CN118265888A - 工件测量装置及工件测量方法 - Google Patents
工件测量装置及工件测量方法 Download PDFInfo
- Publication number
- CN118265888A CN118265888A CN202180104283.2A CN202180104283A CN118265888A CN 118265888 A CN118265888 A CN 118265888A CN 202180104283 A CN202180104283 A CN 202180104283A CN 118265888 A CN118265888 A CN 118265888A
- Authority
- CN
- China
- Prior art keywords
- workpiece
- dimensional data
- data
- image
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 38
- 238000003384 imaging method Methods 0.000 claims abstract description 53
- 238000005286 illumination Methods 0.000 claims abstract description 28
- 239000000284 extract Substances 0.000 claims abstract description 13
- 230000001678 irradiating effect Effects 0.000 claims abstract description 11
- 238000005259 measurement Methods 0.000 claims description 50
- 239000011159 matrix material Substances 0.000 claims description 5
- 238000013507 mapping Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 20
- 230000003287 optical effect Effects 0.000 description 14
- 238000012986 modification Methods 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- 238000012545 processing Methods 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 4
- 239000011295 pitch Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000013500 data storage Methods 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000009795 derivation Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 102220491082 ADP-ribosylation factor 6_D12A_mutation Human genes 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000013075 data extraction Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000012840 feeding operation Methods 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T5/00—Image enhancement or restoration
- G06T5/40—Image enhancement or restoration using histogram techniques
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2021/045061 WO2023105664A1 (fr) | 2021-12-08 | 2021-12-08 | Dispositif et procédé de mesure de pièce |
Publications (1)
Publication Number | Publication Date |
---|---|
CN118265888A true CN118265888A (zh) | 2024-06-28 |
Family
ID=86729893
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202180104283.2A Pending CN118265888A (zh) | 2021-12-08 | 2021-12-08 | 工件测量装置及工件测量方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPWO2023105664A1 (fr) |
KR (1) | KR20240058907A (fr) |
CN (1) | CN118265888A (fr) |
WO (1) | WO2023105664A1 (fr) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006162386A (ja) | 2004-12-06 | 2006-06-22 | Canon Inc | 3次元モデル生成装置、3次元モデル生成システム及び3次元モデル生成プログラム |
JP2009068986A (ja) * | 2007-09-13 | 2009-04-02 | Nikon Corp | 形状測定装置 |
JP5978002B2 (ja) * | 2012-05-22 | 2016-08-24 | リコーエレメックス株式会社 | 検査方法及び外観検査装置 |
JP6229134B2 (ja) * | 2013-11-29 | 2017-11-15 | 株式会社アバールデータ | 計測装置 |
WO2017162744A1 (fr) * | 2016-03-22 | 2017-09-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Dispositif et procédé pour combiner des signaux de mesure à partir de signaux d'éclairage |
-
2021
- 2021-12-08 WO PCT/JP2021/045061 patent/WO2023105664A1/fr active Application Filing
- 2021-12-08 KR KR1020247011180A patent/KR20240058907A/ko unknown
- 2021-12-08 JP JP2023565762A patent/JPWO2023105664A1/ja active Pending
- 2021-12-08 CN CN202180104283.2A patent/CN118265888A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
JPWO2023105664A1 (fr) | 2023-06-15 |
WO2023105664A1 (fr) | 2023-06-15 |
KR20240058907A (ko) | 2024-05-07 |
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