to the MEMS speaker with the crystal structure, the circuit board 4, the diaphragm structure 3 and the elastic sheet structure 2 are fixed through the shell 5, the crystal body 1 is installed on the elastic sheet structure 2, the piezoelectric resonance phenomenon is utilized to control the crystal body 1 to deform up and down, the crystal body 1 drives the diaphragm structure 3 connected with the crystal body to vibrate up and down to produce sound, and the maximum amplitude of the crystal body 1 can reach 1mm, so that the advantage of manufacturing the MEMS speaker by the crystal body 1 relative to piezoelectric ceramics and electrostatic diaphragms is more obvious, in addition, the loudspeaker amplitude is larger, the low-frequency noise reduction effect can be improved, and therefore, the speaker with the crystal structure can be applied to the field of noise reduction headphones.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. MEMS speaker of crystal structure, comprising a housing (5), characterized in that: the upper end of casing (5) is connected with diaphragm structure (3), and the lower extreme of casing (5) is provided with circuit board (4), is provided with shell fragment structure (2) in casing (5) between diaphragm structure (3) and circuit board (4), is connected with crystal body (1) jointly between shell fragment structure (2) and diaphragm structure (3), crystal body (1) and circuit board (4) electric connection.
2. A MEMS speaker with a crystal structure according to claim 1, wherein: the elastic sheet structure (2) comprises an elastic ring (21) and an elastic frame (22), wherein the inner ring of the elastic ring (21) is fixedly connected with the elastic frame (22), and a conductive circuit (221) is arranged on the elastic frame (22).
3. A MEMS speaker with a crystal structure according to claim 2, wherein: the elastic ring (21) and the elastic frame (22) are made of one of stainless steel and copper materials.
4. A MEMS speaker with a crystal structure according to claim 3, wherein: the membrane structure (3) comprises a folding ring (31), a ball top (32) and a supporting ring (33), wherein the edge of the folding ring (31) is connected with the upper end of the supporting ring (33), the supporting ring (33) is connected with the elastic ring (21), and the inner ring of the folding ring (31) is connected with the edge of the ball top (32).
5. The MEMS speaker of claim 4, wherein: the folding ring (31) is made of elastic materials, and the dome (32) is made of rigid materials.
6. A MEMS speaker with a crystal structure according to claim 2, wherein: the crystal body (1) is connected with the upper surface of the elastic frame (22), the upper end of the crystal body (1) is connected with the ball top (32), and the crystal body (1) is electrically connected with the circuit board (4) through the conductive circuit (221).
7. A MEMS speaker with a crystal structure according to claim 1, wherein: when more than two crystal bodies (1) are arranged, the crystal bodies (1) are connected in parallel or in series.
8. A MEMS speaker with a crystal structure according to claim 2, wherein: one side of the circuit board (4) close to the crystal body (1) is connected with the conductive circuit (221), and a bonding pad (41) is arranged on the other side of the circuit board (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410585652.XA CN118338217A (en) | 2024-05-13 | 2024-05-13 | MEMS speaker of crystal structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410585652.XA CN118338217A (en) | 2024-05-13 | 2024-05-13 | MEMS speaker of crystal structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN118338217A true CN118338217A (en) | 2024-07-12 |
Family
ID=91769233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410585652.XA Pending CN118338217A (en) | 2024-05-13 | 2024-05-13 | MEMS speaker of crystal structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN118338217A (en) |
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2024
- 2024-05-13 CN CN202410585652.XA patent/CN118338217A/en active Pending
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